Method of measuring measurement target
    141.
    发明授权
    Method of measuring measurement target 有权
    测量目标的测量方法

    公开(公告)号:US09256912B2

    公开(公告)日:2016-02-09

    申请号:US12779599

    申请日:2010-05-13

    Abstract: In order to measure a measurement target on a PCB, height information of the PCB is acquired by using a first image photographed by illuminating a grating pattern light onto the PCB. Then, a first area protruding on the PCB by greater than a reference height is determined as the measurement target by using the height information. Thereafter, color information of the PCB is acquired by using a second image photographed by illuminating light onto the PCB. Then, the first color information of the first area determined as the measurement target out of the color information of the PCB is set as reference color information. Thereafter, the reference color information is compared with color information of an area except for the first area to judge whether the measurement target is formed in the area except for the first area. Thus, the measurement target may be accurately measured.

    Abstract translation: 为了测量PCB上的测量目标,通过使用通过将光栅图案光照射到PCB上拍摄的第一图像来获取PCB的高度信息。 然后,通过使用高度信息,将在PCB上突出大于参考高度的第一区域确定为测量目标。 此后,通过使用通过将光照射到PCB上拍摄的第二图像来获取PCB的颜色信息。 然后,将作为PCB的颜色信息中的测量对象确定的第一区域的第一颜色信息设置为参考颜色信息。 此后,将参考颜色信息与除了第一区域之外的区域的颜色信息进行比较,以判断在除了第一区域之外的区域中是否形成测量对象。 因此,可以精确地测量测量对象。

    Apparatus for optically inspecting electronic circuits
    142.
    发明授权
    Apparatus for optically inspecting electronic circuits 有权
    用于光学检查电子电路的装置

    公开(公告)号:US09036024B2

    公开(公告)日:2015-05-19

    申请号:US13190149

    申请日:2011-07-25

    Abstract: An installation of optical inspection of integrated circuits or the like, comprising: a planar conveyor along a first direction of the objects to be analyzed and a photographic system placed above an area of the conveyor and in a fixed position with respect thereto, the photographic system comprising at least one first set of digital cameras each comprising an orthogonal array of pixels, said cameras being aligned in a second direction different from the first one, the cameras being all oriented so that one of the orthogonal directions of their pixel array forms a first angle with the first direction.

    Abstract translation: 集成电路等的光学检查的安装,包括:沿着要分析的物体的第一方向的平面传送器和放置在传送器的区域上方并处于相对于其的固定位置的照相系统,照相系统 包括至少一个第一组数字照相机,每个第一组数字照相机各自包括正交阵列的像素,所述相机在与第一方向不同的第二方向上对准,所述照相机全部定向成使得它们的像素阵列的正交方向之一形成第一 与第一个方向成角度。

    Uniform epi-illumination of planar samples
    143.
    发明授权
    Uniform epi-illumination of planar samples 有权
    平面样品的均匀外照射

    公开(公告)号:US08985808B2

    公开(公告)日:2015-03-24

    申请号:US13740590

    申请日:2013-01-14

    Abstract: A planar sample, particularly of the type used in biological laboratories for detection and sometimes analysis of two-dimensional arrays of proteins, nucleic acids, or other biological species, is illuminated by epi-illumination using optically filtered line lights that are arranged along opposing parallel sides of a rectangle in which the sample array resides, with two coaxial line lights on each side of the rectangle, and the two on any given side being separated by a gap whose optimal width depends on the wavelength band transmitted by the optical filter. Surprisingly, the gap eliminates the peak in intensity at the center of the sample area and the decrease that occurs from the center outward that would otherwise occur with a single continuous filtered line light, producing instead a substantially uniform intensity along the direction parallel to the line lights.

    Abstract translation: 平面样品,特别是用于生物实验室中用于检测和有时分析蛋白质,核酸或其他生物物种的二维阵列的类型的样品,通过使用沿着相对的平行排列的光学滤波的线光照射外照射 样品阵列所在的矩形的边,在矩形的每一侧上具有两根同轴线灯,并且任意给定侧上的两根被间隔开,该间隙的最佳宽度取决于由滤光器传输的波长带。 令人惊奇的是,间隙消除了样品区域中心处的强度峰值以及从中心向外发生的减少,否则会出现与单个连续过滤线条光线相反的方向,沿着平行于该线条的方向产生基本均匀的强度 灯光

    Apparatus and method for fluorescence imaging and tomography using spatially structured illumination
    145.
    发明授权
    Apparatus and method for fluorescence imaging and tomography using spatially structured illumination 有权
    使用空间结构照明的荧光成像和断层摄影的装置和方法

