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公开(公告)号：US10241062B2
公开(公告)日：2019-03-26
申请号：US14774367
申请日：2014-01-22
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Mitsugu Sato , Kenko Uchida , Sadamitsu Aso , Taku Sakazume , Hideo Morishita , Sukehiro Ito , Takashi Ohshima
IPC: H01J37/20 , H01J37/28 , H01J37/244 , G01N23/22 , G01N23/2251 , G01N23/2204
Abstract: The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device (601) is characterized by having: a charged particle optical lens tube that irradiates a sample (6) with a primary charged particle beam; a sample stage on which a light emitting member (500) that emits light because of charged particles that have come by transmission internally in the sample (6) or scattering therefrom or a sample platform (600) having the light emitting member (500) is attachably and detachably disposed; and a detector (503) that detects the light emitted by the light emitting member.
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公开(公告)号：US09466457B2
公开(公告)日：2016-10-11
申请号：US14422531
申请日：2013-07-01
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Mami Konomi , Shinsuke Kawanishi , Sukehiro Ito
CPC classification number: H01J37/18 , H01J37/04 , H01J37/09 , H01J37/16 , H01J37/20 , H01J37/228 , H01J37/261 , H01J37/28 , H01J2237/045 , H01J2237/164 , H01J2237/1825 , H01J2237/2602 , H01J2237/2605
Abstract: Ordinary charged particle beam apparatuses have each been an apparatus manufactured for dedicated use in making observations in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. There have existed no devices capable of simply making observations using an ordinary high-vacuum charged particle microscope in a gas atmosphere at atmospheric pressure or at a pressure approximately equal thereto. Furthermore, ordinary techniques have been incapable of observing the same spot of the sample in such an atmosphere using a charged particle beam and light simultaneously. This invention thus provides an apparatus including: a charged particle optical tube that irradiates a sample with a primary charged particle beam; a vacuum pump that evacuates the inside of the charged particle optical tube; a diaphragm arranged to separate a space in which the sample is placed from the charged particle optical tube, the diaphragm being detachable and allowing the primary charged particle beam to permeate or pass therethrough; and an optical microscope positioned on the opposite side of the charged particle optical tube across the diaphragm and the sample, the optical microscope having an optical axis thereof aligned with at least part of an extension of the optical axis of the charged particle optical tube.
Abstract translation: 普通带电粒子束装置各自是制造用于在大气压或基本上等于其的压力下在气体气氛中进行观察的专用制造装置。 在大气压或大致相等的压力下，不存在使用普通的高真空带电粒子显微镜简单地进行观察的装置。 此外，普通技术已经不能使用带电粒子束和光同时在这样的大气中观察样品的相同点。 因此，本发明提供了一种装置，包括：带有电荷的粒子束照射样品的带电粒子光管; 抽真空带电粒子光管内部的真空泵; 隔膜，布置成将带有样品的空间与带电粒子光管分离，隔膜可拆卸并允许初级带电粒子束渗透或通过; 以及光学显微镜，其位于带电粒子光管的横跨隔膜和样品的相对侧，光学显微镜的光轴与带电粒子光管的光轴的延伸部分的至少一部分对准。
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公开(公告)号：US09418818B2
公开(公告)日：2016-08-16
申请号：US14422552
申请日：2013-06-28
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Sukehiro Ito
CPC classification number: H01J37/16 , H01J37/00 , H01J37/18 , H01J37/20 , H01J37/244 , H01J37/26 , H01J37/28 , H01J2237/2002 , H01J2237/24455 , H01J2237/2605
Abstract: A sample observation method includes irradiating a sample with a primary charged particle beam, detecting a secondary charged particle signal obtained by the irradiating, and observing the sample. The method is characterized by causing the primary charged particle beam generated in a charged particle optical lens barrel, which is maintained in a vacuum state, to be transmitted or passed through a separating film disposed to isolate a space in which the sample is placed from the charged particle optical lens barrel; and detecting a transmitted charged particle beam obtained by irradiating the sample, placed in an atmospheric pressure or a predetermined gas atmosphere of a slightly negative pressure state compared with the atmospheric pressure, with the primary charged particle beam.
