公开(公告)号：US20160118309A1

公开(公告)日：2016-04-28

申请号：US14525944

申请日：2014-10-28

Applicant: Intermolecular, Inc.

Inventor： Rajesh Kelekar ,  Satbir Kahlon ,  Robert Sculac

IPC: H01L21/66 ,  H01L21/288 ,  H01L21/67 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/02 ,  H01L21/306

CPC classification number: H01L22/26 ,  H01L21/02057 ,  H01L21/02282 ,  H01L21/02623 ,  H01L21/288 ,  H01L21/30604 ,  H01L21/31111 ,  H01L21/31133 ,  H01L21/32134 ,  H01L21/67023 ,  H01L21/6704 ,  H01L21/67075 ,  H01L21/6708 ,  H01L21/6719 ,  H01L22/20

Abstract: Embodiments provided herein describe systems and methods for processing substrates. A substrate having a first region and a second region is provided. A container is positioned proximate to the first region of the substrate. The container has an opening on an end thereof adjacent to the substrate. A processing liquid is dispensed into the container such that the processing liquid contacts the first region of the substrate through the opening. The gaseous pressure in a portion of the container devoid of the processing liquid is reduced. The reduction of the gaseous pressure prevents the processing liquid from flowing from the first region of the substrate to the second region of the substrate.

Abstract translation: 本文提供的实施例描述了用于处理衬底的系统和方法。 提供具有第一区域和第二区域的衬底。 容器位于基底的第一区域附近。 容器在与基板相邻的端部上具有开口。 处理液体被分配到容器中，使得处理液体通过开口接触基板的第一区域。 没有处理液体的容器的一部分中的气体压力降低。 气体压力的降低防止处理液体从衬底的第一区域流到衬底的第二区域。

公开(公告)号：US08973524B2

公开(公告)日：2015-03-10

申请号：US13685961

申请日：2012-11-27

Applicant: Intermolecular, Inc.

Inventor： Richard R. Endo ,  Rajesh Kelekar

IPC: B05C11/11 ,  B05C11/115 ,  B05D1/00 ,  B05D1/32

CPC classification number: B05D1/005 ,  B05D1/32

Abstract: A spin deposition apparatus includes a deposition mask configured to be arranged proximate a target substrate. The deposition mask includes at least one fluid reservoir offset from a rotational axis of the deposition mask and configured to hold fluid for dispersal on a portion of a surface of the target substrate.

Abstract translation: 旋转沉积设备包括被配置为邻近目标衬底设置的沉积掩模。 沉积掩模包括从沉积掩模的旋转轴线偏移的至少一个流体储存器，并且构造成保持用于分散在目标基板的表面的一部分上的流体。

公开(公告)号：US20140315370A1

公开(公告)日：2014-10-23

申请号：US14321383

申请日：2014-07-01

Applicant: Intermolecular, Inc.

Inventor： Rajesh Kelekar ,  Aaron T. Francis ,  Gregory P. Lim

IPC: H01L21/76

CPC classification number: H01L21/76 ,  H01L21/02 ,  H01L21/306 ,  H01L21/67017

Abstract: Overlapping combinatorial processing can offer more processed regions, better particle performance and simpler process equipment. In overlapping combinatorial processing, one or more regions are processed in series with some degrees of overlapping between regions. In some embodiments, overlapping combinatorial processing can be used in conjunction with non-overlapping combinatorial processing and non-combinatorial processing to develop and investigate materials and processes for device processing and manufacturing.

Abstract translation: 重叠组合处理可以提供更多的处理区域，更好的粒子性能和更简单的工艺设备。 在重叠组合处理中，一个或多个区域与区域之间的一些重叠程度串联处理。 在一些实施例中，重叠的组合处理可以结合非重叠的组合处理和非组合处理来使用，以开发和研究用于设备处理和制造的材料和过程。

公开(公告)号：US20140262028A1

公开(公告)日：2014-09-18

申请号：US14013281

申请日：2013-08-29

Applicant: Intermolecular, Inc.

Inventor： Rajesh Kelekar

IPC: B05C9/00 ,  C25D21/12 ,  B08B3/04

CPC classification number: H01L21/30 ,  B01J19/0046 ,  B01J2219/00283 ,  B01J2219/00286 ,  B01J2219/00301 ,  B01J2219/00313 ,  B01J2219/0038 ,  B01J2219/00382 ,  B01J2219/00416 ,  B01J2219/00418 ,  B01J2219/00527 ,  B01J2219/00585 ,  B08B3/04 ,  C23C14/08 ,  C23C14/22 ,  C23C14/34 ,  C23C18/1619 ,  C23C18/1682 ,  C25D17/02 ,  G11C13/0004 ,  H01L21/02104 ,  H01L21/30604 ,  H01L21/67051 ,  H01L21/67057 ,  H01L21/6719 ,  H01L22/10 ,  H01L22/12 ,  H01L22/14 ,  H01L27/2463 ,  H01L45/1608

