公开(公告)号：US07613591B2

公开(公告)日：2009-11-03

申请号：US11835151

申请日：2007-08-07

Applicant: Igor Y. Khandros ,  Benjamin N. Eldridge

Inventor： Igor Y. Khandros ,  Benjamin N. Eldridge

IPC: G01R31/00 ,  G06F19/00

CPC classification number: G01R31/2884 ,  G01R31/3025 ,  G01R31/31907

Abstract: A central test facility transmits wirelessly test data to a local test facility, which tests electronic devices using the test data. The local test facility transmits wirelessly response data generated by the electronic devices back to the central test facility, which analyzes the response data to determine which electronic devices passed the testing. The central test facility may provide the results of the testing to other entities, such as a design facility where the electronic devices were designed or a manufacturing facility where the electronic devices where manufactured. The central test facility may accept requests for test resources from any of a number of local test facilities, schedule test times corresponding to each test request, and at a scheduled test time, wirelessly transmits test data to a corresponding local test facility.

Abstract translation: 中央测试设备将无线测试数据传输到本地测试设备，该测试设备使用测试数据测试电子设备。 本地测试设备将由电子设备生成的无线响应数据发送回中央测试设备，分析响应数据以确定哪些电子设备通过测试。 中央测试设备可以向其他实体提供测试结果，例如设计电子设备的设计设施或其中制造的电子设备的制造设施。 中央测试设备可以接受来自任何本地测试设施的测试资源的请求，对应于每个测试请求的调度测试时间，并且在预定的测试时间，将测试数据无线地传输到相应的本地测试设施。

公开(公告)号：US07593872B2

公开(公告)日：2009-09-22

申请号：US11464760

申请日：2006-08-15

Applicant: Benjamin N. Eldridge ,  Mark W. Brandemuehl ,  Stefan Graef ,  Yves Parent

Inventor： Benjamin N. Eldridge ,  Mark W. Brandemuehl ,  Stefan Graef ,  Yves Parent

IPC: G06Q30/00

CPC classification number: G01R3/00 ,  G01R1/073 ,  G01R1/07342 ,  G06Q30/0609 ,  G06Q30/0621 ,  G06Q30/0633 ,  G06Q50/188

Abstract: A method and system for designing a probe card from data provided by prospective customers via the Internet is provided. Design specifications are entered into the system by prospective customers and compiled into a database. The collective feasibility of each set of design specifications is determined by an automated computer system and communicated to the prospective customer. If feasible, additional software enables prospective customers to create verification packages according to their respective design specifications. These verification packages further consist of drawing files visually describing the final design and verification files confirming wafer bonding pad data. Verification packages are reviewed and forwarded to an applications engineer after customer approval. An interactive simulation of probe card performance is also provided. Data on probe card performance is incorporated into an overall modeling exercise, which includes not only the probe card, but data on the device(s) under test and wafer, as well as data on automated test equipment.

Abstract translation: 提供了一种通过互联网从潜在客户提供的数据设计探针卡的方法和系统。 设计规范由潜在客户输入系统并编译成数据库。 每套设计规范的集体可行性由自动化计算机系统确定，并传达给潜在客户。 如果可行，附加软件可使潜在客户根据各自的设计规范创建验证包。 这些验证包还包括可视化地描述确认晶圆键合焊盘数据的最终设计和验证文件的绘图文件。 在客户批准后，验证包将被审核并转发给应用工程师。 还提供了探针卡性能的交互式仿真。 探针卡性能数据被纳入整体建模练习中，其中不仅包括探针卡，还包括被测设备和晶片上的数据，以及自动测试设备的数据。

公开(公告)号：US07592821B2

公开(公告)日：2009-09-22

申请号：US11877466

申请日：2007-10-23

Applicant: Benjamin N. Eldridge ,  Gary W. Grube ,  Eric D. Hobbs ,  Gaetan L. Mathieu ,  Makarand S. Shinde ,  Alexander H. Slocum ,  A. Nicholas Sporck ,  Thomas N. Watson

Inventor： Benjamin N. Eldridge ,  Gary W. Grube ,  Eric D. Hobbs ,  Gaetan L. Mathieu ,  Makarand S. Shinde ,  Alexander H. Slocum ,  A. Nicholas Sporck ,  Thomas N. Watson

IPC: G01R31/02

CPC classification number: G01R31/2874 ,  G01R31/2863 ,  G01R31/2889 ,  Y10T29/5313

Abstract: A probe card assembly can include a probe head assembly having probes for contacting an electronic device to be tested. The probe head assembly can be electrically connected to a wiring substrate and mechanically attached to a stiffener plate. The wiring substrate can provide electrical connections to a testing apparatus, and the stiffener plate can provide structure for attaching the probe card assembly to the testing apparatus. The stiffener plate can have a greater mechanical strength than the wiring substrate and can be less susceptible to thermally induced movement than the wiring substrate. The wiring substrate may be attached to the stiffener plate at a central location of the wiring substrate. Space may be provided at other locations where the wiring substrate is attached to the stiffener plate so that the wiring substrate can expand and contract with respect to the stiffener plate.

