公开(公告)号：US06882674B2

公开(公告)日：2005-04-19

申请号：US10036676

申请日：2001-12-21

申请人： Christian J. Wittak ,  William N. Partlo ,  Richard L. Sandstrom ,  Paul C. Melcher ,  David M. Johns ,  Robert B. Saethre ,  Richard M. Ness ,  Curtis L. Rettig ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Shahryar Rokni ,  Scott T. Smith ,  Stuart L. Anderson ,  John M. Algots ,  Ronald L. Spangler ,  Igor V. Fomenkov ,  Thomas D. Steiger ,  Jerome A. Emilo ,  Clay C. Titus ,  Alex P. Ivaschenko ,  Paolo Zambon ,  Gamaralalage G. Padmabandu ,  Mark S. Branham ,  Sunjay Phatak ,  Raymond F. Cybulski

发明人： Christian J. Wittak ,  William N. Partlo ,  Richard L. Sandstrom ,  Paul C. Melcher ,  David M. Johns ,  Robert B. Saethre ,  Richard M. Ness ,  Curtis L. Rettig ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Shahryar Rokni ,  Scott T. Smith ,  Stuart L. Anderson ,  John M. Algots ,  Ronald L. Spangler ,  Igor V. Fomenkov ,  Thomas D. Steiger ,  Jerome A. Emilo ,  Clay C. Titus ,  Alex P. Ivaschenko ,  Paolo Zambon ,  Gamaralalage G. Padmabandu ,  Mark S. Branham ,  Sunjay Phatak ,  Raymond F. Cybulski

IPC分类号： H01S3/097 ,  G03F7/20 ,  H01S3/00 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/0975 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225 ,  H01S3/23 ,  H01S3/22

CPC分类号： G03F7/70025 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/0975 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2366

摘要： The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.

摘要翻译： 本发明提供了一种准分子激光器，其能够以约5mJ或更大的脉冲能量产生脉冲速率约为4000Hz的高质量脉冲激光束。 优选的实施方案是专门设计为用于集成电路光刻的光源的ArF准分子激光器。 具有特殊软件的改进型波长测量仪监测输出光束参数，并控制非常快的PZT驱动调光镜和脉冲功率充电电压，以将波长和脉冲能量保持在所需的极限内。 在优选实施例中，两个风扇马达驱动单个切向风扇，其提供足够的气流以在脉冲之间的大约0.25毫秒期间从放电区域清除放电碎片。

公开(公告)号：US6128323A

公开(公告)日：2000-10-03

申请号：US157067

申请日：1998-09-18

申请人： David W. Myers ,  Herve A. Besaucele ,  Palash P. Das ,  Thomas P. Duffey ,  Alexander I. Ershov ,  Igor V. Fomenkov ,  Thomas Hofmann ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  Robert G. Ozarski ,  Gamaralalage G. Padmabandu ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom ,  Paul S. Thompson ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb ,  Paolo Zambon

发明人： David W. Myers ,  Herve A. Besaucele ,  Palash P. Das ,  Thomas P. Duffey ,  Alexander I. Ershov ,  Igor V. Fomenkov ,  Thomas Hofmann ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  Robert G. Ozarski ,  Gamaralalage G. Padmabandu ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom ,  Paul S. Thompson ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb ,  Paolo Zambon

IPC分类号： G03F7/20 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/041 ,  H01S3/08 ,  H01S3/081 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225 ,  H03K3/57 ,  H03K17/80 ,  H01S3/00

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225 ,  H03K17/80 ,  H03K3/57 ,  H01S3/08009 ,  H01S3/0812 ,  H01S3/1392 ,  H01S3/2251 ,  H01S3/2256

摘要： The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses at 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Improvements in the laser chamber permitting the higher pulse rates and improved bandwidth performance include a single upstream preionizer tube and a high efficiency chamber. The chamber is designed for operation at lower fluorine concentration. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

摘要翻译： 本发明提供了一种可靠的模块化生产质量准分子激光器，其能够在2000Hz下产生10mJ激光脉冲，全宽度为一半，最大带宽为约0.6μm或更小。 可更换模块包括激光室; 由三个模块组成的脉冲电源系统; 光学谐振器，包括线窄模块和输出耦合器模块; 波形计模块，电气控制模块，冷却水模块和气体控制模块。 允许更高脉冲速率和改进的带宽性能的激光室的改进包括单个上游预分解器管和高效室。 该室设计用于在较低的氟浓度下运行。 在脉冲功率单元中已经提供了重要的改进，以产生更快的上升时间和改进的脉冲能量控制。 这些改进包括增加容量的高压电源，具有用于精确电压调整的电压降低电路，改进的换向模块，其从由高压电源充电的电容器产生高电压脉冲，并用脉冲电压放大23次 具有由单个四段不锈钢棒组成的次级绕组的非常快速的电压互感器。 用于压缩头可饱和电感器的新颖设计大大减少了所需的变压器油的数量，并且几乎消除了过去漏油的可能性。

