Abstract:
A method and an apparatus for measuring an air flow at an airfoil surface are provided, wherein at least one pressure sensor adapted to detect an air flow associated with a rotor blade surface and a pressure transducer which converts the detected air flow into an electrical signal indicating the air flow are provided. The pressure sensor is arranged within the boundary layer of the air flow at the airfoil surface such that the boundary layer profile may be determined from the electrical signal. The air flow sensor is adapted for rotor blades of a wind turbine to assist in adjusting a pitch angle of the rotor blades.
Abstract:
A system, apparatus, and method for exhaust gas recirculation (EGR) is disclosed. The EGR apparatus includes an EGR circuit having an input configured to receive an exhaust gas from an engine exhaust port, an output configured to return the exhaust gas to an intake port of the engine, and an EGR path configured to circulate the exhaust gas between the input and the output. The EGR apparatus also includes an EGR compressor connected to the EGR circuit in the EGR path downstream of the input and EGR compressor configured to compress the exhaust gas for circulation to the output. The EGR apparatus further includes a valve system positioned in the EGR circuit and upstream of the EGR compressor to selectively cut off a flow of the exhaust gas to the EGR compressor and selectively inject ambient air into the EGR path.
Abstract:
The invention provides slurry-less chemical-mechanical polishing processes which are effective in planarizing oxide materials, especially siliceous oxides, even where the starting oxide layer has significant topographical variation. The processes of the invention are preferably characterized by the use of a fixed abrasive polishing element and by use of an aqueous liquid medium containing a polyelectrolyte for at least a portion of the polishing process involving reduction in the amount of topographic variation (height differential) across the oxide material on the substrate. The method reduces or eliminates the transfer of topographic variations to levels below the desired planarization level. The processes enable elimination of special endpoint detection techniques. The processes are also especially suitable for polishing interlevel dielectrics.
Abstract:
A method for polishing a dielectric layer containing silicon provides a fluorine-based inorganic compound during a polishing process. The dielectric layer is polished in the presence of the fluorine based compound to accelerate a polishing rate of the dielectric layer.
Abstract:
The present application provides for a wet gas compressor system. The wet gas compressor system may include a wet gas compressor with an inlet section. A variable cross-section nozzle may be positioned about the inlet section.
Abstract:
A system and method for waste heat recovery in exhaust gas recirculation is disclosed. The system includes an engine having an intake manifold and an exhaust manifold, an exhaust conduit connected to the exhaust manifold, and a turbocharger having a turbine and a compressor, the turbine being connected to the exhaust conduit to receive a portion of the exhaust gas from the exhaust manifold. The system also includes an EGR system connected to the exhaust conduit to receive a portion of the exhaust gas, with the EGR system including an EGR conduit that is connected to the exhaust conduit to receive a portion of the exhaust gas, a heat exchanger connected to the EGR conduit and being configured to extract heat from the exhaust gas, and a waste heat recovery system connected to the heat exchanger and configured to capture the heat extracted by the heat exchanger.
Abstract:
A system and method for compressing and expanding air in a compressed air energy storage (CAES) system is disclosed. A CAES system is provided that is alternately operable in a compression mode and an expansion mode and includes therein a motor-generator unit and a drive shaft connected to the motor-generator unit that is configured to transmit rotational power to and from the motor-generator unit. The CAES system also includes at least one reversible compressor-expander unit coupled to the drive shaft and configured to selectively compress and expand air, and an air storage unit connected to the reversible compressor-expander unit and configured to store compressed air received therefrom, with the at least one reversible compressor-expander unit compressing air during the compression mode and expanding air during the expansion mode.
Abstract:
A polyelectrolyte dispensing polishing pad, a process for its production and a method of polishing, e.g., chemical mechanical polishing (CMP), a substrate such as a semiconductor wafer, are provided. The pad is usable for CMP planarization of an oxide or metal layer on the wafer. The pad has a polishing layer of erodible binder material containing uniformly distributed therein both abrasive particles and a water soluble ionizable electrolyte substance such as a polyelectrolyte, such that during polishing the binder material incrementally erodes and the abrasive particles and electrolyte substance is incrementally release into direct contact with the substrate. The electrolyte substance inhibits CMP removal of silicon nitride, e.g., as a stop layer, under an upper oxide or metal layer, such that the upper layer is selectively polished and the CMP stops on the stop layer leaving the latter intact.
Abstract:
A structure and method for an insulator layer having carbon-graded layers above a substrate is disclosed, wherein the concentration of carbon increases in each successive carbon-graded layer above the substrate. The insulator comprises a low-k dielectric having a dielectric constant less than 3.3. The carbon-graded layer increases adhesion between the substrate and the insulator and between the insulator and the conductor layer. The structure may also include stabilization interfaces between the carbon-graded layers. More specifically, the carbon-graded layers include a first layer adjacent the substrate having a carbon content between about 5% and 20%, a second layer above the first layer having a carbon content between about 10% and 30%, and a third layer above the second layer having a carbon content between about 20% and 40%.