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    Method of aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate
    1.
    发明授权
    Method of aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate 失效
    将粒子束生成图案与预图案化衬底上的图案对准的方法

    公开(公告)号：US07625679B2

    公开(公告)日：2009-12-01

    申请号：US11233616

    申请日：2005-09-23

    申请人： Jeffrey S. Sullivan ,  Tony Tiecheng Young

    发明人： Jeffrey S. Sullivan ,  Tony Tiecheng Young

    IPC分类号： G03F9/00 ,  G03C5/00

    CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G03F9/7015 ,  G03F9/7088 ,  H01J2237/31793 ,  Y10S430/143

    摘要： A significant improvement in the alignment of a particle-beam-generated pattern relative to a pre-existing pattern present on a substrate has been accomplished using optical measurement to register the particle beam to the pre-existing pattern. Use of a position fiducial which can be accurately measured by both an optical microscope and a particle beam axis is used to align a pre-existing pattern with a particle-beam-generated pattern during writing of the particle-beam-generated pattern. Registration of the pre-existing pattern to the fiducial and registration of the particle beam axis to the fiducial periodically during production of the particle-beam-generated pattern continually provides an improvement in the overall alignment of the pattern being created to the pre-existing pattern on the substrate. The improved method of alignment can be used to correct for drift, or thermal expansion, or gravitational sag, by way of example.

    摘要翻译： 已经使用光学测量来实现粒子束生成图案相对于存在于衬底上的预先存在的图案的对准的显着改进，以将粒子束注册到预先存在的图案。 使用可以通过光学显微镜和粒子束轴两者精确测量的位置基准来使用在粒子束产生的图案的写入期间将预先存在的图案与粒子束产生的图案对准。 在生成粒子束生成图案期间，将预先存在的图案注册到基准和粒子束轴的基准周期性地定期地连续地提供了所创建的图案与预先存在的图案的整体对准的改进 在基板上。 改进的对准方法可以用于校正漂移或热膨胀或重力下垂的例子。

    Apparatus for aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate
    2.
    发明申请
    Apparatus for aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate 审中-公开
    用于将粒子束产生的图案与预图案化衬底上的图案对准的装置

    公开(公告)号：US20100044594A1

    公开(公告)日：2010-02-25

    申请号：US12589479

    申请日：2009-10-22

    申请人： Jeffrey S. Sullivan ,  Tony Tiecheng Young

    发明人： Jeffrey S. Sullivan ,  Tony Tiecheng Young

    IPC分类号： G03F9/00 ,  G21G5/00

    CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G03F9/7015 ,  G03F9/7088 ,  H01J2237/31793 ,  Y10S430/143

    摘要： The apparatus includes a particle beam, having an axis which functions as a primary optical axis, which particle beam is used to generate a pattern on a substrate. The apparatus also includes an optical reader, having an axis which functions as a secondary optical axis. A position fiducial is located at a stationary position relative to the substrate. Registration of a pre-existing pattern and the particle beam axis to the position fiducial periodically during production of a particle-beam-generated pattern continually provides an improvement in the overall alignment of the pattern being created with the pre-existing pattern on the substrate.

    摘要翻译： 该装置包括具有用作主光轴的轴的粒子束，该粒子束用于在衬底上产生图案。 该装置还包括具有用作辅助光轴的轴的光学读取器。 位置基准位于相对于基板的静止位置。 在制备粒子束生成图案期间，将预先存在的图案和粒子束轴定位到周期性地定位在基准上的连续地提供了在衬底上产生的图案与预先存在的图案的整体对准。

    Photovoltaic cell solar simulator
    4.
    发明授权
    Photovoltaic cell solar simulator 失效
    光伏电池太阳能模拟器

    公开(公告)号：US08138782B2

    公开(公告)日：2012-03-20

    申请号：US12351087

    申请日：2009-01-09

    申请人： Yacov Elgar ,  Danny Cam Toan Lu ,  Tzay-Fa Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Harry Whitesell

    发明人： Yacov Elgar ,  Danny Cam Toan Lu ,  Tzay-Fa Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Harry Whitesell

