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    Non-relaxed embedded stressors with solid source extension regions in CMOS devices
    1.
    发明授权
    Non-relaxed embedded stressors with solid source extension regions in CMOS devices 失效
    CMOS器件中具有固态源延伸区域的非轻松嵌入式应力源

    公开(公告)号：US08592270B2

    公开(公告)日：2013-11-26

    申请号：US13115314

    申请日：2011-05-25

    申请人： Kangguo Cheng ,  Bruce B. Doris ,  Ali Khakifirooz ,  Pranita Kulkarni ,  Douglas C. La Tulipe, Jr.

    发明人： Kangguo Cheng ,  Bruce B. Doris ,  Ali Khakifirooz ,  Pranita Kulkarni ,  Douglas C. La Tulipe, Jr.

    IPC分类号： H01L21/336 ,  H01L21/8238

    CPC分类号： H01L21/823814 ,  H01L21/823807

    摘要： A method of forming a field effect transistor (FET) device includes forming a patterned gate structure over a substrate; forming a solid source dopant material on the substrate, adjacent sidewall spacers of the gate structure; performing an anneal process at a temperature sufficient to cause dopants from the solid source dopant material to diffuse within the substrate beneath the gate structure and form source/drain extension regions; following formation of the source/drain extension regions, forming trenches in the substrate adjacent the sidewall spacers, corresponding to source/drain regions; and forming an embedded semiconductor material in the trenches so as to provide a stress on a channel region of the substrate defined beneath the gate structure.

    摘要翻译： 形成场效应晶体管（FET）器件的方法包括在衬底上形成图案化栅极结构; 在所述衬底上形成固体源掺杂剂材料，所述栅极结构的相邻侧壁间隔物; 在足以使来自固体源掺杂剂材料的掺杂剂在栅极结构下方的衬底内扩散并形成源极/漏极延伸区域的温度下进行退火工艺; 在形成源极/漏极延伸区之后，在与衬底相邻的衬底中形成相应于源极/漏极区的沟槽; 以及在所述沟槽中形成嵌入式半导体材料，以在所述栅极结构下面限定的所述衬底的沟道区域上产生应力。

    NON-RELAXED EMBEDDED STRESSORS WITH SOLID SOURCE EXTENSION REGIONS IN CMOS DEVICES
    3.
    发明申请
    NON-RELAXED EMBEDDED STRESSORS WITH SOLID SOURCE EXTENSION REGIONS IN CMOS DEVICES 失效
    CMOS器件中固体源扩展区非松弛嵌入式压电器

    公开(公告)号：US20120302019A1

    公开(公告)日：2012-11-29

    申请号：US13115314

    申请日：2011-05-25

    申请人： Kangguo Cheng ,  Bruce B. Doris ,  Ali Khakifirooz ,  Pranita Kulkarni ,  Douglas C. La Tulipe, JR.

    发明人： Kangguo Cheng ,  Bruce B. Doris ,  Ali Khakifirooz ,  Pranita Kulkarni ,  Douglas C. La Tulipe, JR.

    IPC分类号： H01L21/8238 ,  H01L21/336

    CPC分类号： H01L21/823814 ,  H01L21/823807

    摘要： A method of forming a field effect transistor (FET) device includes forming a patterned gate structure over a substrate; forming a solid source dopant material on the substrate, adjacent sidewall spacers of the gate structure; performing an anneal process at a temperature sufficient to cause dopants from the solid source dopant material to diffuse within the substrate beneath the gate structure and form source/drain extension regions; following formation of the source/drain extension regions, forming trenches in the substrate adjacent the sidewall spacers, corresponding to source/drain regions; and forming an embedded semiconductor material in the trenches so as to provide a stress on a channel region of the substrate defined beneath the gate structure.

    摘要翻译： 形成场效应晶体管（FET）器件的方法包括在衬底上形成图案化栅极结构; 在所述衬底上形成固体源掺杂剂材料，所述栅极结构的相邻侧壁间隔物; 在足以使来自固体源掺杂剂材料的掺杂剂在栅极结构下方的衬底内扩散并形成源极/漏极延伸区域的温度下进行退火工艺; 在形成源极/漏极延伸区之后，在与衬底相邻的衬底中形成相应于源极/漏极区的沟槽; 以及在所述沟槽中形成嵌入式半导体材料，以在所述栅极结构下面限定的所述衬底的沟道区域上产生应力。

    Integrated circuit including DRAM and SRAM/logic
    8.
    发明授权
    Integrated circuit including DRAM and SRAM/logic 有权
    集成电路包括DRAM和SRAM /逻辑

    公开(公告)号：US08653596B2

    公开(公告)日：2014-02-18

    申请号：US13344885

    申请日：2012-01-06

    申请人： Kangguo Cheng ,  Bruce B. Doris ,  Terence B. Hook ,  Ali Khakifirooz ,  Pranita Kulkarni

    发明人： Kangguo Cheng ,  Bruce B. Doris ,  Terence B. Hook ,  Ali Khakifirooz ,  Pranita Kulkarni

    IPC分类号： H01L21/70 ,  H01L27/12 ,  H01L21/762 ,  H01L21/84

    CPC分类号： H01L29/945 ,  H01L21/84 ,  H01L27/1052 ,  H01L27/1087 ,  H01L27/10873 ,  H01L27/10894 ,  H01L27/1116 ,  H01L27/1203 ,  H01L27/1207

    摘要： An integrated circuit includes an SOI substrate with a unitary N+ layer below the BOX, a P region in the N+ layer, an eDRAM with an N+ plate, and logic/SRAM devices above the P region. The P region functions as a back gate of the logic/SRAM devices. An optional intrinsic (undoped) layer can be formed between the P back gate layer and the N+ layer to reduce the junction field and lower the junction leakage between the P back gate and the N+ layer. In another embodiment an N or N+ back gate can be formed in the P region. The N+ back gate functions as a second back gate of the logic/SRAM devices. The N+ plate of the SOI eDRAM, the P back gate, and the N+ back gate can be electrically biased at the same or different voltage potentials. Methods to fabricate the integrated circuits are also disclosed.

