公开(公告)号：US5572122A

公开(公告)日：1996-11-05

申请号：US141077

申请日：1993-10-26

申请人： Yusuke Yajima ,  Yoshio Takahashi ,  Masakazu Ichikawa ,  Shigeyuki Hosoki

发明人： Yusuke Yajima ,  Yoshio Takahashi ,  Masakazu Ichikawa ,  Shigeyuki Hosoki

IPC分类号： G01N23/04 ,  G01R31/305 ,  G01R33/028 ,  G01R33/12 ,  G01R33/02 ,  G01R33/025

CPC分类号： G01R31/305

摘要： An apparatus for measuring an electromagnetic field distribution using a focused electron beam can measure the electromagnetic field distribution in a specimen with high resolution and high reliability. A focused electron beam radiation system irradiates a specimen with a focused electron beam. A specimen tilt mechanism tilts a specimen by 180.degree. about a tilt axis that is perpendicular to the optical axis of the focused electron beam. An electron beam position detector measures the direction and quantity of the deflection given to the focused electron beam when it is transmitted through the specimen. Further, a processing system calculates the direction and the intensity of an electric field, and the direction and the intensity of a magnetic field separately at a point on the specimen through which the focused electron beam is transmitted, from the data on the direction and the quantity of the deflection of the focused electron beam measured by the electron beam position detector before and after the turnover of the specimen by the specimen tilt mechanism. Thus, an electric field and a magnetic field in a specimen can be separately observed independently of each other.

摘要翻译： 使用聚焦电子束测量电磁场分布的装置可以以高分辨率和高可靠性测量样品中的电磁场分布。 聚焦电子束辐射系统用聚焦电子束照射样品。 样品倾斜机构围绕垂直于聚焦电子束的光轴的倾斜轴将样品倾斜180度。 电子束位置检测器测量当聚焦电子束透过样品时给予聚焦电子束的偏转的方向和数量。 此外，处理系统从方向和方向上的数据分别计算电场的方向和强度，以及分别在聚焦电子束透过的样本上的点上的磁场的方向和强度 电子束位置检测器在样品倾倒机构转换之前和之后测量的聚焦电子束的偏转量。 因此，可以彼此独立地分别观察试样中的电场和磁场。

公开(公告)号：US5698798A

公开(公告)日：1997-12-16

申请号：US411316

申请日：1995-03-28

申请人： Makiko Kohno ,  Shigeyuki Hosoki ,  Tsuyoshi Hasegawa ,  Yusuke Yajima ,  Toshio Katsuyama

发明人： Makiko Kohno ,  Shigeyuki Hosoki ,  Tsuyoshi Hasegawa ,  Yusuke Yajima ,  Toshio Katsuyama

IPC分类号： G01D21/00 ,  G01N23/00 ,  G01N25/00 ,  G01N33/00 ,  G01Q80/00

CPC分类号： G01Q60/12 ,  B82Y35/00 ,  Y10S977/852

摘要： In a measuring method and a measuring apparatus which are suited for observing a dynamic physical phenomenon particularly in a microdevice, a signal for generating a physical phenomenon in a specimen is inputted to the specimen, and a signal which is caused by this dynamic physical phenomenon is detected by a probe which is close to or in contact with the specimen surface in correspondence with a signal input to the specimen on the basis of the specific time. The measuring apparatus has a scanning probe microscope with a probe (tip) which is close to or in contact with the specimen surface, a pulse voltage application control unit for applying respective pulse voltages to the specimen and probe, and a signal measuring unit for measuring a signal from the specimen detected by the probe. The measuring apparatus causes a dynamic physical phenomenon in the specimen by applying the pulse voltage to the specimen, applies a bias voltage between the probe and specimen by applying the pulse voltage to the probe, and detects the signal caused by the dynamic physical phenomenon in the specimen. Pulse voltage application to the probe is executed by the pulse voltage application control unit in correspondence with pulse voltage application to the specimen on the basis of the specific time. A dynamic physical phenomenon in a microarea of a specimen which is caused by the particle property or wave property of electrons can thus be observed.

