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公开(公告)号：US09174253B2
公开(公告)日：2015-11-03
申请号：US13762991
申请日：2013-02-08
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Mitsuo Natsume , Atsushi Suzuki
IPC: B65B1/04 , B08B9/093 , H01L21/673 , H01L21/677
CPC classification number: B08B9/093 , H01L21/67393 , H01L21/67775
Abstract: A purge nozzle unit 1 includes a nozzle main body 2 including a trunk 41 and a collar section 8 protruding outward from the trunk 41 and a holder 3 including a side wall 31 that is in slidable contact with an outward face of the collar section 8 and a bottom wall 33 having a through hole 32 with which an outward face of the trunk 41 is in slidable contact and is configured such that a vent 30 in communication with the outside is formed in the holder 3 and the nozzle main body 2 is vertically moved relative to the holder 3 by regulating a pressure in a pressure-regulated space S formed between the nozzle main body 2 and the holder 3 and in communication with the vent 30.
Abstract translation: 吹扫喷嘴单元1包括喷嘴主体2，喷嘴主体2包括行李箱41和从行李箱41向外突出的轴环部分8以及具有与轴环部分8的外表面可滑动接触的侧壁31的支架3，以及 具有贯通孔32的底壁33，其中躯干41的外表面可与滑动接触并且构造成使得在保持器3中形成与外部连通的通气口30，并且喷嘴主体2垂直移动 通过调节形成在喷嘴主体2和保持器3之间并与通气口30连通的压力调节空间S中的压力来相对于保持器3。
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公开(公告)号：US20150308812A1
公开(公告)日：2015-10-29
申请号：US14689551
申请日：2015-04-17
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Mitsuo NATSUME , Masahiro Osawa , Toshimitsu Morihana , Mitsutoshi Ochiai
IPC: G01B11/00
CPC classification number: G01B11/002 , G01B11/14 , G01B11/22 , G01B11/24 , G01N21/64 , G01N35/1016 , G01N2035/1025 , H01L21/67265
Abstract: The left-right span between a light projection section 5a and a light receiving section 5b of a mapping sensor 5 having an optical axis L1 extending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassette 12 which is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device 4. A first protrusion sensor 6 having an optical axis L2 extending in the left-right horizontal direction is attached to the mapping device 4 to be separated from the mapping sensor 5 in a moving direction of the mapping sensor 5. Furthermore, a second protrusion sensor 7 having an optical axis extending in the up-down moving direction of the mapping sensor 5 is provided.
Abstract translation: 在具有沿左右水平方向延伸的光轴L1的映射传感器5的光投射部分5a和光接收部分5b之间的左右跨度布置成比开口的前开口的跨度窄 盒式录像带12是不同尺寸的容器中较小的一个传送到负载端口的盒式磁带12，并且映射传感器附接到映射装置4.附接有沿左右水平方向延伸的光轴L2的第一突出传感器6 到映射装置4，以在映射传感器5的移动方向上与映射传感器5分离。此外，提供具有在映射传感器5的上下移动方向上延伸的光轴的第二突起传感器7。
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公开(公告)号：US20150162857A1
公开(公告)日：2015-06-11
申请号：US14560406
申请日：2014-12-04
Applicant: SINFONIA TECHNOLOGY CO., LTD. , IHI AEROSPACE CO., LTD.
Inventor： Yoshito OHTA , Keisuke ONISHI , Hitoshi OYORI
IPC: H02P6/00
CPC classification number: H02P6/002 , H02P6/28 , H02P21/22 , H02P29/0243
Abstract: A 0-axis current calculator 7 configured to calculate a target value of the 0-axis current by setting the current of the open phase to be zero when one of the phases becomes open, or determines that the target value of the 0-axis current is zero when there is no open phase is provided. Based on the target values of the d-axis current and the q-axis current, the target value of the 0-axis current calculated by the 0-axis current calculator 7, and the d-axis current, the q-axis current, and the 0-axis current transformed by the d-q-0 transformer 8, the current supplied to each phase of the motor are controlled.
