公开(公告)号：US09934928B2

公开(公告)日：2018-04-03

申请号：US14713573

申请日：2015-05-15

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Shengwu Chang ,  Jeff Burgess ,  William Leavitt ,  Michael St Peter ,  Matt Mosher ,  Joe Olson ,  Frank Sinclair

IPC: H01J37/08 ,  H01J27/08 ,  H01J27/02 ,  H01J9/18 ,  H01J9/385 ,  H01J3/04 ,  H01J5/02

CPC classification number: H01J27/08 ,  H01J3/04 ,  H01J5/02 ,  H01J9/18 ,  H01J9/385 ,  H01J27/024 ,  H01J37/08

Abstract: Provided herein are approaches for improving ion beam extraction stability and ion beam current for an ion extraction system. In one approach, a source housing assembly may include a source housing surrounding an ion source including an arc chamber, the source housing having an extraction aperture plate mounted at a proximal end thereof. The source housing assembly further includes a vacuum liner disposed within an interior of the source housing to form a barrier around a set of vacuum pumping apertures. As configured, openings in the source housing assembly, other than an opening in the extraction aperture plate, are enclosed by the extraction aperture plate and the vacuum liner, thus ensuring appendix arcs or extraneous ions produced outside the arc chamber remain within the source housing. Just those ions produced within the arc chamber exit the source housing through the opening of the extraction aperture plate.

公开(公告)号：US20050247885A1

公开(公告)日：2005-11-10

申请号：US11177984

申请日：2005-07-08

Applicant: John Madocks

Inventor： John Madocks

IPC: F03H1/00 ,  H01J3/04 ,  H01J27/00 ,  H01J33/00 ,  H05H1/24

CPC classification number: F03H1/0075 ,  H01J27/143 ,  H05H1/54

Abstract: A closed drift ion source which includes a channel having an open end, a closed end, and an input port for an ionizable gas. A first magnetic pole is disposed on the open end of the channel and extends therefrom in a first direction. A second magnetic pole disposed on the open end of the channel and extends therefrom in a second direction, where the first direction is opposite to the second direction. The distal ends of the first magnetic pole and the second magnetic pole define a gap comprising the opening in the first end. An anode is disposed within the channel. A primary magnetic field line is disposed between the first magnetic pole and the second magnetic pole, where that primary magnetic field line has a mirror field greater than 2.

公开(公告)号：US4645978A

公开(公告)日：1987-02-24

申请号：US621579

申请日：1984-06-18

Applicant: Robin J. Harvey ,  Hayden E. Gallagher

Inventor： Robin J. Harvey ,  Hayden E. Gallagher

IPC: H01J3/07 ,  H01J3/02 ,  H01J3/04 ,  H01J17/38 ,  H01J17/44 ,  H01S3/09 ,  H01S3/097 ,  H01J7/24

CPC classification number: H01J3/021 ,  H01J17/44

Abstract: An electron beam controlled switch employing a radial geometry and a Wire-Ion Plasma-Electron gun (WIP E-gun) as an electron source is disclosed. The switch comprises an inner cylinder that serves as the WIP E-gun cathode, a cylindrical grid that serves as the WIP E-gun anode, an array of fine wire anodes disposed in the WIP E-gun ionization chamber, a foil support cylinder to support the foil windows which also serve as the switch anode, and an outer cylinder which also serves as the switch cathode. The WIP E-gun and ionization chamber is gas filled at low pressure, while the switch cavity is filled with a high pressure gas. A voltage pulse is applied to the wire anodes to ionize the gas in the ionization chamber. The ions are extracted through the chamber grid and accelerated through a high voltage to bombard the E-gun cathode. The electrons emitted from the ion bombardment are accelerated outwardly through the high voltage, penetrate through the foil windows and into the pressurized gas in the switch cavity. The high energy electrons ionize the gas between the switch anode and cathode, thereby turning "ON" the switch. In the absence of the electron beam, the switch gas deionizes and switch conduction is quickly extinguished.

Abstract translation: 公开了采用放射状几何形状的电子束控制开关和线离子等离子体电子枪（WIP E-gun）作为电子源。 开关包括用作WIP电子枪阴极的内筒，用作WIP E枪阳极的圆柱形栅格，设置在WIP E枪电离室中的细线阳极阵列，箔支撑筒 支撑也用作开关阳极的箔窗以及也用作开关阴极的外筒。 WIP电子枪和电离室在低压下充满气体，而开关腔充满高压气体。 对电线阳极施加电压脉冲以电离电离室中的气体。 离子通过室格栅提取，并通过高压加速轰击电子枪阴极。 从离子轰击发射的电子通过高电压向外加速，穿过箔窗口并进入开关腔中的加压气体。 高能电子使开关阳极和阴极之间的气体电离，从而使开关“开”。 在没有电子束的情况下，开关气体去离子并且开关导通快速熄灭。

