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    SEMICONDUCTOR DEVICE WITH JUNCTION TERMINATION EXTENSION
    11.
    发明申请
    SEMICONDUCTOR DEVICE WITH JUNCTION TERMINATION EXTENSION 有权
    具有断点终止延伸的半导体器件

    公开(公告)号：US20150115284A1

    公开(公告)日：2015-04-30

    申请号：US14396852

    申请日：2013-05-15

    Applicant: GENERAL ELECTRIC COMPANY

    Inventor： Stephen Daley Arthur ,  Alexander Viktorovich Bolotnikov ,  Peter Almern Losee ,  Kevin Sean Matocha ,  Richard Joseph Saia ,  Zachary Matthew Stum ,  Ljubisa Dragoljub Stevanovic ,  Kuna Venkat Satya Rama Kishore ,  James William Kretchmer

    IPC: H01L29/36 ,  H01L29/06 ,  H01L29/16

    CPC classification number: H01L29/0638 ,  H01L21/0465 ,  H01L29/0619 ,  H01L29/0646 ,  H01L29/1608 ,  H01L29/36 ,  H01L29/6606 ,  H01L29/7395 ,  H01L29/7811 ,  H01L29/8611 ,  H01L29/8613

    Abstract: A semiconductor device includes a substrate including silicon carbide; a drift layer disposed over the substrate including a drift region doped with a first dopant and conductivity type; and a second region, doped with a second dopant and conductivity type, adjacent to the drift region and proximal to a surface of the drift layer. The semiconductor device further includes a junction termination extension adjacent to the second region with a width and discrete regions separated in a first and second direction doped with varying concentrations of the second dopant type, and an effective doping profile of the second conductivity type of functional form that generally decreases away from the edge of the primary blocking junction. The width is less than or equal to a multiple of five times the width of the one-dimensional depletion width, and the charge tolerance of the semiconductor device is greater than 1.0×1013 per cm2.

    Abstract translation: 半导体器件包括：包含碳化硅的衬底; 设置在所述衬底上的漂移层，包括掺杂有第一掺杂剂和导电类型的漂移区; 以及掺杂有第二掺杂剂和导电类型的第二区域，其邻近漂移区并且靠近漂移层的表面。 所述半导体器件还包括与所述第二区相邻的连接终端延伸部，所述连接终端延伸部具有在掺杂有不同浓度的所述第二掺杂剂类型的第一和第二方向上分离的宽度和离散区域以及所述第二导电类型的功能形式的有效掺杂分布 这通常从主阻塞结的边缘减小。 宽度小于或等于一维耗尽宽度宽度的五倍的倍数，半导体器件的电荷容差大于1.0×1013 / cm2。

    Silicon-carbide MOSFET cell structure and method for forming same
    13.
    发明授权
    Silicon-carbide MOSFET cell structure and method for forming same 有权
    碳化硅MOSFET单元结构及其形成方法

    公开(公告)号：US08507986B2

    公开(公告)日：2013-08-13

    申请号：US13740758

    申请日：2013-01-14

    Applicant: General Electric Company

    Inventor： Stephen Daley Arthur ,  Kevin Sean Matocha ,  Peter Micah Sandvik ,  Zachary Matthew Stum ,  Peter Almren Losee ,  James Jay McMahon

    IPC: H01L29/76 ,  H01L21/332

    CPC classification number: H01L27/088 ,  H01L29/0696 ,  H01L29/1608 ,  H01L29/66068 ,  H01L29/7802

    Abstract: In one embodiment, the invention comprises a MOSFET comprising individual MOSFET cells. Each cell comprises a U-shaped well (P type) and two parallel sources (N type) formed within the well. A Number of source rungs (doped N) connect sources at multiple locations. Regions between two rungs comprise a body (P type). These features are formed on an N-type epitaxial layer, which is formed on an N-type substrate. A contact extends across and contacts a number of source rungs and bodies. Gate oxide and a gate contact overlie a leg of a first well and a leg of a second adjacent well, inverting the conductivity responsive to a gate voltage. A MOSFET comprises a plurality of these cells to attain a desired low channel resistance. The cell regions are formed using self-alignment techniques at several states of the fabrication process.