Abstract translation: 样品观察方法包括用初级带电粒子束照射样品，检测通过照射获得的二次带电粒子信号，并观察样品。 该方法的特征在于使保持在真空状态的带电粒子光学镜筒中产生的初级带电粒子束透过或通过分离膜，以将样品放置的空间从 带电粒子光学镜头镜筒; 并且与初级带电粒子束一起检测放置在与大气压相比的微小负压状态的大气压或预定气体气氛中的样品所获得的透射带电粒子束。
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14.发明授权公开(公告)号：US09012842B2
公开(公告)日：2015-04-21
申请号：US14370736
申请日：2012-12-20
Applicant: Hitachi High-Technologies Corporation
Inventor： Wataru Kotake , Shigeru Kawamata , Sukehiro Ito
CPC classification number: H01J37/24 , H01J37/1478 , H01J37/21 , H01J37/261 , H01J37/28 , H01J2237/2611
Abstract: A control device (50) for a charged particle beam device (100) tilts the irradiation axis of a primary electron beam (4) to the left, straight, or to the right via tilting coils (11, 12) each time the primary electron beam (4) scans the surface of a sample (15) over a single scanning line. When the irradiation axis is changed, the focal point of the primary electron beam (4) is adjusted by a focal point-adjusting coil (14) based on the tilt of the irradiation axis in order to take a left-tilted observation image, a non-tilted observation image or a right-tilted observation image of the surface of a sample (15) for each scanning line. The left-tilted observation images, non-tilted observation images and right-tilted observation images for the scanning lines obtained up to this point are simultaneously displayed on the same display device (31). In this way, focused non-tilted observation images and focused tilted observation images can be taken and displayed nearly simultaneously.
Abstract translation: 用于带电粒子束装置（100）的控制装置（50）每次通过倾斜线圈（11,12）将一次电子束（4）的照射轴向左，向右或向右倾斜， 光束（4）通过单个扫描线扫描样品（15）的表面。 当照射轴改变时，基于照射轴的倾斜度，通过焦点调节线圈（14）调节一次电子束（4）的焦点，以便进行左倾斜的观察图像， 每个扫描线的样品（15）的表面的非倾斜观察图像或右倾斜观察图像。 在同一显示装置（31）上同时显示直到此为止的扫描线的左倾斜观察图像，非倾斜观察图像和右倾斜观察图像。 以这种方式，可以同时拍摄和显示聚焦的非倾斜观察图像和聚焦的倾斜观察图像。
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公开(公告)号：US20140284477A1
公开(公告)日：2014-09-25
申请号：US14356191
申请日：2012-11-12
Applicant: Hitachi High-Technologies Corporation , TOTO LTD
Inventor： Yuta Ebine , Shinichi Tomita , Sukehiro Ito , Toshihiro Aoshima
IPC: H01J37/244 , H01J37/26 , H01J37/252
CPC classification number: H01J37/244 , H01J37/023 , H01J37/252 , H01J37/261 , H01J37/28 , H01J2237/221 , H01J2237/24415 , H01J2237/24475
Abstract: In order to provide a charged-particle radiation apparatus capable of evaluating and distinguishing the analysis position in a sample subjected to X-ray analysis in the stage before performing X-ray elemental analysis, and also making it possible for an analyst to perform, in a short period of time and without reworking, analysis for which high reliability is ensured, the present invention provides a charged-particle radiation apparatus provided with an X-ray detector, wherein a first back scattered electron detector (15) on the same axis as the X-ray detection surface of the X-ray detector (12 (25-30)) is disposed integrally with or independently from the X-ray detector (12), an X-ray signal being detected by the X-ray detector (12) simultaneously with or separately from detection of a back scattered electron signal by the first back scattered electron detector (15)
Abstract translation: 为了提供一种能够在执行X射线元素分析之前的阶段中对经过X射线分析的样本中的分析位置进行评估和区分的带电粒子辐射装置，并且使分析人员能够 本发明提供了一种具有X射线检测器的带电粒子辐射装置，其中第一背散射电子检测器（15）在同一轴线上 X射线检测器（12（25-30））的X射线检测面与X射线检测器（12）一体地或独立地设置，X射线检测器（X射线检测器 12）与第一背散射电子检测器（15）的背散射电子信号的检测同时或分开，
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Patent Agency Ranking
公开(公告)号：US08692195B2
公开(公告)日：2014-04-08
申请号：US13633476
申请日：2012-10-02
Applicant: Hitachi High-Technologies Corporation
Inventor： Sukehiro Ito , Junichi Katane
IPC: H01J37/28 , H01J37/26 , G01N23/225
CPC classification number: H01J37/28 , H01J37/244 , H01J2237/2443 , H01J2237/2445 , H01J2237/2605
Abstract: The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image. In addition, the detector is made usable in combination with a detector for high vacuum, to thereby make it possible to provide wide-ranging users with the image, irrespective of the vacuum mode.
