公开(公告)号：US20060244467A1

公开(公告)日：2006-11-02

申请号：US11375625

申请日：2006-03-14

申请人： Fayez Abboud ,  Sriram Krishnaswami ,  Benjamin Johnston ,  Hung Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John White ,  Shinichi Kurita ,  James Hunter

发明人： Fayez Abboud ,  Sriram Krishnaswami ,  Benjamin Johnston ,  Hung Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John White ,  Shinichi Kurita ,  James Hunter

IPC分类号： G01R31/302

CPC分类号： H01L21/67748 ,  H01J2237/2811 ,  H01J2237/2817 ,  H01L21/67201 ,  H01L21/67236

摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

公开(公告)号：US20050285992A1

公开(公告)日：2005-12-29

申请号：US11145018

申请日：2005-06-02

申请人： John White ,  Shinichi Kurita ,  William Sterling ,  Yoshiaki Tanase

发明人： John White ,  Shinichi Kurita ,  William Sterling ,  Yoshiaki Tanase

IPC分类号： B65G49/00 ,  G02F1/1333 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68

CPC分类号： H01L21/67126 ,  H01L21/67201

摘要： In certain aspects, a load lock chamber is provided that includes a body having at least one sealing surface wall including a sealing surface. The sealing surface wall has an opening adjacent the sealing surface adapted to input or output a substrate. The body further includes a plurality of side walls. The load lock chamber also includes a top coupled to the body. The top includes one or more openings that divide the top into a first portion and a second portion. The load lock chamber further includes one or more top sealing members adapted to cover each opening of the top. Each top sealing member absorbs a movement of the first portion of the top relative to the second portion of the top. Numerous other aspects are provided.

摘要翻译： 在某些方面，提供了一种装载锁定室，其包括具有包括密封表面的至少一个密封表面壁的主体。 密封表面壁具有邻近密封表面的开口，适于输入或输出基底。 身体还包括多个侧壁。 负载锁定室还包括联接到主体的顶部。 顶部包括将顶部分成第一部分和第二部分的一个或多个开口。 负载锁定室还包括适于覆盖顶部的每个开口的一个或多个顶部密封构件。 每个顶部密封构件吸收顶部相对于顶部的第二部分的第一部分的运动。 提供了许多其他方面。

公开(公告)号：US20050255253A1

公开(公告)日：2005-11-17

申请号：US11061121

申请日：2005-02-18

申请人： John White ,  Fan Sze ,  Quanyuan Shang ,  Shinichi Kurita ,  Hongbin Ji ,  Janusz Jozwiak ,  Inchen Huang ,  Emanuel Beer

发明人： John White ,  Fan Sze ,  Quanyuan Shang ,  Shinichi Kurita ,  Hongbin Ji ,  Janusz Jozwiak ,  Inchen Huang ,  Emanuel Beer

IPC分类号： B05D1/00 ,  B05D3/04 ,  B05D3/06 ,  B41J2/01 ,  B41J11/00 ,  B41M7/00 ,  C08F2/46

CPC分类号： B41J11/0015 ,  B05D3/0486 ,  B05D3/068 ,  B41M7/0072 ,  B41M7/0081

摘要： In a first aspect, a method of curing ink on a substrate is provided. The method includes the steps of (1) placing a substrate on a support stage of an ink curing chamber; and (2) scanning an electron beam over a surface of the substrate within the ink curing chamber so as to cure ink present on the substrate. Numerous other aspects are provided.

摘要翻译： 在第一方面，提供一种在基板上固化油墨的方法。 该方法包括以下步骤：（1）将基板放置在油墨固化室的支撑台上; 和（2）在油墨固化室内的基板的表面上扫描电子束，以固化存在于基板上的油墨。 提供了许多其他方面。

公开(公告)号：US20060236934A1

公开(公告)日：2006-10-26

申请号：US11473661

申请日：2006-06-22

申请人： Soo Choi ,  John White ,  Qunhua Wang ,  Li Hou ,  Ki Kim ,  Shinichi Kurita ,  Tae Won ,  Suhail Anwar ,  Beom Park ,  Robin Tiner

发明人： Soo Choi ,  John White ,  Qunhua Wang ,  Li Hou ,  Ki Kim ,  Shinichi Kurita ,  Tae Won ,  Suhail Anwar ,  Beom Park ,  Robin Tiner

