Substrate transfer system and substrate processing system
    133.
    发明授权
    Substrate transfer system and substrate processing system 有权
    基板转印系统和基板处理系统

    公开(公告)号:US09570336B2

    公开(公告)日:2017-02-14

    申请号:US15016272

    申请日:2016-02-05

    Abstract: A substrate transfer system includes a substrate transfer robot. The substrate transfer robot is provided between a first apparatus and a second apparatus which has a wall provided opposite to the substrate transfer robot and having an opening on the wall. The substrate transfer robot is configured to transfer a substrate from the first apparatus to the second apparatus via the opening and includes a base having a first axis, an arm body, and a hand. The arm body has a proximal end and a distal end and is connected to the base at the proximal end to rotate around the first axis. The substrate transfer robot includes a minimum distance from the first axis to an outermost portion of the arm body and the hand in a radius direction from the first axis being larger than a distance between the first axis and the opening on the wall.

    Abstract translation: 基板传送系统包括基板传送机器人。 衬底传送机器人设置在第一设备和第二设备之间,第二设备具有与衬底传送机器人相对设置的壁,并且在壁上具有开口。 基板传送机器人构造成经由开口将基板从第一装置传送到第二装置,并且包括具有第一轴,臂主体和手的基部。 臂体具有近端和远端,并且在近端处连接到基部以围绕第一轴线旋转。 基板传送机器人包括从臂体的第一轴线到最外侧部分的最小距离,并且距离第一轴线的半径方向上的手大于第一轴线与壁上的开口之间的距离。

    Encoder, motor with encoder, and servo system having a plurality of light receiving array to receive light reflected by slit tracks comprising incremental patterns and absolute pattern
    134.
    发明授权
    Encoder, motor with encoder, and servo system having a plurality of light receiving array to receive light reflected by slit tracks comprising incremental patterns and absolute pattern 有权
    具有编码器的编码器,电动机和具有多个光接收阵列的伺服系统,以接收由狭缝轨迹反射的光,包括增量图案和绝对图案

    公开(公告)号:US09562794B2

    公开(公告)日:2017-02-07

    申请号:US14532006

    申请日:2014-11-04

    CPC classification number: G01D5/34776 G01D5/3473 G01D5/34738

    Abstract: An encoder includes a plurality of slit tracks, a point light source, a first light-receiving array, a second light-receiving array, and a third light-receiving array. The plurality of slit tracks respectively comprises a plurality of reflection slits arranged along a measurement direction. The point light source is configured to emit diffusion light to the plurality of slit tracks. The first light-receiving array is configured to receive light reflected by the slit track comprising an incremental pattern. The second light-receiving array is configured to receive light reflected by the slit track comprising an incremental pattern longer in pitch than other incremental patterns. The third light-receiving array is configured to receive light reflected by the slit track comprising an absolute pattern.

    Abstract translation: 编码器包括多个狭缝轨道,点光源,第一光接收阵列,第二光接收阵列和第三光接收阵列。 多个狭缝轨道分别包括沿着测量方向布置的多个反射狭缝。 点光源被配置为向多个狭缝轨道发射漫射光。 第一光接收阵列被配置为接收由包括增量图案的狭缝轨迹反射的光。 第二光接收阵列被配置为接收由狭缝轨道反射的光,其包括以比其它增量图案更长的间距的增量图案。 第三光接收阵列被配置为接收由包括绝对图案的狭缝轨迹反射的光。

    Robot system, robot monitoring device, and robot monitoring method
    135.
    发明授权
    Robot system, robot monitoring device, and robot monitoring method 有权
    机器人系统,机器人监控装置和机器人监控方法

    公开(公告)号:US09545722B2

    公开(公告)日:2017-01-17

    申请号:US14636181

    申请日:2015-03-03

    Abstract: A robot system, includes: a robot; a camera configured to capture an image of operation of the robot; and a circuit configured to: control the robot so as to perform work in accordance with work contents information preliminarily stored to indicate a series of work contents; save image information captured by the camera during work performance by the robot in association with time information; and display the saved image information together with the time information.

    Abstract translation: 一种机器人系统,包括:机器人; 被配置为捕获所述机器人的操作的图像的相机; 以及电路,被配置为:控制所述机器人,以便根据预先存储的工作内容信息进行工作以指示一系列工作内容; 保存摄像机在机器人与工作时间信息相关联的工作过程中拍摄的图像信息; 并与时间信息一起显示保存的图像信息。

    Drive unit and transport machine
    136.
    发明授权
    Drive unit and transport machine 有权
    驱动单元和运输机

    公开(公告)号:US09543878B2

    公开(公告)日:2017-01-10

    申请号:US15014288

    申请日:2016-02-03

    CPC classification number: H02P25/188 H02M1/34 H02P6/14 H02P27/047 H02P29/032

    Abstract: A drive unit includes: an inverter; an electric motor that has a first winding connected to an output part of the inverter and a second winding connected to the first winding; a first semiconductor switch that has a first end connected to the first winding and a second end connected to the second winding; a second semiconductor switch that has a first end and a second end connected to the first winding and the first semiconductor switch; and a snubber circuit that is provided between the second end of the first semiconductor switch and the first end of the second semiconductor switch and has a capacitor and a diode.