公开(公告)号：US06320892B1

公开(公告)日：2001-11-20

申请号：US09420297

申请日：1999-10-18

申请人： Gamaralalage G. Padmabandu ,  Palash P. Das ,  Tom A. Watson ,  Paolo Zambon

发明人： Gamaralalage G. Padmabandu ,  Palash P. Das ,  Tom A. Watson ,  Paolo Zambon

IPC分类号： H01S3223

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F2 “sweet spot” in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines &Dgr;E/&Dgr;V, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on &Dgr;E/&Dgr;V without the need to actually measure the fluorine concentration. The present invention is especially useful in lithography environments in which photo resist having a wide range of sensitivity are used. The present invention permits operation of the laser at substantially maximum efficiency over a wide range of pulse energy outputs.

摘要翻译： 一种具有自动氟控制系统的准分子激光系统，用于在气体放电激光室中精确控制F2“甜点”内的氟浓度。 这是通过电脑控制系统进行的，该系统监视激光参数，确定DELTAE / DELTAV，脉冲能量随电压的变化，并且可以根据DELTAE / DELTAV自动精确控制氟浓度，而无需实际测量氟浓度。 本发明在使用具有宽灵敏度范围的光刻胶的光刻环境中特别有用。 本发明允许激光器在宽范围的脉冲能量输出上以基本最大的效率进行操作。

公开(公告)号：US06392743B1

公开(公告)日：2002-05-21

申请号：US09515974

申请日：2000-02-29

申请人： Paolo Zambon ,  Gamaralalage G. Padmabandu ,  Tom A. Watson ,  Palash P. Das

发明人： Paolo Zambon ,  Gamaralalage G. Padmabandu ,  Tom A. Watson ,  Palash P. Das

IPC分类号： G03B2772

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70525 ,  G03F7/70558 ,  H01S3/1022 ,  H01S3/1024 ,  H01S3/1305

摘要： A lithograph quality optimization process for controlling laser beam parameters when changing operating modes. The laser is programmed to automatically conduct an optimization procedure preferably in less than one minute to adjust laser operating parameters such as blower speed, total gas pressure and F2 partial pressure in order to optimize beam quality parameters.

摘要翻译： 用于在改变工作模式时控制激光束参数的光刻胶质量优化过程。 激光器被编程为优选在不到一分钟内自动进行优化程序以调整激光器操作参数，例如鼓风机速度，总气体压力和F2分压，以优化光束质量参数。

公开(公告)号：US20050238077A9

公开(公告)日：2005-10-27

申请号：US10740659

申请日：2003-12-18

申请人： John Rule ,  Paolo Zambon

发明人： John Rule ,  Paolo Zambon

IPC分类号： H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/225 ,  H01S3/134 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2366

摘要： A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region; based upon the identity of the identified region, and parameters of that region relative to the condition of an actuator in each of the oscillator and the amplifier, determining a necessary modification to the actuator for each of the oscillator and the amplifier to attempt to move the multidimensional operating point from the parameters indicated by the position of the multidimensional operating point being in the particular region to a preselected region in the coordinate system. The method and apparatus may also comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; changing the gas mixture in one or both of the oscillator and amplifier by injection of at least one constituent gas in the gas mixture at least part of which injection for the respective oscillator and amplifier is based upon a calculated estimate of consumption of the at least one constituent gas in the gas mixture in the respective oscillator and amplifier from a prior change in the gas mixture; allowing the oscillator and amplifier to operate for a selected period of time with the changed gas mixture; determining the position of an operating point in the multidimensional variable state space and based upon the location of the operating point in the multidimensional state space determining a respective boost factor to modify the calculated estimate of consumption for the current change of the gas mixture in the respective oscillator and amplifier. A third dimension may be added relating to a spectral characteristic of the output of the oscillator or the amplifier, which may be bandwidth of the output of the amplifier, and including modifying that output with a beam correction device.

公开(公告)号：US20140248048A1

公开(公告)日：2014-09-04

申请号：US13785441

申请日：2013-03-05

申请人： Malcolm J. Northcott ,  J. Elon Graves ,  Siegfried Fleischer ,  Paolo Zambon ,  Jeffrey Tuttle ,  Rebecca Chang

发明人： Malcolm J. Northcott ,  J. Elon Graves ,  Siegfried Fleischer ,  Paolo Zambon ,  Jeffrey Tuttle ,  Rebecca Chang

IPC分类号： H04B10/2507

CPC分类号： H04B10/1125

摘要： A low cost, high reliability system for correcting aberrations in optical signals is disclosed. A foreoptic assembly, such as a telescope, receives an incoming optical signal and directs it to an active optical element, such as a fast steering mirror. The incoming optical signal is diffracted by a diffractive optical element to shape the image that is formed at a wavefront sensor, such as a quad-cell. The wavefront sensor measures a tip-tilt aberration of the incoming optical signal and the active optical element is adjusted to correct the measured aberration. An outgoing optical signal can be transmitted along substantially the same optical path as the incoming optical signal, but in the opposite direction. Thus, the aberration measured from the incoming optical signal can be automatically accounted for in the outgoing optical signal.

