Manufacturing method for semiconductor device having a multilayer interconnect
    16.
    发明授权
    Manufacturing method for semiconductor device having a multilayer interconnect 失效
    具有多层互连的半导体器件的制造方法

    公开(公告)号:US06350674B1

    公开(公告)日:2002-02-26

    申请号:US09534937

    申请日:2000-03-24

    申请人: Hiroshi Okamura

    发明人: Hiroshi Okamura

    IPC分类号: H01L214763

    摘要: A semiconductor device having good electrical properties, and a method of manufacturing this semiconductor device by forming an insulation layer on a first wiring layer and then, simultaneously forming in this insulation layer a second wiring layer and a contact layer for connecting the first wiring layer and the second wiring layer. A positive resist layer having an opening over an area where a through-hole is to be formed is first formed on the insulation layer. A negative resist layer having an opening over an area where a wiring trench is to be formed is then formed on the positive resist layer. The insulation layer, positive resist layer, and negative resist layer are then simultaneously etched to form a wiring trench and through-hole that are automatically aligned with each other. The wiring trench and through-hole are then filled with a conductive material to form a second wiring layer and contact layer.

    摘要翻译: 一种具有良好电性能的半导体器件,以及通过在第一布线层上形成绝缘层然后在该绝缘层上同时形成第二布线层和用于连接第一布线层和 第二布线层。 首先在绝缘层上形成具有在要形成通孔的区域上的开口的正性抗蚀剂层。 然后在正抗蚀剂层上形成具有在要形成布线沟槽的区域上的开口的负的抗蚀剂层。 然后同时蚀刻绝缘层,正性抗蚀剂层和负性抗蚀剂层,以形成彼此自动对准的布线沟槽和通孔。 然后用导电材料填充布线沟槽和通孔,以形成第二布线层和接触层。

    Method and apparatus for detecting flying height variation of head in
disk storage system
    17.
    发明授权
    Method and apparatus for detecting flying height variation of head in disk storage system 失效
    用于检测磁盘存储系统中磁头高度变化的方法和装置

    公开(公告)号:US5831781A

    公开(公告)日:1998-11-03

    申请号:US596663

    申请日:1996-02-05

    申请人: Hiroshi Okamura

    发明人: Hiroshi Okamura

    摘要: The feature of the present invention lies in the point that a flying height variation of a head is checked by use of a read signal sent from the head so as to easily detect the flying height out of an allowable range, so that the generation of an abnormal data writing/reading operation is prevented in advance with result that data writing/reading operation can be surely realized in an interior of a HDD. There is provided a system in which a read signal obtained when data recorded in a disk 1 is read by a head 2 is input, and the flying height variation of the head is checked by use of a DC voltage of a gain control signal of an AGC circuit of a data reading processing circuit for executing a predetermined data reading processing. A CPU 11 converts a DC voltage level of the gain control signal of the AGC circuit to digital data by an A/D converter so as to check the flying height variation of the head. The CPU 11 compares the level value of the input gain control signal with threshold data DT stored in a memory. When the compared value exceeds the allowable range, the CPU 11 outputs a detection signal FS of the flying height variation for designating that an amount of the flying height of the head is abnormally varied.

    摘要翻译: 本发明的特征在于,通过使用从头部发送的读取信号来检查头部的飞行高度变化,以便容易地将飞行高度检测到允许范围之外,从而生成 提前防止异常数据写入/读取操作,从而可以在HDD的内部可靠地实现数据写入/读取操作。 提供了一种系统,其中当由磁头2读取记录在磁盘1中的数据时获得的读取信号被输入,并且通过使用由磁头2的增益控制信号的DC电压来检查磁头的飞行高度变化 AGC电路,用于执行预定的数据读取处理。 CPU11通过A / D转换器将AGC电路的增益控制信号的DC电压电平转换为数字数据,以检查磁头的飞行高度变化。 CPU 11将输入增益控制信号的电平值与存储在存储器中的阈值数据DT进行比较。 当比较值超过允许范围时,CPU11输出用于指定头部的飞行高度的量异常变化的飞行高度变化的检测信号FS。

