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公开(公告)号：US09711483B2
公开(公告)日：2017-07-18
申请号：US15028819
申请日：2014-10-28
发明人： Hiromitsu Wada
IPC分类号： B23K37/00 , H01L23/00 , B23K37/04 , H05K3/00 , B23K1/00 , B23K1/06 , B23K3/04 , B23K3/06 , B23K3/08 , H05K3/34
CPC分类号： H01L24/75 , B23K1/0016 , B23K1/06 , B23K3/04 , B23K3/0638 , B23K3/08 , B23K37/04 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L24/95 , H01L2224/2732 , H01L2224/29298 , H01L2224/29339 , H01L2224/32225 , H01L2224/753 , H01L2224/75301 , H01L2224/75745 , H01L2224/75824 , H01L2224/75901 , H01L2224/7598 , H01L2224/83192 , H01L2224/8384 , H01L2224/83908 , H05K3/0008 , H05K3/3436 , H05K2203/163 , H05K2203/166
摘要： A bonding apparatus bonds a plurality of device chips on a plurality of electrode pads that are provided to a surface of a substrate. The bonding apparatus includes a stage, a head unit, a head lifting mechanism, a head vibrator, a heater, and a bonding region observation component. The substrate is placed and supported on the stage. The head unit holds the device chips. The head lifting mechanism raises and lowers the head unit in an up and down direction relative to the stage. The head vibrator vibrate the head unit in the up and down direction. The heater heats a bonding paste that bonds the device chips and the electrode pads. The bonding region observation component observes a region that includes at least a peripheral part of the electrode pads.
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公开(公告)号：US09281420B2
公开(公告)日：2016-03-08
申请号：US14382823
申请日：2013-01-16
IPC分类号： H01L31/0203 , C23C16/40 , C23C16/505 , H01L21/56 , H01L23/29 , H01L51/52
CPC分类号： H01L31/0203 , C23C16/401 , C23C16/505 , H01L21/56 , H01L23/291 , H01L51/5253 , H01L2924/0002 , H01L2924/00
摘要： A chemical vapor deposited film includes silicon atoms, oxygen atoms, carbon atoms, and hydrogen atoms. The chemical vapor deposited film is formed by a plasma CVD method such that the concentration of the oxygen atoms is 10-35% by element.
摘要翻译： 化学气相沉积膜包括硅原子，氧原子，碳原子和氢原子。 化学气相沉积膜通过等离子体CVD法形成，使得氧原子的浓度为10-35％。
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公开(公告)号：US08993877B2
公开(公告)日：2015-03-31
申请号：US13378908
申请日：2010-06-16
IPC分类号： H01L31/00 , H01L31/048
CPC分类号： H01L31/048 , H01L31/0481 , Y02E10/50
摘要： A solar battery module has a structure in which a solar battery cell formed by a transparent electrode, a power generating element, and a back electrode is formed on a substrate, and it is sealed with a resin material such as EVA. However, there has been a problem that water enters from a gap between the substrate and a resin sealing material, thereby resulting in the corrosion of the resin or the solar battery cell. A barrier layer made of inorganic substances having portions in contact with the substrate and the second electrode is provided. Here, the barrier layer is formed by laminating at least SiO2 and an inorganic layer having a lower density than SiO2, and the film having a lower density than SiO2 is directly formed on the substrate and the second electrode.
摘要翻译： 太阳能电池模块具有在基板上形成由透明电极，发电元件和背面电极形成的太阳能电池单元的结构，并且用树脂材料如EVA密封。 然而，存在水从基板和树脂密封材料之间的间隙进入的问题，从而导致树脂或太阳能电池的腐蚀。 提供由具有与基板和第二电极接触的部分的无机物质制成的阻挡层。 这里，通过层压至少SiO 2和密度低于SiO 2的无机层来形成阻挡层，并且在基板和第二电极上直接形成具有比SiO 2低的密度的膜。
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公开(公告)号：US20150027531A1
公开(公告)日：2015-01-29
申请号：US14382835
申请日：2013-01-16
IPC分类号： H01L31/028 , H01L31/0224 , H01L31/18
CPC分类号： H01L31/028 , B82Y10/00 , C23C16/0272 , C23C16/401 , H01L21/0245 , H01L21/02532 , H01L21/0262 , H01L31/0224 , H01L31/022475 , H01L31/022483 , H01L31/03926 , H01L31/0481 , H01L31/1804 , H01L51/0046 , H01L51/0078 , H01L51/424 , H01L51/448 , H01L51/5253 , H01L2251/308 , Y02E10/549
摘要： A silicon-containing film includes a first chemical vapor deposition layer and a second chemical vapor deposition layer. The first chemical vapor deposition layer includes elemental silicon. The first chemical vapor deposition layer is formed by a plasma CVD method such that oxygen concentration is greater than or equal to 0% by element and less than 10% by element. The second chemical vapor deposition layer includes elemental silicon. The second chemical vapor deposition layer is formed by the plasma CVD method such that oxygen concentration is greater than 35% by element and less than or equal to 70% by element. A ratio of the thickness of the second chemical vapor deposition layer relative to the thickness of the first chemical vapor deposition layer is 1.5-9.
