Trench Schottky barrier diode
    13.
    发明授权
    Trench Schottky barrier diode 有权
    沟槽肖特基势垒二极管

    公开(公告)号:US06855593B2

    公开(公告)日:2005-02-15

    申请号:US10193783

    申请日:2002-07-11

    Abstract: A fabrication process for a Schottky barrier structure includes forming a nitride layer directly on a surface of an epitaxial (“epi”) layer and subsequently forming a plurality of trenches in the epi layer. The interior walls of the trenches are then deposited with a final oxide layer without forming a sacrificial oxide layer to avoid formation of a beak bird at the tops of the interior trench walls. A termination trench is etched in the same process step for forming the plurality of trenches in the active area.

    Abstract translation: 用于肖特基势垒结构的制造方法包括在外延(“epi”)层的表面上直接形成氮化物层,随后在外延层中形成多个沟槽。 然后将沟槽的内壁沉积有最终的氧化物层,而不形成牺牲氧化物层,以避免在内部沟槽壁的顶部形成喙鸟。 在用于在有源区域中形成多个沟槽的相同工艺步骤中蚀刻端接沟槽。

    Trench IGBT for highly capacitive loads
    15.
    发明授权
    Trench IGBT for highly capacitive loads 有权
    用于高容性负载的沟槽IGBT

    公开(公告)号:US07655977B2

    公开(公告)日:2010-02-02

    申请号:US11252642

    申请日:2005-10-18

    CPC classification number: H01L29/7397 H01L29/402 H01L2924/0002 H01L2924/00

    Abstract: An IGBT for controlling the application of power to a plasma display panel has an increased current conduction capability and a reduced conduction loss at the expense of a reduced safe operating area. For a device with a 300 volt breakdown voltage rating, the die has a substrate resistivity less than 10 m ohm cm; a buffer layer thickness of about 8 μm resistivity in the range of 0.05 to 0.10 ohm cm, and an epi layer for receiving junction patterns and trenches, which has a thickness of from 31 to 37 μm and resistivity in te range of 14 to 18 ohm cm.

    Abstract translation: 用于控制对等离子体显示面板的电力施加的IGBT具有增加的导电能力和降低的传导损耗,而降低安全操作区域。 对于具有300伏击穿电压额定值的器件,裸片具有小于10mΩcm的衬底电阻; 具有约0.05μm至0.10欧姆cm范围内的约8μm电阻率的缓冲层厚度,以及用于接收结形图案和沟槽的外延层,其厚度为31至37μm,电阻率范围为14至18欧姆 厘米。

    Process for counter doping N-type silicon in Schottky device Ti silicide barrier
    20.
    发明授权
    Process for counter doping N-type silicon in Schottky device Ti silicide barrier 有权
    肖特基元件Ti硅化物屏蔽中的反相掺杂N型硅的工艺

    公开(公告)号:US06846729B2

    公开(公告)日:2005-01-25

    申请号:US10254112

    申请日:2002-09-25

    CPC classification number: H01L27/0814 H01L29/66143 H01L29/8725

    Abstract: A Schottky diode is adjusted by implanting an implant species by way of a titanium silicide Schottky contact and driving the implant species into the underlying silicon substrate by a rapid anneal. The implant is at a low energy, (e.g. about 10 keV) and at a low dose (e.g. less than about 9E12 atoms per cm2) such that the barrier height is slightly increased and the leakage current reduced without forming pn junction and retaining the peak boron concentration in the titanium silicide layer.

    Abstract translation: 通过用硅化钛肖特基接触注入植入物种并通过快速退火将植入物种驱动到下面的硅衬底中来调节肖特基二极管。 植入物处于低能量(例如约10keV)和低剂量(例如小于约9E12原子/ cm 2),使得势垒高度略微增加,并且漏电流减小而不形成pn结,并且 保留钛硅化物层中的峰值硼浓度。

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