公开(公告)号：US20090323287A1

公开(公告)日：2009-12-31

申请号：US12330376

申请日：2008-12-08

Applicant: Joseph Martin Patterson

Inventor： Joseph Martin Patterson

IPC: H05K7/20

CPC classification number: H01L21/67098 ,  B23K26/703 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/2007 ,  H01J2237/2817 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A fixture and method are provided for cooling an IC in the performance of focused beam processes. The method provides a holding/cooling fixture with thermal electric (TE) jaws having an IC interface surface and a heatsink interface. An IC die is secured between the IC interface surfaces of the jaws. Electrical energy is supplied to the TE jaws, creating a negative temperature differential between the IC interface and heatsink interfaces. As a result, the IC die is cooled. A focused beam is applied to a local region of the IC die. Some examples of the focused beam include a focused ion beam (FIB), scanning electron microscope (SEM), E-beam, or a laser scanning microscope (LSM). The focused beam heats the local region of the IC, while the bulk of the IC remains cooled. Typically, each TE jaw includes a plurality of TE elements thermally connected in series.

Abstract translation: 提供了一种夹具和方法，用于在聚焦光束过程的执行中冷却IC。 该方法提供具有具有IC接口表面和散热器接口的热电（TE）钳口的保持/冷却固定装置。 IC芯片固定在钳口的IC接口表面之间。 电能供应到TE钳口，在IC接口和散热器接口之间产生负温差。 结果，IC管芯被冷却。 聚焦光束被施加到IC芯片的局部区域。 聚焦光束的一些实例包括聚焦离子束（FIB），扫描电子显微镜（SEM），电子束或激光扫描显微镜（LSM）。 聚焦光束加热IC的局部区域，而大部分IC仍然冷却。 通常，每个TE卡爪包括串联热连接的多个TE元件。

公开(公告)号：US20090317926A1

公开(公告)日：2009-12-24

申请号：US12339337

申请日：2008-12-19

Applicant: LI-NA ZHANG ,  ZHUO CHEN ,  CHEN FENG ,  LIANG LIU ,  KAI-LI JIANG ,  QUN-QING LI ,  SHOU-SHAN FAN

Inventor： LI-NA ZHANG ,  ZHUO CHEN ,  CHEN FENG ,  LIANG LIU ,  KAI-LI JIANG ,  QUN-QING LI ,  SHOU-SHAN FAN

IPC: H01L21/268

CPC classification number: H01J37/20 ,  H01J2237/2007 ,  H01J2237/2802 ,  Y10S438/96

Abstract: A method for making transmission electron microscope gird is provided. An array of carbon nanotubes is provided and drawing a carbon nanotube film from the array of carbon nanotubes. A substrate has a plurality of spaced metal girds attached on the substrate. The metal girds are covered with the carbon nanotube film and treating the carbon nanotube film and the metal girds with organic solvent. A transmission electron microscope (TEM) grid is obtained by removing remaining CNT film.

Abstract translation: 提供了制造透射电子显微镜镜架的方法。 提供了碳纳米管阵列，并从碳纳米管阵列中抽出碳纳米管薄膜。 衬底具有附接在衬底上的多个间隔开的金属网。 金属网被碳纳米管膜覆盖，并用有机溶剂处理碳纳米管膜和金属网。 通过去除剩余的CNT膜获得透射电子显微镜（TEM）网格。

公开(公告)号：US20090230984A1

公开(公告)日：2009-09-17

申请号：US12471907

申请日：2009-05-26

Applicant: Eiichi HAZAKI ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

Inventor： Eiichi HAZAKI ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

IPC: G01R31/02

CPC classification number: G01R31/2891 ,  G01N23/225 ,  G01R31/2887 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/24564 ,  H01J2237/2482

Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

Abstract translation: 为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量 在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和 探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且第二位置处的测量精度优于 第一名

公开(公告)号：US07525108B2

公开(公告)日：2009-04-28

申请号：US11701410

申请日：2007-02-02

Applicant: Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

Inventor： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC: H01J37/20

CPC classification number: G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A specimen fabrication apparatus including: a sample stage to mount or hold a sample substrate, an ion beam irradiating optical system to irradiate the sample substrate with an ion beam, a specimen holder to mount a specimen obtained from the sample substrate, a transferring means including a probe, and a deposition-gas supplying source to supply a deposition-gas for forming a deposition-film between the specimen and the probe.

Abstract translation: 一种试样制造装置，其特征在于，具备：载置试样基板的样品台，离子束照射所述试样基板的离子束照射光学系统，将从所述试样基板得到的试样安装的试样保持体， 探针和沉积气体供给源，以在样品和探针之间提供用于形成沉积膜的沉积气体。

公开(公告)号：US20080296516A1

公开(公告)日：2008-12-04

申请号：US12168238

申请日：2008-07-07

Applicant: Satoshi TOMIMATSU ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

Inventor： Satoshi TOMIMATSU ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC: G21K5/00

CPC classification number: G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A specimen fabrication apparatus, including: an ion beam irradiating optical system to irradiate a sample placed in a chamber with an ion beam; a specimen holder to mount a specimen separated by the irradiation with the ion beam; a holder cassette to hold the specimen holder; a sample stage to hold, the sample and the holder cassette; and a probe to move the specimen to the specimen holder, wherein the holder cassette is transferred to outside of the chamber in a condition of holding the specimen holder with the specimen mounted.