    公开(公告)号:US08504140B2

    公开(公告)日:2013-08-06

    申请号:US12411432

    申请日:2009-03-26

    Abstract: An imaging system for imaging an object. More specifically, an imaging system enabling depth sectioned fluorescence imaging in a turbid medium, such as human or animal tissue, to substantially minimize the excitation radiation from reaching the detection beam path. The imaging system includes an arrangement of the excitation radiation source wherein the optical axis of the source is inclined relative to the optical axis of the camera, the optical plane of the source and the optical plane of the object are subject to a Scheimpflug condition, and the angle of inclination of the source is selected such that the excitation radiation incident upon the object is reflected to minimize excitation radiation from reaching the detection beam path.

    Abstract translation: 用于成像对象的成像系统。 更具体地说,一种能够在诸如人或动物组织的混浊介质中进行深度分割荧光成像的成像系统基本上最小化到达检测光束路径的激发辐射。 成像系统包括激发辐射源的布置,其中源的光轴相对于照相机的光轴倾斜,源的光学平面和物体的光学平面经受Scheimpflug条件,并且 选择源的倾斜角度使得入射到物体上的激发辐射被反射以使得到达检测光束路径的激发辐射最小化。

    Apparatus and method for fluorescence measurements using spatially structured illumination
    146.
    发明授权
    Apparatus and method for fluorescence measurements using spatially structured illumination 有权
    使用空间结构照明进行荧光测量的装置和方法

    公开(公告)号:US07994485B2

    公开(公告)日:2011-08-09

    申请号:US12556662

    申请日:2009-09-10

    Abstract: An apparatus and method for depth selected fluorescence measurements is provided. The apparatus may include a carrier for at least one sample substance; projection optics; an image capture module; a signal processor to transform the data image to provide depth selected fluorescence measurement for the at least one sample substance. The apparatus is arranged such that a first optical axis is inclined relative to a second optical axis so that the projection optics have an angle of inclination relative to the image plane. The angle of inclination is selected so that a component of excitation radiation incident upon, but not absorbed by, the at least one sample substance is scattered or reflected to reduce excitation radiation from reaching the detection beam path.

    Abstract translation: 提供了用于深度选择的荧光测量的装置和方法。 该装置可以包括用于至少一种样品物质的载体; 投影光学; 图像捕捉模块; 信号处理器,用于变换所述数据图像以提供所述至少一个样品物质的深度选择的荧光测量。 该装置被布置成使得第一光轴相对于第二光轴倾斜,使得投影光学元件相对于像平面具有倾斜角。 倾斜角被选择为使得入射到但不被该至少一个样品物质吸收的激发辐射的分量被散射或反射以减少激发辐射到达检测光束路径。

    Process and devices for optically sensing a specimen with a large depth of field
    147.
    发明授权
    Process and devices for optically sensing a specimen with a large depth of field 有权
    用于光学感测具有较大景深的试样的工艺和装置

    公开(公告)号:US07923672B2

    公开(公告)日:2011-04-12

    申请号:US12088610

    申请日:2006-09-14

    Abstract: A device for optically sensing a specimen with a large depth of field has a lighting module which illuminates a zone of the specimen during a predetermined measurement period with a pattern whose phase is modified in time during the measurement period, generating a specimen light to which a corresponding time-variable phase is imparted. The device also includes a detection module having a space-resolving detection zone which records the specimen zone and has multiple recording pixels, two analysis channels which can be connected to the recording pixels, and an analysis unit is connected to both analysis channels. A control unit is provided which, during the measurement period, connects each recording pixel in synchrony with the phase of the detected specimen light to the two analysis channels, alternatively, in such a way that the detected specimen light is divided into two portions phased in relation to one another, and the analysis unit calculates an optical split-image of the specimen zone on the basis of the two phased portions supplied to the analysis channels.

    Abstract translation: 用于光学感测具有大景深的样本的装置具有照明模块,其在预定测量周期期间以在测量周期内的相位被修改的图案照亮样本的区域,产生样本光,其中, 给予相应的时变相位。 该装置还包括具有记录样本区域并具有多个记录像素的空间分辨检测区域的检测模块,可连接到记录像素的两个分析通道,并且分析单元连接到两个分析通道。 提供了一种控制单元,在测量期间,将每个记录像素与检测到的样本光的相位同步地连接到两个分析通道,或者以这样的方式将检测到的样本光分成两部分 并且分析单元基于提供给分析通道的两个相位部分来计算样本区域的光学分割图像。

    Device and method for acquiring information on objective substance to be detected by detecting a change of wavelength characteristics on the optical transmittance
    148.
    发明授权
    Device and method for acquiring information on objective substance to be detected by detecting a change of wavelength characteristics on the optical transmittance 失效
    通过检测光透射率上的波长特性的变化来获取关于要检测的物质的信息的装置和方法

    公开(公告)号:US07659987B2

    公开(公告)日:2010-02-09

    申请号:US11659717

    申请日:2005-09-14

    Abstract: An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.

