公开(公告)号：US20100004887A1

公开(公告)日：2010-01-07

申请号：US12380674

申请日：2009-03-02

Applicant: Johnathan Martin Mooney

Inventor： Johnathan Martin Mooney

IPC: G01J3/40 ,  G06F19/00

CPC classification number: G01J3/02 ,  G01J3/0237 ,  G01J3/0289 ,  G01J3/14 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/2889

Abstract: Apparatus for registering the spectral signature of a dynamic source event include an imaging-sensor array configured to register electromagnetic energy over a predetermined range of electromagnetic wavelengths and an optical system configured for imaging onto the imaging-sensor array a dispersion pattern of electromagnetic energy emitted from a source event external to the optical system. The optical system includes (i) a focusing element and (ii) a selected set of optical dispersion apparatus. Among the optical dispersion apparatus are at least a first optically dispersive element that disperses a first selected set of wavelengths within the sensitivity range of the imaging-sensor array and at least a second optically dispersive element that disperses a second selected set of wavelengths within the sensitivity range of the imaging-sensor array such that wavelengths emitted from a source event that are within the first and second selected sets of wavelengths impinge simultaneously upon the imaging-sensor array along, respectively, a first extrapolated axis and a second extrapolated axis that is non-parallel to the first extrapolated axis.

Abstract translation: 用于记录动态源事件的光谱特征的装置包括被配置为在电磁波长的预定范围内记录电磁能量的成像传感器阵列和被配置用于在成像传感器阵列上成像的电磁能量的散射图案 光学系统外部的源事件。 光学系统包括（i）聚​​焦元件和（ii）所选择的一组光学分散设备。 在光学分散装置中，至少是第一光学色散元件，其将成像传感器阵列的灵敏度范围内的第一选定组的波长分散，并且将至少第二光学色散元件分散在灵敏度范围内的第二选定组合 成像传感器阵列的范围使得从源事件发射的波长在第一和第二选定组合波长内同时在成像传感器阵列上分别沿着第一外插轴和第二外推轴非对称 平行于第一外推轴。

公开(公告)号：US20090316146A1

公开(公告)日：2009-12-24

申请号：US12551375

申请日：2009-08-31

Applicant: BURT JAY BEARDSLEY ,  WENDY LYNN BEARDSLEY

Inventor： BURT JAY BEARDSLEY ,  WENDY LYNN BEARDSLEY

IPC: G01J3/40

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0272 ,  G01J3/18 ,  G01J3/1809 ,  G01J3/2803 ,  G01J3/2823

Abstract: A portable spectrograph including a primary mirror, a secondary mirror, and a tertiary mirror forming a TMA having a common vertex axis, a diffraction grating, and a dispersive prism, where the portable spectrograph can detect wavelengths between 150 nm and 1.1 μm. The portable spectrograph also may include a collimating mirror and an entrance aperture, which form an interchangeable module. Radiation received through the entrance aperture is reflected in a collimated pattern towards an aperture stop. The diffraction grating, located between the collimating mirror and prism, diffracts radiation passed through the aperture stop into multiple beams directed onto the prism. A flat mirror, located to one side of the vertex axis receives and reflects the multiple beams exiting the prism onto the primary mirror, where they are reflected onto the secondary mirror. The secondary mirror reflects the beams to the tertiary mirror where they are reflected onto an image plane located on the other side of the vertex axis.

Abstract translation: 便携式光谱仪包括主镜，副镜和形成具有共同顶点轴的TMA的副镜，衍射光栅和色散棱镜，其中便携式光谱仪可以检测150nm和1.1μm之间的波长。 便携式光谱仪还可以包括形成可互换模块的准直镜和入口孔。 通过入射孔收到的辐射以朝向孔径光阑的准直图案反射。 位于准直镜和棱镜之间的衍射光栅将通过孔径光阑的辐射衍射成多个指向棱镜的光束。 位于顶点轴的一侧的平面镜将接收并反射离开棱镜的多个光束到主镜上，并将反射镜反射到次镜上。 次级反射镜将光束反射到第三级反射镜，它们被反射到位于顶点轴线另一侧的图像平面上。