公开(公告)号：US4626691A

公开(公告)日：1986-12-02

申请号：US667255

申请日：1984-11-01

Applicant: Basil F. Gavin

Inventor： Basil F. Gavin

IPC: G21K1/14 ,  H01J3/04

CPC classification number: G21K1/14

Abstract: An improved liquid-film electron stripper particularly for high intensity heavy ion beams which produces constant regenerated, stable, free-standing liquid films having an adjustable thickness between 0.3 to 0.05 microns. The improved electron stripper is basically composed of at least one high speed, rotating disc with a very sharp, precision-like, ground edge on one said of the disc's periphery and with a highly polished, flat, radial surface adjacent the sharp edge. A fine stream of liquid, such as oil, impinges at a 90.degree. angle adjacent the disc's sharp outer edge. Film terminators, located at a selected distance from the disc perimeter are positioned approximately perpendicular to the film. The terminators support, shape, and stretch the film and are arranged to assist in the prevention of liquid droplet formation by directing the collected film to a reservoir below without breaking or interfering with the film. One embodiment utilizes two rotating discs and associated terminators, with the discs rotating so as to form films in opposite directions, and with the second disc being located down beam-line relative to the first disc.

Abstract translation: 特别是用于高强度重离子束的改进的液膜电子剥离器，其产生具有0.3至0.05微米之间的可调厚度的恒定的再生稳定的独立液膜。 改进的电子剥离器基本上由至少一个高速旋转盘组成，其在盘的周边上的一个上具有非常锋利，精密的接地边缘，并且具有与尖锐边缘相邻的高度抛光的平坦的径向表面。 诸如油的细小的液体流以与盘的尖锐外边缘相邻的90度角冲击。 位于与圆盘周边的选定距离处的膜终端器被定位成大致垂直于薄膜。 终止器支撑，成形和拉伸薄膜，并且被布置成通过将收集的薄膜引导到下面的容器中来帮助防止液滴形成，而不破坏或干扰薄膜。 一个实施例使用两个旋转盘和相关联的终端器，其中盘旋转以便在相反方向上形成膜，并且第二盘相对于第一盘位于下束束线上。

公开(公告)号：US4551650A

公开(公告)日：1985-11-05

申请号：US443642

申请日：1982-11-22

Applicant: Tamotsu Noda ,  Hifumi Tamura ,  Hiroshi Okano

Inventor： Tamotsu Noda ,  Hifumi Tamura ,  Hiroshi Okano

IPC: H01J37/08 ,  H01J3/04 ,  H01J27/26 ,  H01J49/16 ,  H01J33/02 ,  H01J49/10

CPC classification number: H01J27/26

Abstract: The field-emission-type ion source according to the present invention comprises an emitter tip, a heater, a reservoir which stores material to be ionized, an extracting electrode situated at the front end of the emitter tip, and a coating-layer which is refractory and anti-reactive with the material to be ionized and which is coated on at least the heater of the emitter tip and heater, in order to prevent their reactions with the material to be ionized.

Abstract translation: 根据本发明的场致发射型离子源包括发射极尖端，加热器，存储待离子化材料的储存器，位于发射极尖端前端的提取电极和涂覆层， 耐火材料和与待离子化的材料具有抗反应性，并且至少涂覆在发射极尖端和加热器的加热器上，以防止它们与材料的离子化反应。

公开(公告)号：US4546253A

公开(公告)日：1985-10-08

申请号：US517966

申请日：1983-07-28

Applicant: Masahiko Tsuchiya ,  Hirofumi Kuwabara

Inventor： Masahiko Tsuchiya ,  Hirofumi Kuwabara

IPC: H01J49/10 ,  G01N27/62 ,  G01N27/68 ,  H01J49/12 ,  H01J49/16 ,  H01J3/04

CPC classification number: H01J49/168

Abstract: Apparatus for producing sample ions comprising means of producing metastable species by corona discharges in the carrier gas, a needle-shaped emitter whose pointed end is inserted into the stream of carrier gas which transports said metastable species, means for applying a high potential to said needle emitter, wherein sample is arranged adjacent to or deposited on the pointed end of said emitter. Its value is further enhanced when it is combined with a mass spectrometer.

