Thin film-manufacturing apparatus,thin film-manufacturing method,and substrate-conveying roller
    23.
    发明授权
    Thin film-manufacturing apparatus,thin film-manufacturing method,and substrate-conveying roller 有权
    薄膜制造装置,薄膜​​制造方法和基板输送辊

    公开(公告)号:US09340865B2

    公开(公告)日:2016-05-17

    申请号:US13575244

    申请日:2011-01-26

    摘要: A conveyance system 50A of a film-forming apparatus 20A includes a blowing roller 6 having a function of supplying a cooling gas toward a substrate 21. The blowing roller has the first shell 11 and the internal block 12. The first shell 11 has a plurality of first through holes 13 as a gas supply channel, and is rotatable in synchronization with the substrate 21. The internal block 12 is disposed inside the first shell 11. A manifold 14 is defined by the internal block 12 inside the first shell 11. The manifold 14 is formed so as to introduce the gas toward the plurality of first through holes 13 within the range of a holding angle. A clearance 15 facing the plurality of first through holes 13 outside the range of the holding angle is further formed inside the first shell 11. In the radial direction, the manifold 14 has a relatively large dimension, and the clearance 15 has a relatively small dimension.

    摘要翻译: 薄膜形成装置20A的输送系统50A包括具有向基板21供给冷却气体的功能的送风辊6.该吹送辊具有第一壳体11和内部块12.第一壳体11具有多个 第一通孔13作为气体供应通道,并且可与基板21同步旋转。内部块12设置在第一壳体11的内部。歧管14由第一壳体11内的内部块12限定。 歧管14形成为在保持角度的范围内朝向多个第一通孔13引入气体。 另外在第一壳体11的内侧形成面向多个保持角范围的第一贯通孔13的间隙15.在径向方向上,歧管14的尺寸较大,间隙15的尺寸比较小 。

    SUBSTRATE CONVEYING ROLLER, THIN FILM MANUFACTURING DEVICE, AND THIN FILM MANUFACTURING METHOD
    24.
    发明申请
    SUBSTRATE CONVEYING ROLLER, THIN FILM MANUFACTURING DEVICE, AND THIN FILM MANUFACTURING METHOD 失效
    底板输送辊,薄膜制造装置,薄膜​​制造方法

    公开(公告)号:US20140057448A1

    公开(公告)日:2014-02-27

    申请号:US13985798

    申请日:2012-10-30

    摘要: A substrate-conveying roller includes a first shell, a second shell, an internal block, a manifold, and a clearance. The first shell has a plurality of first through holes serving as supply paths for a gas. The internal block is disposed inside the first shell. The manifold is formed in the internal block so as to guide the gas to the first through holes within the region of a specific angle. The clearance is formed so as to guide the gas to the first through holes outside the region of the specific angle. The second shell has second through holes for guiding the gas from the manifold to the first through holes, and is disposed between the first shell and the internal block. The central axes of the first through hole are offset from the central axes of the second through holes.

    摘要翻译: 基板输送辊包括第一壳体,第二壳体,内部块体,歧管和间隙。 第一壳体具有用作气体的供给路径的多个第一通孔。 内部块被设置在第一壳内。 歧管形成在内部块中,以便在特定角度的区域内将气体引导到第一通孔。 间隙被形成为将气体引导到特定角度的区域外的第一通孔。 第二壳体具有用于将气体从歧管引导到第一通孔的第二通孔,并且设置在第一壳体和内部块体之间。 第一通孔的中心轴线偏离第二通孔的中心轴线。

    DEPOSITION APPARATUS AND METHOD FOR MANUFACTURING FILM BY USING DEPOSITION APPARATUS
    26.
    发明申请
    DEPOSITION APPARATUS AND METHOD FOR MANUFACTURING FILM BY USING DEPOSITION APPARATUS 审中-公开
    沉积装置和使用沉积装置制造薄膜的方法

