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141.
公开(公告)号:US20230238428A1
公开(公告)日:2023-07-27
申请号:US17582550
申请日:2022-01-24
Applicant: GlobalFoundries U.S. Inc.
Inventor: Rong-Ting Liou , Man Gu , Jeffrey B. Johnson , Wang Zheng , Jagar Singh , Haiting Wang
IPC: H01L29/06 , H01L29/78 , H01L29/66 , H01L21/762
CPC classification number: H01L29/0653 , H01L29/7816 , H01L29/66681 , H01L21/76224
Abstract: An IC structure that includes a trench isolation (TI) in a substrate having three portions of different dielectric materials. The portions may also have different widths. The TI may include a lower portion including a first dielectric material and having a first width, a middle portion including the first dielectric material and an outer second dielectric material, and an upper portion including a third dielectric material and having a second width greater than the first width. The first, second and third dielectric materials are different.
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142.
公开(公告)号:US11699650B2
公开(公告)日:2023-07-11
申请号:US17151346
申请日:2021-01-18
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Alamgir M. Arif , Sunil K. Singh , Dewei Xu , Seung-Yeop Kook , Roderick A. Augur
IPC: H01L23/522 , H01L49/02
CPC classification number: H01L23/5223 , H01L23/5226 , H01L28/60
Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure. With capacitor electrodes in different ILD layers. The structure includes a first inter-level dielectric (ILD) layer having a top surface, a first vertical electrode within the first ILD layer, a capacitor dielectric film on a top surface of the first vertical electrode, a second ILD layer over the first ILD layer, and a second vertical electrode within the second ILD layer and on the capacitor dielectric film. The capacitor dielectric film is vertically between the first vertical electrode and the second vertical electrode.
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143.
公开(公告)号:US20230215869A1
公开(公告)日:2023-07-06
申请号:US17647176
申请日:2022-01-06
Applicant: GlobalFoundries U.S. Inc.
Inventor: Uzma B. Rana , Steven M. Shank , Anthony K. Stamper
IPC: H01L27/12 , H01L21/762
CPC classification number: H01L27/1207 , H01L21/76283
Abstract: An integrated circuit (IC) structure, a switch and related method, are disclosed. The IC structure includes an active device, e.g., a switch, over a bulk semiconductor substrate, and an isolation structure under the active device in the bulk semiconductor substrate. The isolation structure may include a trench isolation adjacent the active device in the bulk semiconductor substrate, a dielectric layer laterally adjacent the trench isolation and over the active device, and a porous semiconductor layer in the bulk semiconductor substrate under the dielectric layer laterally adjacent the trench isolation. The IC structure employs a lower cost, low resistivity bulk semiconductor substrate rather than a semiconductor-on-insulator (SOI) substrate, yet it has better performance characteristics for RF switches than an SOI substrate.
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144.
公开(公告)号:US20230197707A1
公开(公告)日:2023-06-22
申请号:US17554222
申请日:2021-12-17
Applicant: GlobalFoundries U.S. Inc.
Inventor: Meng Miao , Alain Loiseau , Souvick Mitra , Wei Liang , Robert J. Gauthier, JR. , Anindya Nath
CPC classification number: H01L27/0248 , H01L27/1207 , H01L29/7436
Abstract: Disclosed are embodiments of a semiconductor structure that includes a semiconductor-controlled rectifier (e.g., for electrostatic discharge (ESD) protection). The SCR can be readily integrated into advanced semiconductor-on-insulator processing technology platforms (e.g., a fully depleted silicon-on-insulator (FDSOI) processing technology platform) that employ hybrid semiconductor substrates (i.e., semiconductor substrates with both bulk semiconductor and semiconductor-on-insulator regions) and is configured with an on-Pwell semiconductor-on-insulator gate structure that is tied to an anode terminal to effectively lower the SCR trigger voltage. To further lower the trigger voltage of the SCR, the Pwell on which the gate structure sits may be made narrower than the gate structure and/or the doping profile of the Pwell on which the gate structure sits may be graded (e.g., P to P- closer to insulator layer). Additionally, to minimize parasitic capacitance, the gate structure may be shorter in length than contact regions parallel and adjacent thereto.
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145.
公开(公告)号:US11677000B2
公开(公告)日:2023-06-13
申请号:US17450186
申请日:2021-10-07
Applicant: GlobalFoundries U.S. Inc.