Abstract translation: 用于生产样品离子的装置包括通过载气中的电晕放电产生亚稳态物质的装置，其尖端插入输送所述亚稳态物质的载气流中的针状发射体，用于向所述针施加高电位的装置 发射器，其中样品布置成邻近或沉积在所述发射体的尖端上。 当与质谱仪组合时，其值进一步增强。

公开(公告)号：US4516052A

公开(公告)日：1985-05-07

申请号：US384321

申请日：1982-06-01

Applicant: Phillip D. Prewett ,  Derek K. Jefferies ,  Neil A. Pashley ,  Thomas D. Cockhill

Inventor： Phillip D. Prewett ,  Derek K. Jefferies ,  Neil A. Pashley ,  Thomas D. Cockhill

IPC: H01J37/08 ,  H01J3/04 ,  H01J27/02 ,  H01J27/26 ,  H01J49/04 ,  H01J17/26 ,  B65D47/10

CPC classification number: H01J27/26

Abstract: A dispenser for supplying metal vapor to an ion source. The metal is provided in a capsule which may be broken to release the metal by turning a knob which causes a capsule housing to move to the right, thus causing the capsule to break against a piston member. The piston member communicates with a conduit which in turn communicates with the associated ion source, partly shown in the drawing. A heating mantle is provided to vaporize the metal in the housing so that it can pass from the dispenser through a conduit, to the ion source.

Abstract translation: 用于向离子源供应金属蒸气的分配器。 金属设置在胶囊中，该胶囊可以通过转动使胶囊壳体向右移动的旋钮而被破坏以释放金属，从而使胶囊破坏活塞件。 活塞构件与导管连通，导管又与图中部分示出的相关离子源连通。 提供加热套以蒸发壳体中的金属，使得其可以从分配器通过导管传递到离子源。

公开(公告)号：US4335465A

公开(公告)日：1982-06-15

申请号：US8162

申请日：1979-01-31

Applicant: Jens Christiansen ,  Christoph Schultheiss

Inventor： Jens Christiansen ,  Christoph Schultheiss

IPC: H01J3/02 ,  H01J3/04 ,  H05H1/48 ,  G21G1/06 ,  H01J17/00

CPC classification number: H01J3/04 ,  H01J3/025 ,  H05H1/48

Abstract: An electron and ion accelerator includes plural spaced electrodes which are apertured to define a gas discharge path and supported at their peripheries by insulative means. A gas supply provides low pressure gas capable of producing electrons and ions in the gas discharge path. A voltage applied between the at least two electrodes establishes an electrical potential between them such that a spark-like gas discharge occurs along the gas discharge path. The current density obtainable in the low pressure gas is substantially higher than the density of an electron or ion flow in a vacuum.

Abstract translation: 电子和离子加速器包括多个间隔开的电极，它们有孔以限定气体放电路径，并通过绝缘装置在其周边支撑。 气体供应提供能够在气体排出路径中产生电子和离子的低压气体。 施加在至少两个电极之间的电压在它们之间建立电位，使得沿着气体放电路径发生火花般的气体放电。 在低压气体中可获得的电流密度明显高于真空中电子或离子流的密度。

公开(公告)号：US4109290A

公开(公告)日：1978-08-22

申请号：US788118

申请日：1977-04-18

Applicant: James C. Gallagher

Inventor： James C. Gallagher

IPC: H01T23/00 ,  H01J3/04

CPC classification number: H01T23/00

Abstract: An improved means for generating a negative charge effect in the environment, in which oppositely charged electrically conductive plates are coated with secondary emissive material and are enclosed in a sealed container such as glass that is preferably filled with an inert gas such as argon.

公开(公告)号：US3999072A

公开(公告)日：1976-12-21

申请号：US625040

申请日：1975-10-23

Applicant: Toshinori Takagi

Inventor： Toshinori Takagi

IPC: H01J3/04 ,  H01J27/00 ,  H01J27/20 ,  H05H7/08 ,  H01J7/24 ,  H05B31/26

CPC classification number: H01J27/20 ,  Y10S148/045

Abstract: A beam-plasma type ion source comprises a first section for generating an electron beam, a cylindrical second section for ionizing a gas by virtue of electron bombardment caused by the electron beam generated from the first section, a microwave energy transmission circuit disposed in the second section and connected to receive microwave energy in order to cause plasma ionization, and a third section for collecting the electron beam. The gas introduced into the third section is ionized at the second section and extracted by and accelerated in the first section in the opposite direction to the electron beam way. The first section functions to converge an ion beam to generate a well-focused ion beam toward a desired target by means of ions trapped into a negative-potential well due to the electron beam.

Abstract translation: 射束等离子体型离子源包括用于产生电子束的第一部分，用于通过由第一部分产生的电子束引起的电子轰击而使气体电离的圆柱形第二部分，设置在第二部分中的微波能量传输电路 并连接以接收微波能量以引起等离子体电离，以及用于收集电子束的第三部分。 引入第三部分的气体在第二部分被电离，并且在与电子束方向相反的方向上被提取并在第一部分中被加速。 第一部分用于收敛离子束，以通过由于电子束捕获到负电位阱中的离子而产生朝向期望目标的良好聚焦的离子束。