公开(公告)号：US5998906A

公开(公告)日：1999-12-07

申请号：US135158

申请日：1998-08-17

申请人： John H. Jerman ,  John D. Grade ,  Joseph D. Drake

发明人： John H. Jerman ,  John D. Grade ,  Joseph D. Drake

IPC分类号： G02B6/35 ,  G02B6/42 ,  G02B26/08 ,  G11B7/135 ,  H02N1/00

CPC分类号： G02B6/357 ,  G02B26/0833 ,  G02B26/0841 ,  G02B6/4216 ,  G11B7/1384 ,  H02N1/008 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/358 ,  G02B6/3584

摘要： An electrostatic microactuator comprising a substrate and at least one comb drive assembly having first and second comb drive members. Each of the first and second comb drive members is provided with comb drive fingers. The first comb drive member is mounted on the substrate. The at least one comb drive assembly is disposed between the first and second spaced-apart, beam-like spring members. The second comb drive member overlies the substrate. Each of the first and second beam-like members have a first end portion secured to the substrate and a second end portion secured to the second comb drive member for suspending the second comb drive member over the substrate. The second comb drive member is movable between a first position in which the comb drive fingers of the first and second comb drive members are spaced apart and a second position in which the comb drive fingers of the first and second comb drive members are interdigitated.

摘要翻译： 一种静电微致动器，其包括基板和至少一个具有第一和第二梳状驱动构件的梳状驱动组件。 第一和第二梳状驱动构件中的每一个设置有梳齿驱动指。 第一梳状驱动构件安装在基底上。 至少一个梳子驱动组件设置在第一和第二间隔开的梁状弹簧构件之间。 第二梳状驱动构件覆盖在基底上。 第一和第二梁状构件中的每一个具有固定到基板的第一端部和固定到第二梳状驱动构件的第二端部，用于将第二梳状驱动构件悬挂在基板上。 第二梳状驱动构件可以在第一和第二梳状驱动构件的梳状驱动指状物间隔开的第一位置和第一和第二梳状驱动构件的梳状驱动指状物交叉的第二位置之间移动。

公开(公告)号：US5824204A

公开(公告)日：1998-10-20

申请号：US671428

申请日：1996-06-27

申请人： John H. Jerman

发明人： John H. Jerman

IPC分类号： B81B1/00 ,  B81C1/00 ,  G01N27/447 ,  G01N27/26

CPC分类号： B81C1/00119 ,  G01N27/44791 ,  B81B2201/058 ,  B81B2203/0338 ,  B81B2203/0353 ,  B81C2201/014 ,  B81C2203/031

摘要： A micromachined structure for handling fluids with an applied high voltage, i.e. for electrophoresis, includes a glass or other highly insulative substrate on which are formed very small diameter capillary channels of e.g. silicon nitride. Due to the absence of a silicon substrate, this structure is highly electrically insulative. The silicon nitride channels are formed by a micro-machining and etch process, so that they are initially defined in an etched sacrificial silicon wafer by conformal coating of etched features in the silicon wafer with a silicon nitride layer, which is then patterned to define the desired channels. The silicon wafer is bonded to the glass substrate and the bulk of the silicon wafer is sacrificially etched away, leaving the desired silicon nitride channels with supporting silicon mesas. The remaining silicon nitride "shell" is bonded to the glass substrate and substantially duplicates the etched features in the original silicon wafer. The capillary channels are of a material such as low stress silicon nitride and there is no electrical shorting path to the highly insulative glass substrate.

摘要翻译： 用于处理具有施加的高电压（即电泳）的流体的微加工结构包括玻璃或其它高度绝缘的基底，其上形成非常小直径的毛细管通道。 氮化硅。 由于没有硅衬底，这种结构是高度电绝缘的。 通过微加工和蚀刻工艺形成氮化硅沟道，使得它们最初在蚀刻的牺牲硅晶片中通过在氮化硅层中对硅晶片中的蚀刻特征进行保形涂覆来限定，该氮化硅层被图案化以限定 所需渠道。 将硅晶片结合到玻璃基板上，并将硅晶片的大部分牺牲蚀刻掉，留下所需的具有支撑硅台面的氮化硅沟道。 剩余的氮化硅“壳”结合到玻璃基板上，并且基本上复制了原始硅晶片中的蚀刻特征。 毛细通道是诸如低应力氮化硅的材料，并且没有到高绝缘性玻璃基板的电短路。

公开(公告)号：US5533412A

公开(公告)日：1996-07-09

申请号：US479247

申请日：1995-06-07

申请人： John H. Jerman ,  Ronald E. Toth ,  David A. Winchell ,  David W. Pennington

发明人： John H. Jerman ,  Ronald E. Toth ,  David A. Winchell ,  David W. Pennington

IPC分类号： G01F1/684 ,  G01F1/708 ,  G01F1/712 ,  G01F7/00 ,  G01P5/18 ,  G01F1/68

CPC分类号： G01F1/7084 ,  G01F1/6842 ,  G01F1/6845 ,  G01F1/708 ,  G01F1/712 ,  G01F7/00 ,  G01P5/18

摘要： A precise fluid flow meter fabricated by micromachining techniques measures a wide range of fluid flow rates. Two serial portions of an enclosed channel have different cross-sectional areas, and therefore different flow velocities. The fluid carries the thermal pulse through the flow channel to two sensor elements spaced apart along the channel downstream from the heating element. The transit time of the thermal pulse between the two sensor elements measures the fluid flow velocity.