摘要翻译： 公开了一种用于校正光信号中的像差的低成本，高可靠性系统。 诸如望远镜的前置组件接收输入光信号并将其引导到诸如快速转向镜的有源光学元件。 入射光信号被衍射光学元件衍射以对形成在波前传感器（例如四单元）上的图像进行成形。 波前传感器测量入射光信号的尖端倾斜像差，并且调整有源光学元件以校正测量的像差。 出射光信号可以沿着与入射光信号基本相同的光路而沿相反方向传输。 因此，可以在出射光信号中自动考虑从入射光信号测量的像差。

公开(公告)号：US07277464B2

公开(公告)日：2007-10-02

申请号：US11035938

申请日：2005-01-13

申请人： John A. Rule ,  Paolo Zambon ,  Tom A. Watson ,  Omez S. Mesina ,  Weijie Zheng

发明人： John A. Rule ,  Paolo Zambon ,  Tom A. Watson ,  Omez S. Mesina ,  Weijie Zheng

IPC分类号： H01S3/22

CPC分类号： H01S3/036 ,  H01S3/097 ,  H01S3/10069 ,  H01S3/104 ,  H01S3/1306 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2366

摘要： The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.

摘要翻译： 本发明涉及一种氟气放电激光器系统，并且当气体放电激光器工作并消耗氟时，控制补充氟气。

公开(公告)号：US07209507B2

公开(公告)日：2007-04-24

申请号：US10740659

申请日：2003-12-18

申请人： John A. Rule ,  Paolo Zambon

发明人： John A. Rule ,  Paolo Zambon

IPC分类号： H01S3/22

CPC分类号： H01S3/225 ,  H01S3/134 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2366

摘要： A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region.

摘要翻译： 公开了一种用于控制包括振荡器气体放电激光器和放大器气体放电激光器的二腔气体放电激光器的输出的方法和装置，其可以包括建立包括具有至少两个坐标的坐标系的多维可变状态空间，每个坐标 包括表示振荡器或放大器的工作参数的选定变量; 根据所述振荡器或放大器中的任一个或两者中的所选变量的变化来跟踪所述多维可变状态空间中的多维工作点，以确定所述多维工作点在所述多维状态空间中的位置; 从所述多维操作空间中的所述多维操作区域中的所述多维操作区域中的所述多维操作区域中的所述多维操作区域的位置确定所述多维操作空间中的所述多维操作空间，并识别所述区域。

公开(公告)号：US20050185690A1

公开(公告)日：2005-08-25

申请号：US11035938

申请日：2005-01-13

申请人： John Rule ,  Paolo Zambon ,  Tom Watson ,  Omez Mesina ,  Weijie Zheng

发明人： John Rule ,  Paolo Zambon ,  Tom Watson ,  Omez Mesina ,  Weijie Zheng

IPC分类号： H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/036 ,  H01S3/097 ,  H01S3/10069 ,  H01S3/104 ,  H01S3/1306 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2366

摘要： The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.

摘要翻译： 本发明涉及一种氟气放电激光器系统，并且当气体放电激光器工作并消耗氟时，控制补充氟气。

公开(公告)号：US20050135451A1

公开(公告)日：2005-06-23

申请号：US10740659

申请日：2003-12-18

申请人： John Rule ,  Paolo Zambon

发明人： John Rule ,  Paolo Zambon

IPC分类号： H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/225 ,  H01S3/134 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2366

摘要： A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region; based upon the identity of the identified region, and parameters of that region relative to the condition of an actuator in each of the oscillator and the amplifier, determining a necessary modification to the actuator for each of the oscillator and the amplifier to attempt to move the multidimensional operating point from the parameters indicated by the position of the multidimensional operating point being in the particular region to a preselected region in the coordinate system. The method and apparatus may also comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; changing the gas mixture in one or both of the oscillator and amplifier by injection of at least one constituent gas in the gas mixture at least part of which injection for the respective oscillator and amplifier is based upon a calculated estimate of consumption of the at least one constituent gas in the gas mixture in the respective oscillator and amplifier from a prior change in the gas mixture; allowing the oscillator and amplifier to operate for a selected period of time with the changed gas mixture; determining the position of an operating point in the multidimensional variable state space and based upon the location of the operating point in the multidimensional state space determining a respective boost factor to modify the calculated estimate of consumption for the current change of the gas mixture in the respective oscillator and amplifier. A third dimension may be added relating to a spectral characteristic of the output of the oscillator or the amplifier, which may be bandwidth of the output of the amplifier, and including modifying that output with a beam correction device.