    IPC分类号： G01R31/26

    CPC分类号： B25J11/00 ,  G01J1/08 ,  H01L31/18 ,  H01L31/186 ,  H02S50/10 ,  Y02E10/50 ,  Y02P70/521 ,  Y10S136/29

    摘要： Embodiments of the present invention relate to a solar simulator module of a solar cell production line. In one embodiment the solar simulator receives a solar cell module in a horizontal position and reorients the module into a vertical position. A light source is oriented to emit a flash of light in a substantially horizontal orientation toward the vertically oriented solar cell module. In one embodiment, an automated labeling device affixes a label including the electrical characteristics measured onto a back surface of the solar cell module. In one embodiment, a plurality of solar cell modules are received and tested simultaneously.

    摘要翻译： 本发明的实施例涉及太阳能电池生产线的太阳模拟器模块。 在一个实施例中，太阳模拟器在水平位置接收太阳能电池模块，并将模块重定向到垂直位置。 光源被定向成朝向垂直取向的太阳能电池模块发射基本水平的方向的闪光。 在一个实施例中，自动标签装置将包括测量的电特性的标签粘贴到太阳能电池模块的背面上。 在一个实施例中，多个太阳能电池模块被同时接收和测试。

    SOLDER BONDING METHOD AND APPARATUS
    5.
    发明申请
    SOLDER BONDING METHOD AND APPARATUS 失效
    焊接方法和装置

    公开(公告)号：US20110089145A1

    公开(公告)日：2011-04-21

    申请号：US12581728

    申请日：2009-10-19

    申请人： Eric Benson ,  Danny Cam Lu ,  Jeffrey S. Sullivan

    发明人： Eric Benson ,  Danny Cam Lu ,  Jeffrey S. Sullivan

    IPC分类号： B23K1/00

    CPC分类号： B23K3/0478 ,  B23K1/0016 ,  H01L31/188 ,  Y02E10/50

    摘要： The present invention generally relates to an automated solar cell electrical connection module that is positioned within an automated solar cell fabrication line and is configured to ensure a robust and reliable bond is formed during the electrical connection process. The electrical connection module generally provides a module and process for automatically attaching a junction box to a composite solar cell structure during the fabrication of a completed solar cell device. The electrical connection module further provides a thermode assembly including heating elements for forming a soldered connection between the junction box and the composite solar cell structure and a temperature sensing device in thermal communication with the heating elements for detecting a temperature profile during the connection process. The heating elements and temperature sensing device are linked to a controller configured to monitor and compare the energy input into the heating elements with the temperature near the tip of the heating elements throughout the connection process. The controller is further configured to compare the actual energy versus temperature profile to an expected profile throughout the connection process and verify whether a quality bond is achieved.

    摘要翻译： 本发明一般涉及一种自动化太阳能电池电连接模块，其定位在自动太阳能电池制造线内，并被配置为确保在电连接过程期间形成牢固且可靠的结合。 电连接模块通常提供用于在制造完整的太阳能电池装置期间将接线盒自动地连接到复合太阳能电池结构的模块和工艺。 电连接模块还提供包括用于在接线盒和复合太阳能电池结构之间形成焊接连接​​的加热元件的热​​电极组件和与加热元件热连通的温度感测装置，用于在连接过程期间检测温度曲线。 加热元件和温度感测装置连接到控制器，该控制器被配置为在整个连接过程中监测和比较加热元件中输入的能量与加热元件尖端附近的温度。 控制器进一步被配置为将实际能量与温度曲线与整个连接过程中的期望曲线进行比较，并验证是否实现了质量粘合。

    Solder bonding method and apparatus
    7.
    发明授权
    Solder bonding method and apparatus 失效
    焊接方法和装置