摘要翻译： 通过微加工技术制造的精确流体流量计测量各种流体流速。 封闭通道的两个串联部分具有不同的横截面积，因此具有不同的流速。 流体将热脉冲通过流动通道传送到沿着加热元件下游的通道间隔开的两个传感器元件。 两个传感器元件之间的热脉冲的传播时间测量流体流速。

公开(公告)号：US4474889A

公开(公告)日：1984-10-02

申请号：US371617

申请日：1982-04-26

申请人： Stephen C. Terry ,  John H. Jerman

发明人： Stephen C. Terry ,  John H. Jerman

IPC分类号： G01N30/20 ,  G01N30/60 ,  G01N30/88 ,  G01N31/08 ,  B01D53/00

CPC分类号： G01N30/88 ,  G01N30/6095 ,  G01N30/20 ,  G01N30/6091

摘要： A gas chromatography assembly has a substrate wafer with grooves and a valve seat etched therein. A plate cooperates with the wafer and the grooves to define gas channels: a carrier gas channel and a sample gas channel, each passing through the valve seat. A valve actuator is attached to the valve seat for controlling the flow of sample gas from the sample gas channel into the carrier gas channel. A pump is attached to the wafer and is connected to the sample gas channel. The pump cooperates with the valve actuator to inject sample gas from the sample gas channel into the carrier gas channel. A modular capillary tube and a detector are connected to the carrier gas channel to analyze the properties of the sample gas flowing in the carrier gas channel from the sample gas channel.

摘要翻译： 气相色谱组合件具有其中蚀刻有凹槽和阀座的衬底晶片。 板与晶片和槽配合以限定气体通道：载气通道和样品气体通道，每个通过阀座。 阀致动器附接到阀座，用于控制样气从样气通道进入载气通道的流动。 泵连接到晶片并连接到样品气体通道。 泵与阀门致动器配合，将样品气体从样品气体通道注入载气通道。 模块化毛细管和检测器连接到载气通道，以分析从样气通道在载气通道中流动的样气的性质。

公开(公告)号：US08174751B2

公开(公告)日：2012-05-08

申请号：US13085345

申请日：2011-04-12

申请人： John H. Jerman

发明人： John H. Jerman

IPC分类号： G02B26/08

CPC分类号： G02B26/08 ,  B41C1/05 ,  B41M5/24 ,  B41M5/26 ,  G02B26/105

摘要： Apparatus for marking a bitmap image on tape includes a scanning mirror which is incorporated in a micro-electro-mechanical system (MEMS). The MEMS is torsionally resonant at two frequencies one being about three time the other. The MEMS is excited to resonance by applying an AC signal to the actuators, causing the mirror to oscillate. The AC signal has components at the two frequencies. The magnitude and phase-relationship of the components can be selected such that the mirror oscillates in an approximation of a triangle-wave.

摘要翻译： 用于在带上标记位图图像的设备包括结合在微机电系统（MEMS）中的扫描镜。 MEMS在两个频率下扭转谐振，一个大约三次。 通过向致动器施加AC信号来激发MEMS以进行谐振，从而使反射镜振荡。 交流信号具有两个频率的分量。 可以选择分量的幅度和相位关系，使得反射镜以近似的三角波振荡。

公开(公告)号：US20110188103A1

公开(公告)日：2011-08-04

申请号：US13085345

申请日：2011-04-12

申请人： John H. Jerman

发明人： John H. Jerman

IPC分类号： G02B26/08

CPC分类号： G02B26/08 ,  B41C1/05 ,  B41M5/24 ,  B41M5/26 ,  G02B26/105

摘要： Apparatus for marking a bitmap image on tape includes a scanning mirror which is incorporated in a micro-electro-mechanical system (MEMS). The MEMS is torsionally resonant at two frequencies one being about three time the other. The MEMS is excited to resonance by applying an AC signal to the actuators, causing the mirror to oscillate. The AC signal has components at the two frequencies. The magnitude and phase-relationship of the components can be selected such that the mirror oscillates in an approximation of a triangle-wave.

