Dummy wafer
    11.
    发明授权
    Dummy wafer 失效
    虚拟晶圆

    公开(公告)号:US6150023A

    公开(公告)日:2000-11-21

    申请号:US637496

    申请日:1996-04-25

    摘要: The present invention provides a test dummy wafer used in the process for manufacturing a semiconductor device, which has more excellent etching resistance than a silicon wafer, and excellent mirror surface properties and evenness required for a substrate, and which causes no contamination source in the manufacturing process. The dummy wafer is composed of glassy carbon, and at least one side thereof is preferably polished to a mirror surface having a surface roughness Ra of not more than 0.005 .mu.m. The dummy wafer of the present invention has excellent characteristics as a dummy wafer for monitoring the thickness of a CVD film. The dummy wafer having specific electric resistance of not more than 0.1 .OMEGA..multidot.cm exhibits excellent characteristics as a dummy wafer for monitoring the thickness of a film formed by sputtering and confirming cleanliness.

    摘要翻译: 本发明提供了一种用于制造半导体器件的方法的测试虚拟晶片,其具有比硅晶片更好的耐蚀刻性,以及基板所需的优异的镜面性质和均匀性,并且在制造中不产生污染源 处理。 伪晶片由玻璃碳组成,其至少一侧优选抛光至表面粗糙度Ra不大于0.005μm的镜面。 本发明的虚设晶片作为用于监测CVD膜的厚度的虚设晶片具有优异的特性。 具有不大于0.1欧姆·厘米的比电阻的伪晶片作为用于监测由溅射形成的膜的厚度并确认清洁度的虚拟晶片表现出优异的特性。

    Method of manufacturing carbon substrate
    12.
    发明授权
    Method of manufacturing carbon substrate 失效
    制造碳基板的方法

    公开(公告)号:US5580500A

    公开(公告)日:1996-12-03

    申请号:US297811

    申请日:1994-08-30

    IPC分类号: C04B35/524 C01B31/00

    CPC分类号: C04B35/524

    摘要: A carbon substrate manufacturing method includes a hot molding step, a burn-carbonizing step, a hot isostatical pressure treatment step, and a mirror polishing step. In the hot molding step, molding is performed while heating thermosetting resin powders to be a hard carbon substrate after burn-carbonizing, where the thermosetting resin powders are of a particle size 150 .mu.m or more, HPF 80-150 mm, a moisture content 1.0-3.0 weight %, Fe, Ni, Si and Ca respectively 5 ppm or less. In the burn-carbonizing process, a disk shaped resin molded body is filled into a graphite cylinder and burn-carbonized by heating from the external while the condition therefor is maintained in that the disk shaped resin molded body is stacked holding therein a graphite spacer at every one sheet basis or at every plurality of sheet basis and is loaded on its top with a tungsten carbide weight, where the graphite spacer has a heat conductivity 100 kcal/m.hr..degree. C. or less, a bulk density 1.70-1.85, and a flatness degree 10 .mu.m or less.

    摘要翻译: 碳基板制造方法包括热成型步骤,燃烧碳化步骤,热等压压力处理步骤和镜面抛光步骤。 在热成型工序中,在将热固化性树脂粉末在烧成碳化后作为硬质碳基板加热的同时进行成型,其中热固性树脂粉末的粒径为150μm以上,HPF为80-150mm,水分含量 1.0-3.0重量%,Fe,Ni,Si和Ca分别为5ppm以下。 在烧成碳化工序中,将圆盘状树脂成形体填充到石墨圆筒中,通过加热从外部进行燃烧碳化,同时保持其状态,将盘状树脂成型体层叠在一起,将石墨间隔件 每一片或多个片材基础,并以碳化钨重量装载在其顶部,其中石墨间隔物具有100kcal / m·hr的热导率。 ℃以下,体积密度1.70-1.85,平坦度10μm以下。

    Grinder
    13.
    发明授权
    Grinder 有权
    磨床

    公开(公告)号:US08657033B2

    公开(公告)日:2014-02-25

    申请号:US13088848

    申请日:2011-04-18

    IPC分类号: E21B10/12

    摘要: In a grinder, a terminal plate is projectingly provided on an upper surface of a controller. A connection portion, which accommodates a female terminal and includes a slit into which the terminal plate enters, is projectingly provided on a lower surface of a main body portion of a switch block. At the time of assembling of the switch block and the controller, the terminal plate that enters into the connection portion from the slit is inserted into and connected to the female terminal. First and second projections that cover a formation surface of the slit in the connection portion when the connection portion is inserted with and connected to the terminal plate are formed on the upper surface of the controller.