    公开(公告)号:US20130014699A1

    公开(公告)日:2013-01-17

    申请号:US13549166

    申请日:2012-07-13

    IPC分类号: C23C16/54

    摘要: A vapor deposition device including an evaporation source for evaporating a vapor-depositing material; a transportation section including first and second rolls for holding the substrate in the state of being wound therearound and a guide section for guiding the substrate; and a shielding section, located in a vapor deposition possible zone, for forming a shielded zone which is not reachable by the vapor-depositing material from the evaporation source. Vapor deposition zones include a planar transportation zone for transporting the substrate such that the surface of the substrate to be subjected to the vapor-depositing material is planar; and the transportation section is located with respect to the evaporation source such that the vapor-depositing material is not incident on the substrate in a direction of the normal to the substrate in the vapor deposition possible zone excluding the shielded zone.

    摘要翻译: 一种气相沉积装置,包括用于蒸发气相沉积材料的蒸发源; 一个传送部分,包括用于保持基片的卷绕在其周围的第一和第二滚筒以及用于引导基片的引导部分; 以及位于气相沉积可能区域中的屏蔽部分,用于形成从气相沉积材料不能从蒸发源到达的屏蔽区域。 蒸镀区域包括用于输送基板的平面输送区域,使得要经历气相沉积材料的基板的表面是平面的; 并且运送部相对于蒸发源设置,使得气相沉积材料在除了屏蔽区之外的气相沉积可能区域中不与基板的法线方向入射到基板上。

    Electrode for nonaqueous electrolyte secondary battery, method for producing same, and nonaqueous electrolyte secondary battery comprising such electrode for nonaqueous electrolyte secondary battery
    27.
    发明授权
    Electrode for nonaqueous electrolyte secondary battery, method for producing same, and nonaqueous electrolyte secondary battery comprising such electrode for nonaqueous electrolyte secondary battery 有权
    非水电解质二次电池用电极及其制造方法以及非水电解质二次电池用电极的非水电解质二次电池

    公开(公告)号:US08268484B2

    公开(公告)日:2012-09-18

    申请号:US12847727

    申请日:2010-07-30

    IPC分类号: H01M4/13 H01M10/00 B05D5/12

    摘要: An electrode for a non-aqueous electrolyte secondary battery 6 according to the present invention includes: a current collector 3; a first active material layer 2 formed on the current collector 3; and a second active material layer 5 provided on the first active material layer 2, the second active material layer 5 including a plurality of active material particles 4. The plurality of active material particles 4 is mainly of a chemical composition represented as SiOx (0≦x x). The area in which the first active material layer 2 is in contact with the plurality of active material particles 4 is smaller than the area in which the current collector 3 is in contact with the first active material layer 2.

    摘要翻译: 本发明的非水电解质二次电池用电极6具备:集电体3, 形成在集电体3上的第一活性物质层2; 以及设置在第一活性物质层2上的第二活性物质层5,具有多个活性物质粒子4的第二活性物质层5.多个活性物质粒子4主要以SiO x(0&amp; x <1.2)。 第一活性物质层2主要由以SiO y表示的化学组成(1.0&amp; nl; y <2.0,y> x)。 第一活性物质层2与多个活性物质粒子4接触的区域比集电体3与第一活性物质层2接触的面积小。

    THIN FILM MANUFACTURING DEVICE AND THIN FILM MANUFACTURING METHOD
    28.
    发明申请
    THIN FILM MANUFACTURING DEVICE AND THIN FILM MANUFACTURING METHOD 审中-公开
    薄膜制造装置和薄膜制造方法

