摘要:
Before spin-on-glass (SOG) is applied and soft-cured over metal traces (10) having a height/width aspect ratio (of the spaces) of at least 1, the aluminum metal traces are selectively coated with selective tungsten (16). After SOG (18) is spun on and soft-cured, it is etched back to expose the metal interconnects. A selective tungsten wet etch in H.sub.2 O.sub.2 detaches the SOG from the metal walls, leaving silt-like voids (20). Stress-free SOG hard curing may now proceed. A capping layer (22) of SOG may now be applied, soft-cured, then hard-cured. Alternatively, other dielectric materials may be applied as the capping layer. Further, interfacial lateral sidewall voids (24) may be deliberately left unfilled, by employing a capping layer (22') of vapor-deposited oxide. The unfilled voids have a dielectric constant of 1.0, which is useful in extremely high speed devices. The resulting structure is comparatively stress-free as fabricated and is resistant to later environmentally-induced brittle tensile fracture.
摘要翻译:在旋涂玻璃(SOG)被施加并软化固化在具有至少1的高度/宽度纵横比(空间)的金属迹线(10)之后,铝金属迹线选择性地涂覆有选择性钨(16 )。 在将SOG(18)纺丝并软化后,将其回蚀以暴露金属互连。 H 2 O 2中的选择性钨湿蚀刻将SOG从金属壁分离出来,留下淤泥状空隙(20)。 现在可以进行无压力的SOG硬化。 现在可以施加SOG的覆盖层(22),软化,然后硬化。 或者,可以施加其它电介质材料作为覆盖层。 此外,通过采用蒸镀氧化物的覆盖层(22'),界面侧向侧壁空隙(24)可有意留下未填充。 未填充的空隙的介电常数为1.0,这在非常高速的装置中是有用的。 所得到的结构在制造时是相对无应力的,并且耐受以后的环境诱导的脆性拉伸断裂。
摘要:
An ablating device has a cover which holds an interface material such as a gel. The cover contains the interface material during initial placement of the device. The ablating device may also have a removable tip or a membrane filled with fluid. In still another aspect, the ablating device may be submerged in liquid during operation.
摘要:
An ablating device has a cover which holds an interface material such as a gel. The cover contains the interface material during initial placement of the device. The ablating device may also have a removable tip or a membrane filled with fluid. In still another aspect, the ablating device may be submerged in liquid during operation.
摘要:
An ablating device has a cover which holds an interface material such as a gel. The cover contains the interface material during initial placement of the device. The ablating device may also have a removable tip or a membrane filled with fluid. In still another aspect, the ablating device may be submerged in liquid during operation.
摘要:
An ablating device has a cover which holds an interface material such as a gel. The cover contains the interface material during initial placement of the device. The ablating device may also have a removable tip or a membrane filled with fluid. In still another aspect, the ablating device may be submerged in liquid during operation.
摘要:
A high degree of wafer-scale integration of normally incompatible IC devices is achieved by providing a plurality of segments (10), each segment having thereon one or more circuits, circuit elements, sensors and/or I/O connections (14'). Each segment is provided with at least one edge (12) having an abutting portion (12a) capable of abutting against a similar edge of a neighboring segment. The segments are placed on the surface of a flotation liquid (20) and are allowed to be pulled together so as to mate abutting edges of neighboring segments, thereby forming superchips (10'). Microbridges (22) are formed between neighboring segments, such as by solidifying the flotation liquid, and interconnections (26) are formed between neighboring segments. In this manner, coplanar integration of semiconductor ICs is obtained, permitting mixed and normally incompatible circuit functions on one pseudomonolithic device as diverse as silicon and III-V digital circuits, III-V optoelectronic devices, static RAMs, charge coupled devices, III-V lasers, superconducting thin films, ferromagnetic non-volatile memories, high electron mobility transistors, and bubble memories, to name a few, to be integrated in any desired combination. The yieldable scale of integration of a given device technology is also greatly extended. The segments are brought together in a particulate-free fashion with high throughput and exacting reproducibility at low cost.
摘要:
A method for producing microinterconnections including the steps of providing a first support member bearing electrical circuit elements including first electrical contacts and first electrical traces, providing a second support member bearing electrical circuit elements including second electrical contacts and second electrical traces, placing the second support member in face-to-face spaced and aligned relationship with respect to the first support member, and applying energy to the first support member for moving portions thereof underlying ones of the first contacts toward and into intimacy with aligned ones of the second contacts.
摘要:
Thermal dissipation problems characteristic of micropackaging applications in integrated circuits can be eliminated by the use of a semiconductor heat pipe package. Additionally, the heat pipe package as herein disclosed can be employed for the creation of substantially constant temperature surfaces. In applications where a device requires controlled temperatures in order to achieve optimum operation, such as in photo voltaic converters, the packaging of the present invention provides a means for such temperature control. The heat pipe package comprises, in its simplest form, a closed vessel or box containing a heat transferring fluid. In its liquid state, the heat transferring fluid is transported along the interior surfaces of the box by means of a plurality of microgrooves through capillary action. The interior cavity of the heat pipe package or box provides a means for transport of the heat transferring fluid in the vapor state. The integrated circuits may be disposed in the semiconductor surface of the package itself, or mounted as dies in high density. The large number of intercommunications which are required between the high density of integrated circuits included with the micropackaging can be achieved by a combination of optical and electrical communication lines or buses.
摘要:
Ultrasonic, sonic or vibratory energy, delivered non-invasively, minimally invasively or invasively (e.g. surgically), is utilized to provide direct cleaning action at or to the location of the implanted device such as a prosthetic heart valve with undesirable deposits of at least some amount thereon or therein. Such ultra-sound energy may be aided by the use of a drug in association or cooperation with the acoustic irradiation. The “cleaning” acoustic energy may optionally be delivered under the guidance of an imaging modality and may be delivered in a timed or gated manner such that the valve occluders or leaflets are in a preferred position (assuming they are functioning) during exposures.
摘要:
The formation and manipulation of microbubbles, microdroplets and films of (preferably) flowable materials, such as liquids and gases, are used to beneficially control or modulate acoustic-energy propagation, electromagnetic-energy propagation or electrical potential and current application. A droplet, bubble or film causes at least one of reflection, refraction, diffraction, attenuation, sapping, scattering, dissipation, redirection, conversion or blocking of at least one component of the energy due to the droplet, bubble or film causing a propagation discontinuity, disruption or energy-barrier to the energy. The energy comprises at least one of acoustic, electrical, electromagnetic, magnetic, kinetic, mechanical, chemical, RF, thermal, pneumatic, hydraulic or non-visible optical energy.