公开(公告)号：US20090096088A1

公开(公告)日：2009-04-16

申请号：US11872562

申请日：2007-10-15

申请人： MARCO FRANCESCO AIMI ,  Chirstopher James Kapusta ,  Arun Virupaksha Gowda ,  David Cecil Hays ,  Oliver Charles Boomhower ,  Glenn Scott Claydon ,  Joseph Alfred Iannotti ,  Christopher Fred Keimel

发明人： MARCO FRANCESCO AIMI ,  Chirstopher James Kapusta ,  Arun Virupaksha Gowda ,  David Cecil Hays ,  Oliver Charles Boomhower ,  Glenn Scott Claydon ,  Joseph Alfred Iannotti ,  Christopher Fred Keimel

IPC分类号： H01L23/34 ,  H01L21/00

CPC分类号： B81C1/00269 ,  B81C2203/0118 ,  B81C2203/019 ,  B81C2203/032 ,  H01L2224/16225 ,  H01L2924/1461 ,  H01L2924/00

摘要： Multiple microelectromechanical systems (MEMS) on a substrate are capped with a cover using a layer that may function as a bonding agent, separation layer, and hermetic seal. A substrate has a first side with multiple MEMS devices. A cover is formed with through-holes for vias, and with standoff posts for layer registration and separation. An adhesive sheet is patterned with cutouts for the MEMS devices, vias, and standoff posts. The adhesive sheet is tacked to the cover, then placed on the MEMS substrate and heated to bond the layers. The via holes may be metalized with leads for circuit board connection. The MEMS units may be diced from the substrate after sealing, thus protecting them from contaminants.

摘要翻译： 衬底上的多个微电子机械系统（MEMS）用盖子盖住，使用可用作粘合剂，分离层和气密密封的层。 衬底具有具有多个MEMS器件的第一侧。 形成有用于通孔的通孔的盖，并且具有用于层对准和分离的支柱。 图案化粘合片用于MEMS器件，通孔和支柱的切口。 将粘合片粘合到盖上，然后放置在MEMS基板上并加热以粘合层。 通孔可以用电路板连接的引线金属化。 在密封之后，MEMS单元可以从基底切割，从而保护它们免受污染。

公开(公告)号：US07411670B2

公开(公告)日：2008-08-12

申请号：US11400863

申请日：2006-04-10

申请人： Anis Zribi ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Shankar (nmn) Chandrasekaran ,  Sandip Maity ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Todd Ryan Tolliver ,  David Cecil Hays ,  Sheila Neumann Tandon ,  Long Que ,  Christopher Fred Keimel

发明人： Anis Zribi ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Shankar (nmn) Chandrasekaran ,  Sandip Maity ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Todd Ryan Tolliver ,  David Cecil Hays ,  Sheila Neumann Tandon ,  Long Que ,  Christopher Fred Keimel

IPC分类号： G01J3/44

CPC分类号： G01J3/44 ,  G01J3/02 ,  G01J3/0291 ,  G01N21/65

摘要： A photonic crystal based collection probe is provided. The probe includes a photonic crystal configured to guide and condition a beam of Raman scattered photons. Further, the device includes a spectrograph in optical communication with the photonic crystal and configured to receive Raman scattering from the photonic crystal. The device may be employed in a Raman spectrometer system.

摘要翻译： 提供了一种基于光子晶体的收集探针。 探针包括配置为引导和调节拉曼散射光子束的光子晶体。 此外，该装置包括与光子晶体光学通信并被配置为从光子晶体接收拉曼散射的光谱仪。 该装置可以用在拉曼光谱仪系统中。

公开(公告)号：US07327022B2

公开(公告)日：2008-02-05

申请号：US10248237

申请日：2002-12-30

申请人： Glenn Scott Claydon ,  Matthew Christian Nielsen ,  Samhita Dasgupta ,  Robert John Filkins ,  Glenn Alan Forman

发明人： Glenn Scott Claydon ,  Matthew Christian Nielsen ,  Samhita Dasgupta ,  Robert John Filkins ,  Glenn Alan Forman

IPC分类号： H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H01L23/29 ,  H01L23/02

CPC分类号： G02B6/4206 ,  G02B6/4214 ,  G02B6/43 ,  H01L24/19 ,  H01L24/20 ,  H01L2224/73267 ,  H01L2224/9222 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12043 ,  H01L2924/14 ,  H01L2924/00

摘要： A novel micro optical system as a platform technology for electrical and optical interconnections, thermal and mechanical assembly and integration of electronic, optoelectronic, passive and active components. This platform provides optical coupling and chip-to-chip interconnection by microwave electrical, optical guided and unguided waves, and power or bias electrical contacts or interfaces by a novel chip in flexible circuit, rigid or inflexible embodiments.