    公开(公告)号:US20110268893A1

    公开(公告)日:2011-11-03

    申请号:US13143284

    申请日:2010-04-02

    IPC分类号: C23C14/30

    摘要: The present invention provides a thin film manufacturing device capable of preventing crack damage of a crucible by, while maintaining a melt state of a film formation material in the crucible, tilting the crucible to discharge substantially the entire amount of film formation material from the crucible. The thin film manufacturing device of the present invention includes: a film forming source 9 including a storage portion having an opening at an upper portion thereof to hold a film formation material 3; an electron gun 5 configured to irradiate the film formation material in the storage portion with an electron beam 6 to melt the film formation material, generate a melt, and evaporate the film formation material; a tilt mechanism 8 configured to tilt the film forming source 9 from a film formation posture to an inclined posture to discharge the melt from the storage portion, the inclined posture being a posture by which the storage portion is not able to hold the melt; a vacuum chamber 22 in which the film forming source and the tilt mechanism are accommodated and a thin film is formed on a substrate; and a vacuum pump 34 configured to discharge air in the vacuum chamber. A trajectory of tilting of the film forming source 9 or a trajectory of the electron beam 6 is controlled such that the melt in the storage portion is continuously irradiated with the electron beam 6 while the film forming source 9 is tilted from the film formation posture to the inclined posture.

    摘要翻译: 本发明提供一种薄膜制造装置,其能够通过在保持坩埚内的成膜材料的熔融状态的同时,使坩埚倾斜,从坩埚中大量排出成膜材料,能够防止坩埚的龟裂损伤。 本发明的薄膜制造装置包括:成膜源9,其具有在其上部具有保持成膜材料3的开口部的收容部; 电子枪5,被配置为用电子束6照射存储部分中的成膜材料,以熔化成膜材料,产生熔体并使成膜材料蒸发; 倾斜机构8,其被配置为将成膜源9从成膜姿势倾斜到倾斜姿势,以将熔体从储存部排出,倾斜姿势是储存部不能保持熔体的姿势; 在其上容纳有成膜源和倾斜机构的真空室22,在基板上形成薄膜; 以及构造成将真空室内的空气排出的真空泵34。 控制成膜源9的倾斜轨迹或电子束6的轨迹,使得成膜源9从成膜姿势倾斜而使储存部分中的熔体连续地被电子束6照射, 倾斜的姿势。

    ELECTRODE FOR NONAQUEOUS ELECTROLYTE SECONDARY BATTERY, METHOD FOR PRODUCING SAME, AND NONAQUEOUS ELECTROLYTE SECONDARY BATTERY COMPRISING SUCH ELECTRODE FOR NONAQUEOUS ELECTROLYTE SECONDARY BATTERY
    30.
    发明申请
    ELECTRODE FOR NONAQUEOUS ELECTROLYTE SECONDARY BATTERY, METHOD FOR PRODUCING SAME, AND NONAQUEOUS ELECTROLYTE SECONDARY BATTERY COMPRISING SUCH ELECTRODE FOR NONAQUEOUS ELECTROLYTE SECONDARY BATTERY 有权
    非电解电解质二次电池用电极,其制造方法以及包含该电极用于非电解电解质二次电池的非水电解质二次电池

    公开(公告)号:US20090117462A1

    公开(公告)日:2009-05-07

    申请号:US11994562

    申请日:2007-02-12

    IPC分类号: H01M4/48 B05D5/12

    摘要: An electrode for a non-aqueous electrolyte secondary battery 6 according to the present invention includes: a current collector 3; a first active material layer 2 formed on the current collector 3; and a second active material layer 5 provided on the first active material layer 2, the second active material layer 5 including a plurality of active material particles 4. The plurality of active material particles 4 is mainly of a chemical composition represented as SiOx(0≦x x). The area in which the first active material layer 2 is in contact with the plurality of active material particles 4 is smaller than the area in which the current collector 3 is in contact with the first active material layer 2.

    摘要翻译: 本发明的非水电解质二次电池用电极6具备:集电体3, 形成在集电体3上的第一活性物质层2; 以及设置在第一活性物质层2上的第二活性物质层5,包含多个活性物质粒子4的第二活性物质层5.多个活性物质粒子4主要由SiOx(0 < = x <1.2)。 第一活性物质层2主要是以SiO y(1.0 <= y <2.0,y> x)表示的化学组成。 第一活性物质层2与多个活性物质粒子4接触的区域比集电体3与第一活性物质层2接触的面积小。