SEMICONDUCTOR ARRANGEMENT
    6.
    发明申请
    SEMICONDUCTOR ARRANGEMENT 审中-公开
    半导体安排

    公开(公告)号:US20160172451A1

    公开(公告)日:2016-06-16

    申请号:US14879394

    申请日:2015-10-09

    Applicant: NXP B.V.

    Abstract: A semiconductor arrangement comprising a substrate having a first trench formed therein, a field plate layer arranged to extend within the first trench and coat the first trench, the field plate layer having a thickness such that it defines a second trench within the first trench, a barrier layer arranged to coat an internal surface of the second trench; and a trench fill material configured to substantially planarize the first and second trenches.

    Abstract translation: 一种半导体装置,包括其中形成有第一沟槽的衬底,场板层布置成在第一沟槽内延伸并涂覆第一沟槽,场板层具有使得其在第一沟槽内限定第二沟槽的厚度, 阻挡层,布置成涂覆第二沟槽的内表面; 以及沟槽填充材料,其构造成基本上平坦化所述第一和第二沟槽。

    Semiconductive device and associated method of manufacture

    公开(公告)号:US09911816B2

    公开(公告)日:2018-03-06

    申请号:US14693756

    申请日:2015-04-22

    Applicant: NXP B.V.

    Abstract: A semiconductive device comprising a body having: a first surface and an opposing second surface; a first semiconductive layer adjacent to the first surface; an active region comprising: a plurality of active trenches in the first surface, extending from the first surface into the first semiconductive layer, and having an active trench width, and a plurality of active cells; and a termination region at a periphery of the first surface comprising: at least one termination trench extending from the first surface into the first semiconductive layer, wherein the termination region has a width that is greater than the active trench width; and a number of termination trench separators having a width that is less than a width of the active cells, wherein the active trenches and the at least one termination trench each comprise a first insulator layer adjacent to the first semiconductive layer of the body.

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