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1.发明授权公开(公告)号：US06747748B2
公开(公告)日：2004-06-08
申请号：US09974195
申请日：2001-10-10
IPC分类号： G01B1106
CPC分类号： H01L21/67167 , H01L21/28167 , H01L21/28185 , H01L21/28194 , H01L21/28211 , H01L21/67253 , H01L22/26 , H01L29/511 , H01L29/513 , H01L29/517
摘要： In a process of forming a film on a surface of a wafer by thermal processing, laser light generated by a light source is depolarized by a depolarizer and the deporlarized light is irradiated upon the surface of wafer. As for the light reflected from the surface of wafer, polarization components in predetermined two directions perpendicular to each other are extracted by a beam splitter, and optical sensors receive the extracted light components to detect each intensity. An analytical processing unit determines a thickness of a formed film based on a change in a difference in intensity.
摘要翻译： 在通过热处理在晶片的表面上形成膜的过程中，由光源产生的激光由去偏振器去极化，并且去角化的光被照射在晶片的表面上。 对于从晶片表面反射的光，通过分束器提取彼此垂直的预定的两个方向的偏振分量，并且光学传感器接收提取的光分量以检测每个强度。 分析处理单元基于强度差的变化来确定成膜的厚度。
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公开(公告)号：US5973469A
公开(公告)日：1999-10-26
申请号：US981033
申请日：1998-04-13
摘要： It is an object of this invention to attain reliable starting characteristics and stable rotation performance of a motor in a motor of a phase synchronization driving type. To achieve this object, according to this invention, there is provided a motor driving apparatus having a stepping motor constituted by a stator with at least two poles, a rotor having a permanent magnet with at least two poles, and a driving coil magnetically coupled to the stator, a driving pulse generation means for outputting a driving pulse signal for driving the stepping motor, a driving circuit for supplying a driving current to the driving coil on the basis of the signal from the driving pulse generation means, a voltage detection circuit for detecting a counter electromotive voltage generated upon rotation of the rotor, and a pole position detection means for detecting the pole position of the rotating rotor with respect to the rotor on the basis of a detection signal generated by the voltage detection circuit, the driving pulse generation means controlling the output timing of the driving pulse signal on the basis of the detection signal from the pole position detection means, characterized in that the pole position detection means stops outputting the driving pulse signal on the basis of the detection signal from the voltage detection circuit which is detected during the output period of the driving pulse signal, and outputs a driving pulse signal having a phase opposite to that of the driving pulse signal.
摘要翻译： PCT No.PCT / JP97 / 01276 Sec。 371日期：1998年4月13日 102（e）日期1998年4月13日PCT 1997年4月11日PCT公布。 公开号WO97 / 38487 日期为1997年10月16日本发明的目的是获得电动机在相位同步驱动型电动机中的可靠起动特性和稳定的旋转性能。 为了达到这个目的，根据本发明，提供了一种马达驱动装置，其具有步进马达，该步进马达由具有至少两个极的定子构成，转子具有至少两个极的永磁体，以及驱动线圈，磁耦合到 定子，驱动脉冲产生装置，用于输出用于驱动步进电机的驱动脉冲信号;驱动电路，用于根据来自驱动脉冲发生装置的信号向驱动线圈提供驱动电流;电压检测电路，用于 检测在转子旋转时产生的反电动势;以及极位置检测装置，用于根据由电压检测电路产生的检测信号来检测旋转转子相对于转子的极位置，驱动脉冲产生 基于来自极位置检测装置的检测信号来控制驱动脉冲信号的输出定时 其特征在于，所述极位置检测装置根据来自所述驱动脉冲信号的输出期间检测出的电压检测电路的检测信号，停止输出驱动脉冲信号，并输出相位相反的驱动脉冲信号 到驱动脉冲信号。
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3.发明授权Apparatus including a specimen tilt mechanism for measuring electromagnetic field distribution in the specimen using a focused electron beam 失效包括用于使用聚焦电子束测量样本中的电磁场分布的样本倾斜机构的装置
公开(公告)号：US5572122A
公开(公告)日：1996-11-05
申请号：US141077
申请日：1993-10-26
IPC分类号： G01N23/04 , G01R31/305 , G01R33/028 , G01R33/12 , G01R33/02 , G01R33/025
CPC分类号： G01R31/305
摘要： An apparatus for measuring an electromagnetic field distribution using a focused electron beam can measure the electromagnetic field distribution in a specimen with high resolution and high reliability. A focused electron beam radiation system irradiates a specimen with a focused electron beam. A specimen tilt mechanism tilts a specimen by 180.degree. about a tilt axis that is perpendicular to the optical axis of the focused electron beam. An electron beam position detector measures the direction and quantity of the deflection given to the focused electron beam when it is transmitted through the specimen. Further, a processing system calculates the direction and the intensity of an electric field, and the direction and the intensity of a magnetic field separately at a point on the specimen through which the focused electron beam is transmitted, from the data on the direction and the quantity of the deflection of the focused electron beam measured by the electron beam position detector before and after the turnover of the specimen by the specimen tilt mechanism. Thus, an electric field and a magnetic field in a specimen can be separately observed independently of each other.
