公开(公告)号：US09266192B2

公开(公告)日：2016-02-23

申请号：US13482248

申请日：2012-05-29

申请人： Joseph G. Frankel

发明人： Joseph G. Frankel

IPC分类号： B23K26/00 ,  B23K26/02 ,  B23K26/10 ,  H01L21/00 ,  B23K26/03 ,  B23K26/36 ,  B23K26/06

CPC分类号： B23K26/032 ,  B23K26/082 ,  B23K26/36 ,  Y10T279/21

摘要： An apparatus for processing a workpiece can be exemplarily characterized as including a processing tool having a processing region within which a workpiece can be processed, and an illumination system configured to direct detection light into the processing region. In this embodiment, detection light directable by the illumination system has a wavelength to which the workpiece is at least partially opaque. The apparatus may further include an image sensor configured to detect a characteristic of the detection light transmitted through the processing region and a chuck configured to support a workpiece such that at least a portion of the workpiece is disposable within the processing region and is illuminatable by the detection light. Methods for processing a workpiece are also disclosed.

摘要翻译： 用于加工工件的装置可以示例性地表征为包括具有可以处理工件的处理区域的处理工具和被配置为将检测光引导到处理区域中的照明系统。 在该实施例中，由照明系统可指示的检测光具有工件至少部分不透明的波长。 该装置还可以包括：图像传感器，被配置为检测透过该处理区域的检测光的特性;以及卡盘，其构造成支撑工件，使得该工件的至少一部分在处理区域内是可弃置的， 检测光。 还公开了加工工件的方法。

公开(公告)号：US20150274574A1

公开(公告)日：2015-10-01

申请号：US14229347

申请日：2014-03-28

申请人： Electro Scientific Industries, Inc.

发明人： Mathew Rekow ,  Yun Zhou ,  Nicolas Falletto

IPC分类号： C03B33/09 ,  C03B33/10

CPC分类号： C03B33/091 ,  B23K26/364 ,  B23K26/402 ,  B23K2103/54 ,  C03B33/0222 ,  C03B33/102

摘要： An internal feature can be laser machined in strengthened glass sheets or panels by first laser machining a first scribe in a first surface proximate to the internal feature to be laser machined. The internal feature can be then laser machined by positioning a beam waist of a laser beam proximate to an opposite second surface by focusing the laser beam through the strengthened glass panel from the first surface. The internal feature is laser machined by repositioning the beam waist from the second surface to the first surface while removing material from a kerf surrounding the internal feature. When the laser beam waist is finally positioned proximate to the first surface material, the internal shape formed by the laser machining is easily and cleanly removed from the surrounding glass.

摘要翻译： 可以通过在接近内部特征的第一表面中激光加工第一划片进行激光加工，在加强的玻璃板或板中激光加工内部特征。 然后通过将激光束从第一表面聚焦通过加强的玻璃面板，将激光束的束腰定位成靠近相对的第二表面，激光加工内部特征。 通过将梁腰从第二表面重新定位到第一表面，同时从围绕内部特征的切口移除材料，激光加工内部特征。 当激光束腰部最终定位成靠近第一表面材料时，通过激光加工形成的内部形状容易且干净地从周围的玻璃上移除。

公开(公告)号：US20150239064A1

公开(公告)日：2015-08-27

申请号：US14707950

申请日：2015-05-08

申请人： Electro Scientific Industries, Inc.

发明人： Yasu Osako ,  Mark Unrath ,  Mark Kosmowski

IPC分类号： B23K26/08 ,  B23K26/38

CPC分类号： B23K26/0846 ,  B23K26/38

摘要： Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.

摘要翻译： 用于激光处理连续移动的片材的系统和方法包括一个或多个激光处理头，其被配置为用一个或多个激光束照射移动片材。 片材可以包括例如在激光处理期间从第一辊连续地移动到第二辊的光学膜。 在一个实施例中，真空卡盘构造成将可动片材的第一部分可拆卸地固定到其上。 当第一部分被一个或多个激光束处理时，真空吸盘控制移动片材的速度。 在一个实施例中，输送机包括多个真空卡盘，其构造成在激光加工期间连续地贴附到片材的不同部分。

公开(公告)号：US09029731B2

公开(公告)日：2015-05-12

申请号：US11949582

申请日：2007-12-03

申请人： Yasu Osako ,  Mark Unrath ,  Mark Kosmowski

发明人： Yasu Osako ,  Mark Unrath ,  Mark Kosmowski

IPC分类号： B23K26/08

CPC分类号： B23K26/0846 ,  B23K26/38

摘要： Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.

