公开(公告)号：US06532247B2

公开(公告)日：2003-03-11

申请号：US09794782

申请日：2001-02-27

申请人： Ronald L. Spangler ,  Robert N. Jacques ,  George J. Everage ,  Stuart L. Anderson ,  Frederick A. Palenschat ,  Igor V. Fomenkov ,  Richard L. Sandstrom ,  William N. Partlo ,  John M. Algots ,  Daniel J. W. Brown

发明人： Ronald L. Spangler ,  Robert N. Jacques ,  George J. Everage ,  Stuart L. Anderson ,  Frederick A. Palenschat ,  Igor V. Fomenkov ,  Richard L. Sandstrom ,  William N. Partlo ,  John M. Algots ,  Daniel J. W. Brown

IPC分类号： H01S322

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/1312 ,  H01S3/134 ,  H01S3/137 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/225

摘要： An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to three millisecond and on a very fast time frame of a few microseconds. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control and a piezoelectric load cell in combination with the piezoelectric driver to provide the very fast (few microseconds) wavelength control.

公开(公告)号：US06026103A

公开(公告)日：2000-02-15

申请号：US290852

申请日：1999-04-13

申请人： I. Roger Oliver ,  Igor V. Fomenkov ,  William N. Partlo

发明人： I. Roger Oliver ,  Igor V. Fomenkov ,  William N. Partlo

IPC分类号： H01S3/036 ,  H01S3/00

CPC分类号： H01S3/036

摘要： An electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported in position radially by a roller bearing system and axially at least in part by magnetic forces. In a preferred embodiment the magnetic forces are supplied by a brushless DC motor in which the rotor of the motor is sealed within the gas environment of the laser cavity and the motor stator is located outside the gas environment. The magnetic center of the rotor is offset from the center of the stator to produce a magnetic reluctance generated force on the shaft that acts axially on the shaft toward the non-drive end and is reacted by a ball and plate bearing assembly mounted along the axis of rotation at the opposite end of the shaft.

摘要翻译： 一种具有激光腔的放电气体激光器，其中包含激光气体和用于使激光气体循环的风扇。 风扇通过滚子轴承系统径向支撑在位置，并至少部分地由磁力轴向地支撑。 在优选实施例中，磁力由无刷直流电动机提供，其中电机的转子在激光腔的气体环境内被密封，并且电动机定子位于气体环境的外部。 转子的磁心偏离定子的中心，以产生轴上的磁阻产生力，该轴在轴上朝向非驱动端轴向作用，并且通过沿着轴线安装的球和轴承组件反作用 在轴的相对端旋转。

公开(公告)号：US08259764B2

公开(公告)日：2012-09-04

申请号：US11472088

申请日：2006-06-21

申请人： Igor V. Fomenkov ,  William N. Partlo ,  Daniel J. Reiley ,  James K. Howey ,  Stanley C. Aguilar

发明人： Igor V. Fomenkov ,  William N. Partlo ,  Daniel J. Reiley ,  James K. Howey ,  Stanley C. Aguilar

IPC分类号： H01S3/136

CPC分类号： H01S3/225 ,  H01S3/03 ,  H01S3/034 ,  H01S3/08009 ,  H01S3/137 ,  H01S3/2256

摘要： A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.

摘要翻译： 公开了用于操作可以包括标称中心波长和带宽选择光学器件的激光输出光束脉冲线窄化机构的方法和装置; 静态波前补偿机构整形选择光学元件的曲率; 主动波前补偿机构整形选择光学元件的曲率并独立于静态波前补偿机制工作。 该方法和装置可以包括标称中心波长和带宽选择光学器件包括光栅; 静态波前补偿机构将预选的弯矩应用于光栅; 主动波前补偿机构响应于基于来自监视激光输出光束脉冲的带宽的带宽监视器的带宽反馈的弯矩控制器的控制，向光栅施加单独的选定弯矩。 主动波前补偿机构可以包括气动驱动机构。