IPC分类号： C23F1/00 ,  C23C16/00

CPC分类号： H01J37/3244 ,  C23C16/345 ,  C23C16/455 ,  C23C16/45565 ,  C23C16/5096 ,  H01J37/32082 ,  H01J37/32091 ,  H01J37/32541 ,  H01J37/32596 ,  H01J2237/327 ,  H01J2237/3321 ,  H01J2237/3323 ,  H01J2237/3325 ,  Y10T29/49885 ,  Y10T29/49996

摘要： Embodiments of a gas diffuser plate for distributing gas in a processing chamber are provided. The gas distribution plate includes a diffuser plate having an upstream side and a downstream side, and a plurality of gas passages passing between the upstream and downstream sides of the diffuser plate. The gas passages include hollow cathode cavities at the downstream side to enhance plasma ionization. The depths, the diameters, the surface area and density of hollow cathode cavities of the gas passages that extend to the downstream end can be gradually increased from the center to the edge of the diffuser plate to improve the film thickness and property uniformity across the substrate. The increasing diameters, depths and surface areas from the center to the edge of the diffuser plate can be created by bending the diffuser plate toward downstream side, followed by machining out the convex downstream side. Bending the diffuser plate can be accomplished by a thermal process or a vacuum process. The increasing diameters, depths and surface areas from the center to the edge of the diffuser plate can also be created computer numerically controlled machining. Diffuser plates with gradually increasing diameters, depths and surface areas of the hollow cathode cavities from the center to the edge of the diffuser plate have been shown to produce improved uniformities of film thickness and film properties.

公开(公告)号：US20060109296A1

公开(公告)日：2006-05-25

申请号：US11238632

申请日：2005-09-29

申请人： Bassam Shamoun ,  Janusz Jozwiak ,  Quanyuan Shang ,  Shinichi Kurita ,  John White

发明人： Bassam Shamoun ,  Janusz Jozwiak ,  Quanyuan Shang ,  Shinichi Kurita ,  John White

IPC分类号： B41J2/015

CPC分类号： B41J3/407 ,  B41J2/04505 ,  B41J2/04541 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/0459 ,  B41J2/04593 ,  B41J2/125 ,  B41J3/543 ,  B41J25/003 ,  B41J25/005 ,  B41J29/15 ,  B41J29/393

摘要： The invention provides methods, systems, and drivers for controlling an inkjet printing system. The driver may include logic including a processor, memory coupled to the logic, and a fire pulse generator circuit coupled to the logic. The fire pulse generator includes a connector to facilitate coupling the driver to a print head. The logic is adapted to receive an image and to convert the image to an image data file. The image data file is adapted to be used by the driver to trigger the print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction. Numerous other aspects are disclosed.

摘要翻译： 本发明提供了用于控制喷墨打印系统的方法，系统和驱动程序。 驱动器可以包括逻辑，其包括处理器，耦合到逻辑的存储器和耦合到逻辑的触发脉冲发生器电路。 火灾脉冲发生器包括一个连接器以便于驱动器与打印头的连接。 该逻辑适于接收图像并将图像转换为图像数据文件。 图像数据文件适于由驱动器使用，以在基板沿着打印方向移动时触发打印头将墨水沉积在基板上的像素孔中。 公开了许多其他方面。

公开(公告)号：US20060101728A1

公开(公告)日：2006-05-18

申请号：US11214475

申请日：2005-08-29

申请人： John White ,  Donald Verplancken ,  Shinichi Kurita

发明人： John White ,  Donald Verplancken ,  Shinichi Kurita

IPC分类号： E04H6/00

CPC分类号： H01L21/67236 ,  H01L21/67196 ,  Y10S414/135 ,  Y10S414/139 ,  Y10T29/49826 ,  Y10T29/53

摘要： A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.

摘要翻译： 提供非多边形形状的多片式室。 非多边形多片式室可以包括（1）具有第一侧和第二侧的中心件，（2）适于与中心件的第一侧联接的第一侧件，以及（3） 适于与中心件的第二侧联接的第二侧件。 当连接在一起时，中心件，第一侧件和第二侧件形成圆柱形的整体形状。 提供了许多其他方面。

公开(公告)号：US20060093751A1

公开(公告)日：2006-05-04

申请号：US11167516

申请日：2005-06-27

申请人： John White ,  Shinichi Kurita

发明人： John White ,  Shinichi Kurita

IPC分类号： B41J2/01 ,  B05D5/06 ,  B05D1/32

CPC分类号： B41J3/543 ,  B41J3/407 ,  B41J25/003 ,  B41J25/005

摘要： A system for inkjet printing, which includes an inkjet printing module support having one or more inkjet heads disposed thereon. The one or more inkjet heads are configured to move along a first axis. The system further includes a substrate stage configured to move along a second axis that is perpendicular to the first axis. The substrate stage is configured to support a substrate having one or more ink landing positions disposed thereon in a pattern that is not aligned with either the first axis or the second axis. The system further includes a system controller configured to simultaneously move the one or more inkjet heads along the first axis and move the substrate stage along the second axis during a printing operation such that the one or more inkjet heads dispense ink into the ink landing positions.