    公开(公告)号：US08227723B2

    公开(公告)日：2012-07-24

    申请号：US12581728

    申请日：2009-10-19

    申请人： Eric Benson ,  Danny Cam Lu ,  Jeffrey S. Sullivan

    发明人： Eric Benson ,  Danny Cam Lu ,  Jeffrey S. Sullivan

    IPC分类号： B23K1/00

    CPC分类号： B23K3/0478 ,  B23K1/0016 ,  H01L31/188 ,  Y02E10/50

    摘要： The present invention generally relates to a module and process for automatically attaching a junction box to a composite solar cell structure during the fabrication of a completed solar cell device. The electrical connection module further provides a thermode assembly including heating elements for forming a soldered connection between the junction box and the composite solar cell structure and a temperature sensing device in thermal communication with the heating elements for detecting a temperature profile during the connection process. The heating elements and temperature sensing device are linked to a controller configured to monitor and compare the energy input into the heating elements with the temperature near the tip of the heating elements throughout the connection process. The controller is further configured to compare the actual energy versus temperature profile to an expected profile throughout the connection process and verify whether a quality bond is achieved.

    摘要翻译： 本发明一般涉及一种用于在制造完整的太阳能电池装置期间将接线盒自动地连接到复合太阳能电池结构的模块和工艺。 电连接模块还提供包括用于在接线盒和复合太阳能电池结构之间形成焊接连接​​的加热元件的热​​电极组件，以及与加热元件热连通的温度感测装置，用于在连接过程期间检测温度曲线。 加热元件和温度感测装置连接到控制器，该控制器被配置为在整个连接过程中监测和比较加热元件中输入的能量与加热元件尖端附近的温度。 控制器进一步被配置为将实际能量与温度曲线与整个连接过程中的期望曲线进行比较，并验证是否实现了质量粘合。

    WET HIGH POTENTIAL QUALIFICATION TOOL FOR SOLAR CELL FABRICATION
    8.
    发明申请
    WET HIGH POTENTIAL QUALIFICATION TOOL FOR SOLAR CELL FABRICATION 审中-公开
    耐用的太阳能电池制造的高潜力认证工具

    公开(公告)号：US20110012635A1

    公开(公告)日：2011-01-20

    申请号：US12628851

    申请日：2009-12-01

    申请人： Danny Cam Lu ,  Michael Marriott ,  Jeffrey S. Sullivan ,  Sanoj James ,  Balasundaram Chidambaranathan

    发明人： Danny Cam Lu ,  Michael Marriott ,  Jeffrey S. Sullivan ,  Sanoj James ,  Balasundaram Chidambaranathan

    IPC分类号： G01R31/02

    CPC分类号： H02S50/10

    摘要： Embodiments of the invention generally provide methods and an apparatus for processing and qualifying a formed photovoltaic device to assure that the formed photovoltaic device meets desired quality and industry electrical standards. Embodiments of the present invention may also provide a photovoltaic device, or solar cell device, production line that is adapted to form a thin film solar cell device by accepting an unprocessed substrate and performing multiple deposition, material removal, cleaning, bonding, and testing steps to form a complete functional and tested solar cell device. The solar cell device production line, or system, is generally an arrangement of processing modules and automation equipment used to form solar cell devices that are interconnected by automated material handling system. In one embodiment, the system is a fully automated solar cell production line that is designed to reduce and/or remove the need for human interaction and/or labor intensive processing steps to improve the device reliability, process repeatability, and the solar cell formation process cost of ownership (CoO).

    摘要翻译： 本发明的实施例通常提供用于处理和限定形成的光伏器件的方法和装置，以确保形成的光伏器件满足期望的质量和工业电气标准。 本发明的实施例还可以提供一种光电器件或太阳能电池器件生产线，其适于通过接受未处理的衬底并执行多次沉积，材料去除，清洁，接合和测试步骤来形成薄膜太阳能电池器件 以形成完整的功能和测试的太阳能电池装置。 太阳能电池器件生产线或系统通常是用于形成通过自动化材料处理系统互连的太阳能电池器件的处理模块和自动化设备的布置。 在一个实施例中，该系统是全自动太阳能电池生产线，其被设计为减少和/或消除对人类相互作用和/或劳动密集型处理步骤的需要，以改善装置可靠性，工艺重复性和太阳能电池形成过程 所有权成本（CoO）。