    摘要翻译: 在研磨机中,端子板突出地设置在控制器的上表面上。 容纳阴端子并且包括端子板进入的狭缝的连接部分突出地设置在开关块的主体部分的下表面上。 在组装开关块和控制器时,从狭缝进入连接部分的端子板插入并连接到母端子。 当连接部分插入并连接到端子板时,在连接部分中覆盖狭缝的形成表面的第一和第二突起形成在控制器的上表面上。

    METHOD FOR PRODUCING MULTILAYER GRAPHENE-COATED SUBSTRATE
    14.
    发明申请
    METHOD FOR PRODUCING MULTILAYER GRAPHENE-COATED SUBSTRATE 有权
    生产多层石墨涂层基材的方法

    公开(公告)号:US20130065034A1

    公开(公告)日:2013-03-14

    申请号:US13698796

    申请日:2012-02-06

    申请人: Kazuo Muramatsu

    发明人: Kazuo Muramatsu

    IPC分类号: H01B13/32

    摘要: The present invention provides a method of producing a multi-layer graphene-laminated substrate which comprises laminating, on a substrate surface, multi-layer graphenes from a mass of multi-layer graphenes. The method of the present invention can provide an electrically conductive film and a transparent electrically conductive film made of graphenes more easily and stably.

    摘要翻译: 本发明提供一种多层石墨烯层压基板的制造方法,其包括在基板表面上层叠多层石墨烯的多层石墨烯。 本发明的方法可以更容易且稳定地提供由石墨烯制成的导电膜和透明导电膜。

    CARBON MATERIAL AND METHOD FOR PRODUCING SAME
    15.
    发明申请
    CARBON MATERIAL AND METHOD FOR PRODUCING SAME 有权
    碳材料及其制造方法

    公开(公告)号:US20120045384A1

    公开(公告)日:2012-02-23

    申请号:US13266295

    申请日:2010-05-01

    摘要: (Problem)A porous carbon material having excellent graphite crystallinity, good carrier mobility and proper porosity, a porous carbon material having edges of carbon hexagonal planes located on outer surfaces of particle and structure, and flaky graphite being similar to graphene are produced.(Means to Solve)By subjecting a carbon material, in which a closed-pore-ratio and an amount of remaining hydrogen in the material are set to be within a proper range, to hot isostatic pressing treatment, a vapor phase growth reaction of graphite is generated in closed pores as nuclei using hydrogen and hydrocarbon generated from the carbon material, thereby producing a large amount of targeted porous carbon material at low cost. Flaky graphite being similar to graphene is produced by applying physical impact to the obtained porous carbon material or by generating a graphite intercalation compound using the porous carbon material as a host and then quickly heating the compound.

    摘要翻译: (问题)制造具有优异的石墨结晶性,良好的载流子迁移率和适当孔隙率的多孔碳材料,具有位于颗粒和结构的外表面上的碳六角形平面边缘的多孔碳材料和类似于石墨烯的片状石墨。 (解决手段)通过将材料中的闭孔比和剩余氢量设定在适当范围内的碳材料进行热等静压处理,将石墨的气相生长反应 在密闭孔中产生,使用由碳材料生成的氢和烃产生的核,从而以低成本生产大量的目标多孔碳材料。 与石墨烯类似的片状石墨通过对所得多孔碳材料进行物理冲击或通过使用多孔碳材料作为主体产生石墨插层化合物,然后快速加热该化合物来生产。

    Actuator including rotor case and housing with sealing unit for hermetic structure
    16.
    发明授权
    Actuator including rotor case and housing with sealing unit for hermetic structure 有权
    执行器包括转子外壳和带密封单元的外壳,用于密封结构

    公开(公告)号:US07375446B2

    公开(公告)日:2008-05-20

    申请号:US11135404

    申请日:2005-05-24

    IPC分类号: H02K7/06 H02K21/14

    摘要: An actuator for use with a fluid channel structure comprises: a stator assembly including stator yokes, and a coil; and a rotor assembly including a housing shaped in a circular hollow-cylinder, an output shaft inserted through the housing, a sleeve, a magnet fixedly attached to the sleeve, and a rotor case. In the actuator described above, the housing includes first and second sealing units having elasticity and disposed at the outer circumference of the circular hollow-cylinder. The first sealing unit makes elastic contact with a wall of a fluid channel of the fluid channel structure, and the rotor case has a cup-like configuration and has an open end portion thereof engaging with the circular hollow-cylinder portion of the housing and pressing on the elastic second sealing unit. Thus, hermetic structure is surely achieved.

    摘要翻译: 用于流体通道结构的致动器包括:定子组件,其包括定子轭和线圈; 以及转子组件,其包括形成为圆形中空圆筒的壳体,插入穿过壳体的输出轴,套筒,固定地附接到套筒的磁体和转子壳体。 在上述致动器中,壳体包括具有弹性的第一和第二密封单元,并且设置在圆形中空圆筒的外周。 第一密封单元与流体通道结构的流体通道的壁弹性接触,并且转子壳体具有杯状构造,并且其开口端部与壳体的圆形中空圆筒部分接合并按压 在弹性第二密封单元上。 因此,可靠地实现了气密结构。

    Actuator including rotor case and housing with sealing unit for hermetic structure
    17.
    发明申请
    Actuator including rotor case and housing with sealing unit for hermetic structure 有权
    执行器包括转子外壳和带密封单元的外壳,用于密封结构

    公开(公告)号:US20050264113A1

    公开(公告)日:2005-12-01

    申请号:US11135404

    申请日:2005-05-24

    摘要: An actuator for use with a fluid channel structure comprises: a stator assembly including stator yokes, and a coil; and a rotor assembly including a housing shaped in a circular hollow-cylinder, an output shaft inserted through the housing, a sleeve, a magnet fixedly attached to the sleeve, and a rotor case. In the actuator described above, the housing includes first and second sealing units having elasticity and disposed at the outer circumference of the circular hollow-cylinder. The first sealing unit makes elastic contact with a wall of a fluid channel of the fluid channel structure, and the rotor case has a cup-like configuration and has an open end portion thereof engaging with the circular hollow-cylinder portion of the housing and pressing on the elastic second sealing unit. Thus, hermetic structure is surely achieved.

