Ultrasonic touch sensors and capacitive pressure sensing microelectromechanical system fusion

    公开(公告)号:US12124655B2

    公开(公告)日:2024-10-22

    申请号:US18159817

    申请日:2023-01-26

    CPC classification number: G06F3/04186 G06F3/043 G06F3/044 G06F2203/04105

    Abstract: A touch sensor includes a touch structure including a touch interface and an inner interface arranged opposite to the touch interface; a capacitive ultrasonic transmitter arranged inside an enclosed interior volume and configured to transmit an ultrasonic transmit wave towards the touch structure; a capacitive ultrasonic receiver arranged inside the enclosed interior volume and configured to receive at least one ultrasonic reflected wave produced from the ultrasonic transmit wave via internal reflection; a coupling medium that fills an area between the inner interface and the capacitive ultrasonic receiver, wherein an external force applied to the touch interface is configured to impart an internal pressure onto the capacitive ultrasonic receiver through the coupling medium; and a sensor circuit configured to convert the at least one ultrasonic reflected wave into a measurement signal and detect the external force based on the measurement signal.

    Sensor devices having an acoustic coupling medium, and associated manufacturing methods

    公开(公告)号:US12086363B2

    公开(公告)日:2024-09-10

    申请号:US18456754

    申请日:2023-08-28

    CPC classification number: G06F3/0436 B06B1/0292 G06F2203/04103

    Abstract: A sensor device contains at least one sensor chip having at least one MEMS structure arranged at a main surface of the at least one sensor chip, wherein the at least one sensor chip is configured to transmit ultrasonic signals and/or to receive ultrasonic signals. The sensor device further contains an acoustic coupling medium arranged selectively on the at least one MEMS structure, wherein the acoustic coupling medium is configured to decouple an ultrasonic signal to be emitted from the at least one MEMS structure and/or to inject a received ultrasonic signal into the at least one MEMS structure. The acoustic coupling medium only partially covers the main surface of the at least one sensor chip.

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