摘要翻译： 用于激光处理连续移动的片材的系统和方法包括一个或多个激光处理头，其被配置为用一个或多个激光束照射移动片材。 片材可以包括例如在激光处理期间从第一辊连续地移动到第二辊的光学膜。 在一个实施例中，真空卡盘构造成将可动片材的第一部分可拆卸地固定到其上。 当第一部分被一个或多个激光束处理时，真空吸盘控制移动片材的速度。 在一个实施例中，输送机包括多个真空卡盘，其构造成在激光加工期间连续地贴附到片材的不同部分。

公开(公告)号：US08970238B2

公开(公告)日：2015-03-03

申请号：US13163516

申请日：2011-06-17

申请人： Douglas J. Garcia

发明人： Douglas J. Garcia

IPC分类号： G01R31/20 ,  G01R1/067 ,  G01R3/00 ,  G01R31/28

CPC分类号： G01R1/06716 ,  G01R1/06733 ,  G01R3/00 ,  G01R31/2889 ,  Y10T29/49222

摘要： A probe module for testing an electronic device comprises at least two contacts, each contact including a first end portion extending in a first direction along a first line, a second end portion extending linearly in a second direction opposite from the first direction and along a second line, and a third curved portion extending between the first end portion and the second end portion. The first line is spaced apart from and in parallel with the second line, and the at least two contacts are spaced apart from each other in a direction perpendicular to the first line and the second line. Methods for making such a probe module are also taught.

摘要翻译： 用于测试电子设备的探针模块包括至少两个触点，每个触点包括沿着第一线在第一方向上延伸的第一端部，在与第一方向相反的第二方向上线性地延伸的第二端部， 以及在所述第一端部和所述第二端部之间延伸的第三弯曲部。 第一线与第二线隔开并平行，并且至少两个触点在垂直于第一线和第二线的方向上彼此间隔开。 还教导了制造这种探针模块的方法。

公开(公告)号：US08878095B2

公开(公告)日：2014-11-04

申请号：US12972021

申请日：2010-12-17

申请人： Guangyu Li ,  Mehmet E. Alpay

发明人： Guangyu Li ,  Mehmet E. Alpay

IPC分类号： B23K26/06 ,  B23K26/08 ,  H01S3/00

CPC分类号： B23K26/066 ,  H01S3/0064

摘要： Systems and methods reduce or prevent back-reflections in a laser processing system. A system includes a laser source to generate an incident laser beam, a laser beam output to direct the incident laser beam toward a work surface along a beam path, and a spatial filter. The system further includes a beam expander to expand a diameter of the incident laser beam received through the spatial filter, and a scan lens to focus the expanded incident laser beam at a target location on a work surface. A reflected laser beam from the work surface returns through the scan lens to the beam expander, which reduces a diameter of the reflected beam and increases a divergence angle of the reflected laser beam. The spatial filter blocks a portion of the diverging reflected laser beam from passing through the aperture and returning to the laser beam output.

摘要翻译： 系统和方法减少或防止激光加工系统中的反射。 一种系统包括用于产生入射激光束的激光源，将入射激光束沿着光束路径引向工作表面的激光束输出和空间滤光器。 该系统还包括扩束器，以扩大通过空间滤波器接收的入射激光束的直径;以及扫描透镜，以将扩大的入射激光束聚焦在工作表面上的目标位置。 来自工作表面的反射激光束通过扫描透镜返回到光束扩展器，这减小了反射光束的直径并增加了反射激光束的发散角。 空间滤波器阻挡发散反射激光束的一部分通过孔并返回到激光束输出。

公开(公告)号：US20140227776A1

公开(公告)日：2014-08-14

申请号：US14180849

申请日：2014-02-14

申请人： Electro Scientific Industries, Inc.

发明人： BARRY L. SHARP ,  DAVID N. DOUGLAS ,  AMY J. MANAGH

IPC分类号： G01N1/28

CPC分类号： H05H1/26 ,  G01N1/28 ,  H01J49/0463 ,  H05H1/30

摘要： A laser ablation system includes a sample chamber 102 configured to accommodate a target 104 within an interior 106 thereof, a sample generator 108 configured to remove a portion of the target 104 (which may be subsequently captured as a sample) and an analysis system 110 configured to analyze a composition of the sample. A sample capture cell in the chamber proximate to the target has a capture cavity configured to receive target material, a first inlet configured to transmit a flow of a carrier gas from a first location adjacent to an exterior of the capture cell into a region of the capture cavity; and an outlet configured to receive carrier gas from another region of the capture cavity. The sample chamber 102 includes an injection nozzle 120 configured to introduce, into the interior 106, a fluid such as a carrier gas.