摘要翻译： 使用聚焦电子束测量电磁场分布的装置可以以高分辨率和高可靠性测量样品中的电磁场分布。 聚焦电子束辐射系统用聚焦电子束照射样品。 样品倾斜机构围绕垂直于聚焦电子束的光轴的倾斜轴将样品倾斜180度。 电子束位置检测器测量当聚焦电子束透过样品时给予聚焦电子束的偏转的方向和数量。 此外，处理系统从方向和方向上的数据分别计算电场的方向和强度，以及分别在聚焦电子束透过的样本上的点上的磁场的方向和强度 电子束位置检测器在样品倾倒机构转换之前和之后测量的聚焦电子束的偏转量。 因此，可以彼此独立地分别观察试样中的电场和磁场。
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公开(公告)号：US07161874B2
公开(公告)日：2007-01-09
申请号：US10069489
申请日：2001-06-21
申请人： Masakazu Ichikawa , Isao Kitazawa
发明人： Masakazu Ichikawa , Isao Kitazawa
IPC分类号： G04C3/00
摘要： The power generated by a power generating means (1) of a power-generating type electronic clock is measured by a first power generating sensing means (101) and a second power generating sensing means (102). The power generation level required when the operation is changed from a normal mode to a power-saving mode and the power generation level required when the operation is changed from the power-saving mode back to the normal mode are made different to prevent the phenomenon that the operation changes frequently by imparting hysteresis characteristics to the power generation level which causes a change in the mode, thereby improving the power-saving effect.
摘要翻译： 由发电型电子时钟的发电装置（1）产生的功率由第一功率产生感测装置（101）和第二发电感测装置（102）测量。 当操作从正常模式切换到省电模式时所需的发电电平和将操作从节电模式改变回正常模式所需的发电电平被设定为不同，以防止 通过给发电电平赋予滞后特性而频繁地变化，这导致模式的改变，从而提高了省电效果。
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公开(公告)号：US5563465A
公开(公告)日：1996-10-08
申请号：US225978
申请日：1994-04-12
CPC分类号： H02N2/026 , H02N2/0025 , H02N2/067
摘要： An actuator includes piezo electric devices which are installed in contact with a drive head and a driven body which is contact-driven by the drive head. Thus, only one mechanism performs coarse motion and micromotion by forming a gap between the drive head and driven body. The high precision positioning mechanism can be miniaturized and constructed at a low price.
摘要翻译： 致动器包括安装成与驱动头接触的压电装置和由驱动头接触驱动的从动体。 因此，只有一个机构通过在驱动头和被驱动体之间形成间隙来执行粗略运动和微动作。 高精度定位机构可以以低价格小型化和建造。
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6.发明授权
公开(公告)号：US5345080A
公开(公告)日：1994-09-06
申请号：US960503
申请日：1992-10-13
IPC分类号： H01J37/04 , H01J37/09 , H01J37/147 , H01J37/20 , H01J37/22 , H01J37/26 , H01J37/295
CPC分类号： H01J37/26 , H01J37/045 , H01J2237/24455
摘要： An electron microscopic image observing method and an apparatus for carrying out the same enables the observation of an electron microscopic image of a specimen by irradiating the specimen with an electron beam and detecting the electron beam after it has transmitted through the specimen. The electron beam transmitted through the specimen is deflected so that the deflection thereof varies with time, and is allowed to pass through an aperture only when the deflection thereof is within a predetermined range of deflection, whereby the electron beam transmitted through the specimen and passed through the aperture is then detected. Thus, the electron microscopic image observing method and the apparatus for carrying out the same enables the observation of time-resolved electron microscopic images of a specimen having internal physical properties varying with time.
摘要翻译： 电子显微镜图像观察方法及其执行装置能够通过用电子束照射样本来观察样品的电子显微镜图像，并且在透射通过样品之后检测电子束。 透过试样的电子束被偏转，使其挠曲随时间而变化，只有当其偏转在预定的偏转范围内时才允许通过孔，由此电子束透过试样并通过 然后检测孔径。 因此，电子显微镜图像观察方法及其执行装置能够观察具有随时间变化的内部物理性质的样品的时间分辨电子显微镜图像。
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公开(公告)号：US5298747A
公开(公告)日：1994-03-29
申请号：US794007
申请日：1991-11-19
CPC分类号： H01J37/28 , H01J2237/1514
摘要： A scanning interference electron microscope includes an electron source, a focusing lens, an electron beam deflection system and a biprism. The biprism separates the primary electron beam emanating from the electron source into two beams. One of the separated beams is controlled by the deflection system to scan the sample surface, thereafter interfering with the other separated beam to generated interference fringes. The phase difference due to interaction of the first electron beam with a sample surface produces changes in the interference intensity of the interference fringes, which represent a microscopic image of the sample.
