FUNCTIONAL ELEMENT HAVING A CUTOUT SECTION IN A WALL
    9.
    发明申请
    FUNCTIONAL ELEMENT HAVING A CUTOUT SECTION IN A WALL 审中-公开
    在墙壁上有一个切割部分的功能元件

    公开(公告)号:US20160272483A1

    公开(公告)日:2016-09-22

    申请号:US15169368

    申请日:2016-05-31

    发明人: Satoru TANAKA

    IPC分类号: B81B3/00

    摘要: A functional element includes a substrate which is provided with a concave section; a stationary section connected to a wall section that defines the concave section of the substrate; an elastic section which extends from the stationary section and is capable of stretching and contracting in a first axis direction; a movable body connected to the elastic section; a movable electrode section which extends from the movable body. The concave section includes a cutout section which is provided on the wall section. The stationary section includes an overlap section which is spaced with the substrate, and overlaps the concave section when seen in a plan view. At least a portion of the overlap section overlaps the cutout section when seen in the plan view, and the elastic section extends from the overlap section.

    摘要翻译: 功能元件包括设置有凹部的基板; 连接到限定所述基板的凹部的壁部的固定部; 弹性部分,其从固定部分延伸并且能够在第一轴线方向上伸缩; 连接到所述弹性部分的可移动体; 从可动体延伸的可动电极部。 凹部包括设置在壁部上的切口部。 固定部分包括与基板间隔开的重叠部分,并且在平面图中看时与凹部重叠。 当在平面图中看时,重叠部分的至少一部分与切口部分重叠,并且弹性部分从重叠部分延伸。