公开(公告)号：US20230341367A1

公开(公告)日：2023-10-26

申请号：US17906920

申请日：2020-07-10

申请人： Wiinaa Co., Ltd.

发明人： Lei XU ,  Dongcheng XIE ,  Dongliang CHEN

IPC分类号： G01N33/00 ,  B81B7/04

CPC分类号： G01N33/0031 ,  B81B7/04 ,  B81B2201/0292

摘要： A MEMS gas sensor (A) and array (B) thereof, a gas detection and preparation method. The gas sensor (A) comprises a first substrate (A2) with a cavity (A1) provided in a first surface, and a gas detection assembly (A3) arranged at an opening of the cavity The gas detection assembly comprises: a supporting suspension bridge (A31) erected on the opening of the cavity, and a gas detection part (A32) arranged on the supporting suspension bridge. The gas detection part comprises a strip-shaped heating electrode part (A321), an insulating layer (A322), a strip-shaped detection electrode part (A323) and a gas-sensitive material part (A324), which are sequentially stacked. The strip-shaped detection electrode part comprises a first detection electrode part (A323-1) and a second detection electrode part (A323-2), with a first opening (A325) provided between the A323-1 and A323-2; the gas-sensitive material part is arranged at the position of the first opening.

公开(公告)号：US20230298862A1

公开(公告)日：2023-09-21

申请号：US17696594

申请日：2022-03-16

申请人： Applied Materials, Inc.

发明人： Alexander BERGER ,  Ming XU

IPC分类号： H01J37/32 ,  B81B7/04 ,  H05K1/02 ,  C23C16/50 ,  C23C16/455

CPC分类号： H01J37/32449 ,  B81B7/04 ,  H05K1/0272 ,  C23C16/50 ,  C23C16/45565 ,  B81B2201/054 ,  B81B2207/053 ,  B81B2207/99 ,  B81B2207/012 ,  H05K2201/10083 ,  H05K2201/10522 ,  H05K2201/10545 ,  H05K2201/09063 ,  H05K1/181

摘要： A showerhead for a processing chamber includes a faceplate with a plurality of openings. A plurality of compartments are recessed into a top surface of the faceplate. The showerhead includes a plurality of MEMS devices. Each MEMS device is disposed in a corresponding compartment of the plurality of compartments. A printed circuit board including a plurality of ports therethrough is coupled to each MEMS device. Each MEMS device is configured to regulate a gas flow into each corresponding compartment through a corresponding port of the plurality of ports in the printed circuit board.

公开(公告)号：US11753295B2

公开(公告)日：2023-09-12

申请号：US18079519

申请日：2022-12-12

申请人： Knowles Electronics, LLC

发明人： Peter V. Loeppert ,  Michael Pedersen

IPC分类号： B81B7/04 ,  B81C1/00 ,  B81B3/00

CPC分类号： B81C1/00166 ,  B81B3/0021 ,  B81B2203/04 ,  B81C2201/01

摘要： A MEMS device can include a solid dielectric including a plurality of apertures, the solid dielectric having a first side and a second side. The MEMS device can include a first plurality of electrodes extending completely through a first subset of the plurality of apertures, a second plurality of electrodes extending partially through a second subset of the plurality of apertures, a third plurality of electrodes extending partially into a third subset of the plurality of apertures. The MEMS device can include a first diaphragm coupled to the first plurality and to the third plurality of electrodes, the first diaphragm facing the first side of the solid dielectric. The MEMS device can include a second diaphragm coupled to the first plurality and to the second plurality of electrodes the second diaphragm facing the second side of the solid dielectric.

公开(公告)号：US11598916B2

公开(公告)日：2023-03-07

申请号：US17002295

申请日：2020-08-25

申请人： Matthew E. Ward

发明人： Matthew E. Ward ,  Jeremy Hochman

IPC分类号： B81B7/04 ,  G02B6/12 ,  B81B3/00 ,  H01L27/15

摘要： An optical light package includes an optical output lens, an optical filter located thereunder and between the output lens and LEDS, a tray of LEDs arrayed on a stage mounted on a linear comb based MEMS device that is distributed in such a way that the stage is movable, and a driver that controls movement of the stage.

公开(公告)号：US11088314B2

公开(公告)日：2021-08-10

申请号：US16225419

申请日：2018-12-19

申请人： BOE Technology Group Co., Ltd.

发明人： Lei Zhao

IPC分类号： H01L41/08 ,  H01L41/297 ,  H01L41/09 ,  B81C1/00 ,  H01L41/332 ,  B81B7/04 ,  H01L41/113 ,  H01L41/23

摘要： The present disclosure provides an ultrasonic transducer and a method for manufacturing an ultrasonic transducer, a display substrate and a method for manufacturing a display substrate. The method for manufacturing the ultrasonic transducer includes: forming a via hole in a substrate; forming a structural layer on a side of the substrate, the structural layer cover the via hole; and etching the structural layer from a side of the substrate away from the structural layer by using the substrate formed with the via hole as a blocking layer, to form a cavity at a position of the structural layer corresponding to that of the via hole.