摘要翻译： 一种新颖的微光学系统作为电气和光学互连的平台技术，电子，光电子，被动和有源组件的热和机械组装和集成。 该平台通过柔性电路，刚性或不灵活的实施例中的新型芯片提供了通过微波电，光引导和非导向波以及功率或偏置电触点或接口的光耦合和芯片到芯片互连。

公开(公告)号：US20100156577A1

公开(公告)日：2010-06-24

申请号：US12340776

申请日：2008-12-22

申请人： Xuefeng Wang ,  Kuna Venkat Satya Rama Kishore ,  Christopher Fred Keimel ,  Glenn Scott Claydon ,  Kanakasabapathi Subramanian

发明人： Xuefeng Wang ,  Kuna Venkat Satya Rama Kishore ,  Christopher Fred Keimel ,  Glenn Scott Claydon ,  Kanakasabapathi Subramanian

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H1/0036

摘要： A micro electro-mechanical system switch is presented. The switch includes a base substrate having a support surface. An actuating surface having a notch and an electrical contact surface having an extension is provided. The extension is disposed within the notch. A beam is attached to the base substrate. The beam includes an actuatable free end that is configured to flex upon actuation and to make contact with at least a portion of the extension and carry current therethrough.

摘要翻译： 介绍了一种微机电系统开关。 开关包括具有支撑表面的基底。 提供具有凹口和具有延伸部的电接触表面的致动表面。 延伸部位于凹口内。 梁连接到基底基板。 梁包括可致动的自由端，其构造成在致动时弯曲并且与延伸部的至少一部分接触并且携带电流通过其中。

公开(公告)号：US20090159410A1

公开(公告)日：2009-06-25

申请号：US11961767

申请日：2007-12-20

申请人： Xuefeng Wang ,  Kanakasabapathi Subramanian ,  Christopher Fred Keimel ,  Marco Francesco Aimi ,  Kuna Venkat Satya Rama Kishore ,  Glenn Scott Claydon ,  Oliver Charles Boomhower ,  Parag Thakre

发明人： Xuefeng Wang ,  Kanakasabapathi Subramanian ,  Christopher Fred Keimel ,  Marco Francesco Aimi ,  Kuna Venkat Satya Rama Kishore ,  Glenn Scott Claydon ,  Oliver Charles Boomhower ,  Parag Thakre

IPC分类号： H01H57/00

CPC分类号： H01H59/0009 ,  H01H2059/0072

摘要： A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.

摘要翻译： MEMS开关包括衬底，耦合到衬底的可移动致动器，衬底接触件，衬底电极和电耦合到可移动致动器的导电阻塞件，并被构造成防止可动致动器接触衬底电极，同时允许可动致动器 与基板接触。

公开(公告)号：US20080084565A1

公开(公告)日：2008-04-10

申请号：US11538885

申请日：2006-10-05

申请人： Anis Zribi ,  Min-Yi Shih ,  Guiju Song ,  Ajit Achuthan ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Kuna Venkat Satya Rama Kishore ,  Jianming Zheng ,  Kevin George Harding ,  Hua Xia

发明人： Anis Zribi ,  Min-Yi Shih ,  Guiju Song ,  Ajit Achuthan ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Kuna Venkat Satya Rama Kishore ,  Jianming Zheng ,  Kevin George Harding ,  Hua Xia

IPC分类号： G01B9/02

CPC分类号： G01D5/35303 ,  G01D5/268 ,  G01N17/008 ,  G01N21/45 ,  G01N21/8422 ,  G01N2021/458 ,  G01N2021/9546

摘要： A interferometer-based fouling detection system and method are described. The system may include a fiber optic cable, a light source in communication with the fiber optic cable, at least one photo detector in communication with the fiber optic cable, and at least one interferometric spectrometer. The fiber optic cable may include a long period grating and a fiber Bragg grating or it may include a facet edge. The system may instead include a fiber optic cable, a light source in communication with the fiber optic cable, at least one photo detector in communication with the fiber optic cable, a fiber coupler, a reference probe including a mirror, a sample probe, and an interferometer.