公开(公告)号：US20110248191A1

公开(公告)日：2011-10-13

申请号：US13075500

申请日：2011-03-30

申请人： Igor V. Fomenkov ,  William N. Partlo

发明人： Igor V. Fomenkov ,  William N. Partlo

IPC分类号： H05G2/00

CPC分类号： H05G2/008 ,  H05G2/005 ,  H05G2/006

摘要： A device is disclosed herein which may comprise a chamber, a source providing a stream of target material droplets delivering target material to an irradiation region in the chamber along a path between a target material release point and the irradiation region, a gas flow in the chamber, at least a portion of the gas flowing in a direction toward the droplet stream, a system producing a laser beam irradiating droplets at the irradiation region to generate a plasma producing EUV radiation, and a shroud positioned along a portion of said stream, said shroud having a first shroud portion shielding droplets from said flow and an opposed open portion.

摘要翻译： 本文公开了一种装置，其可以包括室，源提供目标材料液滴流，其沿着目标材料释放点和照射区域之间的路径将靶材料输送到腔室中的照射区域，腔室中的气流 ，所述气体的至少一部分沿着朝向所述液滴流的方向流动，产生在所述照射区域处照射液滴的激光束以产生等离子体产生EUV辐射的系统，以及沿着所述流的一部分定位的护罩，所述护罩 具有屏蔽来自所述流动的液滴的第一护罩部分和相对的开口部分。

公开(公告)号：US07471708B2

公开(公告)日：2008-12-30

申请号：US11095293

申请日：2005-03-31

申请人： Herve A. Besaucele ,  Igor V. Fomenkov ,  William N. Partlo ,  Fedor B. Trintchouk ,  Hao Ton That

发明人： Herve A. Besaucele ,  Igor V. Fomenkov ,  William N. Partlo ,  Fedor B. Trintchouk ,  Hao Ton That

IPC分类号： H01S3/13 ,  H01S3/00 ,  H01S3/22

CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/134

摘要： A line narrowed gas discharge laser system and method of operation are disclosed which may comprise: an oscillator cavity; a laser chamber comprising a chamber housing containing a lasing medium gas; at least one peaking capacitor electrically connected to the chamber housing and to a first one of a pair of electrodes; a second one of the pair of electrodes connected to an opposite terminal of the at least one peaking capacitor; a current return path connected to the chamber housing; the one terminal, the first one of the electrodes, the lasing medium gas, the second one of the electrodes, the current return path and the second terminal forming a head current inductive loop having an inductance unique to the particular head current inductive loop; a spectral quality tuning mechanism comprising a mechanism for changing the particular head current inductive loop inductance value for the particular head current inductance loop.

摘要翻译： 公开了一种窄气体放电激光系统和操作方法，其可以包括：振荡器腔; 激光室，包括容纳激光介质气体的腔室; 至少一个峰值电容器电连接到所述腔室壳体和一对电极中的第一电极; 所述一对电极中的第二个连接到所述至少一个峰值电容器的相对端子; 连接到所述腔室壳体的电流返回路径; 一个端子，电极中的第一个，激光介质气体，第二个电极，电流返回路径和第二端子，形成具有特定头电流感应环路特有的电感的磁头电流感应环路; 光谱质量调谐机构包括用于改变特定头电流电感回路的特定头电流感应环电感值的机构。

公开(公告)号：US20070297467A1

公开(公告)日：2007-12-27

申请号：US11472088

申请日：2006-06-21

申请人： Igor V. Fomenkov ,  William N. Partlo ,  Daniel J. Reiley ,  James K. Howey ,  Stanley C. Aguilar

发明人： Igor V. Fomenkov ,  William N. Partlo ,  Daniel J. Reiley ,  James K. Howey ,  Stanley C. Aguilar

IPC分类号： H01S3/10

CPC分类号： H01S3/225 ,  H01S3/03 ,  H01S3/034 ,  H01S3/08009 ,  H01S3/137 ,  H01S3/2256

摘要： A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.

