公开(公告)号：US20180052099A1

公开(公告)日：2018-02-22

申请号：US15387180

申请日：2016-12-21

申请人： KLA-Tencor Corporation

发明人： Andrew V. Hill ,  Amnon Manassen ,  Ohad Bachar

IPC分类号： G01N21/25 ,  G01J3/12 ,  G01J3/10

CPC分类号： G01N21/255 ,  G01J1/0418 ,  G01J1/4257 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/06 ,  G01J3/10 ,  G01J3/12 ,  G01J2001/4247 ,  G01J2003/069 ,  G01J2003/1213 ,  G01J2003/1217 ,  G01J2003/1221 ,  G01J2003/1234 ,  G01N2201/0666 ,  G01N2201/0668 ,  G01N2201/0675 ,  G01N2201/0683 ,  G03F7/70633

摘要： A metrology system includes an illumination source to generate an illumination beam, a multi-channel spectral filter, a focusing element to direct illumination from the single optical column to a sample, and at least one detector to capture the illumination collected from the sample. The multi-channel spectral filter includes two or more filtering channels having two or more channel beam paths. The two or more filtering channels filter illumination propagating along the two or more channel beam paths based on two or more spectral transmissivity distributions. The multi-channel spectral filter further includes a channel selector to direct at least a portion of the illumination beam into at least one selected filtering channel to filter the illumination beam. The multi-channel spectral filter further includes at least one beam combiner to combine illumination from the two or more filtering channels to a single optical column.

公开(公告)号：US09823129B2

公开(公告)日：2017-11-21

申请号：US15058527

申请日：2016-03-02

申请人： Seiko Epson Corporation

发明人： Ryohei Kuri

IPC分类号： G01J3/26 ,  G01J3/28 ,  G01J3/50 ,  H04N1/60 ,  G01J3/02 ,  G01J3/06

CPC分类号： G01J3/2823 ,  G01J3/0229 ,  G01J3/06 ,  G01J3/26 ,  G01J3/50 ,  G01J2003/061 ,  H04N1/6033 ,  H04N1/6044

摘要： A printer includes a spectroscope and a carriage moving unit. The spectroscope includes a wavelength-selective interference filter on which light from a measurement target is incident, and the carriage moving unit moves the spectroscope in an X direction with respect to the measurement target. If the measurement target is a color patch, the spectroscope performs spectrometry by changing a wavelength of light passing through the wavelength-selective interference filter in a first period during which the spectroscope is moved in the X direction, and passes light of an initial wavelength through the wavelength-selective interference filter at a start of measurement and at an end of measurement in the first period. A first output value that is a measured value from the spectrometry at the start of measurement is compared with a second output value that is a measured value from the spectrometry at the end of measurement.

公开(公告)号：US20170322077A1

公开(公告)日：2017-11-09

申请号：US15262061

申请日：2016-09-12

申请人： Spectro Analytical Instruments GmbH

发明人： Wolfram BOHLE ,  Alexander MORLANG

IPC分类号： G01J3/02 ,  G02B7/18 ,  G01J3/443 ,  G02B7/182 ,  G01J3/18

CPC分类号： G01J3/021 ,  G01J3/0286 ,  G01J3/06 ,  G01J3/18 ,  G01J3/20 ,  G01J3/443 ,  G01J2003/064 ,  G02B7/181 ,  G02B7/1827

摘要： A spectrometer for examining the spectrum of an optical emission source may include: an optical base body, a light entry aperture connected to the optical base body to couple light into the spectrometer, at least one dispersion element to receive the light as a beam of rays and generate a spectrum, and at least one detector for measuring the generated spectrum. A light path may run from the light entry aperture to the detector. A mirror group with at least two mirrors may be provided in a section of the light path between the light entry aperture and the at least one detector, in which the beam does not run parallel, which may compensate for temperature effects. In the mirror group, at least one mirror or the entire mirror group may be moveable relative to the optical base body and may be coupled to a temperature-controlled drive.