摘要翻译： 在适于观察动态物理现象的测量方法和测量装置中，特别是在微型装置中，用于产生样本中的物理现象的信号被输入到样本，并且由该动态物理现象引起的信号是 通过与基于特定时间输入到样本的信号相对应的与探针接近或接触的探针来检测。 测量装置具有扫描探针显微镜，其具有与试样表面接近或接触的探针（尖端），用于向样本和探针施加相应脉冲电压的脉冲电压施加控制单元，以及用于测量 由探针检测到的样本的信号。 测量装置通过向样本施加脉冲电压来引起样品中的动态物理现象，通过向探针施加脉冲电压在探针和样品之间施加偏置电压，并且检测由于动态物理现象引起的信号 标本。 脉冲电压施加到探针由脉冲电压施加控制单元根据具体时间对标本施加脉冲电压进行。 因此可以观察到由电子的粒子特性或波特性引起的样品的微区域中的动态物理现象。

公开(公告)号：US5229607A

公开(公告)日：1993-07-20

申请号：US714018

申请日：1991-06-12

申请人： Hironobu Matsui ,  Mikio Ichihashi ,  Sumio Hosaka ,  Yoshinori Nakayama ,  Satoshi Haraichi ,  Fumikazu Itoh ,  Akira Shimase ,  Yoshimasa Kondo ,  Shigeyuki Hosoki ,  Masakazu Ichikawa ,  Yukio Honda ,  Tsuyoshi Hasegawa ,  Shiji Okazaki ,  Shunji Maeda ,  Hitoshi Kubota

发明人： Hironobu Matsui ,  Mikio Ichihashi ,  Sumio Hosaka ,  Yoshinori Nakayama ,  Satoshi Haraichi ,  Fumikazu Itoh ,  Akira Shimase ,  Yoshimasa Kondo ,  Shigeyuki Hosoki ,  Masakazu Ichikawa ,  Yukio Honda ,  Tsuyoshi Hasegawa ,  Shiji Okazaki ,  Shunji Maeda ,  Hitoshi Kubota

IPC分类号： G01Q10/04 ,  G01Q30/02 ,  G01Q30/12 ,  G01Q30/18 ,  G01Q60/00 ,  H01J37/252 ,  H01J37/28

CPC分类号： H01J37/28 ,  B82Y35/00 ,  G01Q30/02 ,  H01J37/252 ,  H01J37/3056

摘要： A combination apparatus having a scanning electron microscope includes equipment for performing any of observing, measuring and processing operations on a sample placed in a sample chamber. The sample chamber contains a focused electron beam irradiating unit apart from the components for performing the observing, measuring and processing operations. The focused electron beam irradiating unit irradiates a finely focused electron beam onto the surface of the sample for electron microscopic observation in scanning fashion. This setup allows the observing, measuring or processing equipment to combine with the scanning electron microscope without appreciably enlarging the construction of the combination apparatus.

摘要翻译： 具有扫描电子显微镜的组合装置包括用于对放置在样品室中的样品进行观察，测量和处理操作的任何设备。 样品室包含聚焦电子束照射单元，与用于进行观察，测量和处理操作的部件分开。 聚焦电子束照射单元以扫描方式将精细聚焦的电子束照射到用于电子显微镜观察的样品表面上。 该设置允许观察，测量或处理设备与扫描电子显微镜组合，而不会明显地扩大组合装置的结构。

公开(公告)号：US5144128A

公开(公告)日：1992-09-01

申请号：US649898

申请日：1991-02-01

申请人： Tsuyoshi Hasegawa ,  Sumio Hosaka ,  Shigeyuki Hosoki ,  Yukio Honda ,  Masakazu Ichikawa

发明人： Tsuyoshi Hasegawa ,  Sumio Hosaka ,  Shigeyuki Hosoki ,  Yukio Honda ,  Masakazu Ichikawa

IPC分类号： G01N23/00 ,  G01N27/00 ,  G01Q10/06 ,  G01Q20/00 ,  G01Q30/02 ,  G01Q30/16 ,  G01Q60/00 ,  G01Q70/02 ,  H01J37/252

CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01Q20/00 ,  G01Q30/16 ,  G01Q70/02 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/861 ,  Y10S977/863 ,  Y10S977/873

摘要： An atomic force microscope is provided for sensing displacement of a cantilever based on scanning tunneling microscopy. The atomic force microscope includes a cantilever moving system which allows the cantilever to be moved or slipped between an STM tip and a sample. This results in the microscope being able to carry out atomic force microscopy and tunneling microscopy without changing a single STM tip and to control the very small force between the sample and the tip to be constant.