摘要翻译： 含硅膜包括第一化学气相沉积层和第二化学气相沉积层。 第一化学气相沉积层包括元素硅。 第一化学气相沉积层通过等离子体CVD方法形成，使得氧浓度大于或等于0％且小于10％。 第二化学气相沉积层包括元素硅。 第二化学气相沉积层通过等离子体CVD法形成，使得氧浓度大于35质量％且小于或等于70质量％。 第二化学气相沉积层的厚度相对于第一化学气相沉积层的厚度的比率为1.5-9。
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公开(公告)号：US20120085407A1
公开(公告)日：2012-04-12
申请号：US13378908
申请日：2010-06-16
IPC分类号： H01L31/0224
CPC分类号： H01L31/048 , H01L31/0481 , Y02E10/50
摘要： A solar battery module has a structure in which a solar battery cell formed by a transparent electrode, a power generating element, and a back electrode is formed on a substrate, and it is sealed with a resin material such as EVA. However, there has been a problem that water enters from a gap between the substrate and a resin sealing material, thereby resulting in the corrosion of the resin or the solar battery cell. A barrier layer made of inorganic substances having portions in contact with the substrate and the second electrode is provided. Here, the barrier layer is formed by laminating at least SiO2 and an inorganic layer having a lower density than SiO2, and the film having a lower density than SiO2 is directly formed on the substrate and the second electrode.
摘要翻译： 太阳能电池模块具有在基板上形成由透明电极，发电元件和背面电极形成的太阳能电池单元的结构，并且用树脂材料如EVA密封。 然而，存在水从基板和树脂密封材料之间的间隙进入的问题，从而导致树脂或太阳能电池的腐蚀。 提供由具有与基板和第二电极接触的部分的无机物质制成的阻挡层。 这里，通过层压至少SiO 2和密度低于SiO 2的无机层来形成阻挡层，并且在基板和第二电极上直接形成具有比SiO 2低的密度的膜。
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公开(公告)号：US20120085406A1
公开(公告)日：2012-04-12
申请号：US13378198
申请日：2010-07-12
申请人： Takashi Iwade , Toyoharu Terada
发明人： Takashi Iwade , Toyoharu Terada
IPC分类号： H01L31/0216 , B32B3/30
CPC分类号： H01L31/02366 , H01L31/0392 , Y02E10/50 , Y10T428/24612
摘要： A substrate with a thin film formed by layering a transparent substrate, a silicon compound film, and a transparent electroconductive film in this order, wherein the surface of the silicon compound film on the side of the transparent electroconductive film is an irregularly shaped surface provided with irregularities, the surface of the transparent electroconductive film opposite from the silicon compound film is an irregular surface shaped so as to follow the irregularly shaped surface, and the silicon compound film includes fine transparent particles having a different refractive index than the refractive index of the silicon compound film.
摘要翻译： 依次层叠透明基板，硅化合物膜和透明导电膜而形成薄膜的基板，其中，所述透明导电膜侧的所述硅化合物膜的表面为设置有所述透明导电膜的不规则形状的表面 与硅化合物膜相反的透明导电膜的表面是不规则的表面，其形状遵循不规则形状的表面，并且硅化合物膜包括具有与硅的折射率不同的折射率的细小透明颗粒 复合膜。
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公开(公告)号：US07776670B2
公开(公告)日：2010-08-17
申请号：US12304957
申请日：2007-05-30
IPC分类号： H01L21/00
CPC分类号： C23C16/30 , C23C16/401 , H01L51/5256
摘要： Issue Providing a silicon film which can prevent damage of electronic devices formed on a substrate from occurrence, can prevent apparatus arrangement from becoming large-scale one, can improve coherency of a silicon thin film to a substrate, and is hardly happened crack and/or flaking, and providing a method for forming the silicon thin film.Solving Means A method for forming a silicon thin film according to the present invention is a method for forming a silicon thin film having isolation function or barrier function, on a substrate K using CVD method, and comprises a step for forming a first thin film on the substrate using plasma CVD method employing gas containing hydrogen element and a gas containing silicon element; a step for forming a second thin film using plasma CVD method employing a gas containing nitrogen element and a gas containing silicon element; and a step for forming a third thin film using plasma CVD method employing a gas containing oxygen element and a gas containing silicon element.
