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公开(公告)号:US20230036104A1
公开(公告)日:2023-02-02
申请号:US17712319
申请日:2022-04-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Bongkwan BAEK , Junghwan CHUN , Jongmin BAEK , Koungmin RYU
IPC: H01L29/417 , H01L29/06 , H01L29/423 , H01L29/786
Abstract: A semiconductor device includes a gate structure disposed on a substrate; a source and drain layer disposed on the substrate adjacent the gate structure; a first contact plug disposed on the source and drain layer; an insulation pattern structure disposed on the first contact plug, the insulation pattern structure including insulation patterns having different carbon concentrations; and a second contact plug disposed on the gate structure.
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公开(公告)号:US20190206794A1
公开(公告)日:2019-07-04
申请号:US16296388
申请日:2019-03-08
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sangho RHA , Jongmin BAEK , Wookyung YOU , Sanghoon AHN , Nae-In LEE
IPC: H01L23/528 , H01L21/768 , H01L23/522 , H01L21/306 , H01L21/288 , H01L23/532 , H01L21/02 , H01L21/321
CPC classification number: H01L23/5283 , H01L21/02178 , H01L21/02274 , H01L21/0228 , H01L21/288 , H01L21/306 , H01L21/3212 , H01L21/76802 , H01L21/7682 , H01L21/76826 , H01L21/76829 , H01L21/76832 , H01L21/76834 , H01L21/7684 , H01L21/76843 , H01L21/76849 , H01L21/76871 , H01L21/76877 , H01L21/76885 , H01L23/5222 , H01L23/5226 , H01L23/53238 , H01L23/5329 , H01L23/53295 , H01L2924/0002 , H01L2924/00
Abstract: Methods of forming a semiconductor device are provided. A method of forming a semiconductor device may include forming a capping layer on a metal pattern and on an adjacent portion of an insulating layer, the capping layer comprising a first etch selectivity, with respect to the insulating layer, on the metal pattern and a second etch selectivity, with respect to the insulating layer, on the portion of the insulating layer. Moreover, the method may include forming a recess region adjacent the metal pattern by removing the capping layer from the portion of the insulating layer. At least a portion of the capping layer may remain on an uppermost surface of the metal pattern after removing the capping layer from the portion of the insulating layer. Related semiconductor devices are also provided.
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公开(公告)号:US20150115398A1
公开(公告)日:2015-04-30
申请号:US14453310
申请日:2014-08-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: Euibok LEE , Jongmin BAEK , Dohyoung KIM , Tsukasa MATSUDA , Youngwoo CHO , Jongseo HONG
IPC: H01L21/768 , H01L21/764 , H01L21/762 , H01L21/02
CPC classification number: H01L21/7682 , H01L21/02296 , H01L21/3105 , H01L21/31111 , H01L21/31116 , H01L21/762 , H01L21/764 , H01L21/76802 , H01L21/76849 , H01L21/76882 , H01L21/76883 , H01L21/76885
Abstract: A method of manufacturing a semiconductor device may include: forming an interlayer insulating layer having openings on a substrate; forming a metal layer in the openings and on the interlayer insulating layer, the metal layer including a sidewall portion on a sidewall of each of the openings and a bottom portion on a bottom surface of each of the openings, wherein the bottom portion is thicker than the sidewall portion; reflowing the metal layer to form metal patterns in the openings, the metal patterns having top surfaces at a level lower than a topmost surface of the interlayer insulating layer; and/or forming capping patterns covering the metal patterns in the openings.
Abstract translation: 制造半导体器件的方法可以包括:在衬底上形成具有开口的层间绝缘层; 在开口和层间绝缘层上形成金属层,金属层包括在每个开口的侧壁上的侧壁部分和在每个开口的底表面上的底部,其中底部部分比 侧壁部分; 回流金属层以在开口中形成金属图案,金属图案具有位于层间绝缘层的最上表面以下的顶表面; 和/或形成覆盖开口中的金属图案的覆盖图案。
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公开(公告)号:US20240266257A1
公开(公告)日:2024-08-08
申请号:US18382545
申请日:2023-10-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Seungmin LIM , Jinnam KIM , Jongmin BAEK , Hyoseok CHOI
IPC: H01L23/48 , H01L29/06 , H01L29/417 , H01L29/423 , H01L29/775 , H01L29/786
CPC classification number: H01L23/481 , H01L29/0673 , H01L29/41733 , H01L29/42392 , H01L29/775 , H01L29/78696
Abstract: A semiconductor device includes a substrate having a front surface including an active region and a rear surface opposite to the front surface. An active pattern is on the active region. A gate structure extends in a second direction on the active region. Source/drain regions are disposed on the active pattern on both sides of the gate structure. A front interconnection structure is disposed on the gate structure and the source/drain regions. A rear interconnection structure is disposed on the rear surface of the substrate. A target region defined by the source/drain regions and the active pattern includes a non-oxidizing material at a first concentration. The non-oxidizing material is injected during a high-pressure heat treatment process. A rear interconnection region defined by the substrate, the rear through-structure, and the rear interconnection structure includes the non-oxidizing material at a second concentration higher than the first concentration.