摘要翻译： 描述了基于干涉仪的结垢检测系统和方法。 该系统可以包括光纤电缆，与光纤电缆通信的光源，与光纤电缆通信的至少一个光电检测器，以及至少一个干涉光谱仪。 光纤电缆可以包括长周期光栅和光纤布拉格光栅，或者它可以包括小面边缘。 该系统可以替代地包括光纤电缆，与光纤电缆通信的光源，与光纤电缆通信的至少一个光电检测器，光纤耦合器，包括反射镜的参考探针，样本探针和 干涉仪。

公开(公告)号：US07692785B2

公开(公告)日：2010-04-06

申请号：US11693277

申请日：2007-03-29

申请人： Willam Scott Sutherland ,  Anis Zribi ,  Long Que ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Shankar Chandrasekaran ,  David Cecil Hays ,  Victor Samper ,  Dirk Lange ,  Marko Baller ,  Min-Yi Shih ,  Sandip Maity

发明人： Willam Scott Sutherland ,  Anis Zribi ,  Long Que ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Shankar Chandrasekaran ,  David Cecil Hays ,  Victor Samper ,  Dirk Lange ,  Marko Baller ,  Min-Yi Shih ,  Sandip Maity

IPC分类号： G01J3/44

CPC分类号： G01N21/65 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/0237 ,  G01J3/027 ,  G01J3/0289 ,  G01J3/10 ,  G01J3/1895 ,  G01J3/44 ,  G02B26/02 ,  G02B26/0808 ,  G02B26/0816

摘要： A system and method for managing optical power for controlling thermal alteration of a sample undergoing spectroscopic analysis is provided. The system includes a moveable laser beam generator for irradiating the sample and a beam shaping device for moving and shaping the laser beam to prevent thermal overload or build up in the sample. The moveable laser beam generator includes at least one beam shaping device selected from the group consisting of at least one optical lens, at least one optical diffractor, at least one optical path difference modulator, at least one moveable mirror, at least one Micro-Electro-Mechanical Systems (MEMS) integrated circuit (IC), and/or a liquid droplet. The system also includes an at least two degree of freedom (2 DOF) moveable substrate platform and a controller for controlling the laser beam generator and the substrate platform, and for analyzing light reflected from the sample.

摘要翻译： 提供了一种用于管理用于控制进行光谱分析的样品的热变化的光功率的系统和方法。 该系统包括用于照射样品的可移动激光束发生器和用于移动和成形激光束的光束整形装置，以防止样品中的热过载或积聚。 可移动激光束发生器包括至少一个光束成形装置，其选自由至少一个光学透镜，至少一个光学衍射器，至少一个光程差调制器，至少一个可动反射镜，至少一个微电极 机电系统（MEMS）集成电路（IC）和/或液滴。 该系统还包括至少两个自由度（2自由度）可移动基板平台和用于控制激光束发生器和基板平台的控制器，并用于分析从样品反射的光。

公开(公告)号：US07428055B2

公开(公告)日：2008-09-23

申请号：US11538885

申请日：2006-10-05

申请人： Anis Zribi ,  Min-Yi Shih ,  Guiju Song ,  Ajit Achuthan ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Kuna Venkat Satya Rama Kishore ,  Jianming Zheng ,  Kevin George Harding ,  Hua Xia

发明人： Anis Zribi ,  Min-Yi Shih ,  Guiju Song ,  Ajit Achuthan ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Kuna Venkat Satya Rama Kishore ,  Jianming Zheng ,  Kevin George Harding ,  Hua Xia

IPC分类号： G01B9/02 ,  G01N21/43

CPC分类号： G01D5/35303 ,  G01D5/268 ,  G01N17/008 ,  G01N21/45 ,  G01N21/8422 ,  G01N2021/458 ,  G01N2021/9546

摘要： A interferometer-based fouling detection system and method are described. The system may include a fiber optic cable, a light source in communication with the fiber optic cable, at least one photo detector in communication with the fiber optic cable, and at least one interferometric spectrometer. The fiber optic cable may include a long period grating and a fiber Bragg grating or it may include a facet edge. The system may instead include a fiber optic cable, a light source in communication with the fiber optic cable, at least one photo detector in communication with the fiber optic cable, a fiber coupler, a reference probe including a mirror, a sample probe, and an interferometer.

