公开(公告)号：US10438812B2

公开(公告)日：2019-10-08

申请号：US15474302

申请日：2017-03-30

Applicant: INTEL CORPORATION

Inventor： Jeremy D. Ecton ,  Changhua Liu ,  Arnab Roy ,  Oscar U. Ojeda ,  Timothy A. White ,  Nicholas S. Haehn

IPC: H01L21/3213 ,  H05K3/06 ,  H01L21/67

Abstract: The systems and methods described herein use at least one etchant and at least one photochemically active material in conjunction with electromagnetic energy applied simultaneous with the etchant and photochemically active material during the etching process. The interaction between the electromagnetic energy and the photochemically active material preferentially increases the etch rate in a direction along the axis of incidence of the electromagnetic energy, thereby permitting the anisotropic formation of voids within the semiconductor substrate. These anisotropic voids may be more closely spaced (i.e., arranged on a tighter pitch) than the isotropic voids produced using conventional etching technologies. By placing the voids in the semiconductor substrate on a tighter pitch, greater component density may be achieved.

公开(公告)号：US20240222257A1

公开(公告)日：2024-07-04

申请号：US18089801

申请日：2022-12-28

Applicant: Intel Corporation

Inventor： Bohan Shan ,  Haobo Chen ,  Srinivas Venkata Ramanuja Pietambaram ,  Hongxia Feng ,  Gang Duan ,  Xiaoying Guo ,  Yiqun Bai ,  Dingying Xu ,  Bai Nie ,  Kyle Jordan Arrington ,  Ziyin Lin ,  Rahul N. Manepalli ,  Brandon C. Marin ,  Jeremy D. Ecton

IPC: H01L23/498 ,  H01L21/48 ,  H01L23/538

CPC classification number: H01L23/49894 ,  H01L21/481 ,  H01L21/486 ,  H01L23/49827 ,  H01L23/5384 ,  H01L23/15

Abstract: A substrate for an electronic system includes a glass core layer. The glass core layer includes a first surface and a second surface opposite the first surface; and at least one through-glass via (TGV) extending through the glass core layer from the first surface to the second surface. The TGV includes an opening filled with an electrically conductive material; and a via liner including a sidewall material disposed on a sidewall of the opening between the glass of the glass core layer and the electrically conductive material, wherein the sidewall material includes carbon.

公开(公告)号：US20240213170A1

公开(公告)日：2024-06-27

申请号：US18086293

申请日：2022-12-21

Applicant: Intel Corporation

Inventor： Bohan Shan ,  Haobo Chen ,  Yiqun Bai ,  Dingying Xu ,  Srinivas Venkata Ramanuja Pietambaram ,  Hongxia Feng ,  Gang Duan ,  Xiaoying Guo ,  Ziyin Lin ,  Bai Nie ,  Kyle Jordan Arrington ,  Jeremy D. Ecton ,  Brandon C. Marin

IPC: H01L23/538 ,  H01L23/498 ,  H01L25/16 ,  H01L25/18 ,  H10B80/00

CPC classification number: H01L23/5389 ,  H01L23/49816 ,  H01L23/5386 ,  H01L25/16 ,  H01L25/18 ,  H10B80/00 ,  H01L24/13

Abstract: An electronic system includes a substrate and a top surface active component die. The substrate includes a glass core layer having a glass core layer active component die disposed in a cavity and a discrete passive component disposed in another cavity; a mold layer including a mold layer active component die disposed in the mold layer; and a buildup layer contacting a top surface of the glass core layer and a bottom surface of the mold layer. The buildup layer includes electrically conductive interconnect connecting the glass core layer active component die, the discrete passive component, and the mold layer active component die. The top surface of the component die is electrically connected to the mold layer active component die.

公开(公告)号：US20240186228A1

公开(公告)日：2024-06-06

申请号：US18061237

申请日：2022-12-02

Applicant: Intel Corporation

Inventor： Haobo Chen ,  Bohan Shan ,  Kyle J. Arrington ,  Yiqun Bai ,  Kristof Darmawikarta ,  Gang Duan ,  Jeremy D. Ecton ,  Hongxia Feng ,  Xiaoying Guo ,  Ziyin Lin ,  Brandon Christian Marin ,  Bai Nie ,  Srinivas V. Pietambaram ,  Dingying Xu

IPC: H01L23/498 ,  H01L21/48

CPC classification number: H01L23/49822 ,  H01L21/486 ,  H01L23/49827

Abstract: In one embodiment, an integrated circuit package substrate includes a core layer comprising a dielectric material and a plurality of metal vias within the core layer. The dielectric material includes Silicon, Oxygen, and at least one of Boron or Phosphorus. The metal vias electrically couple a first side of the core layer and a second side of the core layer opposite the first side. The package substrate further includes a plurality of build-up layers on the core layer, the build-up layers comprising metal vias electrically connected to the metal vias of the core layer.

公开(公告)号：US20240113158A1

公开(公告)日：2024-04-04

申请号：US17957003

申请日：2022-09-30

Applicant: Intel Corporation

Inventor： Jeremy D. Ecton ,  Brandon C. Marin ,  Haobo Chen ,  Changhua Liu ,  Srinivas Venkata Ramanuja Pietambaram

IPC: H01L49/02 ,  H01L25/16

CPC classification number: H01L28/91 ,  H01L25/16 ,  H01L28/92

Abstract: Disclosed herein are microelectronics package architectures utilizing in-situ high surface area capacitor in substrate packages and methods of manufacturing the same. The substrates may include an anode material, a cathode material, and a conductive material. The anode material may have an anode surface that may define a plurality of anode peaks and anode valleys. The cathode material may have a cathode surface that may define a plurality of cathode peaks and cathode valleys complementary to the plurality of anode peaks and anode valleys. The conductive material may be located at the anode peaks.