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公开(公告)号:US20220005763A1
公开(公告)日:2022-01-06
申请号:US17480615
申请日:2021-09-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jangho LEE , Jongmin BAEK , Wookyung YOU , Kyu-Hee HAN , Suhyun BARK
IPC: H01L23/528 , H01L21/768 , H01L23/522
Abstract: Disclosed is a semiconductor device comprising a substrate, a first dielectric layer on the substrate, a first lower conductive line in the first dielectric layer, an etch stop layer on the first dielectric layer, a via-structure that penetrates the etch stop layer and connects to the first lower conductive line, a second dielectric layer on the etch stop layer, and an upper conductive line that penetrates the second dielectric layer and connects to the via-structure. The first dielectric layer includes a dielectric pattern at a level higher than a top surface of the first lower conductive line. The upper conductive line is in contact with a top surface of the etch stop layer. The etch stop layer has at an upper portion a rounded surface in contact with the via-structure.
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公开(公告)号:US20230027640A1
公开(公告)日:2023-01-26
申请号:US17699496
申请日:2022-03-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jongmin BAEK , Junghoo SHIN , Sangshin JANG , Junghwan CHUN , Kyeongbeom PARK , Suhyun BARK
IPC: H01L23/522 , H01L23/532 , H01L21/768
Abstract: A semiconductor device includes a substrate having an active region, a first insulating layer on the substrate, a second insulating layer on the first insulating layer, an etch stop layer between the first insulating layer and the second insulating layer, a via contact in the first insulating layer and electrically connected to the active region, an interconnection electrode in the second insulating layer and electrically connected to the via contact, a conductive barrier layer on a side surface and a lower surface of the interconnection electrode and having an extension portion extending to a partial region of a side surface of the via contact, and a side insulating layer on a side region of the via contact below the extension portion of the conductive barrier layer, the side insulating layer including the same material as a material of the etch stop layer.
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公开(公告)号:US20210027837A1
公开(公告)日:2021-01-28
申请号:US16803450
申请日:2020-02-27
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jongryul Kim , Taehui NA , Dueung KIM , Jongmin BAEK
IPC: G11C11/56 , G11C11/408 , G11C11/4094 , G11C11/4091 , G11C11/4074
Abstract: The memory device includes a memory cell array including a plurality of memory cells connected to a plurality of word lines and a plurality of bit lines, a row control circuit including a plurality of row switches corresponding to the word lines, a column control circuit including a plurality of column switches corresponding to the bit lines, and a control logic circuit configured to control pre-charge operations on a word line and a bit line of a selected memory cell and perform a control operation to float the word line and the bit line together after a pre-charge period during a data reading operation. One of the word line and the bit line is floated after the pre-charge period and the other one is pseudo-floated after the pre-charge period.
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公开(公告)号:US20180151490A1
公开(公告)日:2018-05-31
申请号:US15792911
申请日:2017-10-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Taejin YIM , Jongmin BAEK , Deokyoung JUNG , Kyuhee HAN , Byunghee KIM , Jiyoung KIM , Naein LEE , Sangshin JANG
IPC: H01L23/522 , H01L23/532 , H01L21/768
CPC classification number: H01L23/5222 , H01L21/76802 , H01L21/7682 , H01L21/76831 , H01L21/76843 , H01L23/5226 , H01L23/5228 , H01L23/53238 , H01L23/53295
Abstract: A semiconductor device is provided. The semiconductor device includes first metal lines on a lower layer, a dielectric barrier layer provided on the lower layer to cover side and top surfaces of the first metal lines, an etch stop layer provided on the dielectric barrier layer to define gap regions between the first metal lines, an upper insulating layer on the etch stop layer, and a conductive via penetrating the upper insulating layer, the etch stop layer, and the dielectric barrier layer to contact a top surface of a first metal line. The etch stop layer includes first portions on the first metal lines and second portions between the first metal lines. The second portions of the etch stop layer are higher than the first portions.
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公开(公告)号:US20230059177A1
公开(公告)日:2023-02-23
申请号:US17720571
申请日:2022-04-14
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sangshin JANG , Wookyung YOU , Sangkoo KANG , Donghyun ROH , Koungmin RYU , Jongmin BAEK
IPC: H01L23/528 , H01L23/532
Abstract: A semiconductor device including a first conductive layer on a substrate, a second conductive layer on the first conductive layer, a contact structure between the first and second conductive layers, and a barrier structure surrounding a lower region of a side surface of the second conductive layer, wherein the contact structure includes a contact conductive layer having a first upper surface portion and a second upper surface extending from the first upper surface portion and being concave, and a gap-fill pattern fills a space between the second upper surface portion and the second conductive layer and includes a first gap-fill insulating layer including a metal element and a second gap-fill insulating layer including a silicon element, and the barrier structure includes a first etch stop layer and a barrier layer that include same materials as the first insulating material and the second insulating material, respectively, may be provided.
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公开(公告)号:US20210020236A1
公开(公告)日:2021-01-21
申请号:US16745823
申请日:2020-01-17
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jongmin BAEK , Jinyoung KIM , Junho SHIN
Abstract: A resistive memory includes a memory cell array, a write/read circuitry and a control circuitry. The memory cell array includes a plurality of resistive memory cells coupled to a plurality of word-lines and a plurality of bit-lines. The write/read circuitry is coupled to the memory cell array through a row decoder and a column decoder, the write/read circuitry performs a write operation to write write data in a target page of the memory cell array, and verifies the write operation by comparing read data read from the target page with the write data. The control circuitry controls at least one of the row decoder, the column decoder and the write/read circuitry to control a resistance which a selected memory cell experiences according to a distance from an access point to the selected memory cell in the memory cell array based on an address.
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