公开(公告)号：US5746826A

公开(公告)日：1998-05-05

申请号：US347416

申请日：1994-12-02

申请人： Tsuyoshi Hasegawa ,  Shigeyuki Hosoki ,  Makiko Kohno ,  Masakazu Ichikawa ,  Hitoshi Nakahara ,  Toshiyuki Usagawa

发明人： Tsuyoshi Hasegawa ,  Shigeyuki Hosoki ,  Makiko Kohno ,  Masakazu Ichikawa ,  Hitoshi Nakahara ,  Toshiyuki Usagawa

IPC分类号： G01Q60/10 ,  G01Q60/58 ,  G01Q80/00 ,  H01L21/205 ,  C30B25/04

CPC分类号： B82Y30/00 ,  B82Y40/00 ,  H01L21/0237 ,  H01L21/02381 ,  H01L21/0243 ,  H01L21/02433 ,  H01L21/0245 ,  H01L21/02491 ,  H01L21/02532 ,  H01L21/0262 ,  Y10S117/913 ,  Y10S977/855

摘要： Utilizing rugged pattern of atomic size present on a crystalline substrate of a semiconductor such as silicon or selenium or the like, a microstructure body is produced on the substrate by forming a layer of a first element of one monolayer or less by arranging at the position of the substrate most stable in energy formed by ruggedness the atoms of the first element such as gold, silver, copper, nickel, palladium, platinum or an element of group IV and then depositing successively atoms of at least one second element of group III, group IV and group V on only at a part of the surface of the substrate on which said layer of one monolayer or less by vapor deposition, sputtering or the like.

摘要翻译： PCT No.PCT / JP94 / 00561 Sec。 371日期1994年12月2日第 102（e）1994年12月2日PCT PCT 1994年4月5日PCT公布。 公开号WO94 / 23445 日期1994年10月13日利用存在于诸如硅或硒等半导体的晶体衬底上的原子尺寸的粗糙图案，通过以下方式在基板上形成微结构体：通过形成一层单层或更小的第一元素层， 布置在基底最稳定的能量位置上，该能量由第一元素的原子如金，银，铜，镍，钯，铂或IV族元素的粗糙度形成，然后连续沉积至少一个第二元素的原子 仅在通过气相沉积，溅射等在其上存在一层或更少层的一层以上的基板表面的一部分上的III族，IV族和V族。

公开(公告)号：US5689494A

公开(公告)日：1997-11-18

申请号：US441700

申请日：1995-05-15

申请人： Masakazu Ichikawa ,  Shigeyuki Hosoki ,  Fumihiko Uchida ,  Shigeo Kato ,  Yoshihisa Fujisaki ,  Sumiko Fujisaki ,  Atsushi Kikugawa ,  Ryo Imura ,  Hajime Aoi ,  Kiyokazu Nakagawa ,  Eiichi Murakami

发明人： Masakazu Ichikawa ,  Shigeyuki Hosoki ,  Fumihiko Uchida ,  Shigeo Kato ,  Yoshihisa Fujisaki ,  Sumiko Fujisaki ,  Atsushi Kikugawa ,  Ryo Imura ,  Hajime Aoi ,  Kiyokazu Nakagawa ,  Eiichi Murakami

IPC分类号： B82B3/00 ,  G01Q60/00 ,  G01Q80/00 ,  G01Q90/00 ,  G11B9/00 ,  G11B11/08 ,  G11B33/14 ,  H01J37/30 ,  H01J37/305 ,  H01J37/317 ,  G11B7/00

CPC分类号： G11B9/1436 ,  B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G11B11/08 ,  G11B33/14 ,  G11B9/00 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1445 ,  G11B9/1463 ,  G11B9/1472 ,  H01J37/3056 ,  H01J37/3174 ,  G01Q80/00 ,  H01J2237/31738 ,  H01J2237/31759 ,  Y10S977/856 ,  Y10S977/947

摘要： A fine-fabrication method of solid surfaces relates to a new surface fabrication method allows a solid-device surface to be fabricated at an atomic scale so as to produce an ultra-fine device or a device for recording information at an ultra-high density. A probe is installed with a tip thereof facing to the surface of a specimen to undergo fabrication. A voltage for forming an electric field is applied between the probe and the specimen. The electric field is large enough to field-evaporate atoms constituting the specimen or the probe; the electric field field-evaporates atoms constituting the specimen, removing them from the surface of the specimen; and as another alternative, the electric field field-evaporates atoms constituting the probe, depositing them on the surface of the specimen. Further, in another surface atom fabrication method, while the surface of a specimen is observed at an atomic scale using a surface observation technique by means of a scanning tunnelling microscope, a pulsative voltage large enough for the field evaporation of atoms described above is applied between the probe and the specimen at any arbitrary desired positions on the surface of the specimen; and the pulsative voltage field-evaporates and, hence, eliminates atoms one by one from the surface of the specimen.

