公开(公告)号：US5533412A

公开(公告)日：1996-07-09

申请号：US479247

申请日：1995-06-07

申请人： John H. Jerman ,  Ronald E. Toth ,  David A. Winchell ,  David W. Pennington

发明人： John H. Jerman ,  Ronald E. Toth ,  David A. Winchell ,  David W. Pennington

IPC分类号： G01F1/684 ,  G01F1/708 ,  G01F1/712 ,  G01F7/00 ,  G01P5/18 ,  G01F1/68

CPC分类号： G01F1/7084 ,  G01F1/6842 ,  G01F1/6845 ,  G01F1/708 ,  G01F1/712 ,  G01F7/00 ,  G01P5/18

摘要： A precise fluid flow meter fabricated by micromachining techniques measures a wide range of fluid flow rates. Two serial portions of an enclosed channel have different cross-sectional areas, and therefore different flow velocities. The fluid carries the thermal pulse through the flow channel to two sensor elements spaced apart along the channel downstream from the heating element. The transit time of the thermal pulse between the two sensor elements measures the fluid flow velocity.

摘要翻译： 通过微加工技术制造的精确流体流量计测量各种流体流速。 封闭通道的两个串联部分具有不同的横截面积，因此具有不同的流速。 流体将热脉冲通过流动通道传送到沿着加热元件下游的通道间隔开的两个传感器元件。 两个传感器元件之间的热脉冲的传播时间测量流体流速。

公开(公告)号：US08483249B1

公开(公告)日：2013-07-09

申请号：US13448108

申请日：2012-04-16

申请人： Sergei Govorkov ,  John H. Jerman

发明人： Sergei Govorkov ,  John H. Jerman

IPC分类号： H01S3/04

CPC分类号： H01S5/02272 ,  H01S5/02264 ,  H01S5/02423 ,  H01S5/02484 ,  H01S5/4025

摘要： A diode-laser bar package includes a diamond composite heat-sink on which is soft-solder bonded a copper-pad having an area much greater than that of the diode-laser bar. A constraining-block of a metal having a CTE matching that of the diode-laser bar is hard-solder bonded to the conductive pad. The constraining-block is configured such that the conductive pad in the region of the diode-laser bar has a CTE about equal to that of the constraining-block, and, accordingly, the diode-laser bar.

摘要翻译： 二极管激光棒封装包括金刚石复合散热器，软焊接在其上的铜焊盘的面积远大于二极管激光棒的面积。 具有与二极管激光棒的CTE匹配的CTE的金属的约束块被硬焊接到导电焊盘。 约束块被配置为使得二极管激光条区域中的导电焊盘具有大约等于约束块的导通焊盘，并且相应地具有二极管 - 激光条。

公开(公告)号：US20120268548A1

公开(公告)日：2012-10-25

申请号：US13090971

申请日：2011-04-20

申请人： John H. Jerman ,  Sergei Govorkov

发明人： John H. Jerman ,  Sergei Govorkov

IPC分类号： B41J2/47

CPC分类号： B41J2/473 ,  B41J2/455 ,  B41J3/4075

摘要： A laser printer arranged to print a pixellated image on laser sensitive tape includes a carriage on which are arranged two laser-beam sources delivering separately modulated laser-beams and optics for focusing the beams on the tape. The tape is mounted on a tape drive which drives the tape incrementally in one direction. The carriage is translated over the tape in a direction perpendicular to the tape-drive direction, while the modulated beams are focused. Two rows of the pixellated image are drawn across the tape in this manner. The tape is then incremented and a further two rows are drawn.

摘要翻译： 布置成在激光敏感带上打印像素化图像的激光打印机包括一个滑架，两个激光束源配置有两个激光束源，分别调制激光束和光束，用于将光束聚焦在磁带上。 磁带安装在磁带驱动器上，以一个方向递增地驱动磁带。 滑架在垂直于磁带驱动方向的方向上在磁带上平移，而调制的光束被聚焦。 以这种方式将两行像素化图像画在磁带上。 然后将磁带递增，并绘制另外两行。

公开(公告)号：US06903486B2

公开(公告)日：2005-06-07

申请号：US10251035

申请日：2002-09-19

申请人： John H. Jerman ,  John D. Grade

发明人： John H. Jerman ,  John D. Grade

IPC分类号： H01S3/1055 ,  H01S5/022 ,  H01S5/0687 ,  H01S5/14 ,  H02N1/00

CPC分类号： H02N1/008

摘要： A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the movable structure and an opposite second extremity coupled to the element. The movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel. The element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.

