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公开(公告)号：US20160163514A1
公开(公告)日：2016-06-09
申请号：US14953917
申请日：2015-11-30
Applicant: MKS Instruments, Inc.
Inventor： Larry J. FISK, II , Aaron T. RADOMSKI , Jonathan SMYKA
IPC: H01J37/32
CPC classification number: H01J37/32155 , H01J37/32146 , H01J37/32174 , H01J37/32935 , H01J37/3299 , H01J2237/332 , H01J2237/334
Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
Abstract translation: 重复设定点发生器模块根据在连续时间间隔期间重复的预定模式选择性地改变输出参数的设定点。 在第一时间间隔期间，闭环模块基于在（i）在第一时间间隔内N次的设定点的N个值之间的N个差异产生N个闭环值，以及（ii）N 分别在第一个时间间隔内的N次输出参数的测量。 在第一时间间隔期间，调整模块基于在（i）在第二时间间隔期间的N次的设定点的N个值之间的N个差异产生N个调整值，以及（ii） 输出参数分别在第二个时间间隔内的N次。
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公开(公告)号：US20220005674A1
公开(公告)日：2022-01-06
申请号：US17480993
申请日：2021-09-21
Applicant: MKS Instruments, Inc. , LAM RESEARCH CORPORATION
Inventor： Aaron T. RADOMSKI , Benjamin J. GITLIN , Larry J. FISK, II , Mariusz OLDZIEJ , Aaron M. BURRY , Jonathan W. SMYKA , Alexei MARAKHTANOV , Bing JI , Felix Leib KOZAKEVICH , John HOLLAND , Ranadeep BHOWMICK
IPC: H01J37/32
Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.
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公开(公告)号：US20210274644A1
公开(公告)日：2021-09-02
申请号：US17322549
申请日：2021-05-17
Applicant: MKS Instruments, Inc.
Inventor： Ky LUU , Aaron T. RADOMSKI , Dave COFFTA
Abstract: A clamp configured to be coupled to a printed circuit board to cool and compress one or more electrical connections subject to repeated power and thermal cycling. A first conductive column of the clamp is configured to compress a first electrical connection between a first power device lead and a first printed circuit board trace of the printed circuit board, and draw thermal energy away from the first power device lead. The first conductive column extends from a load spreading plate. The load spreading plate is an insulator that electrically isolates a fastener extending therefrom from the first conductive column. The fastener is configured to cooperate with the circuit board to connect the clamp to the circuit board, compress the load spreading plate against the first conductive column to compress the first electrical connection, and connect the clamp to ground.
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公开(公告)号：US20170062187A1
公开(公告)日：2017-03-02
申请号：US15236661
申请日：2016-08-15
Applicant: MKS Instruments, Inc.
Inventor： Aaron T. RADOMSKI , Sang Won LEE , Larry J. FISK, II , Jonathan W. SMYKA
IPC: H01J37/32
CPC classification number: H01J37/32183 , H01J37/32091 , H01J37/321 , H01J37/32155
Abstract: An RF supply system in which a bias RF generator operates at a first frequency to provide a bias RF output signal and a source RF generator operates at a second frequency to provide a source RF output signal. The RF output power signals are applied to a load, such as a plasma chamber. The source RF generator detects a triggering event. In response to the triggering event, the source RF generator initiates adding frequency offsets to the source RF output signal in order to respond to impedance fluctuations in the plasma chamber that occur with respect to the triggering event. The triggering event detected by the source RF generator can be received from the bias RF generator in the form of a control signal that varies in accordance with the bias RF output signal.
Abstract translation: 一种RF供电系统，其中偏置RF发生器以第一频率操作以提供偏置RF输出信号，并且源RF发生器以第二频率操作以提供源RF输出信号。 RF输出功率信号被施加到负载，例如等离子体室。 源RF发生器检测触发事件。 响应于触发事件，源RF发生器启动向源RF输出信号添加频率偏移，以响应相对于触发事件发生的等离子体室中的阻抗波动。 由源RF发生器检测到的触发事件可以以偏置RF发射器的形式从控制信号的形式接收，该控制信号根据偏置RF输出信号而变化。
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15.发明申请公开(公告)号：US20140218076A1
公开(公告)日：2014-08-07
申请号：US13761955
申请日：2013-02-07
Applicant: MKS INSTRUMENTS, INC.