摘要翻译： 激光烧蚀系统包括被配置为在目标104的内部106内容纳目标104的样本室102，被配置为去除目标104的一部分（可以随后被捕获为样本）的样本发生器108和被配置为 分析样品的组成。 靠近目标的室中的样品捕获单元具有被配置为接收目标材料的捕获空间，第一入口被配置为将载气的流从邻近捕获单元的外部的第一位置传送到 捕获腔; 以及被配置为从捕获腔的另一区域接收载气的出口。 样品室102包括注射喷嘴120，其被配置为将诸如载气的流体引入到内部106中。

公开(公告)号：US08729404B2

公开(公告)日：2014-05-20

申请号：US13038642

申请日：2011-03-02

申请人： Glenn Simenson ,  William Antoni ,  Steven Cohen ,  Jeffery Howerton

发明人： Glenn Simenson ,  William Antoni ,  Steven Cohen ,  Jeffery Howerton

IPC分类号： H05K1/11

CPC分类号： B29D11/00663 ,  B29D11/00375

摘要： A method and apparatus for filling a via with transparent material is presented, including the steps of providing a panel having a via, occluding the via with transparent material in a workable state so that a portion of the occluding material is internal to the via and a portion of the material is external to said via. The external and internal portions are separated so the transparent filler material, when set, forms a smooth and featureless surface. This causes the filled via to have a substantially even and uniform appearance over a wide range of viewing angles when lit.

公开(公告)号：US08710402B2

公开(公告)日：2014-04-29

申请号：US11757253

申请日：2007-06-01

申请人： Weisheng Lei ,  Hisashi Matsumoto ,  Gregg Hardy ,  Yunlong Sun

发明人： Weisheng Lei ,  Hisashi Matsumoto ,  Gregg Hardy ,  Yunlong Sun

IPC分类号： B23K26/00 ,  B23K26/08

CPC分类号： B23K26/384 ,  B23K26/389 ,  B23K2101/36 ,  H05K3/0035 ,  H05K2201/09827

摘要： A method of and an apparatus for drilling blind vias with selectable tapers in multilayer electronic circuits permit forming electrical connections between layers while maintaining quality and throughput. The method relies on recognizing that the top diameter of the via and the bottom diameter of the via, which define the taper, are functions of two separate sets of equations. Simultaneous solution of these equations yields a solution space that enables optimization of throughput while maintaining selected taper and quality using temporally unmodified Q-switched CO2 laser pulses with identical pulse parameters. Real time pulse tailoring is not required; therefore, system complexity and cost may be reduced.

摘要翻译： 用于在多层电子电路中钻出具有可选锥度的盲孔的方法和装置允许在层之间形成电连接，同时保持质量和生产量。 该方法依赖于识别定义锥度的通孔的顶部直径和通孔的底部直径是两个单独的方程组的函数。 这些方程的同时解决方案产生一个解空间，可以优化吞吐量，同时使用具有相同脉冲参数的临时未修改的Q开关CO2激光脉冲保持选定的锥度和质量。 不需要实时脉冲裁剪; 因此，系统复杂性和成本可能会降低。

公开(公告)号：US08694148B2

公开(公告)日：2014-04-08

申请号：US11719390

申请日：2005-11-14

申请人： Michael Tyler ,  Robert W. Colby ,  Jeffrey W. Leonard ,  Lindsey M. Dotson ,  David A. Watt ,  Cris E. Hill ,  Laura H. Campbell

发明人： Michael Tyler ,  Robert W. Colby ,  Jeffrey W. Leonard ,  Lindsey M. Dotson ,  David A. Watt ,  Cris E. Hill ,  Laura H. Campbell

IPC分类号： G06F19/00 ,  G01R31/00

CPC分类号： H05K3/0026 ,  B23K26/02 ,  B23K26/382 ,  B23K26/389 ,  B23K26/40 ,  B23K31/12 ,  B23K2101/42 ,  B23K2103/12 ,  B23K2103/172 ,  B23K2103/42 ,  B23K2103/50 ,  H05K3/225 ,  H05K2201/09936 ,  H05K2203/163

摘要： A method and system increase processed specimen yield in the laser processing of target material that includes multiple specimens formed on a common substrate. Preferred embodiments implement a feature that enables storage in the laser processing system a list of defective specimens that have somehow been subject to error during laser processing. Once the common substrate has been completely processed, the system alerts an operator to the number of improperly processed specimens and gives the operator an opportunity to run a software routine, which in a preferred embodiment uses a laser to scribe a mark on the top surface of each improperly processed specimen.

摘要翻译： 一种方法和系统在目标材料的激光加工中增加了加工样品产量，其包括在公共基底上形成的多个样品。 优选实施例实现能够在激光处理系统中存储在激光处理期间以某种方式遭受错误的缺陷样本的列表的特征。 一旦共同的基板被完全处理，系统就会向操作人员提供不正确处理的标本的数量，并给予操作者运行一个软件程序的机会，在一个优选的实施例中，该程序使用激光来刻划在 每个不正确加工的样品。