公开(公告)号：US10389332B2

公开(公告)日：2019-08-20

申请号：US14973336

申请日：2015-12-17

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee

IPC: H03H9/02 ,  H03H9/25 ,  H03H3/02 ,  H01L41/312 ,  H01L41/33 ,  H01L41/047

Abstract: A micro-electrical-mechanical system (MEMS) guided wave device includes a single crystal piezoelectric layer and at least one guided wave confinement structure configured to confine a laterally excited wave in the single crystal piezoelectric layer. A bonded interface is provided between the single crystal piezoelectric layer and at least one underlying layer. A multi-frequency device includes first and second groups of electrodes arranged on or in different thickness regions of a single crystal piezoelectric layer, with at least one guided wave confinement structure. Segments of a segmented piezoelectric layer and a segmented layer of electrodes are substantially registered in a device including at least one guided wave confinement structure.

公开(公告)号：US10305442B2

公开(公告)日：2019-05-28

申请号：US15087354

申请日：2016-03-31

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee

IPC: H01L41/113 ,  H01L41/22 ,  H01L41/16 ,  H01L41/08 ,  H03H9/02 ,  H03H9/25 ,  H03H3/08 ,  H03H3/007 ,  H03H3/02 ,  H03H9/13 ,  H03H9/145 ,  H03H9/17 ,  H03H9/00 ,  H03H9/15 ,  H03H9/05

Abstract: A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of electrodes arranged below a piezoelectric layer (e.g., either embedded in a slow wave propagation layer or supported by a suspended portion of the piezoelectric layer) and configured for transduction of a lateral acoustic wave in the piezoelectric layer. The piezoelectric layer permits one or more additions or modifications to be made thereto, such as trimming (thinning) of selective areas, addition of loading materials, sandwiching of piezoelectric layer regions between electrodes to yield capacitive elements or non-linear elastic convolvers, addition of sensing materials, and addition of functional layers providing mixed domain signal processing utility.

公开(公告)号：US09991872B2

公开(公告)日：2018-06-05

申请号：US14679379

申请日：2015-04-06

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee

IPC: H01L41/04 ,  H03H9/17 ,  H03H9/15

CPC classification number: H03H9/17 ,  H03H2009/155

Abstract: A MEMS device includes a substrate, at least one anchor on a surface of the substrate, and a vibrating body suspended over the substrate by the at least one anchor. The vibrating body includes a periodically poled piezoelectric thin-film layer, a first conductive layer, a second conductive layer, and a functional layer. The first conductive layer is on a first surface of the vibrating body opposite the surface of the substrate. The second conductive layer is on a second surface of the vibrating body opposite the first surface. The functional layer is over the first conductive layer. By including the functional layer over the first conductive layer, functionality may be added to the MEMS device, thereby increasing the utility thereof.

公开(公告)号：US20170214381A1

公开(公告)日：2017-07-27

申请号：US15087197

申请日：2016-03-31

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee

IPC: H03H9/02 ,  H03H3/02 ,  H03H9/17 ,  H03H3/007 ,  H03H9/13 ,  H03H9/145

Abstract: A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of electrodes arranged below a piezoelectric layer (e.g., either embedded in a slow wave propagation layer or supported by a suspended portion of the piezoelectric layer) and configured for transduction of a lateral acoustic wave in the piezoelectric layer. The piezoelectric layer permits one or more additions or modifications to be made thereto, such as trimming (thinning) of selective areas, addition of loading materials, sandwiching of piezoelectric layer regions between electrodes to yield capacitive elements or non-linear elastic convolvers, addition of sensing materials, and addition of functional layers providing mixed domain signal processing utility.