Inventor： David J. COUMOU , Larry J. FISK, II , Aaron T. RADOMSKI , Jaehyun KIM , Sang-Won LEE , Jonathan SMYKA
CPC classification number: H01J37/32174 , H01J37/3299
Abstract: A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output.
Abstract translation: 公开了射频（RF）系统。 RF系统包括RF传感器，模数转换器（ADC）模块，处理模块和同步模块。 RF传感器测量RF输出的参数，并根据参数产生RF信号。 ADC模块将RF信号的采样转换为数字值。 处理模块基于数字值产生处理的值。 响应于RF输出中的转换，同步模块输出其中一个处理值。
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Patent Agency Ranking
公开(公告)号：US20220182024A1
公开(公告)日：2022-06-09
申请号：US17111700
申请日：2020-12-04
Applicant: MKS Instruments, Inc.
Inventor： Duy NGUYEN , Albert KURAMSHIN , Aaron T. RADOMSKI , Alexander JURKOV , Hangon KIM , Kelvin LEE
Abstract: A switched capacitor modulator (SCM) includes a RF power amplifier. The RF power amplifier receives a rectified voltage and a RF drive signal and modulates an input signal in accordance with the rectified voltage to generate a RF output signal to an output terminal. A reactance in parallel with the output terminal is configured to vary in response to a control signal to vary an equivalent reactance in parallel with the output terminal. A controller generates the control signal and a commanded phase. The commanded phase controls the RF drive signal. The reactance is at least one of a capacitance or an inductance, and the capacitance or the inductance varies in accordance with the control signal.
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公开(公告)号：US20190104609A1
公开(公告)日：2019-04-04
申请号：US16115692
申请日：2018-08-29
Applicant: MKS Instruments, Inc.
Inventor： Ky LUU , Aaron T. RADOMSKI , Dave COFFTA
Abstract: A clamp configured to be coupled to a printed circuit board to cool and compress one or more electrical connections subject to repeated power and thermal cycling. A first conductive column of the clamp is configured to compress a first electrical connection between a first power device lead and a first printed circuit board trace of the printed circuit board, and draw thermal energy away from the first power device lead. The first conductive column extends from a load spreading plate. The load spreading plate is an insulator that electrically isolates a fastener extending therefrom from the first conductive column. The fastener is configured to cooperate with the circuit board to connect the clamp to the circuit board, compress the load spreading plate against the first conductive column to compress the first electrical connection, and connect the clamp to ground.
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18.发明申请公开(公告)号：US20180342903A1
公开(公告)日：2018-11-29
申请号：US15605055
申请日：2017-05-25
Applicant: MKS Instruments, Inc.
Inventor： Ky LUU , Aaron T. RADOMSKI
CPC classification number: H02J50/20 , H02J50/80 , H04B5/0037
Abstract: A radio frequency power system is provided that includes bias modules, a switch, a matching network, and a control module. The bias modules are configured to generate respectively DC bias voltages. The switch is configured to (i) receive current from the bias modules, and (ii) control flow of the current from the bias modules to generate a radio frequency bias voltage signal. The matching network is configured to (i) receive the radio frequency bias voltage signal, and (ii) based on the radio frequency bias voltage signal, supply at least a portion of a radio frequency output voltage signal to an electrode of a substrate support in a processing chamber. The control module is connected to the switch and configured to control a state of the switch based on the radio frequency output voltage signal to shape a waveform of the radio frequency bias voltage signal.
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公开(公告)号：US20180330921A1
公开(公告)日：2018-11-15
申请号：US15974947
申请日：2018-05-09
Applicant: MKS Instruments, Inc.
Inventor： Aaron T. RADOMSKI , Ky LUU , Larry J. FISK, II , Ross REINHARDT , Matthew G. HARRINGTON , Amish RUGHOONUNDON , Jesse N. KLEIN , Aaron M. BURRY
IPC: H01J37/32 , H05H1/46 , H01L21/3065
Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.
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公开(公告)号：US20180294141A1
公开(公告)日：2018-10-11
申请号：US16005761
申请日：2018-06-12
Applicant: MKS Instruments, Inc.
Inventor： Larry J. FISK, II , Aaron T. RADOMSKI , Jonathan W. SMYKA
IPC: H01J37/32
CPC classification number: H01J37/32155 , H01J37/32146 , H01J37/32174 , H01J37/32935 , H01J37/3299 , H01J2237/332 , H01J2237/334
Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
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