Abstract translation: 探针卡组件可以包括具有用于接触要测试的电子设备的探针的探针头组件。 探针头组件可以电连接到布线基板并且机械地附接到加强板。 布线基板可以提供到测试装置的电连接，并且加强板可以提供用于将探针卡组件附接到测试装置的结构。 加强板可以具有比布线基板更大的机械强度，并且可以比布线基板更不易受热引起的移动。 布线基板可以在布线基板的中心位置处附接到加强板。 可以在将布线基板附接到加强板的其他位置处设置空间，使得布线基板能够相对于加强板膨胀和收缩。

公开(公告)号：US20090224785A1

公开(公告)日：2009-09-10

申请号：US12044893

申请日：2008-03-07

Applicant: Keith J. Breinlinger ,  Benjamin N. Eldridge ,  David P. Pritzkau

Inventor： Keith J. Breinlinger ,  Benjamin N. Eldridge ,  David P. Pritzkau

IPC: G01R31/26 ,  H05K3/00

CPC classification number: G01R1/06772 ,  G01R1/06716 ,  G01R1/06744 ,  G01R1/07342 ,  Y10T29/49147

Abstract: Devices and methods for providing, making, and/or using an electronic apparatus having a wall structure adjacent a resilient contact structure on a substrate. The electronic apparatus can include a substrate and a plurality of electrically conductive resilient contact structures, which can extend from the substrate. A first of the contact structures can be part of an electrical path through the electronic apparatus. A first electrically conductive wall structure can also extend from the substrate, and the first wall structure can be disposed adjacent one of the contact structures. The first wall structure can be electrically connected to a return current path within the electronic apparatus for an alternating current signal or power on the first contact structure.

Abstract translation: 用于提供，制造和/或使用具有邻近基板上的弹性接触结构的壁结构的电子设备的设备和方法。 电子设备可以包括基板和可从基板延伸的多个导电弹性接触结构。 接触结构中的第一个可以是通过电子设备的电路径的一部分。 第一导电壁结构也可以从衬底延伸，并且第一壁结构可以邻近一个接触结构设置。 第一壁结构可以电连接到电子设备内的回流电路，用于交流信号或第一接触结构上的功率。

公开(公告)号：US07560941B2

公开(公告)日：2009-07-14

申请号：US11548183

申请日：2006-10-10

Applicant: Rod Martens ,  Benjamin N. Eldridge ,  Gary W. Grube ,  Ken S. Matsubayashi ,  Richard A. Larder ,  Makarand S. Shinde ,  Gaetan L. Mathieu

Inventor： Rod Martens ,  Benjamin N. Eldridge ,  Gary W. Grube ,  Ken S. Matsubayashi ,  Richard A. Larder ,  Makarand S. Shinde ,  Gaetan L. Mathieu

IPC: G01R31/02

CPC classification number: G01R31/2891 ,  G01R1/07342 ,  G01R31/2886

Abstract: The present invention discloses a method and system compensating for thermally induced motion of probe cards used in testing die on a wafer. A probe card incorporating temperature control devices to maintain a uniform temperature throughout the thickness of the probe card is disclosed. A probe card incorporating bi-material stiffening elements which respond to changes in temperature in such a way as to counteract thermally induced motion of the probe card is disclosed including rolling elements, slots and lubrication. Various means for allowing radial expansion of a probe card to prevent thermally induced motion of the probe card are also disclosed. A method for detecting thermally induced movement of the probe card and moving the wafer to compensate is also disclosed.

Abstract translation: 本发明公开了一种补偿晶片上测试晶片使用的探针卡的热诱导运动的方法和系统。 公开了一种结合温度控制装置的探针卡，以在探针卡的整个厚度上保持均匀的温度。 公开了一种包括双材料加强元件的探针卡，其包括滚动元件，槽和润滑，以响应于温度变化，以抵消探针卡的热诱导运动。 还公开了用于允许探针卡的径向膨胀以防止探针卡的热诱导运动的各种装置。 还公开了一种用于检测探针卡的热诱导运动并移动晶片进行补偿的方法。

公开(公告)号：US07557596B2

公开(公告)日：2009-07-07

申请号：US11000586

申请日：2004-11-30

Applicant: Benjamin N. Eldridge ,  Igor Y. Khandros ,  David V. Pedersen ,  Ralph G. Whitten

Inventor： Benjamin N. Eldridge ,  Igor Y. Khandros ,  David V. Pedersen ,  Ralph G. Whitten