公开(公告)号：US20170314990A1

公开(公告)日：2017-11-02

申请号：US15652458

申请日：2017-07-18

申请人： H2Optx Inc.

发明人： Rudolf J. Hofmeister ,  Donald A. Ice ,  Scott W. Tandy

IPC分类号： G01J3/42 ,  B01D46/00 ,  G01N33/15 ,  G01N23/00 ,  G01N21/65 ,  G01N21/3577 ,  G01N21/3504 ,  G01N21/33 ,  G01N21/25 ,  G01N21/01 ,  G01N1/06 ,  G01J3/44 ,  G01J3/10 ,  G01J3/06 ,  G01J3/00 ,  B01D46/42 ,  G01N35/10

CPC分类号： G01J3/42 ,  B01D46/0002 ,  B01D46/42 ,  G01J3/00 ,  G01J3/0202 ,  G01J3/0205 ,  G01J3/0237 ,  G01J3/0267 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/06 ,  G01J3/10 ,  G01J3/2823 ,  G01J3/44 ,  G01N1/06 ,  G01N21/01 ,  G01N21/25 ,  G01N21/253 ,  G01N21/33 ,  G01N21/3504 ,  G01N21/3577 ,  G01N21/65 ,  G01N23/00 ,  G01N33/15 ,  G01N35/10 ,  G01N2021/0106 ,  G01N2201/0231

摘要： In some aspects, a device for apportioning granular samples includes a sample feeder defining a conduit, the conduit including a first opening to receive the granular samples and a second opening. The device includes a shuttle operably coupled to the sample feeder to receive the granular samples from the conduit via the second opening. The shuttle is configured to apportion the granular samples to incrementally enter a sample chamber to be analyzed. The device includes an outlet conduit fluidly coupled to the sample chamber and configured to permit the sample chamber to be evacuated.

公开(公告)号：US09797776B2

公开(公告)日：2017-10-24

申请号：US15166374

申请日：2016-05-27

申请人： Sean Xiaolu Wang ,  Qun Li

发明人： Sean Xiaolu Wang ,  Qun Li

IPC分类号： G01J3/30 ,  G01J3/443 ,  G01J3/10 ,  G01J3/06 ,  G01J3/02 ,  G01J3/28

CPC分类号： G01J3/443 ,  G01J3/0208 ,  G01J3/06 ,  G01J3/10 ,  G01J3/28

摘要： This invention discloses a laser induced breakdown spectroscopy (LIBS) apparatus based on a high repetition rate pulsed laser. The laser produces a train of laser pulses at a high repetition rate in the kHz or even higher range. When the laser beam hits the sample, it generates several thousands of micro-plasma emissions per second. Synchronized miniature CCD array optical spectrometer modules collect the LIBS signal from these micro-plasma emissions. By adjusting the integration time of the spectrometer to cover a plurality of periods of the laser pulse train, the spectrometer integrates the LIBS signal produced by this plurality of laser pulses. Hence the intensity of the obtained LIBS spectrum can be greatly improved to increase the signal-to-noise ratio (SNR) and lower the limit of detection (LOD). In addition, the influence of pulse to pulse variation of the laser is minimized since the obtained LIBS spectrum is the spectrum of a plurality of micro-plasma emissions produced by a plurality of laser pulses. The high repetition rate laser also makes it possible to measure the LIBS signal at a short and a long integration time and mathematically combining the two spectra to obtain a LIBS spectrum with enhanced dynamic range.

公开(公告)号：US20170299433A1

公开(公告)日：2017-10-19

申请号：US15512977

申请日：2015-09-23

申请人： Heptagon Micro Optics Pte. Ltd.