Abstract translation: 0轴电流计算器7，被配置为当其中一个相位变为断开时，通过将开路相位的电流设置为零来计算0轴电流的目标值，或者确定0轴电流的目标值 当没有提供开放相位时为零。 基于d轴电流和q轴电流的目标值，由0轴电流计算器7计算的0轴电流的目标值和d轴电流，q轴电流， 和由dq-0变压器8变换的0轴电流，控制提供给电动机各相的电流。
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公开(公告)号：US20150071739A1
公开(公告)日：2015-03-12
申请号：US14479842
申请日：2014-09-08
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Hiroaki Nakamura , Toshiyuki Takaoka , Yoshikatsu Takemoto
IPC: H01L21/677
CPC classification number: H01L21/67745 , H01L21/67196 , H01L21/67766 , H01L21/67769
Abstract: An EFEM 1 includes a wafer transfer chamber 3 having an interior space in which a wafer transfer robot 5 is disposed and load ports 2 disposed adjacent to a front surface 32 of the wafer transfer chamber 3, and semiconductor processing equipment M can be disposed adjacent to a rear surface 33 of the wafer transfer chamber 3. The EFEM 1 has a configuration in which two buffer stations 4 capable of temporarily storing wafers W are disposed next to each other in the front-rear direction A on a side surface 31 of the wafer transfer chamber 3. The EFEM 1 thus configured adapts to an increase in wafer diameter and is capable of handling many wafers while preventing or minimizing an increase in the stroke distance in the height direction of the wafer transfer robot 5 and an increase in the footprint of the entire EFEM 1.
Abstract translation: EFEM 1包括具有设置有晶片传送机器人5的内部空间的晶片传送室3和与晶片传送室3的前表面32相邻设置的负载端口2，并且半导体处理设备M可以设置在 晶片传送室3的背面33. EFEM 1具有能够临时存储晶片W的两个缓冲站4在晶片的侧面31上沿前后方向A彼此相邻配置的结构 这样构成的EFEM 1适应于晶片直径的增加，并且能够处理许多晶片，同时防止或最小化晶片传送机器人5的高度方向上的行程距离的增加，并且增加占用面积 整个EFEM 1。
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公开(公告)号：US20140354197A1
公开(公告)日：2014-12-04
申请号：US14289957
申请日：2014-05-29
Inventor： Takeo Ito , Hideaki Moriya , Takeshi Tomizaki , Akira Nakazumi , Yusuke Kamimura
IPC: H02P23/00
CPC classification number: H02P3/18 , H02P21/36 , H02P29/027
Abstract: There is obtained a configuration capable of rapidly decelerating a motor even if a failure occurs in the communication between a controller and a motor control unit in a motor controller in which a speed command is input from the controller to the motor control unit. A motor controller 1 is provided with a main controller 2, and a motor control unit 3 configured to be communicable with the main controller 2 to drive a motor M according to a torque command output from the main controller 2. The motor control unit 3 includes a speed control unit 31 for outputting a torque command, so as to decelerate the motor M, if any failure occurs in communication with the main controller 2 while the motor M is being driven.
Abstract translation: 即使在从控制器向电动机控制单元输入速度指令的电动机控制器中的控制器和电动机控制单元之间的通信中发生故障，也能够使电动机快速减速。 电动机控制器1设置有主控制器2和电动机控制单元3，其被配置为可与主控制器2通信，以根据从主控制器2输出的转矩指令来驱动电动机M.电动机控制单元3包括 用于输出转矩指令的速度控制单元31，以便在马达M被驱动的同时与主控制器2通信时发生任何故障而使马达M减速。
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Patent Agency Ranking
公开(公告)号：US20140354191A1
公开(公告)日：2014-12-04
申请号：US14289760
申请日：2014-05-29
Inventor： Akira NAKAZUMI , Yusuke KAMIMURA , Hiroyuki SUMINAGA , Takeshi TOMIZAKI , Hideaki MORIYA
IPC: H02P6/00
CPC classification number: H02P21/0021 , H02P6/28 , H02P27/085 , Y02P80/116
Abstract: An object of the present invention is to provide an inverter device for driving an electric motor, which allows control stability and efficiency to be ensured over a wide region of the speed of the electric motor. The inverter device includes a rotational-speed detection section which detects a rotational speed of the electric motor, a carrier-frequency calculation section which calculates a carrier frequency on the basis of the detected rotational speed, and a carrier-frequency switching section which switches, on the basis of the calculated carrier frequency, the carrier frequency used for performing PWM control on the electric motor. The carrier-frequency calculation section calculates, as the carrier frequency, a frequency increased with an increase in the electric-motor rotational speed detected by the rotational-speed detection section.