摘要翻译： 扫描干涉电子显微镜包括电子源，聚焦透镜，电子束偏转系统和双棱镜。 双棱镜将从电子源发射的一次电子束分离成两束。 分离的光束中的一个由偏转系统控制，以扫描样品表面，此后干扰另一个分离的光束以产生干涉条纹。 由于第一电子束与样品表面的相互作用导致的相位差产生干涉条纹的干涉强度的变化，其表示样品的微观图像。
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公开(公告)号：US5521390A
公开(公告)日：1996-05-28
申请号：US341949
申请日：1994-11-16
CPC分类号： G01Q10/04 , B82Y35/00 , G12B1/00 , H01J37/20 , Y10S977/868
摘要： An optical nanodisplacement producing apparatus is realized by employing an optical parametric oscillator of which cavity length is varied in correspondence with a wavelength or the intensity of the output light signal to achieve a fine-displacement producing mechanism. An optical nanodisplacement producing apparatus having high resolution less than 0.1 nm and a highly stable characteristic is realized as a very fine pattern forming/monitoring apparatus.
摘要翻译： 通过采用光学参数振荡器来实现光学纳米位置产生装置，其中腔长度与输出光信号的波长或强度相对应地变化，以实现精细位移产生机制。 作为非常精细的图案形成/监视装置，实现了具有小于0.1nm的高分辨率和高度稳定特性的光学纳米置换产生装置。
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公开(公告)号：US5229607A
公开(公告)日：1993-07-20
申请号：US714018
申请日：1991-06-12
申请人： Hironobu Matsui , Mikio Ichihashi , Sumio Hosaka , Yoshinori Nakayama , Satoshi Haraichi , Fumikazu Itoh , Akira Shimase , Yoshimasa Kondo , Shigeyuki Hosoki , Masakazu Ichikawa , Yukio Honda , Tsuyoshi Hasegawa , Shiji Okazaki , Shunji Maeda , Hitoshi Kubota
发明人： Hironobu Matsui , Mikio Ichihashi , Sumio Hosaka , Yoshinori Nakayama , Satoshi Haraichi , Fumikazu Itoh , Akira Shimase , Yoshimasa Kondo , Shigeyuki Hosoki , Masakazu Ichikawa , Yukio Honda , Tsuyoshi Hasegawa , Shiji Okazaki , Shunji Maeda , Hitoshi Kubota
CPC分类号： H01J37/28 , B82Y35/00 , G01Q30/02 , H01J37/252 , H01J37/3056
摘要： A combination apparatus having a scanning electron microscope includes equipment for performing any of observing, measuring and processing operations on a sample placed in a sample chamber. The sample chamber contains a focused electron beam irradiating unit apart from the components for performing the observing, measuring and processing operations. The focused electron beam irradiating unit irradiates a finely focused electron beam onto the surface of the sample for electron microscopic observation in scanning fashion. This setup allows the observing, measuring or processing equipment to combine with the scanning electron microscope without appreciably enlarging the construction of the combination apparatus.
摘要翻译： 具有扫描电子显微镜的组合装置包括用于对放置在样品室中的样品进行观察，测量和处理操作的任何设备。 样品室包含聚焦电子束照射单元，与用于进行观察，测量和处理操作的部件分开。 聚焦电子束照射单元以扫描方式将精细聚焦的电子束照射到用于电子显微镜观察的样品表面上。 该设置允许观察，测量或处理设备与扫描电子显微镜组合，而不会明显地扩大组合装置的结构。
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公开(公告)号：US5144128A
公开(公告)日：1992-09-01
申请号：US649898
申请日：1991-02-01
IPC分类号： G01N23/00 , G01N27/00 , G01Q10/06 , G01Q20/00 , G01Q30/02 , G01Q30/16 , G01Q60/00 , G01Q70/02 , H01J37/252
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q20/00 , G01Q30/16 , G01Q70/02 , Y10S977/852 , Y10S977/86 , Y10S977/861 , Y10S977/863 , Y10S977/873
摘要： An atomic force microscope is provided for sensing displacement of a cantilever based on scanning tunneling microscopy. The atomic force microscope includes a cantilever moving system which allows the cantilever to be moved or slipped between an STM tip and a sample. This results in the microscope being able to carry out atomic force microscopy and tunneling microscopy without changing a single STM tip and to control the very small force between the sample and the tip to be constant.
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