Method for forming a micro pattern
    26.
    发明授权
    Method for forming a micro pattern 失效
    形成微图案的方法

    公开(公告)号:US06998351B2

    公开(公告)日:2006-02-14

    申请号:US10614182

    申请日:2003-07-08

    IPC分类号: H01L21/31 H01L21/302

    摘要: Disclosed is a method for forming a micro pattern. After a dual photoresist film having different glass transition temperatures is coated, an exposure process and a wet development process are implemented to form a dual photoresist film pattern. A RFP is then implemented for the dual photoresist film pattern. Therefore, it is possible to prohibit warpage of the photoresist film pattern. Accordingly, the uniformity of the critical dimension and a pattern shape could be improved. A good uniformity of the critical dimension and a good pattern shape in the etch process could be thus implemented.

    摘要翻译: 公开了一种形成微图案的方法。 在涂覆了具有不同玻璃化转变温度的双光致抗蚀剂膜之后,实施曝光工艺和湿显影处理以形成双光致抗蚀剂膜图案。 然后为双光致抗蚀剂膜图案实施RFP。 因此,可以防止光致抗蚀剂膜图案的翘曲。 因此,可以提高临界尺寸和图案形状的均匀性。 因此可以实现蚀刻过程中的临界尺寸和良好图案形状的良好均匀性。

    FORCED EVAPORATIVE HUMIDIFIER USING NANOSTEAM
    30.
    发明申请
    FORCED EVAPORATIVE HUMIDIFIER USING NANOSTEAM 有权
    强化蒸发器使用NANOSTEAM

    公开(公告)号:US20150068962A1

    公开(公告)日:2015-03-12

    申请号:US14345011

    申请日:2012-09-13

    IPC分类号: F24F3/16 F24F3/14 F24F11/00

    摘要: Provided is a forced evaporative humidifier using nano-vapor, which includes: a housing having an exhaust port formed in an upper surface thereof and a suction port formed at one side of a front surface thereof; a water tank located below the suction port to store water; an injection unit having an injection nozzle located above the suction port, a pump for pulling up the water in the water tank to the injection nozzle, and a transfer tube for transferring the water pulled by the pump; a blowing fan located above the injection nozzle to carry air toward the exhaust port of the housing; a humidifying unit located below the injection nozzle so that films, each having a body surface formed to allow the water injected from the injection nozzle to flow and a plurality of tube-type spacers protruding on the body surface, are stacked in a lateral direction therein; and an eliminator located between the blowing fan and the injection nozzle to prevent water drops included in a humid air humidified by the humidifying unit from being scattered.

    摘要翻译: 本发明提供一种使用纳米蒸汽的强制蒸发加湿器,其包括:壳体,其具有形成在其上表面中的排气口和形成在其前表面的一侧的吸入口; 位于吸入口下方的水箱以储存水; 具有位于吸入口上方的喷射喷嘴的喷射单元,将水箱内的水拉入喷嘴的泵,以及用于输送由泵吸引的水的输送管; 位于注射喷嘴上方的吹风扇,用于将空气朝向壳体的排气口携带; 位于注射喷嘴下方的加湿单元,使得具有形成为允许从注射喷嘴注入的水流动的主体表面和突出在体表上的多个管状间隔件的膜沿其横向堆叠在其中 ; 以及位于吹风扇和喷嘴之间的消除器,用于防止由加湿单元加湿的潮湿空气中包含的水滴散落。