Abstract translation: 本发明的目的是提供一种用于驱动电动机的逆变器装置，其能够在电动机的宽度范围内确保控制的稳定性和效率。 逆变器装置包括检测电动机的转速的转速检测部，基于检测出的转速来计算载波频率的载波频率计算部;以及载波频率切换部， 基于所计算的载波频率，用于对电动机执行PWM控制的载波频率。 载波频率计算部分计算随着由转速检测部分检测到的电动机转速的增加而增加的频率作为载波频率。
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公开(公告)号：US20140183980A1
公开(公告)日：2014-07-03
申请号：US14135335
申请日：2013-12-19
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Minoru Maeda , Yosuke Muraguchi , Mamoru Kosaki , Takashi Fujiwara
CPC classification number: H02K5/128 , B65G54/02 , H02K41/03 , H02K41/031
Abstract: A conveying apparatus includes: a housing; a movable member; a linear motor; and a cover. The linear motor includes a primary magnetic pole and a secondary magnetic pole each having a facing surface that faces the other and that is a plane along the longitudinal direction of the housing. The cover allows the primary magnetic pole to be located in an atmospheric environment, and the secondary magnetic pole to be located in a vacuum environment or a reduced pressure environment by separating the primary magnetic pole and the secondary magnetic pole from each other. The primary magnetic pole and the secondary magnetic pole face each other so that a direction of a magnetic attraction force generated therebetween and acting on their facing surfaces is different from directions of forces acting, due to an atmospheric pressure outside the housing, on the wall of the housing on which the cover is provided.
Abstract translation: 输送装置包括：壳体; 可移动构件; 线性马达; 和封面。 线性电动机包括主磁极和次级磁极，每个磁极具有面对另一个的面对表面，并且是沿壳体的纵向方向的平面。 所述盖允许所述主磁极位于大气环境中，并且所述次级磁极通过将所述主磁极和所述次级磁极彼此分离而位于真空环境或减压环境中。 主磁极和次级磁极彼此面对，使得在它们之间产生的作用于它们的相对表面上的磁吸引力的方向不同于由于壳体外部的大气压力而作用的力的方向在 提供盖的外壳。
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公开(公告)号：US12237734B2
公开(公告)日：2025-02-25
申请号：US17623514
申请日：2020-06-26
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Shunya Watanabe , Nobuo Aruga , Mamoru Kosaki , Masayasu Kayukawa
Abstract: It is possible to reduce a rise in temperature of a rotor by reducing the temperature of a stator. The motor 1 includes a stator 5, and a rotor 4, which is disposed with a gap from the stator 5, being arranged in a housing 2, in which the stator 5 is provided with an annular yoke and a plurality of teeth protruding from an inner peripheral portion of the yoke toward the rotor 4; slots in which coils 6 wound around the teeth are arranged are respectively formed between the teeth that are adjacent to each other; a mold resin portion 30 in which the stator 5 and the coils 6 are molded is provided; the mold resin portion 30 includes a flow path 32 formed within at least one slot among a plurality of slots; and the flow path 32 is supplied with a cooling medium.
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公开(公告)号：US12201995B2
公开(公告)日：2025-01-21
申请号：US17730980
申请日：2022-04-27
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Toshihiro Kawai , Gengoro Ogura
Abstract: An EFEM includes a circulation path including a transfer chamber configured to form a transfer space where a substrate is transferred and a return path configured to return a gas flowing from one side to the other side of the transfer chamber, the EFEM including: a capture part provided in the return path and configured to electrically capture particles contained in the gas flowing through the return path, wherein the return path and the transfer chamber are provided such that a partition wall is interposed therebetween, and a differential pressure is generated on both sides of the partition wall such that a pressure on the side of the return path becomes higher than a pressure on the side of the transfer chamber in a state in which the gas circulates through the circulation path.
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公开(公告)号：US11851289B2
公开(公告)日：2023-12-26
申请号：US17788647
申请日：2020-09-23
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Hiroaki Nakamura , Toshihiro Kawai , Kosuke Sugiura , Gengoro Ogura , Yasushi Taniyama
IPC: H01L21/677 , B65G47/90 , H01L21/67 , H01L21/687
CPC classification number: B65G47/905 , H01L21/677 , H01L21/67259 , H01L21/68707
Abstract: A conveyance system discriminates the front and back of a frame wafer without human intervention. A frame is partially formed asymmetrically with respect to a predetermined center line when viewed in a direction orthogonal to a surface of a wafer. The conveyance system includes a hand configured to hold the frame so that the frame extends in a predetermined virtual plane, a first sensor configured to detect a portion of the frame held on the hand and located in a predetermined first region in the virtual plane, a second sensor configured to detect a portion of the frame held on the hand and located in a second region opposite to the first region across the center line, and a controller configured to determine the front and back of the frame wafer based on a detection result obtained by the first sensor and a detection result obtained by the second sensor.
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