Emitter for electron-beam projection lithography system, and method of manufacturing and operating the emitter
    92.
    发明申请
    Emitter for electron-beam projection lithography system, and method of manufacturing and operating the emitter 有权
    用于电子束投影光刻系统的发射体,以及制造和操作发射极的方法

    公开(公告)号:US20050077833A1

    公开(公告)日:2005-04-14

    申请号:US10962467

    申请日:2004-10-13

    CPC classification number: H01J37/073 H01J2237/31779

    Abstract: An emitter for an electron-beam projection lithography system includes a photoconductor substrate, an insulating layer formed on a front surface of the photoconductor substrate, a gate electrode layer formed on the insulating layer, and a base electrode layer formed on a rear surface of the photoconductor substrate and formed of a transparent conductive material. In operation of the emitter, a voltage is applied between the base electrode and the gate electrode layer, light is projected onto a portion of the photoconductor substrate to convert the portion of the photoconductor substrate into a conductor such that electrons are emitted only from the partial portion where the light is projected. Since the emitter can partially emit electrons, partial correcting, patterning or repairing of a subject electron-resist can be realized.

    Abstract translation: 用于电子束投影光刻系统的发射器包括:感光体基板,形成于感光体基板前表面的绝缘层,形成在绝缘层上的栅极电极层,以及形成在绝缘层的背面上的基极层 感光体基板并由透明导电材料形成。 在发射极的工作中,在基极和栅极电极层之间施加电压,光被投射到光电导体基底的一部分上,以将感光体基底的一部分转换为导体,使电子仅从部分 投射光的部分。 由于发射体可以部分地发射电子,所以可以实现对象电子抗蚀剂的部分校正,图案化或修复。

    Electron emission lithography apparatus and method using a selectively grown carbon nanotube
    93.
    发明授权
    Electron emission lithography apparatus and method using a selectively grown carbon nanotube 失效
    电子发射光刻设备和使用选择性生长的碳纳米管的方法

    公开(公告)号:US06794666B2

    公开(公告)日:2004-09-21

    申请号:US10160102

    申请日:2002-06-04

    Abstract: An electron emission lithography apparatus and method using a selectively grown carbon nanotube as an electron emission source, wherein the electron emission lithography apparatus includes an electron emission source installed within a chamber and a stage, which is separated from the electron emission source by a predetermined distance and on which a sample is mounted, and wherein the electron emission source is a carbon nanotube having electron emission power. Since a carbon nanotube is used as an electron emission source, a lithography process can be performed with a precise critical dimension that prevents a deviation from occurring between the center of a substrate and the edge thereof and may realize a high throughput.

    Abstract translation: 一种使用选择性生长的碳纳米管作为电子发射源的电子发射光刻设备和方法,其中电子发射光刻设备包括安装在室内的电子发射源和与电子发射源分离预定距离的电台 并且其上安装有样品,并且其中所述电子发射源是具有电子发射能力的碳纳米管。 由于使用碳纳米管作为电子发射源,可以以精确的临界尺寸进行光刻处理,从而防止在基板的中心与其边缘之间发生偏差,并且可以实现高生产率。

    Method and apparatus for pyroelectric lithography using patterned emitter
    94.
    发明授权
    Method and apparatus for pyroelectric lithography using patterned emitter 失效
    使用图案化发射器的热电光刻的方法和装置

    公开(公告)号:US06566666B2

    公开(公告)日:2003-05-20

    申请号:US10230315

    申请日:2002-08-29

    Applicant: In-Kyeong Yoo

    Inventor: In-Kyeong Yoo

    CPC classification number: B82Y10/00 B82Y40/00 H01J37/3175 H01J2237/31777

    Abstract: A method and an apparatus for pyroelectric lithography using a patterned emitter is provided. In the apparatus for pyroelectric lithography, a pyroelectric emitter or a ferroelectric emitter is patterned using a mask and it is then heated. Upon heating, electrons are not emitted from that part of the emitter covered by the mask, but are emitted from the exposed part of the emitter not covered by the mask so that the shape of the emitter pattern is projected onto the substrate. To prevent dispersion of emitted electron beams, which are desired to be parallel, the electron beams are controlled using a magnet or a projection system, thereby achieving exact a one-to-one projection or a x-to-one projection of the desired pattern etched on the substrate.