    Abstract translation: 一种信息获取装置,用于获取关于待检测的物质的信息,该信息获取装置设置有具有能够固定待检测的物体的表面的感测元件,并且使得施加的光响应于该检测元件的波长特性而改变其 要检测的目标物质的固定状态,光源和用于接收通过感测元件从光源发射的光的光接收装置,其中光接收装置和光源布置在同一基板上 使得已经从光源发射并已经透射通过感测元件的光可以被引导到光接收装置,并且具有用于改变入射到多个光中的每一个的每个光的波长区域的装置 - 接收装置安装在从光源到光接收装置的光路中。

    TRAY FLIPPER, TRAY, AND METHOD FOR PARTS INSPECTION
    149.
    发明申请
    TRAY FLIPPER, TRAY, AND METHOD FOR PARTS INSPECTION 有权
    托盘拖板,托盘和部件检查方法

    公开(公告)号:US20090078620A1

    公开(公告)日:2009-03-26

    申请号:US12099774

    申请日:2008-04-08

    Abstract: Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a flipper mechanism. After being inspected at a first station, a tray-transfer device moves the tray from the first inspection station to a flipper mechanism. The flipper mechanism includes two jaws, a mover, and a rotator. The flipper mechanism turns the devices over and places the devices in a second tray so that another surface of the device can be inspected. A second tray-transfer device moves the second tray from the flipper to a second inspection station. The mover of the flipper mechanism removes the tray from the first inspection surface and places a tray at the second inspection surface.

    Abstract translation: 生产线包括用于监测生产零件质量的检测系统。 用于制造半导体器件的制造线通常检查每个制造的部件。 获得的信息用于解决半导体晶圆厂的制造问题。 用于检查装置的机器视觉系统包括翻转机构。 在第一站检查后,托盘传送装置将托盘从第一检查站移动到翻动机构。 导板机构包括两个钳口,一个动子和一个旋转器。 导板机构将装置转过来并将装置放置在第二托盘中,使得可以检查装置的另一个表面。 第二托盘传送装置将第二托盘从托板移动到第二检查台。 导板机构的移动器从第一检查表面移除托盘,并将托盘放置在第二检查表面。

    Device and Method for Optically Sensing a Specimen with a Large Depth of Field
    150.
    发明申请
    Device and Method for Optically Sensing a Specimen with a Large Depth of Field 审中-公开
    用于光学感测具有大景深的样本的装置和方法

    公开(公告)号:US20080166041A1

    公开(公告)日:2008-07-10

    申请号:US12051352

    申请日:2008-03-19

    Abstract: A device for optically sensing a specimen with a large depth of field has a lighting module which illuminates a zone of the specimen during a predetermined measurement period with a pattern whose phase is modified in time during the measurement period, generating a specimen light to which a corresponding time-variable phase is imparted. The device also includes a detection module having a space-resolving detection zone which records the specimen zone and has multiple recording pixels, two analysis channels which can be connected to the recording pixels, and an analysis unit is connected to both analysis channels. A control unit is provided which, during the measurement period, connects each recording pixel in synchrony with the phase of the detected specimen light to the two analysis channels, alternatively, in such a way that the detected specimen light is divided into two portions phased in relation to one another, and the analysis unit calculates an optical split-image of the specimen zone on the basis of the two phased portions supplied to the analysis channels.

    Abstract translation: 用于光学感测具有大景深的样本的装置具有照明模块,其在预定测量周期期间以在测量周期内的相位被修改的图案照亮样本的区域,产生样本光,其中, 给予相应的时变相位。 该装置还包括具有记录样本区域并具有多个记录像素的空间分辨检测区域的检测模块,可连接到记录像素的两个分析通道,并且分析单元连接到两个分析通道。 提供了一种控制单元,其在测量期间将每个记录像素与检测到的样本光的相位同步地连接到两个分析通道,或者以这样一种方式将检测到的样本光分为两部分 并且分析单元基于提供给分析通道的两个相位部分来计算样本区域的光学分割图像。

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