    Abstract translation: 驱动单元包括:逆变器; 电动机,其具有连接到所述逆变器的输出部的第一绕组和连接到所述第一绕组的第二绕组; 第一半导体开关,其具有连接到第一绕组的第一端和连接到第二绕组的第二端; 第二半导体开关,其具有连接到所述第一绕组和所述第一半导体开关的第一端和第二端; 以及缓冲电路,其设置在第一半导体开关的第二端和第二半导体开关的第一端之间,并具有电容器和二极管。

    PROGRAMMABLE CONTROLLER
    137.
    发明申请
    PROGRAMMABLE CONTROLLER 审中-公开
    可编程控制器

    公开(公告)号:US20160370781A1

    公开(公告)日:2016-12-22

    申请号:US15182621

    申请日:2016-06-15

    CPC classification number: G05B19/0426 G05B2219/23427

    Abstract: A programmable controller to control a control machine includes an arithmetic processor, a non-volatile storage, a volatile storage, and a selection transferor. The non-volatile storage stores a plurality of control projects executable by the arithmetic processor to perform control processing of the control machine. The volatile storage is configured to store at least one control project among the plurality of control projects. The selection transferor is configured to select the at least one control project from among the plurality of control projects stored in the non-volatile storage and transfer the selected one control project to the volatile storage so that the arithmetic processor executes the at least one control project stored in the volatile storage.

    Abstract translation: 用于控制控制机器的可编程控制器包括算术处理器,非易失性存储器,易失性存储器和选择转移器。 非易失性存储器存储可由算术处理器执行的多个控制项目,以执行控制机器的控制处理。 易失性存储器被配置为在多个控制项目中存储至少一个控制项目。 选择转移器被配置为从存储在非易失性存储器中的多个控制项目中选择至少一个控制项目,并将所选择的一个控制项目传送到易失性存储器,使得算术处理器执行至少一个控制项目 存储在易失性存储器中。

    Power conversion apparatus and power conversion method
    138.
    发明授权
    Power conversion apparatus and power conversion method 有权
    电力转换装置和电力转换方法

    公开(公告)号:US09515575B2

    公开(公告)日:2016-12-06

    申请号:US14700084

    申请日:2015-04-29

    Abstract: A controller of a power conversion apparatus according to an embodiment causes a chopper and an inverter to generate an alternating-current (AC) voltage including first and second parts of an AC voltage waveform and causes the inverter to output the AC voltage. The chopper generates the first part having an absolute value higher than a voltage of a DC power supply, and the inverter generates the second part having an absolute value lower than the voltage of the DC power supply. The controller is configured to alternately turn on the first and second switching elements in a period during which the controller controls the chopper to generate the first part of the AC voltage waveform.

    Abstract translation: 根据实施例的电力转换装置的控制器使得斩波器和逆变器产生包括交流电压波形的第一和第二部分的交流(AC)电压,并使逆变器输出交流电压。 斩波器产生具有比直流电源的电压高的绝对值的第一部分,并且逆变器产生具有比直流电源的电压低的绝对值的第二部分。 控制器被配置为在控制器控制斩波器以产生交流电压波形的第一部分的周期期间交替地接通第一和第二开关元件。

    POWER CONVERSION SYSTEM, POWER CONVERTER, AND METHOD FOR DIAGNOSING STATE OF POWER STORAGE DEVICE
    139.
    发明申请
    POWER CONVERSION SYSTEM, POWER CONVERTER, AND METHOD FOR DIAGNOSING STATE OF POWER STORAGE DEVICE 审中-公开
    功率转换系统,功率转换器和用于诊断功率储存装置状态的方法

    公开(公告)号:US20160336792A1

    公开(公告)日:2016-11-17

    申请号:US15222951

    申请日:2016-07-29

    Abstract: This disclosure discloses a power conversion system including a first power converter, a second power converter, and a power storage device. The second power converter includes a control signal generation part, a detection signal processing part, and a state diagnosis part. The control signal generation part is configured to perform at least one of superposition of a predetermined AC voltage on a DC voltage in a second DC power and superposition of a predetermined AC current on a DC current in the second DC power. The detection signal processing part is configured to detect at least one of a detection value of the DC voltage superposed with the AC voltage and a detection value of the DC current superposed with the AC current. The state diagnosis part is configured to diagnose a state of the power storage device based on the detection value.

    Abstract translation: 本公开公开了一种包括第一功率转换器,第二功率转换器和蓄电装置的电力转换系统。 第二功率转换器包括控制信号生成部,检测信号处理部和状态诊断部。 控制信号生成部被配置为执行在第二直流电力中的直流电压上的预定交流电压的叠加和第二直流电力中的直流电流上的预定交流电流的叠加中的至少一个。 检测信号处理部被配置为检测与交流电压叠加的直流电压的检测值和叠加有交流电流的直流电流的检测值中的至少一个。 状态诊断部被配置为基于检测值来诊断蓄电装置的状态。

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