Semiconductor device having a dielectric layer with different thicknesses and method for forming

    公开(公告)号:US10134860B2

    公开(公告)日:2018-11-20

    申请号:US15456963

    申请日:2017-03-13

    Applicant: NXP B.V.

    Abstract: A semiconductor device includes a first dielectric layer on a substrate, the first dielectric layer including a first dielectric portion over a first doped well region of a first conductivity type and a second dielectric portion over a second doped well region of a second conductivity type, and a second dielectric layer on the substrate directly adjacent the first dielectric layer. The second dielectric layer is over the second doped well region. A first conductive gate structure is over the first and second dielectric layers. A third dielectric layer is on the substrate over the second doped well region and separated a first distance from the second dielectric layer. A second conductive gate structure is over the third dielectric layer. A third doped region of the second conductivity type is implanted in the second doped well region a second distance from the third dielectric layer and the second conductive gate structure.

    METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE WITH AN ISOLATION REGION AND A DEVICE MANUFACTURED BY THE METHOD
    15.
    发明申请
    METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE WITH AN ISOLATION REGION AND A DEVICE MANUFACTURED BY THE METHOD 有权
    制造具有隔离区域的半导体器件的方法和由该方法制造的器件

    公开(公告)号:US20160079282A1

    公开(公告)日:2016-03-17

    申请号:US14946064

    申请日:2015-11-19

    Applicant: NXP B.V.

    Inventor: Jan Sonsky

    Abstract: A method of manufacturing a semiconductor device includes forming trench isolation structures, exposing some of the trench isolation structures 28 to leave others 30 masked, and then selectively etching a buried layer to form a cavity 32 under an active device region 34. The active device region 34 is supported by support regions in the exposed trenches 28. The buried layer may be a SiGe layer on a Si substrate.

    Abstract translation: 制造半导体器件的方法包括形成沟槽隔离结构,暴露一些沟槽隔离结构28以使另外30个被掩蔽,然后选择性地蚀刻掩埋层,以在有源器件区域34下方形成空腔32.有源器件区域 34由暴露的沟槽28中的支撑区域支撑。掩埋层可以是Si衬底上的SiGe层。

    Integrated circuits separated by through-wafer trench isolation
    17.
    发明授权
    Integrated circuits separated by through-wafer trench isolation 有权
    通过晶圆沟槽隔离分离的集成电路

    公开(公告)号:US09177852B2

    公开(公告)日:2015-11-03

    申请号:US14449522

    申请日:2014-08-01

    Applicant: NXP B.V.

    CPC classification number: H01L21/76232 H01L21/76224 H01L21/823878

    Abstract: An isolated semiconductor circuit comprising: a first sub-circuit and a second sub-circuit; a backend that includes an electrically isolating connector between the first and second sub-circuits; a lateral isolating trench between the semiconductor portions of the first and second sub-circuits, wherein the lateral isolating trench extends along the width of the semiconductor portions of the first and second sub-circuits, wherein one end of the isolating trench is adjacent the backend, and wherein the isolating trench is filled with an electrically isolating material.

    Abstract translation: 一种隔离半导体电路,包括:第一子电路和第二子电路; 后端,其包括在所述第一和第二子电路之间的电隔离连接器; 在所述第一和第二子电路的半导体部分之间的横向隔离沟槽,其中所述横向隔离沟槽沿着所述第一和第二子电路的半导体部分的宽度延伸,其中所述隔离沟槽的一端与所述后端 ,并且其中所述隔离沟槽填充有电绝缘材料。

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