摘要翻译： 公开了用于操作可以包括标称中心波长和带宽选择光学器件的激光输出光束脉冲线窄化机构的方法和装置; 静态波前补偿机构整形选择光学元件的曲率; 主动波前补偿机构整形选择光学元件的曲率并独立于静态波前补偿机制工作。 该方法和装置可以包括标称中心波长和带宽选择光学器件包括光栅; 静态波前补偿机构将预选的弯矩应用于光栅; 主动波前补偿机构响应于基于来自监视激光输出光束脉冲的带宽的带宽监视器的带宽反馈的弯矩控制器的控制，向光栅施加单独的选定弯矩。 主动波前补偿机构可以包括气动驱动机构。

公开(公告)号：US07087914B2

公开(公告)日：2006-08-08

申请号：US10803526

申请日：2004-03-17

申请人： Robert P. Akins ,  Richard L. Sandstrom ,  William N. Partlo ,  Igor V. Fomenkov ,  John Martin Algots ,  Robert N. Jacques ,  Frederick Palenschat ,  Jun Song

发明人： Robert P. Akins ,  Richard L. Sandstrom ,  William N. Partlo ,  Igor V. Fomenkov ,  John Martin Algots ,  Robert N. Jacques ,  Frederick Palenschat ,  Jun Song

IPC分类号： H01J35/20

CPC分类号： B82Y10/00 ,  G03F7/70033 ,  H05G2/003 ,  H05G2/008

摘要： An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site. The target tracking system may provide information enabling the creation of a laser firing control signal, and may comprise a droplet detector comprising a collimated light source directed to intersect a point on a projected delivery path of the target, having a respective oppositely disposed light detector detecting the passage of the target through the respective point, or a detector comprising a linear array of a plurality of photo-sensitive elements aligned to a coordinate axis, the light from the light source intersecting a projected delivery path of the target, at least one of the which may comprise a plane-intercept detection device. The droplet detectors may comprise a plurality of droplet detectors each operating at a different light frequency, or a camera having a field of view and a two dimensional array of pixels imaging the field of view. The apparatus and method may comprise an electrostatic plasma containment apparatus providing an electric plasma confinement field at or near a target ignition site at the time of ignition, with the target tracking system providing a signal enabling control of the electrostatic plasma containment apparatus. The apparatus and method may comprise a vessel having and intermediate wall with a low pressure trap allowing passage of EUV light and maintaining a differential pressure across the low pressure trap. The apparatus and method may comprise a magnetic plasma confinement mechanism creating a magnetic field in the vicinity of the target ignition site to confine the plasma to the target ignition site, which may be pulsed and may be controlled using outputs from the target tracking system.

公开(公告)号：US06882674B2

公开(公告)日：2005-04-19

申请号：US10036676

申请日：2001-12-21

申请人： Christian J. Wittak ,  William N. Partlo ,  Richard L. Sandstrom ,  Paul C. Melcher ,  David M. Johns ,  Robert B. Saethre ,  Richard M. Ness ,  Curtis L. Rettig ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Shahryar Rokni ,  Scott T. Smith ,  Stuart L. Anderson ,  John M. Algots ,  Ronald L. Spangler ,  Igor V. Fomenkov ,  Thomas D. Steiger ,  Jerome A. Emilo ,  Clay C. Titus ,  Alex P. Ivaschenko ,  Paolo Zambon ,  Gamaralalage G. Padmabandu ,  Mark S. Branham ,  Sunjay Phatak ,  Raymond F. Cybulski

发明人： Christian J. Wittak ,  William N. Partlo ,  Richard L. Sandstrom ,  Paul C. Melcher ,  David M. Johns ,  Robert B. Saethre ,  Richard M. Ness ,  Curtis L. Rettig ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Shahryar Rokni ,  Scott T. Smith ,  Stuart L. Anderson ,  John M. Algots ,  Ronald L. Spangler ,  Igor V. Fomenkov ,  Thomas D. Steiger ,  Jerome A. Emilo ,  Clay C. Titus ,  Alex P. Ivaschenko ,  Paolo Zambon ,  Gamaralalage G. Padmabandu ,  Mark S. Branham ,  Sunjay Phatak ,  Raymond F. Cybulski

IPC分类号： H01S3/097 ,  G03F7/20 ,  H01S3/00 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/0975 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225 ,  H01S3/23 ,  H01S3/22

CPC分类号： G03F7/70025 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/0975 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2366

摘要： The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.

