公开(公告)号：US11322449B2

公开(公告)日：2022-05-03

申请号：US15874374

申请日：2018-01-18

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shin-Puu Jeng ,  Po-Hao Tsai ,  Po-Yao Chuang ,  Techi Wong

IPC: H01L23/538 ,  H01L23/31 ,  H01L25/10 ,  H01L23/00 ,  H01L21/48 ,  H01L21/56 ,  H01L25/00 ,  H01L23/16 ,  H01L21/683

Abstract: Structures and formation methods of chip packages are provided. The method includes disposing a semiconductor die over a carrier substrate. The method also includes disposing an interposer substrate over the carrier substrate. The interposer substrate has a recess that penetrates through opposite surfaces of the interposer substrate. The interposer substrate has interior sidewalls surrounding the semiconductor die, and the semiconductor die is as high as or higher than the interposer substrate. The method further includes forming a protective layer in the recess of the interposer substrate to surround the semiconductor die. In addition, the method includes removing the carrier substrate and stacking a package structure over the interposer substrate.

公开(公告)号：US11075132B2

公开(公告)日：2021-07-27

申请号：US15939314

申请日：2018-03-29

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shin-Puu Jeng ,  Hsien-Wen Liu ,  Shih-Ting Hung ,  Yi-Jou Lin ,  Tzu-Jui Fang ,  Po-Yao Chuang

IPC: H01L23/31 ,  H01L21/56 ,  H01L21/48 ,  H01L23/528 ,  H01L25/00 ,  H01L23/538 ,  H01L23/00 ,  H01L25/065 ,  H01L25/10

Abstract: An integrated fan-out package includes a first redistribution structure, a die, an encapsulant, a plurality of conductive structures, and a second redistribution structure. The first redistribution structure has a first surface and a second surface opposite to the first surface. The die is disposed over the first surface of the first redistribution structure and is electrically connected to the first redistribution structure. The encapsulant encapsulates the die. The conductive structures are disposed on the first surface of the first redistribution structure and penetrates the encapsulant. The conductive structures surround the die. The second redistribution structure is disposed on the encapsulant and is electrically connected to the first redistribution structure through the conductive structures. The second redistribution structure includes at least one conductive pattern layer that is in physical contact with the encapsulant.

公开(公告)号：US20210225776A1

公开(公告)日：2021-07-22

申请号：US16921907

申请日：2020-07-06

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yi-Wen Wu ,  Shin-Puu Jeng ,  Shih-Ting Hung ,  Po-Yao Chuang

IPC: H01L23/552 ,  H01L23/538 ,  H01L25/16 ,  H01L23/31 ,  H01L25/00 ,  H01L21/48 ,  H01L21/56

Abstract: A package structure includes a redistribution structure, a first semiconductor die, a first passive component, a second semiconductor die, a first insulating encapsulant, a second insulating encapsulant, a second passive component and a global shielding structure. The redistribution structure includes dielectric layers and conductive layers alternately stacked. The first semiconductor die, the first passive component and the second semiconductor die are disposed on a first surface of the redistribution structure. The first insulating encapsulant is encapsulating the first semiconductor die and the first passive component. The second insulating encapsulant is encapsulating the second semiconductor die, wherein the second insulating encapsulant is separated from the first insulating encapsulant. The second passive component is disposed on a second surface of the redistribution structure. The global shielding structure is surrounding the first insulating encapsulant, the second insulating encapsulant, and covering sidewalls of the redistribution structure.

公开(公告)号：US11062997B2

公开(公告)日：2021-07-13

申请号：US16180511

申请日：2018-11-05

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shin-Puu Jeng ,  Techi Wong ,  Po-Yao Lin ,  Ming-Chih Yew ,  Po-Hao Tsai ,  Po-Yao Chuang

IPC: H01L23/538 ,  H01L23/00 ,  H01L21/48 ,  H01L25/00 ,  H01L21/683 ,  H01L25/10 ,  H01L23/31 ,  H01L21/768

Abstract: A method for forming a chip package structure is provided. The method includes forming a conductive pillar over a redistribution structure. The method includes bonding a chip to the redistribution structure. The method includes forming a molding layer over the redistribution structure. The molding layer surrounds the conductive pillar and the chip, and the conductive pillar passes through the molding layer. The method includes forming a cap layer over the molding layer and the conductive pillar. The cap layer has a through hole exposing the conductive pillar, and the cap layer includes fibers. The method includes forming a conductive via structure in the through hole. The conductive via structure is connected to the conductive pillar.