    Abstract translation: 在一个实施例中，本发明包括一个包含单个MOSFET单元的MOSFET。 每个单元包括形成在井内的U形孔（P型）和两个平行的源（N型）。 在多个位置连接多个源极（掺杂N）源极。 两个梯级之间的区域包括一个主体（P型）。 这些特征形成在形成在N型衬底上的N型外延层上。 联系人跨越并接触许多源级和身体。 栅极氧化物和栅极接触覆盖第一阱的支腿和第二相邻阱的支路，响应于栅极电压而反转导电性。 MOSFET包括多个这些单元以获得期望的低通道电阻。 在制造过程的几个状态下使用自对准技术形成单元区域。

    SiC MOSFETS AND SELF-ALIGNED FABRICATION METHODS THEREOF
    14.
    发明申请
    SiC MOSFETS AND SELF-ALIGNED FABRICATION METHODS THEREOF 审中-公开
    SiC MOSFET和自对准的制造方法

    公开(公告)号：US20130146898A1

    公开(公告)日：2013-06-13

    申请号：US13740734

    申请日：2013-01-14

    Applicant: GENERAL ELECTRIC COMPANY

    Inventor： Kevin Sean Matocha ,  Gregory Keith Dudoff ,  William Gregg Hawkins ,  Zachary Matthew Stum ,  Stephen Daley Arthur ,  Dale Marius Brown

    IPC: H01L29/49

    CPC classification number: H01L29/4975 ,  H01L21/0465 ,  H01L29/1608 ,  H01L29/66068 ,  H01L29/7827 ,  H01L29/872

    Abstract: The present application provides a method of fabricating a metal oxide semiconductor field effect transistor. The method includes the steps of forming a source region on a silicon carbide layer and annealing the source region. A gate oxide layer is formed on the source region and the silicon carbide layer. The method further includes providing a gate electrode on the gate oxide layer and disposing a dielectric layer on the gate electrode and the gate oxide layer. The method further includes etching a portion of the dielectric layer and a portion of the gate oxide layer to form sidewalls on the gate electrode. A metal layer is disposed on the gate electrode, the sidewalls and the source region. The method further includes forming a gate contact and a source contact by subjecting the metal layer to a temperature of at least about 800° C. The gate contact and the source contact comprise a metal silicide. The distance between the gate contact and the source contact is less than about 0.6 μm. A vertical SiC MOSFET is also provided.

    Abstract translation: 本申请提供了制造金属氧化物半导体场效应晶体管的方法。 该方法包括以下步骤：在碳化硅层上形成源极区域并退火源极区域。 在源区和碳化硅层上形成栅氧化层。 该方法还包括在栅极氧化物层上设置栅电极，并在栅电极和栅极氧化物层上设置电介质层。 该方法还包括蚀刻介电层的一部分和栅极氧化物层的一部分以在栅电极上形成侧壁。 金属层设置在栅电极，侧壁和源极区上。 该方法还包括通过使金属层经受至少约800℃的温度来形成栅极接触和源极接触。栅极接触和源极接触包括金属硅化物。 栅极触点与源极之间的距离小于0.6μm。 还提供了一个垂直的SiC MOSFET。

    METHOD AND SYSTEM FOR TRANSIENT VOLTAGE SUPPRESSION
    16.
    发明申请
    METHOD AND SYSTEM FOR TRANSIENT VOLTAGE SUPPRESSION 有权
    瞬态电压抑制方法与系统

    公开(公告)号：US20140264775A1

    公开(公告)日：2014-09-18

    申请号：US13846380

    申请日：2013-03-18

    Applicant: GENERAL ELECTRIC COMPANY

    Inventor： Avinash Srikrishnan Kashyap ,  Peter Micah Sandvik ,  Stephen Daley Arthur

    IPC: H01L29/06 ,  H01L21/265

    CPC classification number: H01L29/1608 ,  H01L21/0445 ,  H01L21/046 ,  H01L21/0475 ,  H01L21/265 ,  H01L29/06 ,  H01L29/0661 ,  H01L29/0692 ,  H01L29/32 ,  H01L29/6606 ,  H01L29/8618 ,  H01L2924/10272

    Abstract: A transient voltage suppression (TVS) device and a method of forming the device are provided. The device includes a first layer of wide band gap semiconductor material formed of a first conductivity type material, a second layer of wide band gap semiconductor material formed of a second conductivity type material over at least a portion of the first layer and comprising an ion implanted material structure between 0.1 micrometers (μm) and 22.0 μm thick, the second layer operating using punch-through physics, and a third layer of wide band gap semiconductor material formed of the first conductivity type material over at least a portion of the second layer.