公开(公告)号：US07636154B1

公开(公告)日：2009-12-22

申请号：US11614676

申请日：2006-12-21

Applicant: Howard N. LaValley ,  Robert Almassy

Inventor： Howard N. LaValley ,  Robert Almassy

IPC: G01N1/00 ,  G01N33/28 ,  G01B11/16 ,  G01J3/40

CPC classification number: G01N21/65 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/36 ,  G01N21/64 ,  G01N33/22 ,  G01N2021/1793 ,  G01N2201/0221

Abstract: A detection system and method are provided having vehicle-mounted and manportable mobile surveillance capabilities with minimal equipment redundancy. The system comprises a vehicle-mounted sensor unit, a hand-held unit, a manportable unit and a vehicle-mounted air collector unit. The vehicle-mounted sensor unit comprises a spectroscopy subsystem that is configured to direct light onto a surface outside the vehicle and to capture scattered optical energy from the surface outside the vehicle while the vehicle is moving. The hand-held unit may be removably mounted to the air collector unit to interrogate airborne particles in collected air. The hand-held unit is removable from the air collector unit and is connected to the manportable unit by a cable so as to form an integrated portable detection system for mobile surveillance away from the vehicle by a user.

Abstract translation: 提供具有车载和可移动监控能力的检测系统和方法，具有最小的设备冗余度。 该系统包括车载传感器单元，手持单元，人造单元和车载空气收集器单元。 车载传感器单元包括光谱子系统，其被配置为将光引导到车辆外部的表面上，并且在车辆移动时从车辆外部的表面捕获散射的光能。 手持单元可以可移除地安装到空气收集器单元以询问收集的空气中的空气中的颗粒。 手持单元可从空气收集器单元移除，并通过电缆连接到人造单元，从而形成用于用户从车辆移动监视的集成便携式检测系统。

公开(公告)号：US20090279074A1

公开(公告)日：2009-11-12

申请号：US12152220

申请日：2008-05-12

Applicant: George A. Seaver

Inventor： George A. Seaver

IPC: G01N21/00 ,  G01J3/00 ,  G01J3/40

CPC classification number: G01N21/4133 ,  G01N21/43 ,  G01N21/431 ,  G01N2021/434 ,  G01N2021/438

Abstract: A critical wavelength refractometer is provided. A broadband light source (413) is optically coupled to a sensor (401), the sensor having at least one sensing surface (407). As the light from the broadband light source passes through the sensor, it undergoes multiple internal reflections against the sensing surface. Due to the index of refraction of the material in contact with the sensing surface, a portion of the light passing through the sensor is reflected while a second portion of the light is transmitted through the sensing surface and into the material. A detector (421) coupled to the sensor measures the spectral intensity of the light that passes completely through the sensor after having undergone the multiple internal reflections against the sensing surface. A microprocessor (423) coupled to the detector determines the critical wavelength based on the spectral intensity measurement, thereby allowing the index of refraction of the material to be determined.

Abstract translation: 提供了一种临界波长折射计。 宽带光源（413）光耦合到传感器（401），所述传感器具有至少一个感测表面（407）。 当来自宽带光源的光穿过传感器时，它经受对感测表面的多次内部反射。 由于与感测表面接触的材料的折射率，通过传感器的一部分光被反射，同时光的第二部分透射通过感测表面并进入材料。 耦合到传感器的检测器（421）测量经过对传感表面的多次内部反射之后完全通过传感器的光的光谱强度。 耦合到检测器的微处理器（423）基于光谱强度测量来确定临界波长，从而允许确定材料的折射率。

公开(公告)号：US20090051914A1

公开(公告)日：2009-02-26

申请号：US12083429

申请日：2006-10-11

Applicant: Thorsten Trupke ,  Robert Andrew Bardos

Inventor： Thorsten Trupke ,  Robert Andrew Bardos

IPC: G01J3/40

CPC classification number: G01N21/6489 ,  F21Y2115/10 ,  G01N21/6456 ,  G01N21/8851 ,  G01N2021/8887 ,  H01L22/14

