ENCLOSED VERTICAL RACK FOR STORING AND TRANSPORTING LARGE SUBSTRATES
    12.
    发明申请
    ENCLOSED VERTICAL RACK FOR STORING AND TRANSPORTING LARGE SUBSTRATES 审中-公开
    用于存储和运输大型基板的垂直支架

    公开(公告)号:US20110272420A1

    公开(公告)日:2011-11-10

    申请号:US12774328

    申请日:2010-05-05

    IPC分类号: B65D90/00

    CPC分类号: H01L21/67363 H01L21/67383

    摘要: An enclosed vertical rack is provided for storing and transporting large substrates. The enclosed vertical rack comprises a movable base, an enclosure on the movable base for accommodating substrates, an alignment facility in the enclosure for receiving substrates, and a sealable door for enclose the enclosure. The enclosure has a gas inlet, and the enclosure or the door has a gas outlet.

    摘要翻译: 提供封闭的垂直支架,用于存储和运输大型基板。 封闭的垂直支架包括可移动基座,可移动基座上的用于容纳基板的外壳,用于接收基板的外壳中的对准设备,以及用于封闭外壳的可密封门。 外壳具有气体入口,外壳或门具有气体出口。

    Optical coupling to gated photocathodes
    15.
    发明授权
    Optical coupling to gated photocathodes 失效
    光耦合到门控光电阴极

    公开(公告)号:US06399934B1

    公开(公告)日:2002-06-04

    申请号:US09642525

    申请日:2000-08-18

    IPC分类号: H01J4014

    CPC分类号: H01J3/024 H01J37/073

    摘要: An electron source is disclosed in which control signals having transition times less than about 10 nanoseconds and electrically isolated from a gated photocathode control an electron beam supplied by the gated photocathode. In one embodiment, the electron source includes a transmissive substrate, a photoemitter on the substrate, a gate insulator on the photoemitter, a gate electrode on the gate insulator, a housing enclosing the photoemitter and the gate electrode, a light source located outside the housing, and a detector located in the housing to receive light from the light source. The detector is electrically coupled to control a voltage applied to one of the gate electrode or the photoemitter.

    摘要翻译: 公开了一种电子源,其中具有小于约10纳秒的转换时间和与门控光电阴极电隔离的控制信号控制由门控光电阴极提供的电子束。 在一个实施例中,电子源包括透射衬底,衬底上的光发射器,光发射器上的栅极绝缘体,栅极绝缘体上的栅极电极,封装光电发生器和栅电极的壳体,位于壳体外部的光源 以及位于壳体中的用于接收来自光源的光的检测器。 检测器电耦合以控制施加到栅极电极或光电发射器之一的电压。

    Automated solar cell electrical connection apparatus
    17.
    发明授权
    Automated solar cell electrical connection apparatus 失效
    自动太阳能电池电气连接装置

    公开(公告)号:US08024854B2

    公开(公告)日:2011-09-27

    申请号:US12358844

    申请日:2009-01-23

    摘要: The present invention generally relates to an automated solar cell electrical connection device that is positioned within an automated solar cell fabrication system. The automated solar cell electrical connection device includes a module and process for automatically attaching a junction box to a composite solar cell structure during the fabrication of a completed solar cell device. The automated solar cell electrical connection module may include a composite solar cell structure conveyor for positioning the composite solar cell structure, an adhesive dispense module for applying adhesive to the junction box, a flux dispenser for applying flux to electrical connection tabs in the junction box, a vision system for locating features on the composite solar cell structure, a robot for positioning the junction box onto the composite solar cell structure, a heating element to make electrical connections between the junction box and the solar cell device, a potting material dispensing assembly for dispensing potting material into the junction box, and a system controller for controlling the functions of the module.

    摘要翻译: 本发明一般涉及一种位于自动太阳能电池制造系统内的自动化太阳能电池电连接装置。 自动化太阳能电池电连接装置包括在制造完成的太阳能电池装置期间将接线盒自动地连接到复合太阳能电池结构的模块和工艺。 自动太阳能电池电连接模块可以包括用于定位复合太阳能电池结构的复合太阳能电池结构输送器,用于将粘合剂施加到接线盒的粘合剂分配模块,用于将焊剂施加到接线盒中的电连接接头的焊剂分配器, 用于定位复合太阳能电池结构上的特征的视觉系统,用于将接线盒定位在复合太阳能电池结构上的机器人,用于在接线盒和太阳能电池装置之间形成电连接的加热元件,用于 将灌封材料分配到接线盒中,以及用于控制模块功能的系统控制器。

    Method of aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate
    19.
    发明授权
    Method of aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate 失效
    将粒子束生成图案与预图案化衬底上的图案对准的方法

    公开(公告)号:US07625679B2

    公开(公告)日:2009-12-01

    申请号:US11233616

    申请日:2005-09-23

    IPC分类号: G03F9/00 G03C5/00

    摘要: A significant improvement in the alignment of a particle-beam-generated pattern relative to a pre-existing pattern present on a substrate has been accomplished using optical measurement to register the particle beam to the pre-existing pattern. Use of a position fiducial which can be accurately measured by both an optical microscope and a particle beam axis is used to align a pre-existing pattern with a particle-beam-generated pattern during writing of the particle-beam-generated pattern. Registration of the pre-existing pattern to the fiducial and registration of the particle beam axis to the fiducial periodically during production of the particle-beam-generated pattern continually provides an improvement in the overall alignment of the pattern being created to the pre-existing pattern on the substrate. The improved method of alignment can be used to correct for drift, or thermal expansion, or gravitational sag, by way of example.

    摘要翻译: 已经使用光学测量来实现粒子束生成图案相对于存在于衬底上的预先存在的图案的对准的显着改进,以将粒子束注册到预先存在的图案。 使用可以通过光学显微镜和粒子束轴两者精确测量的位置基准来使用在粒子束产生的图案的写入期间将预先存在的图案与粒子束产生的图案对准。 在生成粒子束生成图案期间,将预先存在的图案注册到基准和粒子束轴的基准周期性地定期地连续地提供了所创建的图案与预先存在的图案的整体对准的改进 在基板上。 改进的对准方法可以用于校正漂移或热膨胀或重力下垂的例子。