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公开(公告)号:US20200036358A1
公开(公告)日:2020-01-30
申请号:US16356223
申请日:2019-03-18
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Yoon Sok PARK , Won Kyu JEUNG , Tah Joon PARK , Dae Hun JEONG , Sang Uk SON
Abstract: An acoustic wave filter device includes resonance portions, first and second metal pads. The resonance portions each includes a lower electrode disposed on a substrate, a piezoelectric layer disposed on at least a portion of the lower electrode, and an upper electrode disposed on at least a portion of the piezoelectric layer. The first metal pads are connected to one of the upper electrode and the lower electrode of a corresponding resonance portion among the resonance portions. The second metal pads are disposed outwardly of an active region and connected to the other one of the upper electrode and the lower electrode of adjacent resonant portions among the resonance portions. A ring portion is disposed outwardly of the active region in which the lower electrode, the piezoelectric layer, and the upper electrode overlap is disposed only on a portion of any one of the first and second metal pads.
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公开(公告)号:US20170366156A1
公开(公告)日:2017-12-21
申请号:US15384385
申请日:2016-12-20
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Won HAN , Tae Hun LEE , Dae Hun JEONG , Moon Chul LEE , Sang Uk SON
CPC classification number: H03H9/02007 , H03H9/02086 , H03H9/132 , H03H9/173 , H03H9/174 , H03H9/54
Abstract: An acoustic wave filter device includes a lower electrode disposed between a substrate and a piezoelectric layer, an upper electrode disposed on the piezoelectric layer, and an insulating layer disposed on the upper electrode. The insulating layer exposes portions of the upper electrode.
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公开(公告)号:US20170101307A1
公开(公告)日:2017-04-13
申请号:US15181480
申请日:2016-06-14
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Chang Hyun LIM , Tae Hun LEE , Dae Hun JEONG
IPC: B81B7/00 , G01D11/24 , H01L23/053 , H01L25/16 , H01L23/00
CPC classification number: B81B7/008 , B81B7/0048 , B81B2201/0235 , B81B2201/0264 , B81B2207/012 , G01D11/245 , H01L23/053 , H01L24/17 , H01L24/32 , H01L24/48 , H01L24/73 , H01L25/16 , H01L2224/16055 , H01L2224/16057 , H01L2224/16225 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48106 , H01L2224/48225 , H01L2224/73265 , H01L2924/00014 , H01L2924/10158 , H01L2924/1461 , H01L2924/15153 , H01L2224/05599 , H01L2224/45099 , H01L2224/85399
Abstract: There is provided a semiconductor package that comprises a board; a semiconductor chip disposed on the board and having an installation recess; an adhesive layer disposed within the installation recess; and a sensor unit disposed on the adhesive layer.
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公开(公告)号:US20210313950A1
公开(公告)日:2021-10-07
申请号:US16930885
申请日:2020-07-16
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Won HAN , Tae Yoon KIM , Chang Hyun LIM , Sang Uk SON , Jae Hyoung GIL , Dae Hun JEONG
Abstract: A bulk-acoustic wave resonator includes: a first electrode disposed above a substrate; a piezoelectric layer disposed to cover at least a portion of the first electrode; and a second electrode disposed to cover at least a portion of the piezoelectric layer. A plurality of steps are formed in any one or any combination of any two or more of the first electrode, the piezoelectric layer, and the second electrode in an active region in which the first electrode, the piezoelectric layer, and the second electrode are all disposed to overlap one another.
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公开(公告)号:US20200052674A1
公开(公告)日:2020-02-13
申请号:US16362743
申请日:2019-03-25
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Dae Hun JEONG , Sung Wook KIM , Sang Uk SON , Sang Heon HAN , Won HAN
Abstract: A bulk-acoustic wave resonator includes: a substrate; a membrane layer forming a cavity with the substrate; a lower electrode disposed on the membrane layer; an insertion layer disposed to cover at least a portion of the lower electrode; a piezoelectric layer disposed on the lower electrode to cover the insertion layer; and an upper electrode at least partially disposed on the piezoelectric layer, wherein the upper electrode includes a reflection groove disposed on the insertion layer.