公开(公告)号：US10290605B2

公开(公告)日：2019-05-14

申请号：US15800548

申请日：2017-11-01

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shin-Puu Jeng ,  Hsien-Wen Liu ,  Po-Yao Chuang ,  Tzu-Jui Fang ,  Yi-Jou Lin

IPC: H01L23/12 ,  H01L21/00 ,  H01L23/00 ,  H01L23/538 ,  H01L23/31 ,  H01L21/48 ,  H01L21/56 ,  H01L21/78

Abstract: Package structures and methods for forming the same are provided. A package structure includes a semiconductor die. The semiconductor die includes a passivation layer over a semiconductor substrate. The semiconductor die also includes a conductive pad in the passivation layer. The passivation layer partially exposes a top surface of the conductive pad. The package structure also includes an encapsulation layer surrounding the semiconductor die. The package structure further includes a dielectric layer covering the semiconductor die and the encapsulation layer. In addition, the package structure includes a redistribution layer covering the dielectric layer. The redistribution layer extends in the dielectric layer to be physically connected to the top surface of the conductive pad.

公开(公告)号：US20190096791A1

公开(公告)日：2019-03-28

申请号：US15876227

申请日：2018-01-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shin-Puu Jeng ,  Dai-Jang Chen ,  Hsiang-Tai Lu ,  Hsien-Wen Liu ,  Chih-Hsien Lin ,  Shih-Ting Hung ,  Po-Yao Chuang

IPC: H01L23/498 ,  H01L23/31 ,  H01L21/66 ,  H01L25/065 ,  H01L25/00 ,  H01L21/56 ,  H01L23/00 ,  H01L23/373

CPC classification number: H01L23/49822 ,  H01L21/56 ,  H01L22/14 ,  H01L22/32 ,  H01L23/3114 ,  H01L23/36 ,  H01L23/3677 ,  H01L23/3736 ,  H01L23/49833 ,  H01L23/5383 ,  H01L23/5384 ,  H01L23/5389 ,  H01L24/03 ,  H01L24/81 ,  H01L25/043 ,  H01L25/0657 ,  H01L25/074 ,  H01L25/0756 ,  H01L25/117 ,  H01L25/50 ,  H01L2224/02331 ,  H01L2224/02379 ,  H01L2224/0401 ,  H01L2224/73204 ,  H01L2224/73259 ,  H01L2224/81005 ,  H01L2924/15311 ,  H01L2924/1533

Abstract: Integrated fan-out packages and methods of forming the same are disclosed. An integrated fan-out package includes a first semiconductor chip, a plurality of through integrated fan-out vias, an encapsulation layer and a redistribution layer structure. The first semiconductor chip includes a heat dissipation layer, and the heat dissipation layer covers at least 30 percent of a first surface of the first semiconductor chip. The through integrated fan-out vias are aside the first semiconductor chip. The encapsulation layer encapsulates the through integrated fan-out vias. The redistribution layer structure is at a first side of the first semiconductor chip and thermally connected to the heat dissipation layer of the first semiconductor chip.

公开(公告)号：US20250087598A1

公开(公告)日：2025-03-13

申请号：US18958845

申请日：2024-11-25

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Po-Yao Chuang ,  Meng-Wei Chou ,  Shin-Puu Jeng

IPC: H01L23/552 ,  H01L21/48 ,  H01L21/56 ,  H01L23/00 ,  H01L23/31 ,  H01L23/498

Abstract: Semiconductor devices and method of manufacture are provided. In embodiments a conductive connector is utilized to provide an electrical connection between a substrate and an overlying shield. The conductive connector is placed on the substrate and encapsulated with an encapsulant. Once encapsulated, an opening is formed through the encapsulant to expose a portion of the conductive connector. The shield is deposited through the encapsulant to make an electrical connection to the conductive connector.

