Abstract:
A pattern data creating method comprising: referring to a first correspondence relation between an amount of dimension variation between a first pattern formed on a substrate and a second pattern formed by processing the substrate using the first pattern and either one of a pattern total surface area and a pattern boundary length of the first pattern; and creating pattern data for forming the first pattern.
Abstract:
A method of manufacturing a semiconductor device, which forms a pattern by performing pattern transformation steps multiple times, comprises setting finished pattern sizes for patterns to be formed in each consecutive two pattern transformation steps among the plurality of pattern transformation steps based on a possible total amount of in-plane size variation of the patterns to be formed in the consecutive two pattern transformation steps.
Abstract:
A rubber composition tire containing 0.1 to 10 parts by mass of zinc oxide particles having an average particle diameter of not more than 200 nm with respect to 100 parts by mass of a rubber component and a pneumatic tire employing the same are provided. This rubber composition for a tire can be suitably employed for manufacturing tread rubber, base tread rubber, bead apex rubber, clinch rubber and inner liner rubber for a tire.
Abstract:
Pattern formation simulations are performed based on design layout data subjected to OPC processing with a plurality of process parameters set in process conditions. A worst condition of the process conditions is calculated based on risk points extracted from simulation results. The design layout data or the OPC processing is changed such that when a pattern is formed under the worst condition based on the changed design layout data or the changed OPC processing a number of the risk points or a risk degree of the risk points of the pattern is smaller than the simulation result.
Abstract:
A pattern generating method includes: extracting, from a shape of a pattern generated on a substrate, a contour of the pattern shape; setting evaluation points as verification points for the pattern shape on the contour; calculating curvatures on the contour in the evaluation points; and verifying the pattern shape based on whether the curvatures satisfy a predetermined threshold set in advance.
Abstract:
A pattern data creating method comprising: referring to a first correspondence relation between an amount of dimension variation between a first pattern formed on a substrate and a second pattern formed by processing the substrate using the first pattern and either one of a pattern total surface area and a pattern boundary length of the first pattern; and creating pattern data for forming the first pattern.
Abstract:
A rubber composition tire containing 0.1 to 10 parts by mass of zinc oxide particles having an average particle diameter of not more than 200 nm with respect to 100 parts by mass of a rubber component and a pneumatic tire employing the same are provided. This rubber composition for a tire can be suitably employed for manufacturing tread rubber, base tread rubber, bead apex rubber, clinch rubber and inner liner rubber for a tire.
Abstract:
A composite material comprising a rubber composition and a metal material, wherein the rubber composition contains, per 100 parts by weight of rubber, a cobalt salt of an organic acid in an amount up to 0.5 parts by weight, 3 to 6 parts by weight of sulfur, and N-oxydiethylene-2-benzothiazolylsulfenamide or N-tert-butyl-2-benzothiazolylsulfenamide as a vulcanization accelerator, and the metal material is provided with a plating of a ternary alloy consisting of copper, zinc, and nickel.
Abstract:
A composite material comprising a rubber composition and a metal material, wherein the rubber composition contains, per 100 parts by weight of rubber, 0 part by weight of a metal salt of an organic acid, 3 to 6 parts by weight of sulfur, and N-oxy-diethylene-2-benzothiazolylsulfenamide or N-tert-butyl-2-benzothiazolylsulfenamide as a vulcanization accelerator, and the metal material is provided with a plating of a ternary alloy consisting of copper, zinc, and nickel.
Abstract:
The present invention provides a rubber composition that can enhance the fuel economy, wet-grip performance, and abrasion resistance in a balanced manner, and a pneumatic tire using this rubber composition. The present invention relates to a rubber composition that contains a rubber component, silica, and a silane coupling agent, wherein the rubber component contains, based on 100% by mass of the rubber component, not less than 5% by mass of a conjugated diene polymer containing a constituent unit based on a conjugated diene and a constituent unit represented by formula (I) below, at least one terminal of the polymer being modified with a specific compound; an amount of the silica is 5 to 150 parts by mass per 100 parts by mass of the rubber component; and the silane coupling agent contains a mercapto group.