摘要翻译： 平衡微型装置，包括基板，覆盖基板的可移动结构，元件和杠杆组件，其具有联接到枢轴并且可围绕枢轴枢转的枢轴和杠杆。 杠杆具有联接到可移动结构的第一末端和耦合到元件的相对的第二末端。 可移动结构使得杠杆围绕枢轴枢转，以使元件沿行进方向移动。 元件基本上是机械平衡的，以防止元件响应于外部施加的力在行进方向上的不期望的移动。

公开(公告)号：US06396115B1

公开(公告)日：2002-05-28

申请号：US09316644

申请日：1999-05-21

申请人： Edward C. Gage ,  Ronald E. Gerber ,  George R. Gray ,  Steve C. Dohmeier ,  James E. Durnin ,  Daniel E. Glumac ,  Tim Gardner ,  Jill D. Berger ,  John H. Jerman ,  John F. Heanue ,  Ghamin A. Al-Jumaily

发明人： Edward C. Gage ,  Ronald E. Gerber ,  George R. Gray ,  Steve C. Dohmeier ,  James E. Durnin ,  Daniel E. Glumac ,  Tim Gardner ,  Jill D. Berger ,  John H. Jerman ,  John F. Heanue ,  Ghamin A. Al-Jumaily

IPC分类号： H01L310232

CPC分类号： G11B7/1356 ,  G11B7/08576 ,  G11B7/123 ,  G11B7/1263 ,  G11B7/131 ,  G11B7/22 ,  G11B11/10543

摘要： A detector layer for an optics module includes at least one diode having at least one sloped sidewall. At least one isolation region may be formed adjacent to the at least one sloped sidewall to isolate the at least one diode. Conducting material is disposed on at least a portion of the top surface of the diode. An insulating material is disposed on at least a portion of the diode and extends to the conducting material. A metal is disposed on at least a portion of the insulating material and at least a portion of the conducting material such that the metal is coupled to the conducting material.

摘要翻译： 用于光学模块的检测器层包括具有至少一个倾斜侧壁的至少一个二极管。 至少一个隔离区域可以形成为与至少一个倾斜的侧壁相邻以隔离至少一个二极管。 导电材料设置在二极管顶表面的至少一部分上。 绝缘材料设置在二极管的至少一部分上并延伸到导电材料。 绝缘材料的至少一部分和导电材料的至少一部分设置有金属，使得金属与导电材料相连。

公开(公告)号：US6049650A

公开(公告)日：2000-04-11

申请号：US107221

申请日：1998-06-30

申请人： John H. Jerman ,  John D. Grade

发明人： John H. Jerman ,  John D. Grade

IPC分类号： G03F7/40 ,  B25J7/00 ,  B81B7/00 ,  G02B6/36 ,  G02B6/38 ,  G02B6/42 ,  G11B7/22 ,  G02B6/00 ,  H01L21/70

CPC分类号： G02B6/3656 ,  B81C3/008 ,  G02B6/366 ,  G02B6/3692 ,  G11B7/22 ,  G02B6/3893 ,  G02B6/42 ,  G02B6/4219

摘要： Micro-machined tools and component holders useful for the manufacture, assembly, and testing of precision micro-miniature parts are provided, particurlarly embodiments well adapted for precision micro-miniature systems incorporating optical and/or electronic components including lenses, optical fibers, and the like. Structure and method find particular applicability in the precision optical systems of the read, write, or read/write heads of optically assisted storage devices for digital computers. Removable tools are used to temporarily position components while the components are glued or otherwise fixed into place during assembly, and then completely removed for use with another head assembly. Break-away tools or holders typically include three major portions: an element holder, a handle, and a break-away neck portion connecting the holder with the handle. The element holder provides a mounting block for an optical, electrical, or mechanical element. Once the elements are attached to the mounting blocks, they are moved into position within the larger assembly via the handle, the mounting block is glued to the assembly and a small predictable force is applied to the handle to break the neck and separate the handle from the holder which is at that time attached to the assembly. Tools may be formed by photolithographically patterened and etching a substrate such as silicon to selectively carve the substrate. Structures formed from plated metal, either on a base material, or made entirely of metal are also provided by the invention. Several embodiments of process for forming the inventive structures are also provided.