摘要翻译： 固体表面的精细制造方法涉及新的表面制造方法，可以以原子尺度制造固体器件表面，以便产生超细的器件或以超高密度记录信息的器件。 安装探针，其尖端面向样品的表面进行制造。 在探针和样品之间施加用于形成电场的电压。 电场足够大以使构成样品或探针的原子挥发蒸发; 电场场蒸发构成样品的原子，将其从试样的表面除去; 并且作为另一种替代方案，电场场蒸发构成探针的原子，将它们沉积在样品的表面上。 此外，在另一表面原子制造方法中，利用扫描隧道显微镜利用表面观察技术以原子尺度观察试样的表面，在上述原子的场蒸发之前足够大的脉动电压被施加在 探针和样品在样品表面上任意任意的位置; 并且脉动电压场蒸发，因此从样品的表面逐个消除原子。

公开(公告)号：US5416331A

公开(公告)日：1995-05-16

申请号：US934672

申请日：1992-09-11

申请人： Masakazu Ichikawa ,  Shigeyuki Hosoki ,  Fumihiko Uchida ,  Shigeo Kato ,  Yoshihisa Fujisaki ,  Sumiko Fujisaki ,  Atsushi Kikugawa ,  Ryo Imura ,  Hajime Aoi ,  Kiyokazu Nakagawa ,  Eiichi Murakami

发明人： Masakazu Ichikawa ,  Shigeyuki Hosoki ,  Fumihiko Uchida ,  Shigeo Kato ,  Yoshihisa Fujisaki ,  Sumiko Fujisaki ,  Atsushi Kikugawa ,  Ryo Imura ,  Hajime Aoi ,  Kiyokazu Nakagawa ,  Eiichi Murakami

IPC分类号： B82B3/00 ,  G01Q60/00 ,  G01Q80/00 ,  G01Q90/00 ,  G11B9/00 ,  G11B11/08 ,  G11B33/14 ,  H01J37/30 ,  H01J37/305 ,  H01J37/317

CPC分类号： G11B9/1436 ,  B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G11B11/08 ,  G11B33/14 ,  G11B9/00 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1445 ,  G11B9/1463 ,  G11B9/1472 ,  H01J37/3056 ,  H01J37/3174 ,  G01Q80/00 ,  H01J2237/31738 ,  H01J2237/31759 ,  Y10S977/856 ,  Y10S977/947

摘要： A fine-fabrication method of solid surfaces relates to a new surface fabrication method allows a solid-device surface to be fabricated at an atomic scale so as to produce an ultra-fine device or a device for recording information at an ultra-high density. A probe is installed with a tip thereof facing to the surface of a specimen to undergo fabrication. A voltage for forming an electric field is applied between the probe and the specimen. The electric field is large enough to field-evaporate atoms constituting the specimen or the probe; the electric field field-evaporates atoms constituting the specimen, removing them from the surface of the specimen; and as another alternative, the electric field field-evaporates atoms constituting the probe, depositing them on the surface of the specimen. Further, in another surface atom fabrication method, while the surface of a specimen is observed at an atomic scale using a surface observation technique by means of a scanning tunnelling microscope, a pulsative voltage large enough for the field evaporation of atoms described above is applied between the probe and the specimen at any arbitrary desired positions on the surface of the specimen; and the pulsative voltage field-evaporates and, hence, eliminates atoms one by one from the surface of the specimen.

摘要翻译： PCT No.PCT / JP92 / 00015 Sec。 371日期：1992年9月11日 102（e）1992年9月11日PCT PCT 1991年1月10日PCT公布。 公开号WO92 / 12528 日期：1992年7月23日。固体表面的精细制造方法涉及新的表面制造方法，可以以原子尺度制造固体器件表面，以便制造超精细器件或用于记录信息的器件 超高密度。 安装探针，其尖端面向样品的表面进行制造。 在探针和样品之间施加用于形成电场的电压。 电场足够大以使构成样品或探针的原子挥发蒸发; 电场场蒸发构成样品的原子，将其从试样的表面除去; 并且作为另一种替代方案，电场场蒸发构成探针的原子，将它们沉积在样品的表面上。 此外，在另一表面原子制造方法中，利用扫描隧道显微镜利用表面观察技术以原子尺度观察试样的表面，在上述原子的场蒸发之前足够大的脉动电压被施加在 探针和样品在样品表面上任意任意的位置; 并且脉动电压场蒸发，因此从样品的表面逐个消除原子。

公开(公告)号：US4883959A

公开(公告)日：1989-11-28

申请号：US200979

申请日：1988-06-01

申请人： Shigeyuki Hosoki ,  Sumio Hosaka ,  Keiji Takata

发明人： Shigeyuki Hosoki ,  Sumio Hosaka ,  Keiji Takata

IPC分类号： G01B7/34 ,  G01Q10/00 ,  G01Q20/00 ,  G01Q30/02 ,  G01Q60/24 ,  G01Q60/50 ,  G01Q70/02 ,  H01J37/28

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q10/06 ,  Y10S977/873

摘要： A scanning surface microscope is disclosed which includes a unit for moving a sample, and a micro-balance whose balance bar is provided with a probe-tip and an electrode at both ends thereof, to convert the irregularities of a sample surface facing the probe-tip into the displacement of the balance bar by utilizing a force generated between the probe-tip and the sample surface. The movement of the electrode indicative of the displacement of the balance bar is detected to obtain the topography of the sample surface.