Abstract: Methods (600) and systems (100) for inspecting an indirect bandgap semiconductor structure (140) are described. A light source (110) generates light (612) suitable for inducing photoluminescence in the indirect bandgap semiconductor structure (140). A short-pass filter unit (114) reduces long-wavelength light of the generated light above a specified emission peak. A collimator (112) collimates (616) the light. A large area of the indirect bandgap semiconductor structure (140) is substantially uniformly and simultaneously illuminated (618) with the collimated, short-pass filtered light. An image capture device (130) captures (620) images of photoluminescence simultaneously induced by the substantially uniform, simultaneous illumination incident across the large area of the indirect bandgap semiconductor structure. The photoluminescence images are image processed (622) to quantify spatially resolved specified electronic properties of the indirect bandgap semiconductor structure (140) using the spatial variation of the photoluminescence induced in the large area.

Abstract translation: 描述了用于检查间接带隙半导体结构（140）的方法（600）和系统（100）。 光源（110）产生适于在间接带隙半导体结构（140）中诱导光致发光的光（612）。 短路滤波器单元（114）将产生的光的长波长光减少到特定发射峰以上。 准直器（112）准直（616）光。 间接带隙半导体结构（140）的大面积基本均匀地并且被同步地照射（618）并且被准直的短路滤波的光。 图像捕获装置（130）捕获（620）由间接带隙半导体结构的大面积上基本均匀的同时照射入射引起的光致发光图像。 使用在大面积中诱导的光致发光的空间变化来对光致发光图像进行图像处理（622）以量化间接带隙半导体结构（140）的空间分辨的指定电子特性。

公开(公告)号：US20080278720A1

公开(公告)日：2008-11-13

申请号：US11798147

申请日：2007-05-10

Applicant: Jwh Lee ,  Shih-Fang Wu ,  Zi-Yu Liu ,  Zhe-Rui Zhang

Inventor： Jwh Lee ,  Shih-Fang Wu ,  Zi-Yu Liu ,  Zhe-Rui Zhang

IPC: G01J3/40

CPC classification number: G01J3/46 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0291 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/427 ,  G01J3/462

Abstract: A digital spectrophotometer and a spectrologial method for determining spectrum wavelength of an unknown illuminant, and the digital spectrophotometer has a base, an operating assembly and a photographic assembly. The operating assembly is attached to the base and has an operating pedestal, a rotating frame and a spectrometer. The rotating frame is connected rotatably to the operating pedestal. The spectrometer is connected solidly to the rotating frame. The photographic assembly is connected to the operating assembly. The spectrologial method is calculated the diffraction angle α i and the wavelength of the unknown illuminant by putting the parameters into the into the first and second functions.

Abstract translation: 数字分光光度计和用于确定未知光源的光谱波长的分光光度法，数字分光光度计具有基座，操作组件和照相组件。 操作组件附接到基座并具有操作基座，旋转框架和光谱仪。 旋转框架可旋转地连接到操作基座。 光谱仪牢固地连接到旋转框架上。 摄影组件连接到操作组件。 通过将参数放入第一和第二功能中来计算分光方法的衍射角αi和未知光源的波长。

公开(公告)号：US20080239308A1

公开(公告)日：2008-10-02

申请号：US12059464

申请日：2008-03-31

Applicant: Abraham Ravid ,  Boguslaw A. Swedek ,  Dominic J. Benvegnu ,  Jeffrey Drue David ,  Jun Qian ,  Sidney P. Huey ,  Ingemar Carlsson ,  Lakshmanan Karuppiah ,  Harry Q. Lee

Inventor： Abraham Ravid ,  Boguslaw A. Swedek ,  Dominic J. Benvegnu ,  Jeffrey Drue David ,  Jun Qian ,  Sidney P. Huey ,  Ingemar Carlsson ,  Lakshmanan Karuppiah ,  Harry Q. Lee

IPC: G01J3/40

CPC classification number: G01N21/31 ,  G01N21/253 ,  H01L21/67161 ,  H01L21/67207 ,  H01L21/67253 ,  H01L21/67766

Abstract: A substrate processing system includes a processing module to process a substrate, a factory interface module configured to accommodate at least one cassette for holding the substrate, a spectrographic monitoring system positioned in or adjoining the factory interface module, and a substrate handler to transfer the substrate between the at least one cassette, the spectrographic monitoring system and the processing module.