    Abstract translation: 提供了一种使用图案化发射器进行热电光刻的方法和装置。 在用于热电光刻的装置中,使用掩模对热电发射体或铁电发射体进行图案化,然后将其加热。 在加热时,电子不会从掩模覆盖的发射体的那部分发射,而是从未被掩模覆盖的发射体的暴露部分发射,使得发射极图案的形状投影到基板上。 为了防止希望平行的发射电子束的分散,使用磁体或投影系统控制电子束,从而精确地实现所需图案的一对一投影或一对一投影 蚀刻在基板上。

    2T-1C ferroelectric random access memory and operation method thereof
    95.
    发明授权
    2T-1C ferroelectric random access memory and operation method thereof 有权
    2T-1C铁电随机存取存储器及其操作方法

    公开(公告)号:US06404667B1

    公开(公告)日:2002-06-11

    申请号:US09658942

    申请日:2000-09-11

    Applicant: In-Kyeong Yoo

    Inventor: In-Kyeong Yoo

    CPC classification number: G11C11/22

    Abstract: A 2T-1C FRAM, each cell of which includes two transistors and one ferroelectric capacitor so that the “charging” and “discharging” of the ferroelectric capacitor used in conjunction with the p-n junction of the two transistors performs write/read operations without switching thereby avoiding degradation problems such as fatigue and imprint in the 2T-1C FRAM.

    Abstract translation: 一个2T-1C FRAM,每个单元包括两个晶体管和一个铁电电容器,使得与两个晶体管的pn结结合使用的铁电电容器的“充电”和“放电”执行写入/读取操作而不进行切换 避免2T-1C FRAM中的疲劳和压印等退化问题。

    Ferroelectric read and write memory and driving method thereof
    96.
    发明授权
    Ferroelectric read and write memory and driving method thereof 失效
    铁电读写存储器及其驱动方法

    公开(公告)号:US5699290A

    公开(公告)日:1997-12-16

    申请号:US659885

    申请日:1996-06-07

    Applicant: In-kyeong Yoo

    Inventor: In-kyeong Yoo

    CPC classification number: G11C11/22

    Abstract: A ferroelectric read and write memory of a nondestructive write and read (NDWR) method in which charges of a gate insulating layer induced by a ferroelectric capacitor are discharged via a separate path, includes a source and a drain provided in both side of a well; a gate insulating layer provided on the well; a gate electrode provided on the gate insulating layer; a ferroelectric layer provided on the gate electrode, to which corresponding charges are induced in the gate electrode depending on its polar states; an upper electrode provided on the ferroelectric layer; and a charge discharging means electrically connected to the gate electrode for discharging charges induced in the gate insulating layer. In a driving method thereof, charges of the gate insulating layer induced by the ferroelectric layer are directly discharged via the gate electrode to make a logic "low" state by blocking the current flow between the source and insulating layer through the well during a binary logic information write operation. Therefore, if the information is written in a non-inversion state of the polarization, a fatigue of the ferroelectric layer can be prevented. Also, as described above, since the remained polarization still exists during the repeated information write operations, the information can be written at a low voltage.