摘要翻译： 公开了一种扫描表面显微镜，其包括用于移动样品的单元和其平衡杆在其两端设置有探针尖端和电极的微量天平，以转换面向探针头的样品表面的不规则性， 通过利用在探针尖端和样品表面之间产生的力而引导到平衡杆的位移。 检测指示平衡杆的位移的电极的运动，以获得样品表面的形貌。

公开(公告)号：US4379250A

公开(公告)日：1983-04-05

申请号：US198176

申请日：1980-10-17

申请人： Shigeyuki Hosoki ,  Shigehiko Yamamoto ,  Hideo Todokoro ,  Susumu Kawase ,  Yasuharu Hirai

发明人： Shigeyuki Hosoki ,  Shigehiko Yamamoto ,  Hideo Todokoro ,  Susumu Kawase ,  Yasuharu Hirai

IPC分类号： H01J1/304 ,  H01J1/16

CPC分类号： H01J1/304 ,  H01J37/073 ,  H01J2237/06316

摘要： A field emission cathode of the present invention is characterized by the possession of a special layer which is adsorbed onto the surfaces of a tip that is joined to the top of a hairpin-shaped filament.This layer is formed by adsorbing a selected metal via oxygen to a thickness which does not exceed the thickness of the monolayer of atoms.The metal will be selected from chromium, aluminum, cerium, magnesium, titanium, silicon, zirconium or hafnium.The field emission cathode features that the electrons are emitted in a concentrated manner from a particular crystal plane among the crystal planes of the tip.Therefore, it is possible to obtain a field emission cathode having very small emission angle of electrons.

摘要翻译： 本发明的场致发射阴极的特征在于具有吸附在与发夹状丝的顶部接合的尖端的表面上的特殊层。 该层通过将氧选择的金属吸附至不超过原子单层厚度的厚度而形成。 金属将选自铬，铝，铈，镁，钛，硅，锆或铪。 场发射阴极的特征在于电子以尖端的晶面中的特定晶面以集中的方式发射。 因此，可以获得具有非常小的电子发射角的场致发射阴极。

公开(公告)号：US5393983A

公开(公告)日：1995-02-28

申请号：US50044

申请日：1993-04-28

申请人： Shigeyuki Hosoki

发明人： Shigeyuki Hosoki

IPC分类号： G01Q30/10 ,  G01Q30/18 ,  H01J37/141

CPC分类号： H01J37/1416 ,  H01J2237/26

摘要： A magnetic electron lens for use in charged particle beam-applied apparatuses such as electron microscopes, the lens having concave lens characteristics in a geometric-optical sense. The magnetic concave lens of the invention comprises a first and a second magnetic field generating coil arranged in the propagating direction of the charged particle beam, and a first and a second magnetic shielding plate made of a superconductor each and furnished so as to enclose the first and the second magnetic field generating coils. The first magnetic shielding plate shields the magnetic field generated above the first magnetic field generating coil, and the second magnetic shielding plate shields the magnetic field generated under the second magnetic field generating coil. This setup constitutes a magnetic electron lens that is concave in terms of geometric-optical lens characteristics.

摘要翻译： PCT No.PCT / JP92 / 01076 Sec。 371日期：1993年4月28日 102（e）日期1993年4月28日PCT提交1992年8月26日PCT公布。 出版物WO93 / 05529 日期：1993年3月18日。一种用于带电粒子束施加装置如电子显微镜的磁性电子透镜，具有几何光学意义上的凹透镜特性的透镜。 本发明的磁凹透镜包括沿着带电粒子束的传播方向布置的第一和第二磁场产生线圈，以及由超导体制成的第一和第二磁屏蔽板，并且被设置为包围第一 和第二磁场产生线圈。 第一磁屏蔽板屏蔽在第一磁场产生线圈之上产生的磁场，并且第二磁屏蔽板屏蔽在第二磁场产生线圈下产生的磁场。 该装置构成了几何光学透镜特性为凹面的磁性电子透镜。