摘要翻译： 问题提供能够防止在基板上形成的电子器件的损坏的硅膜可以防止装置排列变大，可以提高硅薄膜与基板的一致性，并且几乎不发生裂纹和/或 剥离，提供形成硅薄膜的方法。 解决方法根据本发明的形成硅薄膜的方法是使用CVD法在基板K上形成具有隔离功能或阻挡功能的硅薄膜的方法，并且包括用于形成第一薄膜的步骤 使用等离子体CVD法的基板，其使用含有氢元素的气体和含有硅元素的气体; 使用含有氮元素的气体和含有硅元素的气体的等离子体CVD法形成第二薄膜的工序; 以及使用含有氧元素的气体和含有硅元素的气体的等离子体CVD法形成第三薄膜的工序。
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公开(公告)号：US20100136123A1
公开(公告)日：2010-06-03
申请号：US12445250
申请日：2007-10-12
IPC分类号： A61K9/50
CPC分类号： A61K9/5089 , A61J3/07
摘要： In order to heighten the density of microcapsules and facilitate handling by the unit composed of microcapsules in a given amount smaller than in the whole sheet, a microcapsule sheet which comprises a substrate constituted of an edible film and microcapsules each obtained by surrounding a core layer with a first shell film and a second shell film, the microcapsules being arranged according to a given pattern so as to be arranged only in those regions of the substrate which are separated from each other.
摘要翻译： 为了提高微胶囊的密度，便于以比整个片材小的给定量的由微胶囊组成的单元处理，所述微胶囊片包括由可食用膜构成的基材和微胶囊，每个微胶囊通过围绕核心层与 第一壳膜和第二壳膜，根据给定的图案布置微胶囊，以便仅布置在彼此分离的基板的那些区域中。
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公开(公告)号：US07673864B2
公开(公告)日：2010-03-09
申请号：US11596888
申请日：2005-06-20
申请人： Yasuhisa Mizuno , Hajime Kanamori , Riki Murakami
发明人： Yasuhisa Mizuno , Hajime Kanamori , Riki Murakami
IPC分类号： B41L1/32
CPC分类号： B65H45/1015 , B65H23/042 , B65H45/107 , B65H45/109
摘要： A folding device for folding continuous paper, which is previously provided with fold lines at given intervals, along the fold lines in a zigzag pattern. The folding device comprises a feeding member of the continuous paper, a swinger fin that swings using its one end as a fulcrum like a pendulum in synchronization with the fold lines while feeding the continuous paper into its inside, and a table to be surmounted by the continuous paper that has been folded. The swinger fin includes a feed roller pair for feeding the continuous paper while sandwiching the paper therebetween, and at least a pair of guide plates facing each other with a given gap therebetween, in which the continuous paper is fed through the gap. One of the feed rollers constructing the feed roller pair and one of the guide plates, which are located on one side of the continuous paper, can be integrally opened or detached from the swinger fin.
摘要翻译： 用于折叠连续纸的折叠装置，其以预定的间隔以给定的间隔以折叠线以锯齿形图案设置。 折叠装置包括连续纸的进给构件，摆动翅片，其在将连续纸送入其内部的同时使用其一端作为支点与倾斜同步的摆锤作为支点摆动，并且将由桌子 已经折叠的连续纸。 摆动翼片包括用于在将纸张夹在其间的同时馈送连续纸的进给辊对以及至少一对彼此面对的引导板，其中连续的纸被供给通过间隙。 构成进给辊对的进给辊之一和位于连续纸的一侧上的导向板中的一个可以与摆动翅片一体地打开或分离。
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公开(公告)号：US07591899B2
公开(公告)日：2009-09-22
申请号：US11387865
申请日：2006-03-24
申请人： Junichi Uehara , Takashi Iwade
发明人： Junichi Uehara , Takashi Iwade
CPC分类号： B05C11/10 , B05C5/0254 , G03F7/16
摘要： An applicator device comprises a reservoir tank trapping embrocation, a stage holding a substrate, a ferrule having a slit-shaped opening section above the stage, a fluid transfer pump guiding the embrocation within the reservoir tank to the ferrule, a first opening and closing valve between a suction opening of the fluid transfer pump and the reservoir tank, opening when a suction operation is carried out and closing when a discharge operation is carried out, a second opening and closing valve between a discharge opening of the fluid transfer pump and the ferrule, opening when a discharge operation is carried out and closing when a suction operation is carried out, and driving means relatively moving the ferrule and/or substrate when the slit-shaped opening section and the substrate are adjacent to one another, wherein the fluid transfer pump comprises a membranous sealing member sealing a gap between a cylinder and a plunger.
摘要翻译： 一种施药装置，其特征在于，包括贮存槽捕集栓塞，保持基板的台架，在台架上方具有狭缝状的开口部的套管，将储存罐内的插入件引导到套圈的流体输送泵，第一开闭阀 在进行抽吸操作时的打开和排出操作之间的关闭之间，在流体输送泵的排出口和套圈之间的第二开闭阀 当执行排出操作时打开，当进行抽吸操作时关闭，以及当狭缝状开口部和基板彼此相邻时驱动装置相对移动套圈和/或基板，其中流体转移 泵包括密封气缸和柱塞之间的间隙的膜密封构件。
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