Inventor: Uzma B. Rana , Steven M. Shank , Anthony K. Stamper
IPC: H01L29/06 , H01L29/08 , H01L21/76 , H01L21/8234 , H01L27/088 , H01L29/10 , H01Q1/22
CPC classification number: H01L29/0653 , H01L29/0847 , H01L29/1083 , H01Q1/2283
Abstract: An integrated circuit (IC) structure includes an active device over a bulk semiconductor substrate, and an isolation structure around the active device in the bulk semiconductor substrate. The active device includes a semiconductor layer having a center region, a first end region laterally spaced from the center region by a first trench isolation, a second end region laterally spaced from the center region by a second trench isolation, a gate over the center region, and a source/drain region in each of the first and second end regions. The isolation structure includes: a polycrystalline isolation layer under the active device, a third trench isolation around the active device, and a porous semiconductor layer between the first trench isolation and the polycrystalline isolation layer and between the second trench isolation and the polycrystalline isolation layer.
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公开(公告)号:US11675046B2
公开(公告)日:2023-06-13
申请号:US16558095
申请日:2019-08-31
Applicant: GLOBALFOUNDRIES INC.
Inventor: See Taur Lee , Sher Jiung Fang
CPC classification number: G01S7/35 , G01S7/282 , H03F3/245 , H03K5/00006 , H03F2200/451
Abstract: Transmitters having increased efficiency, such as may be useful in millimeter-wave devices. A semiconductor device, comprising a transmitter, comprising a modulator configured to receive a differential input signal having a first frequency and provide a differential modulated signal having the first frequency and a first clock phase; a series comprising one or more frequency multipliers, wherein the series of frequency multipliers is configured to receive the differential modulated signal and provide a differential second signal having a second frequency greater than the first frequency and having a second clock phase; and an output transformer configured to receive the differential second signal and transform the differential second signal to a single-ended output signal. Methods of using such transmitters. Systems for manufacturing devices comprising such transmitters.
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公开(公告)号:US11664470B2
公开(公告)日:2023-05-30
申请号:US17863922
申请日:2022-07-13
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Rajendran Krishnasamy , Steven M. Shank , John J. Ellis-Monaghan , Ramsey Hazbun
IPC: H01L31/0352 , H01L31/0232 , H01L31/18 , H01L31/103 , H01L31/028
CPC classification number: H01L31/035281 , H01L31/028 , H01L31/02327 , H01L31/103 , H01L31/1808
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photodiode with an integrated, light focusing elements and methods of manufacture. The structure includes: a trench photodiode comprising a domed structure; and a doped material on the domed structure, the doped material having a concave underside surface.
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公开(公告)号:US11664432B2
公开(公告)日:2023-05-30
申请号:US16556796
申请日:2019-08-30
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor: Dirk Utess , Zhixing Zhao , Dominik M. Kleimaier , Irfan A. Saadat , Florent Ravaux
IPC: H01L27/092 , H01L29/417 , H01L29/40 , H01L29/78
CPC classification number: H01L29/41775 , H01L27/092 , H01L29/401 , H01L29/7845
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a layout optimization for radio frequency (RF) device performance and methods of manufacture. The structure includes: a first active device on a substrate; source and drain diffusion regions adjacent to the first active device; and a first contact in electrical contact with the source and drain diffusion regions and which is spaced away from the first active device to optimize a stress component in a channel region of the first active device.
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公开(公告)号:US11662523B2
公开(公告)日:2023-05-30
申请号:US17151955
申请日:2021-01-19
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yusheng Bian , Roderick A. Augur , Kenneth J. Giewont , Karen Nummy
CPC classification number: G02B6/305 , G02B6/0046 , G02B6/4298 , G02B6/12002 , G02B6/12004 , G02B2006/12147
Abstract: Structures including an edge coupler and methods of forming a structure including an edge coupler. The structure includes a waveguide core over a dielectric layer and a back-end-of-line stack over the dielectric layer and the waveguide core. The back-end-of-line stack includes a side edge and a truncated layer that is overlapped with a tapered section of the waveguide core. The truncated layer has a first end surface adjacent to the side edge and a second end surface above the tapered section of the waveguide core. The truncated layer is tapered from the first end surface to the second end surface.
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公开(公告)号:US20230163134A1
公开(公告)日:2023-05-25
申请号:US17533402
申请日:2021-11-23
Applicant: GlobalFoundries U.S. Inc.
Inventor: Navneet Jain , Nigel Chan , Mahbub Rashed
IPC: H01L27/12
CPC classification number: H01L27/1207
Abstract: Disclosed is a semiconductor structure including a substrate with a first type conductivity (e.g., a P− silicon substrate); a deep well region within the substrate and having a second type conductivity (e.g., a deep Nwell); alternating stripes of first and second well regions (e.g., of Pwells and Nwells with each Pwell positioned laterally between and abutting two Nwells) within the substrate above and traversing the deep well region; and an isolation region (e.g., an Nwell-type isolation region) dividing a first well region (e.g., a Pwell) into sections. Since the sectioned first well region has the first type conductivity and since the isolation region, the deep well region below, and the adjacent well regions on either side have the second type conductivity, the different sections of the sectioned well region are electrically isolated and devices formed on an insulator layer above the different sections can be subjected to different back-biasing conditions.
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