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公开(公告)号:US20190158057A1
公开(公告)日:2019-05-23
申请号:US16137710
申请日:2018-09-21
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Dae Hun JEONG , Sang Uk SON , Won HAN , Jong Woon KIM
Abstract: An acoustic resonator includes: a substrate; a resonant region including a first electrode, a piezoelectric layer, and a second electrode disposed on the substrate, and a reflective layer disposed along a periphery of the resonant region; and a connection electrode extending from the second electrode. The reflective layer includes a second section disposed between the resonant region and the connection electrode, and a first section, and a cross-sectional area of the first section is different than a cross-sectional area of the second section.
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公开(公告)号:US20180277735A1
公开(公告)日:2018-09-27
申请号:US15824194
申请日:2017-11-28
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Dae Hun JEONG , Sang Uk SON , Tae Yoon KIM , Dae Ho KIM
IPC: H01L41/047 , H01L41/22
CPC classification number: H01L41/047 , H01L41/187 , H01L41/22 , H03H3/02 , H03H9/02118 , H03H9/174 , H03H9/54 , H03H2003/023
Abstract: An acoustic resonator includes a resonant portion including a piezoelectric layer disposed between a first electrode and a second electrode, and a frame portion disposed along an outer edge of the second electrode. The frame portion includes three reflective portions reflecting lateral waves generated in the resonant portion.
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公开(公告)号:US20180254764A1
公开(公告)日:2018-09-06
申请号:US15797265
申请日:2017-10-30
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Tae Kyung LEE , Won HAN , Tae Yoon KIM , Jong Woon KIM , Moon Chul LEE , Chang Hyun LIM , Sang Kee YOON , Hwa Sun LEE , Dae Hun JEONG
CPC classification number: H03H9/174 , H03H3/02 , H03H9/02118 , H03H9/0504 , H03H9/173 , H03H9/547 , H03H2003/021 , H03H2003/023
Abstract: An acoustic resonator includes: a central portion; an extension portion extended outwardly of the central portion; a first electrode, a piezoelectric layer, and a second electrode sequentially stacked on a substrate, in the central portion; and an insertion layer disposed below the piezoelectric layer in the extension portion, wherein the piezoelectric layer includes a piezoelectric portion disposed in the central portion, and a bent portion disposed in the extension portion and extended from the piezoelectric portion at an incline depending on a shape of the insertion layer.
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公开(公告)号:US20170338399A1
公开(公告)日:2017-11-23
申请号:US15381397
申请日:2016-12-16
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Dae Ho KIM , Dae Hun JEONG , Won HAN , Sang Uk SON
IPC: H01L41/053 , H01L41/047 , H01L41/27 , H01L41/297
CPC classification number: H01L41/053 , H01L41/0471 , H01L41/27 , H01L41/297 , H03H3/02 , H03H9/02118 , H03H9/173 , H03H2003/021
Abstract: An acoustic resonator includes: a substrate; a resonance part including a lower electrode, a piezoelectric layer, and an upper electrode sequentially stacked on the substrate, and a frame formed on the upper electrode along an edge of the upper electrode; and a trench part formed in at least one side of the resonance part and making a thickness of the resonance part asymmetrical.
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公开(公告)号:US20170001857A1
公开(公告)日:2017-01-05
申请号:US15059803
申请日:2016-03-03
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Dae Hun JEONG , Chang Hyun LIM , Tae Hun LEE
CPC classification number: B81B3/0072 , B81B7/0029 , B81B7/0048 , B81B2201/0264 , B81B2203/0109 , B81B2203/0118 , B81B2203/033 , B81C1/00404 , B81C2201/0132
Abstract: Provided are sensor elements and a method of manufacturing the same. The sensor element includes a die, an active part including a frame surrounded by the die, a first trench disposed between the die and the active part, and a bridge connecting the die and the frame and a second trench being formed in the bridge, whereby electrical connection from the active part to an electrode pad may be secured and transfer of external stress to the active part may be significantly reduced through the second trench.
Abstract translation: 提供传感器元件及其制造方法。 传感器元件包括管芯,包括由管芯包围的框架的有源部件,设置在管芯和有源部件之间的第一沟槽,以及连接管芯和框架的桥和在桥中形成的第二沟槽,由此 可以确保从有源部分到电极焊盘的电连接,并且可以通过第二沟槽显着地减少对有源部分的外部应力的传递。
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