    摘要翻译： 集成电路包括在BOX下方具有单一N +层的SOI衬底，N +层中的P区，N +板的eDRAM和P区上方的逻辑/ SRAM器件。 P区域用作逻辑/ SRAM器件的后门。 可以在P背栅层和N +层之间形成可选的本征（未掺杂）层，以减少结场并降低P背栅与N +层之间的结泄漏。 在另一个实施例中，可以在P区中形成N或N +背栅。 N +后门作为逻辑/ SRAM器件的第二个后门。 SOI eDRAM的N +板，P背栅极和N +背栅极可以在相同或不同的电压电位下被电偏置。 还公开了制造集成电路的方法。

    DOUBLE PATTERNING METHOD
    9.
    发明申请
    DOUBLE PATTERNING METHOD 有权
    双重图案方法

    公开(公告)号：US20140024215A1

    公开(公告)日：2014-01-23

    申请号：US13555306

    申请日：2012-07-23

    申请人： Kangguo Cheng ,  Bruce B. Doris ,  Ali Khakifirooz ,  Ying Zhang

    发明人： Kangguo Cheng ,  Bruce B. Doris ,  Ali Khakifirooz ,  Ying Zhang

    IPC分类号： B44C1/22 ,  H01B13/00 ,  H01L21/308

    CPC分类号： H01L21/3086 ,  H01B13/00 ,  H01B19/04 ,  H01L21/0337 ,  H01L21/3081 ,  H01L21/32134 ,  H01L21/32137

    摘要： Disclosed is an improved double patterning method for forming openings (e.g., vias or trenches) or mesas on a substrate. This method avoids the wafer topography effects seen in prior art double patterning techniques by ensuring that the substrate itself is only subjected to a single etch process. Specifically, in the method, a first mask layer is formed on the substrate and processed such that it has a doped region and multiple undoped regions within the doped region. Then, either the undoped regions or the doped region can be selectively removed in order to form a mask pattern above the substrate. Once the mask pattern is formed, an etch process can be performed to transfer the mask pattern into the substrate. Depending upon whether the undoped regions are removed or the doped region is removed, the mask pattern will form openings (e.g., vias or trenches) or mesas, respectively, on the substrate.

    摘要翻译： 公开了一种用于在基板上形成开口（例如，通孔或沟槽）或台面的改进的双重图案化方法。 该方法通过确保衬底本身仅经历单次蚀刻工艺来避免现有技术的双重图案化技术中所见到的晶片形貌效应。 具体地说，在该方法中，在衬底上形成第一掩模层并进行处理，使得其在掺杂区域内具有掺杂区域和多个未掺杂区域。 然后，可以选择性地去除未掺杂区域或掺杂区域，以在衬底上方形成掩模图案。 一旦形成掩模图案，就可以执行蚀刻工艺以将掩模图案转印到基板中。 取决于未掺杂的区域是去除还是去除掺杂区域，掩模图案将分别在衬底上形成开口（例如，通孔或沟槽）或台面。

    Extremely thin semiconductor-on-insulator (ETSOI) integrated circuit with on-chip resistors and method of forming the same
    10.
    发明授权
    Extremely thin semiconductor-on-insulator (ETSOI) integrated circuit with on-chip resistors and method of forming the same 有权
    具有片上电阻的非常薄的绝缘体上半导体（ETSOI）集成电路及其形成方法

    公开(公告)号：US08629504B2

    公开(公告)日：2014-01-14

    申请号：US13433401

    申请日：2012-03-29

    申请人： Bruce B. Doris ,  Kangguo Cheng ,  Ali Khakifirooz ,  Ghavam G. Shahidi

    发明人： Bruce B. Doris ,  Kangguo Cheng ,  Ali Khakifirooz ,  Ghavam G. Shahidi

    IPC分类号： H01L21/00

    CPC分类号： H01L27/1214 ,  H01L21/84 ,  H01L27/1203 ,  H01L27/13

    摘要： An electrical device is provided that in one embodiment includes a semiconductor-on-insulator (SOI) substrate having a semiconductor layer with a thickness of less than 10 nm. A semiconductor device having a raised source region and a raised drain region of a single crystal semiconductor material of a first conductivity is present on a first surface of the semiconductor layer. A resistor composed of the single crystal semiconductor material of the first conductivity is present on a second surface of the semiconductor layer. A method of forming the aforementioned electrical device is also provided.

    摘要翻译： 提供了一种电气装置，其在一个实施例中包括具有厚度小于10nm的半导体层的绝缘体上半导体（SOI）基板。 在半导体层的第一表面上存在具有第一导电性的单晶半导体材料的升高的源极区域和升高的漏极区域的半导体器件。 由第一导电性的单晶半导体材料构成的电阻器存在于半导体层的第二表面上。 还提供了形成上述电气装置的方法。