Abstract:
A bandpass sigma-delta modulator using acoustic resonators or micro-mechanical resonators. In order to improve resolution at high frequencies, acoustic resonators or micro-mechanical resonators are utilized in a sigma-delta modulator instead of electronic resonators. The quantized output is fed back using a pair of D/A converters to an input summation device. In fourth order devices, the feed back is to two summation devices in series. Such a sigma-delta modulator is usable in a software defined radio cellular telephone system and in other applications where high-frequency and high-resolution A/D conversion is required.
Abstract:
Methods are provided for depositing an oxygen-doped dielectric layer. The oxygen-doped dielectric layer may be used for a barrier layer or a hardmask. In one aspect, a method is provided for processing a substrate including positioning the substrate in a processing chamber, introducing a processing gas comprising an oxygen-containing organosilicon compound, carbon dioxide, or combinations thereof, and an oxygen-free organosilicon compound to the processing chamber, and reacting the processing gas to deposit an oxygen-doped dielectric material on the substrate, wherein the dielectric material has an oxygen content of about 15 atomic percent or less. The oxygen-doped dielectric material may be used as a barrier layer in damascene or dual damascene applications.
Abstract:
An appparatus for confining plasma within a process zone of a substrate processing chamber. In one aspect, an apparatus comprises an annular member having an upper mounting surface, an inner confinement wall, and an outer confinement wall. The apparatus is disposed on or otherwise connected to a gas distribution assembly of the processing chamber to prevent plasma edge effects on the surface of a substrate. The apparatus provides a plasma choke aperture that reduces the volume of the process zone around the periphery of the substrate thereby eliminating uneven deposition of material around the edge of the substrate.
Abstract:
A CMOS voltage controlled oscillator (VCO) having an improved voltage-to-current converter and an active MOS load operating in the triode region to provide improved performance characteristics including a small differential logic swing and a high frequency output. The voltage-to-current converter of the CMOS VCO comprises a pair of MOS transistors, one of which has an aspect ratio (W.sub.P /L.sub.P) and the other of which has an aspect ratio (W.sub.P /L.sub.P)/n, wherein 1
Abstract:
The present invention provides an analog biased pre-driver and pad as well as a duty cycle adjustment cell prior to the pre-driver and pad. The pre-driver and pad may operate in either a 3 volt mode, a 5 volt mode or any voltage in between depending only on the power supply voltage present. No production configuration or post-production configuration is required. The present invention utilizes a special bias circuit to reduce the Vcc, temperature and other processing variations. A duty cycle cell produces a range of duty cycles when the circuit is operating between a 3 volt and 5 volt range.
Abstract:
Polyimide resin dope having at least three fluorine atoms in a repeating molecular unit and an organic solvent (A) are extruded in a tube form or coating the dope on a supporting body. The polyimide resin dope is then immersed in a solvent (B), which the organic solvent (A) is miscible with the solvent (B). Thus, a polyimide-type gas separation membrane including fluorine is virtually defect free in the skin layer, and manufactured cost-effectively by a simple manufacturing method.