IPC: G01R31/02

CPC classification number: G01R1/07307 ,  G01R1/07342 ,  G01R1/07371 ,  G01R31/2884 ,  G01R31/2886 ,  H01L22/32 ,  H01L22/34 ,  H01L23/49811 ,  H01L24/05 ,  H01L2224/0401 ,  H01L2224/05553 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/06136 ,  H01L2224/13 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01076 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/10253 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043 ,  H05K3/20 ,  H05K3/3421 ,  H01L2924/00014 ,  H01L2924/00

Abstract: One embodiment of the present invention concerns a test assembly for testing product circuitry of a product die. In one embodiment, the test assembly includes at test die and an interconnection substrate for electrically coupling the test die to a host controller that communicates with the test die. The test die may be designed according to a design methodology that includes the step of concurrently designing test circuitry and a product circuitry in a unified design. The test circuitry can be designed to provide a high degree of fault coverage for the corresponding product circuitry generally without regard to the amount of silicon area that will be required by the test circuitry. The design methodology then partitions the unified design into the test die and the product die. The test die includes the test circuitry and the product die includes the product circuitry. The product and test die may then be fabricated on separate semiconductor wafers. By partitioning the product circuitry and test circuitry into separate die, embedded test circuitry can be either eliminated or minimized on the product die. This will tend to decrease the size of the product die and decrease the cost of manufacturing the product die while maintaining a high degree of test coverage of the product circuits within the product die. The test die can be used to test multiple product die on one or more wafers.

Abstract translation: 本发明的一个实施例涉及一种用于测试产品模具的产品电路的测试组件。 在一个实施例中，测试组件包括在测试模具和用于将测试模具电耦合到与测试模具通信的主机控制器的互连衬底。 测试模具可以根据设计方法设计，包括在统一设计中同时设计测试电路和产品电路的步骤。 测试电路可以设计成为相应的产品电路提供高度的故障覆盖，通常不考虑测试电路所需的硅面积的量。 然后，设计方法将统一设计分为测试模具和产品模具。 测试芯片包括测试电路，产品芯片包括产品电路。 然后可以在单独的半导体晶片上制造产品和测试裸片。 通过将产品电路和测试电路划分为单独的管芯，可以在产品管芯上消除或最小化嵌入式测试电路。 这将倾向于减小产品模具的尺寸并降低制造产品模具的成本，同时保持产品模具内的产品电路的高度测试覆盖。 测试模具可用于在一个或多个晶片上测试多个产品模具。

公开(公告)号：US20090158586A1

公开(公告)日：2009-06-25

申请号：US12343260

申请日：2008-12-23

Applicant: Eric D. Hobbs ,  Benjamin N. Eldridge ,  Lunyu Ma ,  Gaetan L. Mathieu ,  Steven T. Murphy ,  Makarand S. Shinde ,  Alexander H. Slocum

Inventor： Eric D. Hobbs ,  Benjamin N. Eldridge ,  Lunyu Ma ,  Gaetan L. Mathieu ,  Steven T. Murphy ,  Makarand S. Shinde ,  Alexander H. Slocum

IPC: G01R3/00

CPC classification number: G01R31/2886 ,  G01R1/073 ,  G01R31/31905 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49147 ,  Y10T29/49208 ,  Y10T29/49222

Abstract: A probe card assembly comprises multiple probe substrates attached to a mounting assembly. Each probe substrate includes a set of probes, and together, the sets of probes on each probe substrate compose an array of probes for contacting a device to be tested. Adjustment mechanisms are configured to impart forces to each probe substrate to move individually each substrate with respect to the mounting assembly. The adjustment mechanisms may translate each probe substrate in an “x,” “y,” and/or “z” direction and may further rotate each probe substrate about any one or more of the forgoing directions. The adjustment mechanisms may further change a shape of one or more of the probe substrates. The probes can thus be aligned and/or planarized with respect to contacts on the device to be tested.

Abstract translation: 探针卡组件包括附接到安装组件的多个探针基板。 每个探针衬底包括一组探针，并且每个探针衬底上的探针组合在一起组成一组探针，用于接触待测试的器件。 调整机构构造成赋予每个探针基板以相对于安装组件分别移动每个基板的力。 调节机构可以将每个探针基板转换成“x”，“y”和/或“z”方向，并且可以进一步围绕前述方向上的任何一个或多个旋转每个探针基板。 调节机构可以进一步改变一个或多个探针基板的形状。 因此，探针可以相对于要测试的装置上的触点对准和/或平坦化。

公开(公告)号：US20090134897A1

公开(公告)日：2009-05-28

申请号：US12360433

申请日：2009-01-27

Applicant: Timothy E. Cooper ,  Benjamin N. Eldridge ,  Carl V. Reynolds ,  Ravindra Vaman Shenoy

Inventor： Timothy E. Cooper ,  Benjamin N. Eldridge ,  Carl V. Reynolds ,  Ravindra Vaman Shenoy

IPC: G01R31/02

CPC classification number: G01R31/2887 ,  G01R3/00 ,  G01R31/2886

Abstract: Methods and apparatuses for testing semiconductor devices are disclosed. Over travel stops limit over travel of a device to be tested with respect to probes of a probe card assembly. Feedback control techniques are employed to control relative movement of the device and the probe card assembly. A probe card assembly includes flexible base for absorbing excessive over travel of the device to be tested with respect to the probe card assembly.