公开(公告)号：US20240006299A1

公开(公告)日：2024-01-04

申请号：US17855568

申请日：2022-06-30

Applicant: Intel Corporation

Inventor： Suddhasattwa Nad ,  Jason Steill ,  Yi Yang ,  Brandon C. Marin ,  Srinivas Venkata Ramanuja Pietambaram ,  Marcel Arlan Wall ,  Gang Duan ,  Jeremy D. Ecton

IPC: H01L23/498 ,  H01L21/48

CPC classification number: H01L23/49894 ,  H01L23/49816 ,  H01L23/49838 ,  H01L23/49833 ,  H01L23/49822 ,  H01L21/4857

Abstract: Disclosed herein are microelectronics package architectures utilizing SiNx based surface finishes and methods of manufacturing the same. The microelectronics packages may include a core material, a first plurality of pads, and a silicon nitride layer. The first plurality of pads are attached to the core material. The silicon nitride layer is attached to the core material. The silicon nitride material defines respective openings to expose at least a portion of each of the first plurality of pads.

公开(公告)号：US11721650B2

公开(公告)日：2023-08-08

申请号：US16437930

申请日：2019-06-11

Applicant: Intel Corporation

Inventor： Brandon C. Marin ,  Aleksandar Aleksov ,  Georgios Dogiamis ,  Jeremy D. Ecton ,  Suddhasattwa Nad ,  Mohammad Mamunur Rahman

IPC: H01L23/66 ,  H01L23/498 ,  H01L21/48 ,  H01P3/08 ,  H01P11/00 ,  H01P3/06

CPC classification number: H01L23/66 ,  H01L21/481 ,  H01L21/4846 ,  H01L23/49838 ,  H01P3/06 ,  H01P3/08 ,  H01P3/088 ,  H01P11/003 ,  H01P11/005 ,  H01L2223/6627

Abstract: Embodiments include semiconductor packages and method of forming the semiconductor packages. A semiconductor package includes first waveguides over a package substrate. The first waveguides include first angled conductive layers, first transmission lines, and first cavities. The semiconductor package also includes a first dielectric over the first waveguides and package substrate, second waveguides over the first dielectric and first waveguides, and a second dielectric over the second waveguides and first dielectric. The second waveguides include second angled conductive layers, second transmission lines, and second cavities. The first angled conductive layers are positioned over the first transmission lines and package substrate having a first pattern of first triangular structures. The second angled conductive layers are positioned over the second transmission lines and first dielectric having a second pattern of second triangular structures, where the second pattern is shaped as a coaxial interconnects enclosed with second triangular structures and portions of first dielectric.

公开(公告)号：US11605867B2

公开(公告)日：2023-03-14

申请号：US17344715

申请日：2021-06-10

Applicant: Intel Corporation

Inventor： Brandon C. Marin ,  Jeremy D. Ecton ,  Aleksandar Aleksov ,  Kristof Darmawikarta ,  Yonggang Li ,  Dilan Seneviratne

IPC: H01P1/208 ,  H01P1/20 ,  H01P7/10 ,  H01L23/66 ,  H01P3/16 ,  H01L21/768 ,  H01P11/00 ,  H01L21/288

Abstract: A method of fabricating an RF filter on a semiconductor package comprises forming a first dielectric buildup film. A second dielectric buildup film is formed over the first dielectric buildup film, the second dielectric buildup film comprising a dielectric material that contains a metallization catalyst, wherein the dielectric material comprises one of an epoxy-polymer blend dielectric material, silicon dioxide and silicon nitride, and a low-k dielectric. A trench is formed in the second dielectric buildup film with laser ablation, wherein the laser ablation selectively activates sidewalls of the trench for electroless metal deposition. A metal selectively is plated to sidewalls of the trench based at least in part on the metallization catalyst and immersion in an electroless solution. A low-loss buildup film is formed over the metal that substantially fills the trench.

公开(公告)号：US11373951B2

公开(公告)日：2022-06-28

申请号：US15937645

申请日：2018-03-27

Applicant: INTEL CORPORATION

Inventor： Jeremy D. Ecton ,  Hiroki Tanaka ,  Oscar Ojeda ,  Arnab Roy ,  Vahidreza Parichehreh ,  Leonel R. Arana ,  Chung Kwang Tan ,  Robert A. May

IPC: H01L23/538 ,  H01L21/48

Abstract: Embodiments include a package structure with one or more layers of dielectric material, where an interconnect bridge substrate is embedded within the dielectric material. One or more via structures are on a first surface of the embedded substrate, where individual ones of the via structures comprise a conductive material and have a tapered profile. The conductive material is also on a sidewall of the embedded substrate.

公开(公告)号：US20220093520A1

公开(公告)日：2022-03-24

申请号：US17026703

申请日：2020-09-21

Applicant: Intel Corporation

Inventor： Jeremy D. Ecton ,  Aleksandar Aleksov ,  Brandon C. Marin ,  Yonggang Li ,  Leonel Arana ,  Suddhasattwa Nad ,  Haobo Chen ,  Tarek Ibrahim

IPC: H01L23/538 ,  H05K1/11 ,  H01L21/768

Abstract: Conductive routes for an electronic substrate may be fabricated by forming an opening in a material, using existing laser drilling or lithography tools and materials, followed by selectively plating a metal on the sidewalls of the opening. The processes of the present description may result in significantly higher patterning resolution or feature scaling (up to 2× improvement in patterning density/resolution). In addition to improved patterning resolution, the embodiments of the present description may also result in higher aspect ratios of the conductive routes, which can result in improved signaling, reduced latency, and improved yield.