Abstract: An open-bottomed reactor cell for wet processing of substrates can be configured to confine a process liquid to an area under the cell (processing the “internal site”), or alternatively to exclude the process liquid from most of the area under the cell (processing the “external site”) without physical contact between the cell and substrate. A slight underpressure or overpressure maintained inside the main cavity of the cell causes the liquid to form a meniscus in the narrow gap between the cell and substrate rather than flowing outside the desired process area. An area under a peripheral channel outside the main cavity of the cell is shared by both the internal site and the external side, allowing the entire substrate to be processed.

Abstract translation: 用于湿处理基底的开底反应器电池可以被配置为将处理液体限制在细胞下方的区域（处理“内部位点”），或者替代地从细胞下方的大部分区域排除处理液体 处理“外部位置”），而不会在电池和基板之间产生物理接触。 在电池的主腔内保持的轻微的负压或超压导致液体在电池和衬底之间的窄间隙中形成弯液面，而不是流过所需工艺区域外面。 在电池的主腔外部的周边通道下方的区域由内部位置和外部两者共享，从而允许整个衬底被处理。

公开(公告)号：US20150056780A1

公开(公告)日：2015-02-26

申请号：US14506166

申请日：2014-10-03

Applicant: Intermolecular, Inc.

Inventor： Rajesh Kelekar ,  Aaron Francis ,  Gregory Lim

IPC: H01L21/76

CPC classification number: H01L21/76 ,  H01L21/02 ,  H01L21/306 ,  H01L21/67017

Abstract: Overlapping combinatorial processing can offer more processed regions, better particle performance and simpler process equipment. In overlapping combinatorial processing, one or more regions are processed in series with some degrees of overlapping between regions. In some embodiments, overlapping combinatorial processing can be used in conjunction with non-overlapping combinatorial processing and non-combinatorial processing to develop and investigate materials and processes for device processing and manufacturing.

Abstract translation: 重叠组合处理可以提供更多的处理区域，更好的粒子性能和更简单的工艺设备。 在重叠组合处理中，一个或多个区域与区域之间的一些重叠程度串联处理。 在一些实施例中，重叠的组合处理可以结合非重叠的组合处理和非组合处理来使用，以开发和研究用于设备处理和制造的材料和过程。

公开(公告)号：US20140014681A1

公开(公告)日：2014-01-16

申请号：US14030968

申请日：2013-09-18

Applicant: Intermolecular, Inc.

Inventor： Rajesh Kelekar

IPC: B67D7/08

CPC classification number: B67D7/085 ,  F04B49/065 ,  H01L21/67017 ,  Y10T137/0379 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/85986 ,  Y10T137/86002

Abstract: In one implementation, a method for providing a fluid at a target pressure may include providing a fluid at a velocity to a supply line through a dispenser, measuring a pressure of the fluid flowing through the supply line, comparing the measured pressure with the target pressure, and adjusting the velocity based on the results of the comparison.

Abstract translation: 在一个实施方案中，用于在目标压力下提供流体的方法可以包括通过分配器以速度向供应管线提供流体，测量流过供应管线的流体的压力，将测量的压力与目标压力进行比较 ，并根据比较结果调整速度。

公开(公告)号：US20130023130A1

公开(公告)日：2013-01-24

申请号：US13628996

申请日：2012-09-27

Applicant: Intermolecular, Inc.

Inventor： Rajesh Kelekar

IPC: B05B3/02 ,  H01L21/302

CPC classification number: C25D21/10 ,  C23C18/1628 ,  C23C18/1669 ,  C25D5/08 ,  C25D17/001 ,  C25D17/008 ,  H01L21/67023

Abstract: An apparatus and system for stirring liquid inside a flow cell. In one implementation, the apparatus includes a rotatable disc configured to receive liquid at a top side of the disc and distribute the liquid substantially evenly around a periphery of the flow cell. The disc has a triangular cross sectional area. The apparatus may further include a set of fins attached to a bottom side of the disc, wherein the set of fins is configured to draw the liquid from the periphery of the flow cell into the center of the flow cell.

Abstract translation: 用于在流动池内搅拌液体的装置和系统。 在一个实施方案中，该装置包括可旋转盘，其构造成在盘的顶侧处接收液体，并将液体基本均匀地分布在流动池的周边周围。 盘具有三角形横截面积。 该装置还可以包括附接到盘的底侧的一组翅片，其中所述翅片组被配置为将液体从流动池的周边抽吸到流动池的中心。