公开(公告)号：US10965090B2

公开(公告)日：2021-03-30

申请号：US16402270

申请日：2019-05-03

Applicant: Gigaphoton Inc.

Inventor： Takeshi Asayama

IPC: H01S3/104 ,  H01S3/0943 ,  H01S3/225

Abstract: A laser apparatus according to the present disclosure includes: a laser chamber including a pair of electrodes and configured to emit, at each of a plurality of pulse repetition frequencies, a pulse laser beam having a pulse energy corresponding to a voltage applied between the electrodes; an energy detector provided on an optical path of the pulse laser beam and configured to detect the pulse energy of the pulse laser beam; a voltage control unit configured to control the applied voltage based on a target pulse energy and the pulse energy detected by the energy detector; and a pulse energy control unit configured to periodically vary the target pulse energy at a modulation frequency corresponding to each of the pulse repetition frequencies with a reference energy being a center of variation.

公开(公告)号：US09806490B2

公开(公告)日：2017-10-31

申请号：US15354670

申请日：2016-11-17

Applicant: Gigaphoton Inc.

Inventor： Hiroshi Umeda ,  Takeshi Asayama ,  Osamu Wakabayashi

IPC: H01S3/097 ,  H01S3/23 ,  H01L21/02 ,  H01L21/67 ,  H01S3/139 ,  B23K26/00 ,  H01S3/13 ,  H01S3/104 ,  H01S3/225 ,  H01S3/00

CPC classification number: H01S3/09702 ,  B23K26/00 ,  B23K26/0608 ,  H01L21/02686 ,  H01L21/67115 ,  H01S3/0057 ,  H01S3/104 ,  H01S3/1305 ,  H01S3/1394 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2383

Abstract: The laser system may include a delay circuit unit, first and second trigger-correction units, and a clock generator. The delay circuit unit may receive a trigger signal, output a first delay signal obtained by delaying the trigger signal by a first delay time, and output a second delay signal obtained by delaying the trigger signal by a second delay time. The first trigger-correction unit may receive the first delay signal and output a first switch signal obtained by delaying the first delay signal by a first correction time. The second trigger-correction unit may receive the second delay signal and output a second switch signal obtained by delaying the second delay signal by a second correction time. The clock generator may generate a clock signal that is common to the delay circuit unit and the first and second trigger-correction units.

公开(公告)号：US11239625B2

公开(公告)日：2022-02-01

申请号：US16150297

申请日：2018-10-03

Applicant: Gigaphoton Inc.

Inventor： Takeshi Asayama

IPC: H01S3/036 ,  H01S3/225 ,  H01S3/08

Abstract: A laser apparatus includes a controller that selects one of a first gas control and a second gas control based on gas pressure measured by a pressure sensor. The first gas control causes at least one of first laser gas and second laser gas is supplied to a chamber such that the gas pressure in the chamber after the first gas control is higher than the gas pressure in the chamber before the first gas control. The second gas control causes at least the first laser gas is supplied to the chamber and causes a part of the laser gas in the chamber is exhausted such that a difference between the gas pressure in the chamber before the second gas control and the gas pressure in the chamber after the second gas control is smaller than a difference between the gas pressure in the chamber before the first gas control and the gas pressure in the chamber after the first gas control.

公开(公告)号：US10050403B2

公开(公告)日：2018-08-14

申请号：US15680474

申请日：2017-08-18

Applicant: Gigaphoton Inc.

Inventor： Hisakazu Katsuumi ,  Kazuya Takezawa ,  Kouji Kakizaki ,  Hiroaki Tsushima ,  Takeshi Asayama

IPC: H01S3/038 ,  H01S3/225 ,  H01S3/0977 ,  H01S3/036 ,  H01S3/09

Abstract: An excimer laser chamber device may include: a the laser chamber; a first electrode provided in the laser chamber; a second electrode provided in the laser chamber to face the first electrode; an electrode holder provided in the laser chamber to be connected to a high voltage; at least one connecting terminal including a first anchored portion anchored to the first electrode and a second anchored portion anchored to the electrode holder, the at least one connecting terminal being configured to electrically connect the first electrode and the electrode holder; a guide member held by the electrode holder, the guide member being configured to position the first electrode in a direction substantially perpendicular to both a direction of electric discharge between the first electrode and the second electrode and a longitudinal direction of the first electrode; and an electrode-gap-varying unit configured to move the first electrode in a direction substantially parallel to the direction of electric discharge.

公开(公告)号：US09742141B2

公开(公告)日：2017-08-22

申请号：US15245245

申请日：2016-08-24

Applicant: Gigaphoton Inc.

Inventor： Hiroaki Tsushima ,  Kouji Kakizaki ,  Takashi Matsunaga ,  Takeshi Asayama ,  Hisakazu Katsuumi ,  Hiroshi Umeda ,  Hiroyuki Ikeda

IPC: H01S3/22 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/04 ,  H01S3/225 ,  H01S3/08 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/134

CPC classification number: H01S3/036 ,  H01S3/038 ,  H01S3/0384 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/134 ,  H01S3/225

Abstract: A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.

公开(公告)号：US20140166046A1

公开(公告)日：2014-06-19

申请号：US13964816

申请日：2013-08-12

Applicant: GIGAPHOTON INC.

Inventor： Takeshi Asayama ,  Hiroshi Someya ,  Masato Moriya ,  Hideo Hoshino ,  Tamotsu Abe

IPC: B08B7/00 ,  B08B13/00

CPC classification number: B08B7/00 ,  B08B7/0035 ,  B08B13/00

Abstract: A method for cleaning collector mirrors in an EUV light generator in which a target is made into a plasma state and EUV light generated is collected by a collector mirror, the method being adopted to the EUV light generator for cleaning contaminants adhering thereto, the method comprising: preparing at least two collector mirrors; locating one of the mirrors at an EUV light condensing position while locating the other mirror at a cleaning position; determining whether the mirror at the cleaning position is cleaned while determining whether the mirror at the light condensing position requires cleaning; and once determined that the mirror at the cleaning position is cleaned and the mirror at the light condensing position requires cleaning, conveying the mirror at the light condensing position and requiring cleaning to the cleaning position while conveying the mirror at the cleaning position and having been cleaned to the light condensing position.

Abstract translation: 一种在EUV光发生器中清洁收集反射镜的方法，其中靶产生等离子体状态，并且通过集光镜收集产生的EUV光，该方法被用于EUV发光器，用于清除附着在其上的污染物，该方法包括 ：准备至少两个收集镜; 将其中一个反射镜定位在EUV聚光位置，同时将另一个反射镜定位在清洁位置; 确定在清洁位置处的反射镜是否被清洁，同时确定在聚光位置的反射镜是否需要清洁; 并且一旦确定在清洁位置处的反射镜被清洁并且聚光位置处的反射镜需要清洁，则在反射镜处于聚光位置并且在将反射镜输送到清洁位置并且被清洁时需要清洁到清洁位置 到聚光位置。