Abstract translation: 本发明提供一种扫描带电粒子束装置，其包括样品室（8）和检测器。 检测器具有：检测至少从真空紫外区域到可见光区域的光的功能，具有通过气体闪烁的发光现象获得的图像信息的光（17），当样品室被控制到 低真空（1Pa〜3,000Pa）; 以及检测具有通过电子和气体分子的级联放大获得的图像信息的离子电流（11,13）的功能。 因此，可以实现可以处理各种样品的观察的装置。 此外，设计了检测单元的最佳配置，从而使得可以向所获得的图像增加值并且向用户提供具有观察图像的广泛范围的用户。 此外，检测器可与用于高真空的检测器组合使用，从而使得可以向广泛的用户提供图像，而不管真空模式如何。
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公开(公告)号：US09466460B2
公开(公告)日：2016-10-11
申请号：US14891494
申请日：2014-03-12
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Taku Sakazume , Sukehiro Ito
CPC classification number: H01J37/22 , G01N23/046 , G01N2223/3307 , G01N2223/418 , H01J37/10 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/26 , H01J37/261 , H01J37/28 , H01J2237/047 , H01J2237/10 , H01J2237/221 , H01J2237/226 , H01J2237/2443 , H01J2237/2445 , H01J2237/24578 , H01J2237/2611 , H01J2237/2802
Abstract: An electron microscope has a large depth of focus in comparison with an optical microscope. Thus, information is superimposed on one image in the direction of depth. Therefore, it is necessary to accurately specify the three-dimensional position and density of a structure in a specimen so as to observe the three-dimensional structure of the interior of the specimen by using the electron microscope. Furthermore, a specimen that is observed with the optical microscope on a slide glass is not put into a TEM device of the related art. Thus, performing three-dimensional internal structure observation with the electron microscope on a location that is observed with the optical microscope requires very cumbersome preparation of the specimen. By controlling a vector parameter that defines the interrelationship between a primary charged particle beam and the specimen and by irradiation with the primary charged particle beam with a plurality of different vector parameters, images of transmitted charged particles of the specimen that correspond to each of the vector parameters are obtained. Irradiation with the primary charged particle beam is performed on the specimen that is arranged either directly or through a predetermined member on a detector which detects charged particles transmitted through or scattered by the interior of the specimen.
Abstract translation: 与光学显微镜相比，电子显微镜具有较大的聚焦深度。 因此，信息在深度方向上叠加在一个图像上。 因此，必须准确地确定试样中的结构的三维位置和密度，以便通过电子显微镜观察试样内部的三维结构。 此外，用幻灯片玻璃上的光学显微镜观察的样品没有放入现有技术的TEM器件中。 因此，在用光学显微镜观察的位置上用电子显微镜进行三维内部结构观察需要非常繁琐的样品制备。 通过控制限定初级带电粒子束和样本之间的相互关系的矢量参数以及通过用多个不同矢量参数照射初级带电粒子束的样本的透射带电粒子对应于每个矢量的图像 获得参数。 对于直接或通过检测器上的预定部件布置的试样进行照射，该检测器检测通过样本内部传播或散射的带电粒子。
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公开(公告)号：US09208995B2
公开(公告)日：2015-12-08
申请号：US14379291
申请日：2013-02-15
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Takashi Ohshima , Hiroyuki Ito , Mitsugu Sato , Sukehiro Ito
CPC classification number: H01J37/28 , H01J37/09 , H01J37/16 , H01J37/18 , H01J2237/0451 , H01J2237/06341 , H01J2237/10 , H01J2237/1405 , H01J2237/164 , H01J2237/2608 , H01J2237/2801
Abstract: Provided is a charged particle beam apparatus (111) to and from which a diaphragm (101) can be easily attached and detached, and in which a sample (6) can be arranged under vacuum and under high pressure. The charged particle beam apparatus includes: a lens barrel (3) holding a charged particle source (110) and an electron optical system (1,2,7); a first housing (4) connected to the lens barrel (3); a second housing (100) recessed to inside the first housing (4); a first diaphragm (10) separating the space inside the lens barrel (3) and the space inside the first housing (4), and through which the charged particle beam passes; a second diaphragm (101) separating the spaces inside and outside the recessed section (100a) in the second housing (100), and through which the charged particle beam passes; and a pipe (23) connected to a third housing (22) accommodating the charged particle source (110). The first diaphragm (10) is attached to the pipe (23), and the pipe (23) and the third housing (22) can be attached to and detached from the lens barrel (3) in the direction of the optical axis (30). A space (105) surrounded by the first housing (4) and the second housing (100) is depressurized, and the sample (6) arranged inside the recessed section (100a) is irradiated with a charged particle beam.