公开(公告)号：US11025162B2

公开(公告)日：2021-06-01

申请号：US16836049

申请日：2020-03-31

申请人： wiSpry, Inc.

发明人： David Zimlich ,  Vincent Cheung

IPC分类号： H02M3/07 ,  B81B7/04 ,  G05F3/20 ,  B81B5/00 ,  B81B7/00 ,  H02M1/00

摘要： The present subject matter relates to charge pump devices, systems, and methods in which a plurality of series-connected charge-pump stages are connected between a supply voltage node and a primary circuit node, and a discharge circuit is connected to the plurality of charge-pump stages, wherein the discharge circuit is configured to selectively remove charge from the primary circuit node.

公开(公告)号：US20210114868A1

公开(公告)日：2021-04-22

申请号：US17082878

申请日：2020-10-28

申请人： JIANGNAN UNIVERSITY

发明人： Gang Shi ,  Ying Li ,  Jianhua Li ,  Xuan Jin ,  Dawei Wang ,  Likui Wang ,  Jingguo Yang ,  Xinxin Sang ,  Caihua Ni

IPC分类号： B81B7/04 ,  B81C1/00 ,  B81C99/00 ,  C23C18/16 ,  C23C18/38 ,  C23C18/42 ,  B82Y30/00 ,  B82Y40/00 ,  G01N33/02 ,  G01N21/65

摘要： The present invention discloses a bionic SERS substrate of a metal-based compound eye bowl structure, a construction method and application. The bionic SERS substrate of the metal-based compound eye bowl structure of the present invention consists of a metal bowl and a cone-shaped structure substrate in an ordered hierarchy manner. The metal bowl is of a continuously and closely arranged single-layer bowl structure. A height of the metal bowl is 0.01-10 μm, and a bowl opening diameter is 0.01-10 μm. A cone is a micron pyramid cone, and a height of the micron pyramid cone is 1-100 μm. The present invention assembles the metal bowl on a surface of the substrate of the micron pyramid cone structure with great fluctuation by a solid-liquid interface chemical reduction method and a small ball template method, and further constructs a 3D SERS substrate with a bionic compound eye structure.

公开(公告)号：US20210047174A1

公开(公告)日：2021-02-18

申请号：US16946511

申请日：2020-06-24

申请人： INVENSENSE, INC.

发明人： Karthik Katginari ,  Uday Mudoi ,  Mahdi Heydari

IPC分类号： B81B7/04 ,  B81B3/00

摘要： Described herein are methods and systems for controlling a sensor assembly with a plurality of same type sensors. Sensors are operated in active and inactive states and have a corresponding performance parameter and reliability parameter that may be determined. The activation state of at least one of the sensors is changed based on an operational parameter. The performance parameter and/or the reliability parameter can then be updated.

公开(公告)号：US10595132B1

公开(公告)日：2020-03-17

申请号：US16129419

申请日：2018-09-12

申请人： Infineon Technologies AG

发明人： Chau Fatt Chiang ,  Kok Yau Chua

IPC分类号： H04R19/04 ,  B81B7/04 ,  B81C1/00 ,  H04R19/00 ,  H04R31/00

摘要： A device includes: a first sidewall including a first opening extending through the first sidewall; a first sensor attached to an interior surface of the first sidewall, wherein the first sensor is aligned to at least partially cover the first opening; a second sidewall opposite the first sidewall; a third sidewall attaching the first sidewall to the second sidewall; and a first contact pad disposed on an exterior surface of the third sidewall, wherein the first contact pad is configured to provide at least one of a power connection or a signal connection for the first sensor.

公开(公告)号：US10571684B2

公开(公告)日：2020-02-25

申请号：US15107586

申请日：2015-12-11

申请人： Boe Technology Group Co., Ltd.

发明人： Shang Wang

IPC分类号： G02B26/08 ,  G02B26/10 ,  B81B7/04 ,  G03B21/28 ,  H04N9/31 ,  G02B6/35 ,  B81B3/00 ,  H04N5/74

摘要： The present disclosure discloses a micro-mirror array, and a backlight module and a display device using the same. Each reflection mirror in the micro-mirror array comprises a first axis of deflection and a second axis of deflection perpendicular to the first axis of deflection, and a deflection angle of the reflection mirror is controlled individually and continuously. The backlight module comprises a light source, a micro-mirror array and a control unit. The control unit adjusts a deflection angle of each reflection mirror in the micro-mirror array in response to a backlight control signal, so that depending on the backlight control signal, the micro-mirror array reflects light emitted from the light source evenly to an entire surface of the display screen or converges the light to one or more areas of the display screen.