    摘要翻译: 用于流体通道结构的致动器包括:定子组件,其包括定子轭和线圈; 以及转子组件,其包括形成为圆形中空圆筒的壳体,插入穿过壳体的输出轴,套筒,固定地附接到套筒的磁体和转子壳体。 在上述致动器中,壳体包括具有弹性的第一和第二密封单元,并且设置在圆形中空圆筒的外周。 第一密封单元与流体通道结构的流体通道的壁弹性接触,并且转子壳体具有杯状构造,并且其开口端部与壳体的圆形中空圆筒部分接合并按压 在弹性第二密封单元上。 因此,可靠地实现了气密结构。

    Carbon nanotube and production method therefor
    18.
    发明授权
    Carbon nanotube and production method therefor 有权
    碳纳米管及其制备方法

    公开(公告)号:US09403683B2

    公开(公告)日:2016-08-02

    申请号:US13882834

    申请日:2011-11-21

    申请人: Kazuo Muramatsu

    发明人: Kazuo Muramatsu

    摘要: The present invention provides CNT, in particular CNT having inherent properties thereof, which has a thin wall and does not form a bundle, and an efficient production method of the CNT. The method is for producing CNT, the whole length or a part thereof is compressed to form a band, said method comprises preparing a powdery and/or particulate material of an organic compound pre-baked to an extent of containing remaining hydrogen and allowed to carry a catalyst, which may be a transition metal, other metal or other element, thereon; charging the powdery and/or particulate material of the organic compound in a closed vessel made of a heat resistant material; and subjecting the powdery and/or particulate material of the organic compound together with the vessel to hot isostatic pressing treatment using a compressed gas atmosphere, wherein a maximum ultimate temperature at the hot isostatic pressing treatment is 750 to 1200° C.

    摘要翻译: 本发明提供CNT,特别是具有固有性质的CNT,其具有薄壁并且不形成束,并且CNT的有效制备方法。 该方法用于生产CNT,其整个长度或其一部分被压缩以形成带,所述方法包括制备预烘烤至含有剩余氢并允许携带的程度的有机化合物的粉状和/或颗粒材料 催化剂,其可以是过渡金属,其它金属或其它元素; 将有机化合物的粉末和/或颗粒材料装入由耐热材料制成的密闭容器中; 并使用压缩气体气氛将有机化合物的粉末和/或颗粒材料与容器一起进行热等静压处理,其中热等静压处理的最大极限温度为750至1200℃。

    NOVEL CARBON NANOTUBE AND PRODUCTION METHOD THEREFOR
    20.
    发明申请
    NOVEL CARBON NANOTUBE AND PRODUCTION METHOD THEREFOR 有权
    新型碳纳米管及其生产方法

    公开(公告)号:US20130224483A1

    公开(公告)日:2013-08-29

    申请号:US13882834

    申请日:2011-11-21

    申请人: Kazuo Muramatsu

    发明人: Kazuo Muramatsu

    IPC分类号: C01B31/02

    摘要: The present invention provides CNT, in particular CNT having inherent properties thereof, which has a thin wall and does not form a bundle, and an efficient production method of the CNT. The method is for producing CNT, the whole length or a part thereof is compressed to form a band, said method comprises preparing a powdery and/or particulate material of an organic compound pre-baked to an extent of containing remaining hydrogen and allowed to carry a catalyst, which may be a transition metal, other metal or other element, thereon; charging the powdery and/or particulate material of the organic compound in a closed vessel made of a heat resistant material; and subjecting the powdery and/or particulate material of the organic compound together with the vessel to hot isostatic pressing treatment using a compressed gas atmosphere, wherein a maximum ultimate temperature at the hot isostatic pressing treatment is 750 to 1200° C.

    摘要翻译: 本发明提供CNT,特别是具有固有性质的CNT,其具有薄壁并且不形成束,并且CNT的有效制备方法。 该方法用于生产CNT,其整个长度或其一部分被压缩以形成带,所述方法包括制备预烘烤至含有剩余氢并允许携带的程度的有机化合物的粉状和/或颗粒材料 催化剂,其可以是过渡金属,其它金属或其它元素; 将有机化合物的粉末和/或颗粒材料装入由耐热材料制成的密闭容器中; 并使用压缩气体气氛将有机化合物的粉末和/或颗粒材料与容器一起进行热等静压处理,其中热等静压处理的最大极限温度为750至1200℃。