Integrated circuit with metal stop ring outside the scribe seal

    公开(公告)号:US12009319B2

    公开(公告)日:2024-06-11

    申请号:US16737237

    申请日:2020-01-08

    CPC classification number: H01L23/585 H01L23/528 H01L23/53209

    Abstract: An integrated circuit (IC) die includes a substrate with circuitry configured for at least one function including metal interconnect levels thereon including a top metal interconnect level and a bottom metal interconnect level, with a passivation layer on the top metal interconnect level. A scribe street is around a periphery of the IC die, the scribe street including a scribe seal utilizing at least two of the plurality of metal interconnect levels, an inner metal meander stop ring including at least the top metal interconnect level located outside the scribe seal, wherein the scribe seal and the inner metal meander stop ring are separated by a first separation gap. An outer metal meander stop ring including at least the top metal interconnect level is located outside the inner metal stop ring, wherein the outer stop ring and the inner stop ring are separated by a second separation gap.

Patent Agency Ranking