Abstract translation: 一种试样制造装置，包括：离子束照射光学系统，用离子束照射放置在腔室中的样品; 用于安装通过用离子束照射分离的样本的样本保持器; 用于保持样品架的保持器盒; 样品台，样品和保持盒; 以及用于将样本移动到样本保持器的探针，其中，在保持样本保持器的状态下，保持器盒被转移到腔室的外部。

公开(公告)号：US20080188011A1

公开(公告)日：2008-08-07

申请号：US12019110

申请日：2008-01-24

Applicant: Francois J. Henley

Inventor： Francois J. Henley

IPC: H01L21/268 ,  H01L21/687 ,  G21K5/00 ,  B23K26/38

CPC classification number: H01J37/20 ,  B28D1/221 ,  B28D5/00 ,  H01J2237/2001 ,  H01J2237/2005 ,  H01J2237/2007 ,  H01J2237/31701 ,  H01L21/76254 ,  H01L22/26 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An apparatus for temperature control of manufacture of thick film materials includes a stage comprising a planar surface for supporting a bulk material to be implanted and subsequently cleaved. The bulk material has a surface region, a side region, and a bottom region which provides a volume of material and defines a length between the bottom region and the surface region. The apparatus further includes a mechanical clamp device adapted to engage the bottom region to the planar surface of the stage such that the bulk material is in physical contact with the planar surface for thermal energy to transfer through an interface region between the bulk material and the stage while the surface region is substantially exposed. Additionally, the apparatus includes a sensor device configured to measure a temperature value of the surface region and generate an input data. The apparatus further includes an implant device configured to perform implantation of a plurality of particles through one or more portions of the surface region of the bulk material and a controller configured to receive and process the input data to increase and/or decrease the temperature value of the surface region through at least the interface region between the planar surface of the stage and the bottom region of the bulk material.

Abstract translation: 用于制造厚膜材料的温度控制装置包括一个平台，该平台用于支撑待植入的大块材料并随后被切割。 本体材料具有表面区域，侧面区域和底部区域，其提供一定体积的材料并限定了底部区域和表面区域之间的长度。 该装置还包括机械夹持装置，其适于将底部区域接合到平台的平面表面，使得散装材料与平面表面物理接触，以使热能通过散装材料和载物台之间的界面区域传递 而表面区域基本上是露出的。 另外，该装置包括被配置为测量表面区域的温度值并生成输入数据的传感器装置。 该装置还包括植入装置，其配置成执行多个粒子通过散装材料的表面区域的一个或多个部分的植入;以及控制器，被配置为接收和处理输入数据以增加和/或降低温度值 所述表面区域至少通过所述平台的平坦表面和所述散装材料的底部区域之间的界面区域。

公开(公告)号：US20080054195A1

公开(公告)日：2008-03-06

申请号：US11838465

申请日：2007-08-14

Applicant: Yuichi TACHIKAWA

Inventor： Yuichi TACHIKAWA

IPC: G21K5/04 ,  G21F3/00

CPC classification number: G21K1/02 ,  B82Y10/00 ,  B82Y40/00 ,  G21K5/04 ,  H01J37/3174 ,  H01J2237/2007 ,  H01J2237/24578

Abstract: A substrate cover includes a frame-like member configured to be placed on a substrate which is to be written using a charged particle beam, and to have an outer perimeter dimension larger than a perimeter end of the substrate and an inner perimeter dimension, being a border between the frame-like member and an inner opening portion, smaller than the perimeter end of the substrate, and a contact point part configured to be provided on an undersurface of the frame-like member, in order to be electrically connected to the substrate.

Abstract translation: 衬底盖包括框架状构件，其被配置为放置在要使用带电粒子束书写的衬底上，并且具有大于衬底的周边端部的外周尺寸和内周尺寸，其为 框架状构件和内部开口部分之间的边界，小于基板的周边端部，以及构造成设置在框架构件的下表面上的接触点部件，以便电连接到基板 。

公开(公告)号：US20080048699A1

公开(公告)日：2008-02-28

申请号：US11976238

申请日：2007-10-23

Applicant: Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

Inventor： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

IPC: G01R31/02

CPC classification number: G01R31/2891 ,  G01N23/225 ,  G01R31/2887 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/24564 ,  H01J2237/2482

Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

Abstract translation: 为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量 在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和 探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且在第二位置处的测量精度优于 第一名

公开(公告)号：US20070278421A1

公开(公告)日：2007-12-06

申请号：US11789298

申请日：2007-04-23

Applicant: K. Gleason

Inventor： K. Gleason

IPC: G21K5/10

CPC classification number: G01N1/286 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/31745

Abstract: A method of testing a substrate includes separating the substrate from a larger substrate using a separating device and repositioning the substrate to be tested to a processing station apart from the separating device. The substrate is positioned on a holder for inspection.

Abstract translation: 测试基板的方法包括使用分离装置将基板与较大的基板分离，并将待测试的基板重新定位到与分离装置分开的处理台。 基板定位在支架上用于检查。

公开(公告)号：US20070187623A1

公开(公告)日：2007-08-16

申请号：US11736410

申请日：2007-04-17

Applicant: George SKIDMORE ,  Matthew ELLIS ,  Aaron GEISBERGER ,  Kenneth BRAY ,  Kimberly TUCK ,  Robert Folaron

Inventor： George SKIDMORE ,  Matthew ELLIS ,  Aaron GEISBERGER ,  Kenneth BRAY ,  Kimberly TUCK ,  Robert Folaron

IPC: H01J37/08

CPC classification number: H01J37/185 ,  G01N1/28 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2886 ,  G02B21/32 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.

Abstract translation: 一种方法包括在一个实施方案中，通过用聚焦离子束（FIB）切割衬底，至少部分地从衬底切割样品，通过激活抓握元件捕获衬底样品，以及将捕获的样品与衬底分离。 捕获的样品可以与基底分离并输送到电子显微镜进行检查。