Abstract translation: 公开了用于测试半导体器件的方法和装置。 相对于探针卡组件的探针，超行程停止限制要测试的设备的行程。 采用反馈控制技术来控制装置和探针卡组件的相对运动。 探针卡组件包括用于吸收相对于探针卡组件的待测试装置的过度行进的柔性基座。

公开(公告)号：US07524194B2

公开(公告)日：2009-04-28

申请号：US11551621

申请日：2006-10-20

Applicant: Benjamin N. Eldridge ,  Stuart W. Wenzel

Inventor： Benjamin N. Eldridge ,  Stuart W. Wenzel

IPC: H01R12/00

CPC classification number: H05K7/1069 ,  G01R1/06727 ,  G01R1/06733 ,  G01R1/07342 ,  G01R3/00 ,  H01L23/4822 ,  H01L24/72 ,  H01L2924/01006 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/30107 ,  H05K3/4092 ,  Y10T29/49151 ,  Y10T29/4922

Abstract: Improved lithographic type microelectronic spring structures and methods are disclosed, for providing improved tip height over a substrate, an improved elastic range, increased strength and reliability, and increased spring rates. The improved structures are suitable for being formed from a single integrated layer (or series of layers) deposited over a molded sacrificial substrate, thus avoiding multiple stepped lithographic layers and reducing manufacturing costs. In particular, lithographic structures that are contoured in the z-direction are disclosed, for achieving the foregoing improvements. For example, structures having a U-shaped cross-section, a V-shaped cross-section, and/or one or more ribs running along a length of the spring are disclosed. The present invention additionally provides a lithographic type spring contact that is corrugated to increase its effective length and elastic range and to reduce its footprint over a substrate, and springs which are contoured in plan view. The present invention further provides combination (both series and parallel) electrical contacts tips for lithographic type microelectronic spring structures. The microelectronic spring structures according to the present invention are particularly useful for making very fine pitch arrays of electrical connectors for use with integrated circuits and other substrate-mounted electronic devices, because their performance characteristics are enhanced, while at the same time, they may be manufactured at greatly reduced costs compared to other lithographic type microelectronic spring structures.

Abstract translation: 公开了改进的光刻型微电子弹簧结构和方法，用于提供改善的基板上的尖端高度，改进的弹性范围，增加的强度和可靠性以及增加的弹簧刚度。 改进的结构适于由沉积在模制的牺牲衬底上的单个集成层（或一系列层）形成，从而避免多个阶梯式光刻层并降低制造成本。 特别地，为了实现上述改进，公开了在z方向上成形的平版印刷结构。 例如，公开了具有沿着弹簧的长度延伸的U形横截面，V形横截面和/或一个或多个肋的结构。 本发明另外提供了一种平版印刷型弹性接触件，其被波纹化以增加其有效长度和弹性范围并减小其在基底上的覆盖面，以及在俯视图中成形的弹簧。 本发明还提供了用于光刻型微电子弹簧结构的组合（串联和并联）电接触尖端。 根据本发明的微电子弹簧结构特别适用于制造用于集成电路和其它基板安装的电子设备的电连接器的非常精细的间距阵列，因为它们的性能特性被增强，同时它们可以是 与其他光刻型微电子弹簧结构相比大大降低了成本。

公开(公告)号：US20090085592A1

公开(公告)日：2009-04-02

申请号：US12331163

申请日：2008-12-09

Applicant: Timothy E. Cooper ,  Benjamin N. Eldridge ,  Igor Y. Khandros ,  Rod Martens ,  Gaetan L. Mathieu

Inventor： Timothy E. Cooper ,  Benjamin N. Eldridge ,  Igor Y. Khandros ,  Rod Martens ,  Gaetan L. Mathieu

IPC: G01R31/3181

CPC classification number: G01R31/2886 ,  G01R31/2887

Abstract: An electronic device is moved into a first position such that terminals of the electronic device are adjacent probes for making electrical contact with the terminals. The electronic device is then moved horizontally or diagonally such that the terminals contact the probes. Test data are then communicated to and from the electronic device through the probes.

Abstract translation: 电子设备移动到第一位置，使得电子设备的端子是与端子电接触的相邻探头。 然后电子设备水平或对角地移动，使得端子接触探针。 然后通过探头将测试数据传送到电子设备和从电子设备传送。