摘要翻译： 提供了用于精密微型部件的制造，组装和测试的微加工工具和部件保持器，特别是适用于包括光学和/或电子部件的精密微型系统的实施例，包括透镜，光纤和 喜欢。 结构和方法在数字计算机的光辅助存储设备的读，写或读/写头的精密光学系统中发现特别适用。 可拆卸工具用于临时定位部件，同时组件被胶合或以其他方式在组装期间固定到位，然后完全移除以与另一个头部组件一起使用。 分离工具或支架通常包括三个主要部分：元件支架，手柄和将支架与手柄连接的脱离颈部。 元件支架为光学，电气或机械元件提供安装块。 一旦元件连接到安装块，它们通过手柄移动到更大的组件内的位置，安装块被粘合到组件上，并且将小的可预测的力施加到手柄以打破颈部并将手柄从 当时在该大会上的持有人。 工具可以通过光刻蚀刻和蚀刻诸如硅的衬底来选择性地雕刻衬底来形成。 本发明还提供了由基底材料制成或完全由金属制成的电镀金属形成的结构。 还提供了用于形成本发明结构的方法的几个实施例。

公开(公告)号：US5998906A

公开(公告)日：1999-12-07

申请号：US135158

申请日：1998-08-17

申请人： John H. Jerman ,  John D. Grade ,  Joseph D. Drake

发明人： John H. Jerman ,  John D. Grade ,  Joseph D. Drake

IPC分类号： G02B6/35 ,  G02B6/42 ,  G02B26/08 ,  G11B7/135 ,  H02N1/00

CPC分类号： G02B6/357 ,  G02B26/0833 ,  G02B26/0841 ,  G02B6/4216 ,  G11B7/1384 ,  H02N1/008 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/358 ,  G02B6/3584

摘要： An electrostatic microactuator comprising a substrate and at least one comb drive assembly having first and second comb drive members. Each of the first and second comb drive members is provided with comb drive fingers. The first comb drive member is mounted on the substrate. The at least one comb drive assembly is disposed between the first and second spaced-apart, beam-like spring members. The second comb drive member overlies the substrate. Each of the first and second beam-like members have a first end portion secured to the substrate and a second end portion secured to the second comb drive member for suspending the second comb drive member over the substrate. The second comb drive member is movable between a first position in which the comb drive fingers of the first and second comb drive members are spaced apart and a second position in which the comb drive fingers of the first and second comb drive members are interdigitated.

摘要翻译： 一种静电微致动器，其包括基板和至少一个具有第一和第二梳状驱动构件的梳状驱动组件。 第一和第二梳状驱动构件中的每一个设置有梳齿驱动指。 第一梳状驱动构件安装在基底上。 至少一个梳子驱动组件设置在第一和第二间隔开的梁状弹簧构件之间。 第二梳状驱动构件覆盖在基底上。 第一和第二梁状构件中的每一个具有固定到基板的第一端部和固定到第二梳状驱动构件的第二端部，用于将第二梳状驱动构件悬挂在基板上。 第二梳状驱动构件可以在第一和第二梳状驱动构件的梳状驱动指状物间隔开的第一位置和第一和第二梳状驱动构件的梳状驱动指状物交叉的第二位置之间移动。

公开(公告)号：US5824204A

公开(公告)日：1998-10-20

申请号：US671428

申请日：1996-06-27

申请人： John H. Jerman

发明人： John H. Jerman

IPC分类号： B81B1/00 ,  B81C1/00 ,  G01N27/447 ,  G01N27/26

CPC分类号： B81C1/00119 ,  G01N27/44791 ,  B81B2201/058 ,  B81B2203/0338 ,  B81B2203/0353 ,  B81C2201/014 ,  B81C2203/031

摘要： A micromachined structure for handling fluids with an applied high voltage, i.e. for electrophoresis, includes a glass or other highly insulative substrate on which are formed very small diameter capillary channels of e.g. silicon nitride. Due to the absence of a silicon substrate, this structure is highly electrically insulative. The silicon nitride channels are formed by a micro-machining and etch process, so that they are initially defined in an etched sacrificial silicon wafer by conformal coating of etched features in the silicon wafer with a silicon nitride layer, which is then patterned to define the desired channels. The silicon wafer is bonded to the glass substrate and the bulk of the silicon wafer is sacrificially etched away, leaving the desired silicon nitride channels with supporting silicon mesas. The remaining silicon nitride "shell" is bonded to the glass substrate and substantially duplicates the etched features in the original silicon wafer. The capillary channels are of a material such as low stress silicon nitride and there is no electrical shorting path to the highly insulative glass substrate.