发明人： Peter Riel ,  Peter Roentgen

IPC分类号： G01J3/10 ,  H01S5/10 ,  H01S5/04 ,  H01S5/00 ,  G01J3/26 ,  H01S5/343 ,  G01J3/06

CPC分类号： G01J3/10 ,  G01J3/06 ,  G01J3/108 ,  G01J3/26 ,  H01S3/094096 ,  H01S5/0071 ,  H01S5/0287 ,  H01S5/041 ,  H01S5/1096 ,  H01S5/183 ,  H01S5/32375 ,  H01S5/34306 ,  H01S5/34313 ,  H01S5/34326 ,  H01S5/3438 ,  H01S5/4043 ,  H01S5/4087

摘要： The present disclosure describes broadband optical emission sources that include a stack of semiconductor layers, wherein each of the semiconductor layers is operable to emit light of a different respective wavelength; a light source operable to provide optical pumping for stimulated photon emission from the stack; wherein the semiconductor layers are disposed sequentially in the stack such that a first one of the semiconductor layers is closest to the light source and a last one of the semiconductor layers is furthest from the light source, and wherein each particular one of the semiconductor layers is at least partially transparent to the light generated by the other semiconductor layers that are closer to the light source than the particular semiconductor layer. The disclosure also describes various spectrometers that include a broadband optical emission device, and optionally include a tuneable wavelength filter operable to allow a selected wavelength or narrow range of wavelengths to pass through.

公开(公告)号：US20170254755A1

公开(公告)日：2017-09-07

申请号：US15061769

申请日：2016-03-04

申请人： Applied Materials, Inc.

发明人： Tae Seung CHO ,  Junghoon KIM ,  Soonwook JUNG ,  Soonam PARK ,  Dmitry LUBOMIRSKY

IPC分类号： G01N21/68 ,  H01J37/32 ,  H01J37/10

CPC分类号： G01N21/68 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0237 ,  G01J3/0289 ,  G01J3/06 ,  G01J3/443 ,  G01N21/73 ,  G01N2201/0638 ,  G01N2201/068 ,  H01J37/10 ,  H01J37/32458 ,  H01J37/32935 ,  H01J37/32963 ,  H01J37/32972 ,  H01J2237/103 ,  H01J2237/3341

摘要： Implementations of the present disclosure relate to a plasma chamber having an optical device for measuring emission intensity of plasma species. In one implementation, the plasma chamber includes a chamber body defining a substrate processing region therein, the chamber body having a sidewall, a viewing window disposed in the sidewall, and a plasma monitoring device coupled to the viewing window. The plasma monitoring device includes an objective lens and an aperture member having a pinhole, wherein the aperture member is movable relative to the objective lens by an actuator to adjust the focal point in the plasma using principles of optics, allowing only the light rays from the focal point in the plasma to reach the pinhole. The plasma monitoring device therefore enables an existing OES (coupled to the plasma monitoring device through an optical fiber) to monitor emission intensity of the species at any specific locations of the plasma.

公开(公告)号：US09721195B2

公开(公告)日：2017-08-01

申请号：US15185373

申请日：2016-06-17

申请人： Seiko Epson Corporation

发明人： Takeshi Nozawa

IPC分类号： H04N1/00 ,  H04N1/60 ,  G06K15/02 ,  G01J3/02 ,  G01J3/06 ,  G01J3/12 ,  G01J3/28 ,  G01J3/46 ,  G01J3/52 ,  G01J3/26

CPC分类号： G06K15/027 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/06 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/46 ,  G01J3/463 ,  G01J3/52 ,  G01J2003/061 ,  G01J2003/1226 ,  G01J2003/2826 ,  H04N1/00015 ,  H04N1/00023 ,  H04N1/00034 ,  H04N1/00045 ,  H04N1/00068 ,  H04N1/00082 ,  H04N1/6036 ,  H04N1/6044

摘要： A printer includes a spectroscope that has a variable wavelength interference filter which incidents light from a measurement region, and a light receiving section which receives light from the variable wavelength interference filter and which outputs a detection signal according to an amount of received light, a carriage moving unit which relatively moves the spectroscope along one direction with respect to a measurement target of spectrometry and moves the measurement region with respect to the measurement target, and a timing detection circuit which has a differential circuit that differentiates the detection signal and outputs a differentiation signal, wherein in a case where the measurement target is a color patch, spectrometry in which the amount of received light is detected starts based on the differential signal.