摘要翻译： 一种用于喷墨打印的系统，其包括其上设置有一个或多个喷墨头的喷墨打印模块支架。 一个或多个喷墨头被配置为沿着第一轴线移动。 该系统还包括被配置为沿着垂直于第一轴线的第二轴线移动的基底台。 衬底台被配置为以不与第一轴线或第二轴线对准的图案支撑其上设置有一个或多个墨水着陆位置的基板。 该系统还包括系统控制器，该系统控制器被配置成同时沿着第一轴线移动一个或多个喷墨头并且在打印操作期间沿着第二轴线移动衬底台，使得一个或多个喷墨头将墨水分配到墨水着陆位置。

公开(公告)号：US20060092436A1

公开(公告)日：2006-05-04

申请号：US11061148

申请日：2005-02-18

申请人： John White ,  Fan Sze ,  Quanyuan Shang ,  Shinichi Kurita ,  Hongbin Ji ,  Janusz Jozwiak ,  Inchen Huang ,  Emanuel Beer

发明人： John White ,  Fan Sze ,  Quanyuan Shang ,  Shinichi Kurita ,  Hongbin Ji ,  Janusz Jozwiak ,  Inchen Huang ,  Emanuel Beer

IPC分类号： G06K15/02

CPC分类号： B41J3/407 ,  B41J2/04505 ,  B41J2/04541 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/0459 ,  B41J2/04593 ,  B41J2/125 ,  B41J3/28 ,  B41J3/543 ,  B41J25/001 ,  B41J25/003 ,  B41J25/005 ,  B41J29/15 ,  B41J29/393

摘要： Methods and apparatus are provided wherein data representative of an image is received, the data being indicative of a plurality of theoretical ink jetting drop positions. The data may be converted into an image data file, the image data file being indicative of a plurality of actual physical ink jetting drop positions, each physical ink jetting drop position corresponding to a theoretical ink jetting drop position. A print system may be controlled based on the image data file, wherein the actual physical ink jetting drop positions may each be selected based upon being within a predefined percentage of a print resolution in a printing direction of a corresponding one of the theoretical ink jetting drop positions.

摘要翻译： 提供了方法和装置，其中接收到表示图像的数据，该数据表示多个理论喷墨滴落位置。 数据可以被转换为图像数据文件，图像数据文件指示多个实际物理喷墨滴落位置，每个物理喷墨滴下位置对应于理论喷墨滴落位置。 可以基于图像数据文件来控制打印系统，其中可以基于理论喷墨滴的相应一个的打印方向上的打印分辨率的预定百分比内的每一个来选择实际物理喷墨落下位置 职位

公开(公告)号：US20070070109A1

公开(公告)日：2007-03-29

申请号：US11238832

申请日：2005-09-29

申请人： John White ,  Emanuel Beer ,  Hongbin Ji ,  Chang Lin ,  Shinichi Kurita

发明人： John White ,  Emanuel Beer ,  Hongbin Ji ,  Chang Lin ,  Shinichi Kurita

IPC分类号： B41J29/393

CPC分类号： B41J29/393

摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.

摘要翻译： 提供喷墨喷墨滴定位的方法和装置。 第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较 确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。 提供了许多其他方面。

公开(公告)号：US20070070107A1

公开(公告)日：2007-03-29

申请号：US11238636

申请日：2005-09-29

申请人： Bassam Shamoun ,  Janusz Jozwiak ,  Eugene Mirro ,  Quanyuan Shang ,  Shinichi Kurita ,  John White

发明人： Bassam Shamoun ,  Janusz Jozwiak ,  Eugene Mirro ,  Quanyuan Shang ,  Shinichi Kurita ,  John White

IPC分类号： B41J29/38

CPC分类号： B41J29/393

摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.

摘要翻译： 提供喷墨喷墨滴定位的方法和装置。 第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较 确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。 提供了许多其他方面。