摘要翻译： 描述了基于干涉仪的结垢检测系统和方法。 该系统可以包括光纤电缆，与光纤电缆通信的光源，与光纤电缆通信的至少一个光电检测器，以及至少一个干涉光谱仪。 光纤电缆可以包括长周期光栅和光纤布拉格光栅，或者它可以包括小面边缘。 该系统可以替代地包括光纤电缆，与光纤电缆通信的光源，与光纤电缆通信的至少一个光电检测器，光纤耦合器，包括反射镜的参考探针，样本探针和 干涉仪。

公开(公告)号：US20080158568A1

公开(公告)日：2008-07-03

申请号：US12044020

申请日：2008-03-07

申请人： Glenn Scott Claydon ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Renato Guida ,  David Cecil Hays ,  Dirk Lange ,  Boon Kwee Lee ,  Sandip Maity ,  Long Que ,  Anis Zribi

发明人： Glenn Scott Claydon ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Renato Guida ,  David Cecil Hays ,  Dirk Lange ,  Boon Kwee Lee ,  Sandip Maity ,  Long Que ,  Anis Zribi

IPC分类号： G01B9/02

CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/26 ,  G01J3/44 ,  G01N21/65 ,  G01N2021/656 ,  G01N2201/0221

摘要： An interferometer includes a resonant cavity having a movable mirror and at least one fiber optic component acting as a fixed mirror. A surface of the fiber optic component is coated with a reflective film. An actuator is coupled to the movable mirror, such that when a scattered optical beam is coupled to the cavity, interference occurs between the surface of the fiber optic component coated with reflective film and a surface of the movable mirror facing the surface of the fiber optic component coated with reflective film. The reflective film on the surface of the fiber optic component causes closely spaced spectral lines within the scattered optical beam to be suitably resolved.

摘要翻译： 干涉仪包括具有可移动反射镜的谐振腔和用作固定镜的至少一个光纤部件。 光纤部件的表面涂覆有反射膜。 致动器耦合到可移动反射镜，使得当散射的光束耦合到空腔时，在涂覆有反射膜的光纤部件的表面与可移动镜的面向光纤表面的表面之间发生干涉 涂有反射膜的部件。 光纤组件表面上的反射膜导致散射光束内的紧密间隔的光谱线被适当地分辨。

公开(公告)号：US06935792B2

公开(公告)日：2005-08-30

申请号：US10065460

申请日：2002-10-21

申请人： Richard Joseph Saia ,  Thomas Bert Gorczyca ,  Christopher James Kapusta ,  Ernest Wayne Balch ,  Glenn Scott Claydon ,  Samhita Dasgupta ,  Eladio Clemente Delgado

发明人： Richard Joseph Saia ,  Thomas Bert Gorczyca ,  Christopher James Kapusta ,  Ernest Wayne Balch ,  Glenn Scott Claydon ,  Samhita Dasgupta ,  Eladio Clemente Delgado

IPC分类号： G02B6/12 ,  G02B6/122 ,  G02B6/138 ,  G02B6/42 ,  G02B6/00

CPC分类号： G02B6/122 ,  G02B6/12002 ,  G02B6/12004 ,  G02B6/1221 ,  G02B6/138 ,  G02B6/42 ,  H01L2224/04105 ,  H01L2224/32225 ,  H01L2224/32245 ,  H01L2224/73267 ,  H01L2924/15153 ,  H01L2924/15192

摘要： An optoelectronic package is fabricated by a method which includes: positioning an optical device within a window of a substrate active-side up and below a top substrate surface; filling the window with an optical polymer material; planarizing surfaces of the optical polymer material and the substrate; patterning waveguide material over the optical polymer material and the substrate to form an optical interconnection path; and to form a mirror to reflect light from the optical device to the interconnection path; and forming a via to expose a bond pad of the optical device.

摘要翻译： 通过一种方法制造光电子封装，该方法包括：将光学器件定位在衬底主动侧的窗口内，顶部衬底表面上方和下方; 用光学聚合物材料填充窗户; 光学聚合物材料和基底的平坦化表面; 在光学聚合物材料和基底上形成波导材料以形成光学互连路径; 并且形成反射镜以将来自光学装置的光反射到互连路径; 以及形成通孔以暴露所述光学器件的接合焊盘。