    Read error recovery method and apparatus for use in disk storage system
    18.
    发明授权
    Read error recovery method and apparatus for use in disk storage system 失效
    读取磁盘存储系统中使用的错误恢复方法和装置

    公开(公告)号:US5808825A

    公开(公告)日:1998-09-15

    申请号:US691113

    申请日:1996-08-01

    申请人: Hiroshi Okamura

    发明人: Hiroshi Okamura

    摘要: The invention provides a method for effectively removing the cause of a thermal asperity (TA) phenomenon occurring at an MR head incorporated in a disk storage system. If a read error occurs in data read by the MR head, a CPU executes a usual read retry operation. If the read error is not removed by the usual read retry operation, the CPU presumes that the read error is caused by the thermal asperity phenomenon occurring at the MR head. Then, the CPU controls the MR head to move to a CSS zone on the disk, thereby executing a TA removal operation so as to remove a fine particle such as dust attached to the MR head. In the TA removal operation, the rotational speed of the disk is reduced so that the MR head can be brought into contact with the disk in the CSS zone.

    摘要翻译: 本发明提供了一种有效消除在磁盘存储系统中结合的MR磁头发生的热不平坦(TA)现象的原因的方法。 如果在MR头读取的数据中发生读取错误,则CPU执行通常的重试操作。 如果通常的读取重试操作未读取读取错误,则CPU假定读取错误是由MR磁头发生的热不均匀现象引起的。 然后,CPU控制MR磁头移动到磁盘上的CSS区域,从而执行TA去除操作,以便除去附着到MR磁头的灰尘等微粒。 在TA去除操作中,减小了盘的旋转速度,使得MR头可以与CSS区域中的盘接触。

    Magnetic recording and reproducing apparatus
    19.
    发明授权
    Magnetic recording and reproducing apparatus 失效
    磁记录和再现设备

    公开(公告)号:US5233481A

    公开(公告)日:1993-08-03

    申请号:US633939

    申请日:1990-12-26

    摘要: To prevent a decrease in the window margin due to reproduced signals having asymmetrical waveforms in a magnetic recording and reproducing apparatus, data in which peak shifts occur are recorded in the SYNC regions in the data format for the recording medium in accordance with the recording method. In data read operation, by detecting the data recorded in the SYNC regions, the center of the data window signal is shifted by a desired peak shift amount.

    摘要翻译: 为了防止在磁记录和再现装置中由于具有不对称波形的再现信号引起的窗口边缘的减少,发生峰位移的数据根据​​记录方法被记录在用于记录介质的数据格式的SYNC区域中。 在数据读取操作中,通过检测记录在SYNC区域中的数据,数据窗口信号的中心偏移所需的峰值移位量。

    Method of accurately executing read access and magnetic
recording/reproducing apparatus therefor
    20.
    发明授权
    Method of accurately executing read access and magnetic recording/reproducing apparatus therefor 失效
    准确执行读取访问的方法及其磁记录/再现装置

    公开(公告)号:US5038230A

    公开(公告)日:1991-08-06

    申请号:US389883

    申请日:1989-08-04

    摘要: A magnetic recording/reproducing apparatus includes a control section, a recording section and a medium access section having a head. The control section sets a write mode in response to an input write access command, and outputs write data and density indication data to the recording section. In the write mode, the recording section generates dummy data in accordance with the density indication data and modulates a write current in accordance with the write data and the dummy data subsequent to the write data. The modulated write current is supplied to the medium access section. A value of the write current is determined in accordance with the density indication data, and the write current decays with a time constant while the write current is modulated in accordance with the dummy data. The medium access section write-accesses a medium in accordance with the modulated write current in the write mode.

    摘要翻译: 磁记录/重放装置包括一个控制部分,一个记录部分和一个具有头部的介质存取部分。 控制部分响应于输入写访问命令设置写模式,并将写数据和浓度指示数据输出到记录部分。 在写入模式中,记录部根据密度指示数据生成伪数据,并根据写入数据和写入数据之后的伪数据调制写入电流。 调制写入电流被提供给介质存取部分。 根据密度指示数据确定写入电流的值,并且在根据虚拟数据调制写入电流时,写入电流以时间常数衰减。 介质访问部分根据写入模式下的调制写入电流对介质进行写入。