公开(公告)号：US09385685B2

公开(公告)日：2016-07-05

申请号：US14031454

申请日：2013-09-19

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee ,  Sergei Zhgoon

IPC: H01L41/053 ,  H01L41/047 ,  H03H9/25 ,  H03H9/125 ,  H03H9/15 ,  C04B35/00 ,  H03H9/17

CPC classification number: H03H9/17 ,  H03H2009/155

Abstract: A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, a first conducting layer, and a second conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The first conducting layer is inter-digitally dispersed on the second surface of the single-crystal piezoelectric body. The second conducting layer is inter-digitally dispersed on the first surface of the single-crystal piezoelectric body.

Abstract translation: 微电气机械系统（MEMS）振动结构包括载体基板，第一锚固件，第二锚定器，单晶体压电体，第一导电层和第二导电层。 第一锚固件和第二锚固件设置在载体基板的表面上。 单晶压电体悬挂在第一锚和第二锚之间，并且包括由一组欧拉角定义的均匀结晶取向。 单晶体压电体包括平行于并面向其上形成有第一锚和第二锚的载体基板的表面的第一表面和与第一表面相对的第二表面。 第一导电层以数字方式分散在单晶体压电体的第二表面上。 第二导电层被数字地分散在单晶体压电体的第一表面上。

公开(公告)号：US10305443B2

公开(公告)日：2019-05-28

申请号：US15087409

申请日：2016-03-31

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee

IPC: H03H9/25 ,  H03H9/02 ,  H03H3/08 ,  H03H3/007 ,  H03H3/02 ,  H03H9/13 ,  H03H9/145 ,  H03H9/17 ,  H03H9/00 ,  H03H9/15 ,  H03H9/05

Abstract: A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of electrodes arranged below a piezoelectric layer (e.g., either embedded in a slow wave propagation layer or supported by a suspended portion of the piezoelectric layer) and configured for transduction of a lateral acoustic wave in the piezoelectric layer. The piezoelectric layer permits one or more additions or modifications to be made thereto, such as trimming (thinning) of selective areas, addition of loading materials, sandwiching of piezoelectric layer regions between electrodes to yield capacitive elements or non-linear elastic convolvers, addition of sensing materials, and addition of functional layers providing mixed domain signal processing utility.

公开(公告)号：US20170214382A1

公开(公告)日：2017-07-27

申请号：US15087320

申请日：2016-03-31

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee

IPC: H03H9/02 ,  H03H9/05 ,  H03H9/13

CPC classification number: H03H9/02228 ,  H03H3/0072 ,  H03H3/0077 ,  H03H3/02 ,  H03H3/08 ,  H03H9/0009 ,  H03H9/02244 ,  H03H9/02259 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/02787 ,  H03H9/0296 ,  H03H9/0538 ,  H03H9/13 ,  H03H9/131 ,  H03H9/145 ,  H03H9/14564 ,  H03H9/15 ,  H03H9/17 ,  H03H9/25 ,  H03H2003/027 ,  H03H2009/02165 ,  H03H2009/02496 ,  H03H2009/155

Abstract: A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of electrodes arranged below a piezoelectric layer (e.g., either embedded in a slow wave propagation layer or supported by a suspended portion of the piezoelectric layer) and configured for transduction of a lateral acoustic wave in the piezoelectric layer. The piezoelectric layer permits one or more additions or modifications to be made thereto, such as trimming (thinning) of selective areas, addition of loading materials, sandwiching of piezoelectric layer regions between electrodes to yield capacitive elements or non-linear elastic convolvers, addition of sensing materials, and addition of functional layers providing mixed domain signal processing utility.

公开(公告)号：US09466430B2

公开(公告)日：2016-10-11

申请号：US14071025

申请日：2013-11-04

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee

IPC: H01L41/09 ,  H03H9/125 ,  H03H9/15 ,  H01G5/18 ,  H03H9/02 ,  H03H9/46 ,  H03H9/24 ,  B81B3/00

CPC classification number: H01G5/18 ,  B81B3/0086 ,  B81B2201/018 ,  B81B2201/0271 ,  B81B2201/032 ,  H03H9/02275 ,  H03H9/02409 ,  H03H9/2405 ,  H03H9/2463 ,  H03H9/462 ,  H03H9/467 ,  H03H2009/241

Abstract: A micro-electrical-mechanical systems (MEMS) device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with a first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the first surface, such that the second electrode is in contact with a second bimorph layer of the piezoelectric layer.