摘要翻译： 本发明提供了一种准分子激光器，其能够以约5mJ或更大的脉冲能量产生脉冲速率约为4000Hz的高质量脉冲激光束。 优选的实施方案是专门设计为用于集成电路光刻的光源的ArF准分子激光器。 具有特殊软件的改进型波长测量仪监测输出光束参数，并控制非常快的PZT驱动调光镜和脉冲功率充电电压，以将波长和脉冲能量保持在所需的极限内。 在优选实施例中，两个风扇马达驱动单个切向风扇，其提供足够的气流以在脉冲之间的大约0.25毫秒期间从放电区域清除放电碎片。

公开(公告)号：US6064072A

公开(公告)日：2000-05-16

申请号：US268243

申请日：1999-03-15

申请人： William N. Partlo ,  Igor V. Fomenkov ,  Daniel L. Birx

发明人： William N. Partlo ,  Igor V. Fomenkov ,  Daniel L. Birx

IPC分类号： G03F7/20 ,  H05G2/00 ,  H01J35/20

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70916 ,  H05G2/005

摘要： A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. A working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltage high enough to create electrical discharge between the electrodes to produce very high temperature, high density plasma pinch in the working gas providing radiation at the spectral line of the active gas. An external reflection radiation collector-director collects radiation produced in the plasma pinches and directs the radiation in a desired direction. In a preferred embodiment the active gas is lithium and the buffer gas is helium and the radiation-collector is coated with the material used for the electrodes. A good choice for the material is tungsten. In a second preferred embodiment the buffer gas is argon and lithium gas is produced by vaporization of solid lithium located in a hole along the axis of the central electrode of a coaxial electrode configuration.

摘要翻译： 高能光子源。 一对等离子体夹紧电极位于真空室中。 一种工作气体，其包括贵金属缓冲气体和选择用于提供所需光谱线的活性气体。 脉冲电源提供足够高电压的电脉冲，以在电极之间产生放电，以在工作气体中产生非常高温度，高密度的等离子体夹紧，从而在活性气体的谱线处提供辐射。 外部反射辐射收集器 - 导向器收集在等离子体夹中产生的辐射，并将辐射引导到期望的方向。 在一个优选的实施方案中，活性气体是锂，缓冲气体是氦气，辐射收集器涂覆有用于电极的材料。 材料的一个不错的选择是钨。 在第二优选实施例中，缓冲气体是氩气，并且通过沿着同轴电极构造的中心电极的轴的孔中的固体锂的汽化来产生锂气体。

公开(公告)号：US5729562A

公开(公告)日：1998-03-17

申请号：US739873

申请日：1996-10-31

申请人： Daniel L. Birx ,  Palash P. Das ,  Igor V. Fomenkov ,  William N. Partlo ,  Tom A. Watson

发明人： Daniel L. Birx ,  Palash P. Das ,  Igor V. Fomenkov ,  William N. Partlo ,  Tom A. Watson

IPC分类号： H01S3/00 ,  H01S3/097 ,  H01S3/225 ,  H02M9/04 ,  H03K3/57 ,  H03K17/00 ,  H03K17/80 ,  H05H1/06

CPC分类号： H05H1/06 ,  H01S3/097 ,  H03K17/80 ,  H03K3/57 ,  H01S3/225 ,  H03K2217/0036

摘要： A high voltage pulse power generating circuit capable of providing energy recovery is disclosed. The energy efficient pulse generating circuit source comprises a high voltage charge storing element which is periodically discharged into a compressor circuit. An energy recovery circuit coupled to the compressor circuit reverses the polarity of energy dissipated by the pulse power generating circuit and transfers the waste energy back to the power source. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes an SCR switch for periodically discharging the charge storing element. This embodiment of the present invention provides pulses consistently and will not provide even a single missed pulse.

摘要翻译： 公开了一种能够提供能量回收的高压脉冲发生电路。 能量效率脉冲发生电路源包括周期性地排放到压缩机电路中的高电压电荷存储元件。 耦合到压缩机电路的能量恢复电路反转由脉冲发电电路消耗的能量的极性，并将废能转移回电源。 在优选实施例中，本发明的脉冲发生电路利用SCR开关来周期性地对电荷存储元件进行放电。 本发明的该实施例一致地提供脉冲，并且甚至不会提供单个错过的脉冲。