    Abstract translation: 提供瞬态电压抑制（TVS）装置和形成装置的方法。 该器件包括由第一导电类型材料形成的第一层宽带隙半导体材料，在第一层的至少一部分上由第二导电类型材料形成的第二层宽带隙半导体材料，并且包括离子注入 材料结构在0.1微米（μm）和22.0μm厚之间，第二层使用穿透物理学操作，以及在第二层的至少一部分上由第一导电类型材料形成的第三层宽带隙半导体材料。

    Method and system for transient voltage suppressors
    17.
    发明授权
    Method and system for transient voltage suppressors 有权
    瞬态电压抑制器的方法和系统

    公开(公告)号：US08765524B2

    公开(公告)日：2014-07-01

    申请号：US13967886

    申请日：2013-08-15

    Applicant: General Electric Company

    Inventor： Avinash Srikrishnan Kashyap ,  David Mulford Shaddock ,  Emad Andarawis Andarawis ,  Peter Micah Sandvik ,  Stephen Daley Arthur ,  Vinayak Tilak

    IPC: H01L21/00

    CPC classification number: H01L21/56 ,  H01L23/3185 ,  H01L29/0657 ,  H01L29/1608 ,  H01L29/2003 ,  H01L29/861 ,  H01L29/8618 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: A method of forming a silicon carbide transient voltage suppressor (TVS) assembly and a system for a transient voltage suppressor (TVS) assembly are provided. The TVS assembly includes a semiconductor die in a mesa structure that includes a first layer of a first wide band gap semiconductor having a conductivity of a first polarity, a second layer of the first or a second wide band gap semiconductor having a conductivity of a second polarity coupled in electrical contact with the first layer wherein the second polarity is different than the first polarity. The TVS assembly also includes a third layer of the first, the second, or a third wide band gap semiconductor having a conductivity of the first polarity coupled in electrical contact with the second layer. The layer having a conductivity of the second polarity is lightly doped relative to the layers having a conductivity of the first polarity.

    Abstract translation: 提供了形成碳化硅瞬态电压抑制器（TVS）组件的方法和用于瞬态电压抑制器（TVS）组件的系统。 TVS组件包括台面结构中的半导体管芯，其包括具有第一极性的导电率的第一宽带隙半导体的第一层，具有第二极导电率的第一或第二宽带隙半导体的第二层 极性与第一层电接触，其中第二极性不同于第一极性。 TVS组件还包括具有与第二层电接触的第一极性的导电性的第一，第二或第三宽带隙半导体的第三层。 相对于具有第一极性的导电性的层，具有第二极性的导电性的层被轻掺杂。

    SILICON-CARBIDE MOSFET CELL STRUCTURE AND METHOD FOR FORMING SAME
    18.
    发明申请
    SILICON-CARBIDE MOSFET CELL STRUCTURE AND METHOD FOR FORMING SAME 有权
    硅碳化硅晶胞结构及其形成方法

    公开(公告)号：US20130126971A1

    公开(公告)日：2013-05-23

    申请号：US13740758

    申请日：2013-01-14

    Applicant: General Electric Company

    Inventor： Stephen Daley Arthur ,  Kevin Sean Matocha ,  Peter Micah Sandvik ,  Zachary Matthew Stum ,  Peter Almren Losee ,  James Jay McMahon

    IPC: H01L27/088

    CPC classification number: H01L27/088 ,  H01L29/0696 ,  H01L29/1608 ,  H01L29/66068 ,  H01L29/7802

    Abstract: In one embodiment, the invention comprises a MOSFET comprising individual MOSFET cells. Each cell comprises a U-shaped well (P type) and two parallel sources (N type) formed within the well. A Number of source rungs (doped N) connect sources at multiple locations. Regions between two rungs comprise a body (P type). These features are formed on an N-type epitaxial layer, which is formed on an N-type substrate. A contact extends across and contacts a number of source rungs and bodies. Gate oxide and a gate contact overlie a leg of a first well and a leg of a second adjacent well, inverting the conductivity responsive to a gate voltage. A MOSFET comprises a plurality of these cells to attain a desired low channel resistance. The cell regions are formed using self-alignment techniques at several states of the fabrication process.

    Abstract translation: 在一个实施例中，本发明包括一个包含单个MOSFET单元的MOSFET。 每个单元包括形成在井内的U形孔（P型）和两个平行的源（N型）。 在多个位置连接多个源极（掺杂N）源极。 两个梯级之间的区域包括一个主体（P型）。 这些特征形成在形成在N型衬底上的N型外延层上。 联系人跨越并接触许多源级和身体。 栅极氧化物和栅极接触覆盖第一阱的支腿和第二相邻阱的支路，响应于栅极电压而反转导电性。 MOSFET包括多个这些单元以获得期望的低通道电阻。 在制造过程的几个状态下使用自对准技术形成单元区域。

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