Abstract translation: 提供了一种带电粒子束装置（111），隔膜（101）可以从其中容易地附接和拆卸，并且其中样品（6）可以在真空和高压下布置。 带电粒子束装置包括：保持带电粒子源（110）和电子光学系统（1,2,7）的镜筒（3）; 连接到镜筒（3）的第一壳体（4）; 第二壳体（100），其凹入到所述第一壳体（4）的内部; 分离透镜筒（3）内的空间与第一壳体（4）内的空间的第一隔膜（10），带电粒子束通过该第一隔膜 第二隔膜（101），其分离所述第二壳体（100）中的所述凹部（100a）的内部和外部的空间，并且所述带电粒子束穿过所述第二隔膜; 以及连接到容纳所述带电粒子源（110）的第三壳体（22）的管道（23）。 第一隔膜（10）附接到管道（23），并且管道（23）和第三壳体（22）可以沿着光轴（30）的方向附接到镜筒（3）并从镜筒 ）。 由第一壳体（4）和第二壳体（100）围绕的空间（105）被减压，并且将配置在凹部（100a）内部的样品（6）照射带电粒子束。
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公开(公告)号：US20150228448A1
公开(公告)日：2015-08-13
申请号：US14422531
申请日：2013-07-01
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Mami Konomi , Shinsuke Kawanishi , Sukehiro Ito
CPC classification number: H01J37/18 , H01J37/04 , H01J37/09 , H01J37/16 , H01J37/20 , H01J37/228 , H01J37/261 , H01J37/28 , H01J2237/045 , H01J2237/164 , H01J2237/1825 , H01J2237/2602 , H01J2237/2605
Abstract: Ordinary charged particle beam apparatuses have each been an apparatus manufactured for dedicated use in making observations in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. There have existed no devices capable of simply making observations using an ordinary high-vacuum charged particle microscope in a gas atmosphere at atmospheric pressure or at a pressure approximately equal thereto. Furthermore, ordinary techniques have been incapable of observing the same spot of the sample in such an atmosphere using a charged particle beam and light simultaneously. This invention thus provides an apparatus including: a charged particle optical tube that irradiates a sample with a primary charged particle beam; a vacuum pump that evacuates the inside of the charged particle optical tube; a diaphragm arranged to separate a space in which the sample is placed from the charged particle optical tube, the diaphragm being detachable and allowing the primary charged particle beam to permeate or pass therethrough; and an optical microscope positioned on the opposite side of the charged particle optical tube across the diaphragm and the sample, the optical microscope having an optical axis thereof aligned with at least part of an extension of the optical axis of the charged particle optical tube.
Abstract translation: 普通带电粒子束装置各自是制造用于在大气压或基本上等于其的压力下在气体气氛中进行观察的专用制造装置。 在大气压或大致相等的压力下，不存在使用普通的高真空带电粒子显微镜简单地进行观察的装置。 此外，普通技术已经不能使用带电粒子束和光同时在这样的大气中观察样品的相同点。 因此，本发明提供了一种装置，包括：带有电荷的粒子束照射样品的带电粒子光管; 抽真空带电粒子光管内部的真空泵; 隔膜，布置成将带有样品的空间与带电粒子光管分离，隔膜可拆卸并允许初级带电粒子束渗透或通过; 以及光学显微镜，其位于带电粒子光管的横跨隔膜和样品的相反侧，光学显微镜的光轴与带电粒子光管的光轴的延伸部分的至少一部分对准。
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公开(公告)号：US20150228447A1
公开(公告)日：2015-08-13
申请号：US14422552
申请日：2013-06-28
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Sukehiro Ito
IPC: H01J37/16 , H01J37/26 , H01J37/244
CPC classification number: H01J37/16 , H01J37/00 , H01J37/18 , H01J37/20 , H01J37/244 , H01J37/26 , H01J37/28 , H01J2237/2002 , H01J2237/24455 , H01J2237/2605
Abstract: A sample observation method includes irradiating a sample with a primary charged particle beam, detecting a secondary charged particle signal obtained by the irradiating, and observing the sample. The method is characterized by causing the primary charged particle beam generated in a charged particle optical lens barrel, which is maintained in a vacuum state, to be transmitted or passed through a separating film disposed to isolate a space in which the sample is placed from the charged particle optical lens barrel; and detecting a transmitted charged particle beam obtained by irradiating the sample, placed in an atmospheric pressure or a predetermined gas atmosphere of a slightly negative pressure state compared with the atmospheric pressure, with the primary charged particle beam.
Abstract translation: 样品观察方法包括用初级带电粒子束照射样品，检测通过照射获得的二次带电粒子信号，并观察样品。 该方法的特征在于使保持在真空状态的带电粒子光学镜筒中产生的初级带电粒子束透过或通过分离膜，以将样品放置的空间从 带电粒子光学镜头镜筒; 并且与初级带电粒子束一起检测放置在与大气压相比的微小负压状态的大气压或预定气体气氛中的样品所获得的透射带电粒子束。
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