Abstract translation: 衬底处理系统包括处理衬底的处理模块，被配置为容纳用于保持衬底的至少一个盒的工厂接口模块，位于工厂接口模块中或邻接工厂接口模块的光谱监测系统，以及衬底处理器，用于传送衬底 在所述至少一个盒，所述光谱监视系统和所述处理模块之间。

公开(公告)号：US20080204744A1

公开(公告)日：2008-08-28

申请号：US11995362

申请日：2006-07-11

Applicant: Jose Mir ,  R. Mark Boysel

Inventor： Jose Mir ,  R. Mark Boysel

IPC: G01J3/40

CPC classification number: H04N5/2254 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/2823 ,  G01J2003/1239 ,  H04N5/332 ,  H04N5/3415

Abstract: High speed, optically-multiplexed, hyperspectral imagers and methods for producing multiple, spectrally-filtered image information of a scene. In a preferred embodiment, an array of imaging lenslets project multiple images of a scene along parallel optical paths which are then collimated, filtered into distinct wavelengths, and focused onto an array of image sensors. A digital image formatter converts output data from the image sensors into hyperspectral image information of the scene.

Abstract translation: 高速，光学复用，高光谱成像器和用于产生场景的多个频谱滤波图像信息的方法。 在优选实施例中，成像小透镜阵列沿并行光路投影场景的多个图像，然后将其平行化，过滤成不同的波长，并聚焦到图像传感器阵列上。 数字图像格式化器将来自图像传感器的输出数据转换为场景的高光谱图像信息。

公开(公告)号：US20080062406A1

公开(公告)日：2008-03-13

申请号：US11930594

申请日：2007-10-31

Applicant: Moshe FINAROV ,  Boaz BRILL

Inventor： Moshe FINAROV ,  Boaz BRILL

IPC: G01N21/00 ,  G01J3/40 ,  G01N21/55

CPC classification number: G03F7/70616 ,  G01B11/24 ,  G01N21/4788 ,  G01N21/55 ,  G03F1/84

Abstract: A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure.

公开(公告)号：US20060227321A1

公开(公告)日：2006-10-12

申请号：US10907591

申请日：2005-04-07

Applicant: Siddhartha Panda ,  Michael Sievers ,  Richard Wise

Inventor： Siddhartha Panda ,  Michael Sievers ,  Richard Wise

IPC: G01J3/40

CPC classification number: G01N23/2273

Abstract: A non-destructive in-situ elemental profiling of a layer in a set of layers method and system are disclosed. In one embodiment, a first emission of a plurality of photoelectrons is caused from the layer to be elementally profiled. An elemental profile of the layer is determined based on the emission. In another embodiment, a second emission of a plurality of photoelectrons is also received from the layer, and an elemental profile is determined by comparison of the resulting signals. A process that is altering the layer can then be controlled “on-the-fly” to obtain a desired material composition. Since the method can be employed in-situ and is non-destructive, it reduces turn around time and lowers wafer consumption. The invention also records the composition of all processed wafers, hence, removing the conventional statistical sampling problem.

Abstract translation: 公开了一组层中的层的非破坏性原位元素分析方法和系统。 在一个实施例中，多个光电子的第一次发射是从该层进行元素分析。 基于发射确定层的元素分布。 在另一个实施例中，也从该层接收多个光电子的第二次发射，并且通过比较所得到的信号来确定元素分布。 然后可以“即时”控制改变层的方法以获得所需的材料组成。 由于该方法可以原位使用并且是非破坏性的，所以可以减少周转时间并降低晶片消耗。 本发明还记录了所有加工晶片的组成，因此，去除了常规统计抽样问题。