公开(公告)号：US12170274B2

公开(公告)日：2024-12-17

申请号：US17701083

申请日：2022-03-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shin-Puu Jeng ,  Techi Wong ,  Po-Yao Chuang ,  Shuo-Mao Chen ,  Meng-Wei Chou

IPC: H01L25/18 ,  H01L21/48 ,  H01L21/56 ,  H01L21/683 ,  H01L23/00 ,  H01L23/31 ,  H01L23/498 ,  H01L23/538 ,  H01L25/065 ,  H01L27/01 ,  H01L49/02

Abstract: An embodiment a structure including a first semiconductor device bonded to a first side of a first redistribution structure by first conductive connectors, the first semiconductor device comprising a first plurality of passive elements formed on a first substrate, the first redistribution structure comprising a plurality of dielectric layers with metallization patterns therein, the metallization patterns of the first redistribution structure being electrically coupled to the first plurality of passive elements, a second semiconductor device bonded to a second side of the first redistribution structure by second conductive connectors, the second side of the first redistribution structure being opposite the first side of the first redistribution structure, the second semiconductor device comprising a second plurality of passive elements formed on a second substrate, the metallization patterns of the first redistribution structure being electrically coupled to the second plurality of passive elements.

公开(公告)号：US12131984B2

公开(公告)日：2024-10-29

申请号：US18302112

申请日：2023-04-18

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Po-Hao Tsai ,  Po-Yao Chuang ,  Shin-Puu Jeng ,  Techi Wong

IPC: H01L23/498 ,  H01L21/48 ,  H01L21/56 ,  H01L21/683 ,  H01L23/00 ,  H01L23/31 ,  H01L25/00 ,  H01L25/065

CPC classification number: H01L23/49822 ,  H01L21/486 ,  H01L21/56 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L23/3114 ,  H01L23/3128 ,  H01L23/49816 ,  H01L23/49894 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L24/19 ,  H01L24/81 ,  H01L24/96 ,  H01L25/0657 ,  H01L25/50 ,  H01L2221/68359 ,  H01L2221/68372 ,  H01L2224/0231 ,  H01L2224/02331 ,  H01L2224/02379 ,  H01L2224/18 ,  H01L2924/181 ,  H01L2924/18161 ,  H01L2924/181 ,  H01L2924/00012

Abstract: A semiconductor device and method of manufacture are provided whereby an interposer and a first semiconductor device are placed onto a carrier substrate and encapsulated. The interposer comprises a first portion and conductive pillars extending away from the first portion. A redistribution layer located on a first side of the encapsulant electrically connects the conductive pillars to the first semiconductor device.

公开(公告)号：US11848305B2

公开(公告)日：2023-12-19

申请号：US17688448

申请日：2022-03-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shin-Puu Jeng ,  Po-Yao Chuang ,  Shuo-Mao Chen

IPC: H01L25/065 ,  H01L21/56 ,  H01L23/31 ,  H01L23/538 ,  H01L25/00

CPC classification number: H01L25/0652 ,  H01L21/568 ,  H01L23/3128 ,  H01L23/3135 ,  H01L23/5383 ,  H01L23/5385 ,  H01L25/50

Abstract: An embodiment is a structure including a first semiconductor device and a second semiconductor device, a first set of conductive connectors mechanically and electrically bonding the first semiconductor device and the second semiconductor device, a first underfill between the first and second semiconductor devices and surrounding the first set of conductive connectors, a first encapsulant on at least sidewalls of the first and second semiconductor devices and the first underfill, and a second set of conductive connectors electrically coupled to the first semiconductor device, the second set of conductive connectors being on an opposite side of the first semiconductor device as the first set of conductive connectors.