CHIP SCALE PACKAGE AND FABRICATION METHOD THEREOF
    15.
    发明申请
    CHIP SCALE PACKAGE AND FABRICATION METHOD THEREOF 审中-公开
    芯片尺寸包装及其制造方法

    公开(公告)号:US20120013006A1

    公开(公告)日:2012-01-19

    申请号:US12955613

    申请日:2010-11-29

    Abstract: A fabrication method of a chip scale package is provided, which includes forming a protection layer on the active surface of a chip and fixing the inactive surface of the chip to a transparent carrier; performing a molding process; removing the protection layer from the chip and performing a redistribution layer (RDL) process, thereby solving the conventional problems caused by directly attaching the chip on an adhesive film, such as film-softening caused by heat, encapsulant overflow, warpage, chip deviation and contamination that lead to poor electrical connection between the wiring layer formed in the RDL process and the chip electrode pads and even waste product as a result. Further, the transparent carrier employed in the invention can be separated by laser and repetitively used in the process to help reduce the fabrication cost.

    Abstract translation: 提供了一种芯片级封装的制造方法,其包括在芯片的有源表面上形成保护层并将芯片的非活性表面固定到透明载体上; 进行成型工序; 从芯片上除去保护层并执行再分配层(RDL)工艺,从而解决了将芯片直接附着在粘合膜上所引起的常规问题,例如由热引起的膜软化,密封剂溢出,翘曲,芯片偏差和 污染导致在RDL工艺中形成的布线层与芯片电极焊盘之间的电连接不良,甚至结果导致废品。 此外,本发明中使用的透明载体可以通过激光分离并在该过程中重复使用以帮助降低制造成本。

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