公开(公告)号：US20170108378A1

公开(公告)日：2017-04-20

申请号：US15292244

申请日：2016-10-13

申请人： Beijing information Science & Technology University

发明人： Lianqing Zhu ,  Wei He ,  Xiaoping Lou ,  Feng Liu ,  Mingli Dong ,  Fei Luo ,  Wei Zhuang

IPC分类号： G01J3/18 ,  G02B26/08 ,  G02B6/02 ,  G02F2/00

CPC分类号： G01J3/1895 ,  G01J3/0208 ,  G01J3/027 ,  G01J3/06 ,  G01J3/28 ,  G01J2003/064 ,  G01J2003/066 ,  G02B6/02076 ,  G02B26/0816 ,  G02F2/00

摘要： A fiber grating demodulation system for enhancing spectral resolution by finely adjusting an imaging focus mirror, includes a laser pump source, a wavelength division multiplexer, a fiber Bragg grating, a diaphragm, a slit, a collimating mirror, a light splitting grating, an imaging focus mirror, a linear array detector. The laser pump source, the wavelength division multiplexer, the fiber Bragg grating are connected in sequence, the wavelength division multiplexer is connected to the diaphragm. Light emitted from the laser pump source is multiplexed by the wavelength division multiplexer and then enters the fiber Bragg grating, a reflection spectrum of the fiber Bragg grating enters the slit of the fiber grating demodulation system as injected light. After passing through the slit, the injected light is reflected by the collimating mirror, the light splitting grating, and the imaging focus mirror in sequence, and is finally converged to the linear array detector.

公开(公告)号：US20170045722A1

公开(公告)日：2017-02-16

申请号：US15304632

申请日：2015-04-17

申请人： HORIBA JOBIN YVON SAS

发明人： Emmanuel FRETEL ,  Damien ANDREZEJEUSKY ,  Rene BOIDIN ,  Philippe DE BETTIGNIES

IPC分类号： G02B21/00 ,  G02B26/10 ,  G01N21/65

CPC分类号： G02B21/0048 ,  G01J3/06 ,  G01J3/44 ,  G01N21/65 ,  G01N2021/656 ,  G02B21/0032 ,  G02B21/0076 ,  G02B26/101 ,  G02B26/105

摘要： An optical beam scanning microscopy apparatus includes a light source adapted to emit an optical beam (2) and a microscope objective (1) adapted for focusing the optical beam (2) in an object plane (11). The microscopy apparatus includes first and second reflecting optical elements (M-X1, M-X2) disposed in series on the optical path of the optical beam (2) between the light source and the microscope objective (1), first elements of angular tilting (21, 25) adapted for tilting the first reflecting optical elements (M-X1, M-XY1) according to a first predetermined rotation angle (RX1), and second elements of angular tilting (22, 26) adapted for tilting the second reflecting optical elements (M-X2, M-XY2) according to a second rotation angle (RX2), in such a way as to angularly tilt the axis (12) of the optical beam (2) by pivoting about the center (O) of the pupil of the microscope objective (1).

摘要翻译： 光束扫描显微镜装置包括适于发射光束（2）的光源和适于将光束（2）聚焦在物平面（11）中的显微镜物镜（1）。 显微镜装置包括在光源和显微镜物镜（1）之间的光束（2）的光路上串联布置的第一和第二反射光学元件（M-X1，M-X2），第一和第二反射光学元件 （21,25），其适于使第一反射光学元件（M-X1，M-XY1）根据第一预定旋转角度（RX1）倾斜;以及第二角度倾斜元件（22,26），其适于倾斜第二反射 根据第二旋转角度（RX2）的光学元件（M-X2，M-XY2），以通过围绕中心（O）枢转来使光束（2）的轴线（12）成角度地倾斜的方式 显微镜物镜（1）的瞳孔。