摘要翻译： 用于处理具有施加的高电压（即电泳）的流体的微加工结构包括玻璃或其它高度绝缘的基底，其上形成非常小直径的毛细管通道。 氮化硅。 由于没有硅衬底，这种结构是高度电绝缘的。 通过微加工和蚀刻工艺形成氮化硅沟道，使得它们最初在蚀刻的牺牲硅晶片中通过在氮化硅层中对硅晶片中的蚀刻特征进行保形涂覆来限定，该氮化硅层被图案化以限定 所需渠道。 将硅晶片结合到玻璃基板上，并将硅晶片的大部分牺牲蚀刻掉，留下所需的具有支撑硅台面的氮化硅沟道。 剩余的氮化硅“壳”结合到玻璃基板上，并且基本上复制了原始硅晶片中的蚀刻特征。 毛细通道是诸如低应力氮化硅的材料，并且没有到高绝缘性玻璃基板的电短路。

公开(公告)号：US4474889A

公开(公告)日：1984-10-02

申请号：US371617

申请日：1982-04-26

申请人： Stephen C. Terry ,  John H. Jerman

发明人： Stephen C. Terry ,  John H. Jerman

IPC分类号： G01N30/20 ,  G01N30/60 ,  G01N30/88 ,  G01N31/08 ,  B01D53/00

CPC分类号： G01N30/88 ,  G01N30/6095 ,  G01N30/20 ,  G01N30/6091

摘要： A gas chromatography assembly has a substrate wafer with grooves and a valve seat etched therein. A plate cooperates with the wafer and the grooves to define gas channels: a carrier gas channel and a sample gas channel, each passing through the valve seat. A valve actuator is attached to the valve seat for controlling the flow of sample gas from the sample gas channel into the carrier gas channel. A pump is attached to the wafer and is connected to the sample gas channel. The pump cooperates with the valve actuator to inject sample gas from the sample gas channel into the carrier gas channel. A modular capillary tube and a detector are connected to the carrier gas channel to analyze the properties of the sample gas flowing in the carrier gas channel from the sample gas channel.

摘要翻译： 气相色谱组合件具有其中蚀刻有凹槽和阀座的衬底晶片。 板与晶片和槽配合以限定气体通道：载气通道和样品气体通道，每个通过阀座。 阀致动器附接到阀座，用于控制样气从样气通道进入载气通道的流动。 泵连接到晶片并连接到样品气体通道。 泵与阀门致动器配合，将样品气体从样品气体通道注入载气通道。 模块化毛细管和检测器连接到载气通道，以分析从样气通道在载气通道中流动的样气的性质。

公开(公告)号：US08174751B2

公开(公告)日：2012-05-08

申请号：US13085345

申请日：2011-04-12

申请人： John H. Jerman

发明人： John H. Jerman

IPC分类号： G02B26/08

CPC分类号： G02B26/08 ,  B41C1/05 ,  B41M5/24 ,  B41M5/26 ,  G02B26/105

摘要： Apparatus for marking a bitmap image on tape includes a scanning mirror which is incorporated in a micro-electro-mechanical system (MEMS). The MEMS is torsionally resonant at two frequencies one being about three time the other. The MEMS is excited to resonance by applying an AC signal to the actuators, causing the mirror to oscillate. The AC signal has components at the two frequencies. The magnitude and phase-relationship of the components can be selected such that the mirror oscillates in an approximation of a triangle-wave.

摘要翻译： 用于在带上标记位图图像的设备包括结合在微机电系统（MEMS）中的扫描镜。 MEMS在两个频率下扭转谐振，一个大约三次。 通过向致动器施加AC信号来激发MEMS以进行谐振，从而使反射镜振荡。 交流信号具有两个频率的分量。 可以选择分量的幅度和相位关系，使得反射镜以近似的三角波振荡。