    Abstract translation: 一种非铁磁读写(NPWR)方法的铁电读和写存储器,其中由铁电电容器引起的栅极绝缘层的电荷通过单独的路径排出,包括设置在阱两侧的源极和漏极; 设在井上的栅绝缘层; 设置在所述栅极绝缘层上的栅电极; 设置在栅电极上的铁电层,根据极极状态在栅电极中引起相应的电荷; 设置在所述强电介质层上的上电极; 以及电连接到栅电极用于对栅极绝缘层中感应的电荷进行放电的电荷放电装置。 在其驱动方法中,由铁电体层引起的栅极绝缘层的电荷通过栅电极直接放电,以在二进制逻辑期间通过阱阻塞源极和绝缘层之间的电流流动而形成逻辑“低”状态 信息写入操作。 因此,如果信息被写入极化的非反转状态,则可以防止铁电层的疲劳。 此外,如上所述,由于在重复信息写入操作期间仍然存在剩余的极化,所以可以以低电压写入信息。

    Nanostructured acousto-optic device, and optical scanner, optical modulator, and holographic display apparatus using the nanostructured acousto-optic device
    97.
    发明授权
    Nanostructured acousto-optic device, and optical scanner, optical modulator, and holographic display apparatus using the nanostructured acousto-optic device 有权
    纳米结构声光装置,以及使用纳米结构声光装置的光学扫描器,光学调制器和全息显示装置

    公开(公告)号:US09477101B2

    公开(公告)日:2016-10-25

    申请号:US13360616

    申请日:2012-01-27

    Abstract: An acousto-optic device capable of increasing a range of a diffraction angle of output light by using a nanostructured acousto-optic medium, and an optical scanner, an optical modulator, a two-dimensional/three-dimensional (2D/3D) conversion stereoscopic image display apparatus, and a holographic display apparatus using the acousto-optic device. The acousto-optic device may include a nanostructured acousto-optic medium formed by at least two different mediums repeatedly alternating with each other, wherein at least one of the at least two different mediums includes an acousto-optic medium. The acousto-optic device having the aforementioned structure may increase the range of a diffraction angle of output light. Thus, various systems such as the optical scanner, the optical modulator, the 2D/3D conversion stereoscopic image display apparatus, and the holographic display apparatus may not require a separate optical system to increase an operational angle range, thereby decreasing a size of the system and/or improving a resolution of the system.

    Abstract translation: 一种能够通过使用纳米结构的声光介质和光学扫描器,光学调制器,二维/三维(2D / 3D)转换立体视觉增强输出光的衍射角的范围的声光器件 图像显示装置和使用该声光装置的全息显示装置。 声光装置可以包括由至少两个不同介质形成的纳米结构的声光介质,所述至少两个介质彼此重复交替,其中所述至少两种不同介质中的至少一种包括声光介质。 具有上述结构的声光装置可以增加输出光的衍射角的范围。 因此,诸如光学扫描器,光学调制器,2D / 3D转换立体图像显示装置和全息显示装置的各种系统可能不需要单独的光学系统来增加操作角度范围,从而减小系统的尺寸 和/或提高系统的分辨率。

    Apparatuses for and methods of displaying three-dimensional images
    98.
    发明授权
    Apparatuses for and methods of displaying three-dimensional images 有权
    显示三维图像的装置和方法

    公开(公告)号:US08633868B2

    公开(公告)日:2014-01-21

    申请号:US12659156

    申请日:2010-02-26

    Abstract: An apparatus for displaying a three-dimensional (3D) image may include a plurality of display panels and a controller configured to apply image signals to each of the plurality of display panels. At least one of the display panels may include a transparent display panel. The plurality of display panels may be spaced apart from each other in a depth direction. A method of displaying a three-dimensional (3D) image may include displaying plane images on each of a plurality of display panels. At least one of the plurality of display panels may include a transparent display panel. The plurality of display panels may be spaced apart from each other in a depth direction.

    Abstract translation: 用于显示三维(3D)图像的装置可以包括多个显示面板和被配置为将图像信号应用于多个显示面板中的每一个的控制器。 至少一个显示面板可以包括透明显示面板。 多个显示面板可以在深度方向上彼此间隔开。 显示三维(3D)图像的方法可以包括在多个显示面板的每一个上显示平面图像。 多个显示面板中的至少一个可以包括透明显示面板。 多个显示面板可以在深度方向上彼此间隔开。

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