摘要翻译： 用于在带上标记位图图像的设备包括结合在微机电系统（MEMS）中的扫描镜。 MEMS在两个频率下扭转谐振，一个大约三次。 通过向致动器施加AC信号来激发MEMS以进行谐振，从而使反射镜振荡。 交流信号具有两个频率的分量。 可以选择分量的幅度和相位关系，使得反射镜以近似的三角波振荡。

公开(公告)号：US20080025361A1

公开(公告)日：2008-01-31

申请号：US11488986

申请日：2006-07-19

申请人： John H. Jerman ,  Luis A. Spinelli

发明人： John H. Jerman ,  Luis A. Spinelli

IPC分类号： H01S5/00

CPC分类号： H01S5/4025 ,  H01L2224/48091 ,  H01S5/02276 ,  H01S5/4018 ,  H01L2924/00014

摘要： A longitudinal diode-laser array includes a plurality of diode-laser emitter groups. The emitter groups are mounted on corresponding electrical contacts electrically isolated from each other on a dielectric carrier. The emitter groups are cut from a conventionally formed diode-laser bar bonded to the carrier. The emitter-groups are connected together in electrical series via the electrically isolated electrical contacts. This provides that the diode-laser array can be operated at a lower current than would be required to operate the conventional diode-laser bar wherein the plurality of emitters must be connected in parallel.

摘要翻译： 纵向二极管激光器阵列包括多个二极管 - 激光发射器组。 发射极组安装在电介质载体上彼此电隔离的对应的电触点上。 从传统形成的二极管 - 激光条切割发射极组，结合到载体上。 发射极组通过电隔离的电触点以电串联连接在一起。 这提供了二极管激光器阵列可以以比操作常规二极管激光器棒所需的电流更低的电流工作，其中多个发射极必须并联连接。

公开(公告)号：US06882083B2

公开(公告)日：2005-04-19

申请号：US10100545

申请日：2002-03-14

申请人： John H. Jerman ,  John D. Grade

发明人： John H. Jerman ,  John D. Grade

IPC分类号： B81B3/00 ,  H02N1/00

CPC分类号： H02N1/008

摘要： A miniature device comprising a substrate, a movable member overlying the substrate and first and second spaced-apart suspension members. Each of the first and second suspension members has a first bendable end portion coupled to the substrate and a second bendable end portion coupled to the movable member and a substantially rigid central portion. The first and second end portions of each suspension member have respective first and second lengths and the suspension member has an overall length. The sum of the first and second lengths of each suspension member ranges from 5% to 40% of the overall length of the suspension member.

摘要翻译： 一种微型装置，包括基板，覆盖基板的可移动部件和第一和第二间隔开的悬挂部件。 第一和第二悬挂构件中的每一个具有联接到基板的第一可弯曲端部和联接到可动构件的第二可弯曲端部部分和基本上刚性的中心部分。 每个悬挂构件的第一和第二端部具有相应的第一和第二长度，并且悬挂构件具有总长度。 每个悬挂构件的第一和第二长度的总和为悬架构件的总长度的5％至40％。

公开(公告)号：US06856632B1

公开(公告)日：2005-02-15

申请号：US09491429

申请日：2000-01-26

申请人： John F. Heanue ,  John H. Jerman ,  Jeffrey P. Wilde

发明人： John F. Heanue ,  John H. Jerman ,  Jeffrey P. Wilde

IPC分类号： H01S5/022 ,  H01S5/0687 ,  H01S5/14 ,  H01S3/098 ,  H01S3/08 ,  H01S3/10

CPC分类号： H01S5/141 ,  H01S3/105 ,  H01S5/02248 ,  H01S5/0687 ,  H01S5/142 ,  H01S5/143

摘要： A Fabry-Perot laser and a micro-actuator are utilized to provide continuous tuning over a range of wavelengths.

摘要翻译： 利用法布里 - 珀罗激光器和微致动器在一定波长范围内提供连续调谐。

公开(公告)号：US06847151B2

公开(公告)日：2005-01-25

申请号：US10242005

申请日：2002-09-11

申请人： John H. Jerman ,  John D. Grade

发明人： John H. Jerman ,  John D. Grade

IPC分类号： H01S3/1055 ,  H01S5/022 ,  H01S5/0687 ,  H01S5/14 ,  H02N1/00 ,  A41F19/08

CPC分类号： H02N1/008

摘要： A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated. A counterbalance is carried by the substrate and coupled to the second comb drive member for inhibiting undesirable movement of the second comb drive member in response to externally applied accelerations to the microdevice.

摘要翻译： 一种平衡微型装置，其包括基板和至少一个具有第一和第二梳状驱动构件的梳状驱动组件。 第一梳状驱动构件安装在基底上，第二梳状驱动构件覆盖在基底上。 提供至少一个弹簧构件，其具有联接到基底的第一端部和联接到第二梳状驱动构件的第二端部。 第一梳状驱动构件具有多个间隔开的第一梳状驱动指状物，并且第二梳状驱动构件具有多个间隔开的第二梳状驱动指状物。 第二梳状驱动构件可在其中第一和第二梳状驱动指状件基本上不完全相互交叉的第一位置和第一和第二梳状驱动指状件基本上完全相互交叉的第二位置之间移动。 平衡物由衬底承载并且耦合到第二梳状驱动构件，用于防止第二梳状驱动构件响应于外部施加到微型装置的加速度的不期望的运动。