Abstract translation: 微电气机械系统（MEMS）装置包括衬底，形成在衬底的第一表面上的一个或多个锚固体和通过一个或多个锚固件悬挂在衬底的第一表面上的压电层。 第一电极可以设置在面向基板的第一表面的压电层的第一表面上，使得第一电极与压电层的第一双压电晶片层接触。 第二电极可以设置在与第一表面相对的压电层的第二表面上，使得第二电极与压电层的第二双晶片层接触。

公开(公告)号：US09391588B2

公开(公告)日：2016-07-12

申请号：US14031383

申请日：2013-09-19

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee ,  Sergei Zhgoon

IPC: H01L41/053 ,  H01L41/047 ,  H03H9/25 ,  H03H9/125 ,  H03H9/15 ,  C04B35/00 ,  H03H9/17

CPC classification number: H03H9/17 ,  H03H2009/155

Abstract: A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The conducting layer is inter-digitally dispersed, and is formed on the second surface of the single-crystal piezoelectric body. The first surface of the single-crystal piezoelectric body is left exposed.

Abstract translation: 微机电系统（MEMS）振动结构包括载体基板，第一锚固件，第二锚固件，单晶体压电体和导电层。 第一锚固件和第二锚固件设置在载体基板的表面上。 单晶压电体悬挂在第一锚和第二锚之间，并且包括由一组欧拉角定义的均匀结晶取向。 单晶体压电体包括平行于并面向其上形成有第一锚和第二锚的载体基板的表面的第一表面和与第一表面相对的第二表面。 导电层是数字间分散的，并且形成在单晶体压电体的第二表面上。 单晶体压电体的第一面露出。

公开(公告)号：US20160182008A1

公开(公告)日：2016-06-23

申请号：US14972929

申请日：2015-12-17

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee

IPC: H03H9/02 ,  H01L41/312 ,  H03H3/02

CPC classification number: H03H9/02244 ,  H01L41/047 ,  H01L41/312 ,  H01L41/33 ,  H03H3/02 ,  H03H9/02228 ,  H03H9/02275 ,  H03H9/02574 ,  H03H9/25 ,  H03H2003/027

Abstract: A micro-electrical-mechanical system (MEMS) guided wave device includes a piezoelectric layer including multiple thinned regions of different thicknesses each bounding in part a different recess, different groups of electrodes on or adjacent to different thinned regions and arranged for transduction of lateral acoustic waves of different wavelengths in the different thinned regions, and at least one bonded interface between the piezoelectric layer and a substrate. Optionally, a buffer layer may be intermediately bonded between the piezoelectric layer and the substrate. Methods of producing such devices include locally thinning a piezoelectric layer to define multiple recesses, bonding the piezoelectric layer on or over a substrate layer to cause the recesses to be bounded in part by either the substrate or an optional buffer layer, and defining multiple groups of electrodes on or over the different thinned regions.

Abstract translation: 微电机械系统（MEMS）导波器件包括压电层，其包括多个不同厚度的薄化区域，每个部分具有不同的凹槽，不同的电极组在不同的稀薄区域上或邻近于不同的薄化区域并且被布置用于横向声学 在不同的薄化区域中的不同波长的波以及压电层和基底之间的至少一个键合界面。 可选地，可以在压电层和基板之间中间粘结缓冲层。 制造这种装置的方法包括局部减薄压电层以限定多个凹陷，将压电层粘合在基底层上或上方，以使凹陷部分地由衬底或任选的缓冲层界定，并且限定多组 在不同稀疏区域上或上方的电极。