Semiconductor device and method for manufacturing it
    13.
    发明授权
    Semiconductor device and method for manufacturing it 有权
    半导体装置及其制造方法

    公开(公告)号:US06791156B2

    公开(公告)日:2004-09-14

    申请号:US10280071

    申请日:2002-10-25

    申请人: Hiroyasu Itou

    发明人: Hiroyasu Itou

    IPC分类号: H01L2900

    摘要: In a manufacturing process of an SOI structure semiconductor device in which an MOS capacitor is located on an SOI substrate, the capacitor insulating film of the MOS capacitor is prevented from degrading due to a bimetal effect, which is caused by a thermal treatment and characteristic to the SOI substrate. A trench is formed to surround the MOS capacitor in the SOI substrate, thick oxide films are formed on sidewalls defining the trench, and the trench is filled with polysilicon to complete a trench isolation layer. Because the thick oxide films have a coefficient of thermal expansion that is different from that of a silicon semiconductor layer of the SOI substrate, the thick oxide films are able to prevent the capacitor insulating film from degrading in film quality due to the thermal treatment in the manufacturing process. As a result, an SOI semiconductor device in which an MOS capacitor on an SOI substrate offers performance comparable to an MOS capacitor on a silicon substrate can be formed.

    摘要翻译: 在其中MOS电容器位于SOI衬底上的SOI结构半导体器件的制造工艺中,由于由热处理引起的双金属效应,MOS电容器的电容器绝缘膜被防止劣化, SOI衬底。 形成沟槽以围绕SOI衬底中的MOS电容器,在限定沟槽的侧壁上形成厚的氧化物膜,并且沟槽被多晶硅填充以完成沟槽隔离层。 由于厚氧化物膜具有与SOI衬底的硅半导体层的热膨胀系数不同的热膨胀系数,因此厚氧化物膜能够防止电容器绝缘膜由于热处理而导致膜质量降低 制造工艺。 结果,可以形成SOI衬底上的MOS电容器提供与硅衬底上的MOS电容器相当的性能的SOI半导体器件。

    Color image forming method and color image forming apparatus practicable
therewith
    14.
    发明授权
    Color image forming method and color image forming apparatus practicable therewith 失效
    彩色图像形成方法和彩色图像形成装置

    公开(公告)号:US5765087A

    公开(公告)日:1998-06-09

    申请号:US778723

    申请日:1996-12-27

    IPC分类号: G03G21/00 G03G15/01 G03G21/10

    摘要: The color image forming method of the kind sequentially forming toner images of different colors on an image carrier with developers of corresponding colors stored in a plurality of developing devices, sequentially transferring the toner images to a single paper or similar recording medium one above the other, and returning the toner left on the image carrier after the image transfer to the developing devices color by color, and an image forming apparatus practicable therewith. After the transfer of a toner image of any particular color to the paper wrapped around a transfer drum, a cleaning roller assigned to the above color each collects the toner remaining on the drum and again deposits it on the drum. The drum conveys the redeposited toner to one of the developing devices storing a developer of the same color as the toner.

    摘要翻译: 在图像载体上顺序地形成不同颜色的调色剂图像的类型的彩色图像形成方法,其中存储在多个显影装置中的相应颜色的显影剂顺序地将调色剂图像转印到单个纸张或类似的记录介质上, 并且在通过颜色将图像转印到显影装置之后将残留在图像载体上的调色剂返回,以及可用于其的图像形成装置。 在将特定颜色的调色剂图像转印到缠绕在转印鼓上的纸张上之后,分配给上述颜色的清洁辊收集剩余在滚筒上的调色剂并再次将其沉积在滚筒上。 鼓将再沉积的调色剂传送到存储与调色剂相同颜色的显影剂的显影装置中的一个。